Low leakage current dry reed relay and semiconductor test equipment

Abstract

The utility model provides a low-leakage-current dry reed relay and semiconductor test equipment, and relates to the technical field of relays. The low-leakage-current dry reed relay comprises at least one dry reed pipe assembly. Each dry reed pipe assembly comprises a dry reed pipe, a metal pipe, a first insulating layer and a second insulating layer. The reed switch is suspended in a first mounting cavity defined by the metal tube, the first insulating layer covers the outer surface of the reed switch, the second insulating layer is arranged between the first insulating layer and the metal tube, and the second insulating layer is a gas medium layer or a vacuum layer. According to the technical scheme, the first insulating layer covers the outer surface of the reed switch, and the reed switch is suspended in the first mounting cavity, so that the fixing mode of the reed switch and the metal tube is optimized, the insulation resistance of the reed switch can be improved, the leakage current of the low-leakage-current reed relay is reduced, the parasitic capacitance value between the reed switch and the metal tube is reduced, and the reliability of the low-leakage-current reed relay is improved. Therefore, the stable time of small signal measurement is shortened, and the performance of the low-leakage-current dry reed relay is optimized.

Description

Technical Field

[0001] The utility model relates to the technical field of relays, in particular to a low leakage current reed relay and semiconductor testing equipment. Background Art

[0002] When using traditional relays, due to the poor insulation performance of the material, it will interfere with the measurement of weak small signals, resulting in inaccurate measurements. The reed switch of