Field image alignment lighting device
By using a combination device of LED lamps and spotting cylinders in the lithography machine to directly illuminate the silicon wafer, the high cost and low power utilization problems caused by halogen lamp heating and fiber connection are solved, and a more efficient lighting device design is achieved.
Patent Information
- Application Number
- CN202421032016.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-13
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-05-13
AI Technical Summary
In the prior art, halogen lamps are used in FIA light sources due to severe heat generation, and require large-volume halogen lamp boxes, which cannot be placed inside the lithography machine. The optical fiber connection leads to high manufacturing costs and low power utilization.
Using a combination device of LED lamps, lamps and spotting cylinders, LED lamps are directly illuminated by silicon wafers after being gathered through the spotting cylinders, avoiding optical fiber connections, reducing manufacturing costs and improving power utilization.
It realizes the reduction of optical fiber manufacturing costs, improves the power utilization rate of LED lamps, reduces the overall cost of lithography equipment, and avoids the image overexposure caused by optical fiber loss.
Smart Images
Figure CN222281051U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of step-by-step photolithography equipment, in particular to a field image alignment lighting device. Background Art
[0002] FIA (Field Image Alignment) is a type of alignment system for lithography equipment. A complete FIA includes a FIA light source, a FIA optical path, a FIA CCD (Charge Coupled Device) camera and a corresponding signal processing module. After the FIA light source enters the FIA optical path, it irradiates the silicon wafer. The uneven marks on the silicon wafer reflect light to the CCD camera. The signal processing module is used to convert the optical signal in the CCD camera into electronic information.
[0003] In the prior art, FIA light sources use halogen lamps for illumination. Since halogen lamps generate a lot of heat, a large halogen lamp box is required. However, a large halogen lamp box cannot be placed inside a photolithography machine. Halogen lamps are usually connected to the optical path using optical fibers, so the manufacturing cost is high. In addition, optical fibers reduce the power utilization rate of halogen lamps. Utility Model Content
[0004] The purpose of the utility model is to provide a field image alignment lighting device to solve the problems in the prior art that halogen lamps usually use optical fibers to connect with light paths, have high manufacturing costs and low power utilization, thereby reducing manufacturing costs and improving power utilization.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] Field image alignment lighting device, comprising:
[0007] An LED lamp, a lamp tube and a focusing tube; one end of the lamp tube is closed, and the LED lamp is arranged inside the closed end of the lamp tube and placed at the geometric center of the closed end; the focusing tube is arranged inside the lamp tube, and the two ends of the focusing tube are coaxial, and the inner diameter of the focusing tube gradually increases from the first end to the second end, and the first end is arranged close to the LED lamp so that the light of the LED lamp can enter the focusing tube and be concentrated and then emitted from the second end.
[0008] As an optional technical solution for the field image alignment lighting device, the angle between the line connecting any point on the first end edge and the corresponding point on the second end edge and the central axis of the focusing tube is 30°.
[0009] As an optional technical solution for the field image alignment lighting device, the lamp tube includes a pressure ring, which is detachably arranged at the opening of the lamp tube. After the pressure ring is connected to the lamp tube, it can abut against the second end of the focusing tube to abut the first end of the focusing tube against the closed end of the lamp tube.
[0010] As an optional technical solution for the field image alignment lighting device, a first thread is provided on the outer side of the pressure ring, and a second thread is provided on the inner side of the lamp tube. The first thread and the second thread are screwed together to detachably arrange the pressure ring at the opening of the lamp tube.
[0011] As an optional technical solution for the field image aiming lighting device, the field image aiming lighting device also includes a first coaxial reducing tube, which can be connected to the lamp tube, and the first coaxial reducing tube includes a first tube section, a first connecting tube and a second tube section, and the two ends of the first connecting tube are respectively connected to the first tube section and the second tube section, and the inner diameter of the first tube section is larger than the inner diameter of the second tube section.
[0012] As an optional technical solution for the field image alignment lighting device, the lamp tube can be placed in the first tube section and the closed end of the lamp tube can be away from the second tube section. A first top screw hole is provided on the circumference of the first tube section. The first screw is screwed into the first top screw hole and abuts against the side wall of the lamp tube to connect the first coaxial reducer and the lamp tube.
[0013] As an optional technical solution for the field image alignment lighting device, an ultraviolet filter is arranged between the first barrel section and the first connecting barrel.
[0014] As an optional technical solution for the field image alignment lighting device, the field image alignment lighting device also includes a second coaxial reducing cylinder, which can be connected to the first coaxial reducing cylinder, and the second coaxial reducing cylinder includes a third cylinder segment, a second connecting cylinder and a fourth cylinder segment, and both ends of the second connecting cylinder are respectively connected to the third cylinder segment and the fourth cylinder segment, and the inner diameter of the third cylinder segment is larger than the inner diameter of the fourth cylinder segment.
[0015] As an optional technical solution for the field image alignment lighting device, the second barrel section can be placed in the third barrel section, a second top screw hole is provided on the circumference of the third barrel section, a second screw is screwed into the second top screw hole and abuts against the side wall of the second barrel section to connect the second coaxial reducer and the first coaxial reducer.
[0016] As an optional technical solution for the field image alignment lighting device, a dimming filter is arranged between the third barrel segment and the second connecting barrel.
[0017] Beneficial effects of the utility model:
[0018] The utility model provides a field image alignment lighting device, comprising an LED lamp, a lamp tube and a condenser tube; one end of the lamp tube is closed, the LED lamp is arranged inside the closed end of the lamp tube and is placed at the geometric center of the closed end; the condenser tube is arranged inside the lamp tube, the two ends of the condenser tube are coaxial, the inner diameter of the condenser tube gradually increases from the first end to the second end, and the first end is arranged close to the LED lamp, so that the light of the LED lamp can enter the condenser tube and be concentrated and irradiated on the silicon chip. The LED lamp directly collects light through the lamp tube and the condenser tube and irradiates it on the silicon chip, and does not use optical fiber, which reduces the manufacturing cost of the optical fiber and improves the utilization rate of the electric energy of the LED lamp. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 is an exploded view of a field image alignment lighting device provided by an embodiment of the utility model;
[0020] Figure 2 It is a partial structural exploded diagram of the field image alignment lighting device provided by an embodiment of the utility model;
[0021] Figure 3 This is a partial structural diagram of the field image alignment lighting device provided by the embodiment of the utility model Figure 1 ;
[0022] Figure 4 This is a partial structural diagram of the field image alignment lighting device provided by the embodiment of the utility model Figure 2 .
[0023] In the figure:
[0024] 10. LED light;
[0025] 20. Lamp tube; 21. Pressure ring;
[0026] 30. Spotlight tube;
[0027] 40. first coaxial reducer; 41. first barrel section; 411. first top screw hole; 42. first connecting barrel; 43. second barrel section; 44. ultraviolet filter;
[0028] 50. Second coaxial reducing cylinder; 51. Third cylinder section; 511. Second top thread hole; 52. Second connecting cylinder; 53. Fourth cylinder section; 54. Neutral filter. DETAILED DESCRIPTION
[0029] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.
[0030] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0031] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0032] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.
[0033] In the prior art, FIA light sources use halogen lamps for illumination. Since halogen lamps generate a lot of heat, a large halogen lamp box is required. However, a large halogen lamp box cannot be placed inside a photolithography machine. Halogen lamps are usually connected to the optical path using optical fibers, so the manufacturing cost is high. In addition, optical fibers reduce the power utilization rate of halogen lamps.
[0034] To solve the above problems, this embodiment provides a field image alignment lighting device, see Figure 1The field image alignment lighting device comprises an LED lamp 10 (Light Emitting Diode), a lamp tube 20 and a focusing tube 30; one end of the lamp tube 20 is closed, and the LED lamp 10 is arranged inside the closed end of the lamp tube 20 and is placed at the geometric center of the closed end; the focusing tube 30 is arranged inside the lamp tube 20, and the two ends of the focusing tube 30 are coaxial, and the inner diameter of the focusing tube 30 gradually increases from the first end to the second end, and the first end is arranged close to the LED lamp 10, so that the light of the LED lamp 10 can enter the focusing tube 30 and be concentrated and emitted from the second end. The LED lamp 10 directly collects light through the lamp tube 20 and the focusing tube 30 and irradiates it on the silicon wafer, without using optical fiber, reducing the manufacturing cost of the optical fiber and improving the utilization rate of the electric energy of the LED lamp 10.
[0035] Furthermore, a wiring hole is provided at the closed end of the lamp tube 20 to facilitate the wires to be connected to the LED lamp 10 through the wiring hole. The wires can provide 12V, 1A direct current to the LED lamp 10 .
[0036] Furthermore, the angle between the line connecting any point on the first end edge and the corresponding point on the second end edge and the central axis of the focusing tube 30 is 30°. When the angle is set to 30°, the effect of focusing light is best. Specifically, the focusing tube 30 is set to be made of glass.
[0037] Further, see Figure 2 The lamp tube 20 includes a pressing ring 21, which is detachably arranged at the opening of the lamp tube 20. After the pressing ring 21 is connected to the lamp tube 20, it can abut against the second end of the focusing tube 30, so that the first end of the focusing tube 30 abuts against the closed end of the lamp tube 20. Specifically, a first thread is arranged on the outer side of the pressing ring 21, and a second thread is arranged on the inner side of the lamp tube 20. The first thread and the second thread are screwed together, so that the pressing ring 21 is detachably arranged at the opening of the lamp tube 20.
[0038] Furthermore, the lamp tube 20 and the pressing ring 21 are made of metal. Preferably, the lamp tube 20 and the pressing ring 21 are made of aluminum metal.
[0039] Furthermore, since the LED light 10 directly illuminates the silicon wafer without fiber loss, the FIA image may be overexposed, and the light transmission size needs to be flexibly adjusted. Figure 3 Therefore, the field image alignment lighting device further includes a first coaxial diameter reducing cylinder 40, which can be connected to the lamp tube 20. The first coaxial diameter reducing cylinder 40 includes a first cylinder section 41, a first connecting cylinder 42, and a second cylinder section 43. The two ends of the first connecting cylinder 42 are respectively connected to the first cylinder section 41 and the second cylinder section 43. The inner diameter of the first cylinder section 41 is greater than the inner diameter of the second cylinder section 43. Since the inner diameter of the first cylinder section 41 is greater than the inner diameter of the second cylinder section 43, the amount of light passing from the first cylinder section 41 to the second cylinder section 43 will decrease, so the brightness will decrease, avoiding overexposure of the FIA image.
[0040] Furthermore, the lamp tube 20 can be placed in the first barrel section 41 and the closed end of the lamp tube 20 is away from the second barrel section 43. The first barrel section 41 is provided with a first top screw hole 411 on the circumference. The first screw is screwed into the first top screw hole 411 and abuts against the side wall of the lamp tube 20 to connect the first coaxial reducer 40 and the lamp tube 20. The position where the first screw abuts against the side wall of the lamp tube 20 is changed to change the distance between the LED lamp 10 and the outlet of the second barrel section 43, thereby changing the brightness of the light emitted from the second barrel section 43; the closer the LED lamp 10 is to the second barrel section 43, the stronger the brightness of the light emitted from the second barrel section 43; conversely, the farther the LED lamp 10 is from the second barrel section 43, the weaker the brightness of the light emitted from the outlet of the second barrel section 43.
[0041] Furthermore, since the LED lamp 10 directly irradiates the silicon wafer, the glue on the silicon wafer will react with the ultraviolet light therein, affecting the quality of the product. Therefore, an ultraviolet filter 44 is provided between the first barrel section 41 and the first connecting barrel 42. Specifically, the ultraviolet filter 44 is made of glass.
[0042] Further, see Figure 4 The field image alignment lighting device further includes a second coaxial diameter reducing cylinder 50, which can be connected to the first coaxial diameter reducing cylinder 40. The second coaxial diameter reducing cylinder 50 includes a third cylinder section 51, a second connecting cylinder 52 and a fourth cylinder section 53. The two ends of the second connecting cylinder 52 are respectively connected to the third cylinder section 51 and the fourth cylinder section 53. The inner diameter of the third cylinder section 51 is larger than the inner diameter of the fourth cylinder section 53. Specifically, the second cylinder section 43 can be placed in the third cylinder section 51. The third cylinder section 51 is provided with a second top screw hole 511 on the circumference. The second screw is screwed into the second top screw hole 511 and abuts against the side wall of the second cylinder section 43 to connect the second coaxial diameter reducing cylinder 50 and the first coaxial diameter reducing cylinder 40. The position where the second screw abuts the side wall of the second barrel section 43 is changed to change the distance between the LED lamp 10 and the outlet of the fourth barrel section 53, thereby changing the brightness of the light emitted from the fourth barrel section 53; the closer the LED lamp 10 is to the fourth barrel section 53, the stronger the brightness of the light emitted from the fourth barrel section 53; conversely, the farther the LED lamp 10 is from the fourth barrel section 53, the weaker the brightness of the light emitted from the outlet of the fourth barrel section 53, and the light emitted from the outlet of the fourth barrel section 53 enters the optical path.
[0043] Specifically, the first coaxial reducing cylinder 40 and the second coaxial reducing cylinder 50 are both made of copper.
[0044] Furthermore, a neutral density filter 54 is provided between the third barrel section 51 and the second connecting barrel 52 to reduce the amount of light passing through and avoid overexposure of the FIA image. Specifically, the neutral density filter 54 is made of acrylic material.
[0045] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.
Claims
1. A field image alignment lighting device, characterized in that: include: LED lights (10); A lamp tube (20), one end of the lamp tube (20) being closed, and the LED lamp (10) being arranged inside the closed end of the lamp tube (20) and placed at the geometric center of the closed end; A focusing tube (30), the focusing tube (30) being arranged inside the lamp tube (20), the two ends of the focusing tube (30) being coaxial, the inner diameter of the focusing tube (30) gradually increasing from the first end to the second end, the first end being arranged close to the LED lamp (10) so that light from the LED lamp (10) can enter the focusing tube (30) and be focused before being emitted from the second end.
2. The field image alignment lighting device according to claim 1, characterized in that: The angle between a line connecting any point on the first end edge and a corresponding point on the second end edge and the central axis of the light focusing cylinder (30) is 30°.
3. The field image alignment lighting device according to claim 1, characterized in that: The lamp tube (20) comprises a pressure ring (21), and the pressure ring (21) is detachably arranged at the opening of the lamp tube (20). After the pressure ring (21) is connected to the lamp tube (20), it can abut against the second end of the focusing tube (30) to abut the first end of the focusing tube (30) against the closed end of the lamp tube (20).
4. The field image alignment lighting device according to claim 3, characterized in that: The outer side of the pressure ring (21) is provided with a first thread, the inner side of the lamp tube (20) is provided with a second thread, and the first thread and the second thread are screwed together so that the pressure ring (21) can be detachably arranged at the opening of the lamp tube (20).
5. The field image alignment lighting device according to any one of claims 1 to 4, characterized in that: The field image alignment lighting device also includes a first coaxial diameter reducing cylinder (40), which can be connected to the lamp tube (20), and the first coaxial diameter reducing cylinder (40) includes a first cylinder section (41), a first connecting cylinder (42) and a second cylinder section (43), and the two ends of the first connecting cylinder (42) are respectively connected to the first cylinder section (41) and the second cylinder section (43), and the inner diameter of the first cylinder section (41) is greater than the inner diameter of the second cylinder section (43).
6. The field image alignment lighting device according to claim 5, characterized in that: The lamp tube (20) can be placed in the first tube section (41) and the closed end of the lamp tube (20) can be kept away from the second tube section (43); a first top screw hole (411) is arranged on the circumference of the first tube section (41); a first screw is screwed into the first top screw hole (411) and abuts against the side wall of the lamp tube (20) to connect the first coaxial reducer (40) and the lamp tube (20).
7. The field image alignment lighting device according to claim 5, characterized in that: An ultraviolet filter (44) is provided between the first barrel section (41) and the first connecting barrel (42).
8. The field image alignment lighting device according to claim 5, characterized in that: The field image alignment lighting device also includes a second coaxial reducing cylinder (50), which can be connected to the first coaxial reducing cylinder (40), and the second coaxial reducing cylinder (50) includes a third cylinder section (51), a second connecting cylinder (52) and a fourth cylinder section (53), and the two ends of the second connecting cylinder (52) are respectively connected to the third cylinder section (51) and the fourth cylinder section (53), and the inner diameter of the third cylinder section (51) is greater than the inner diameter of the fourth cylinder section (53).
9. The field image alignment lighting device according to claim 8, characterized in that: The second barrel section (43) can be placed in the third barrel section (51), and a second top screw hole (511) is arranged on the circumference of the third barrel section (51). A second screw is screwed into the second top screw hole (511) and abuts against the side wall of the second barrel section (43) to connect the second coaxial reducer (50) and the first coaxial reducer (40).
10. The field image alignment lighting device according to claim 8, characterized in that: A dimming mirror (54) is provided between the third barrel section (51) and the second connecting barrel (52).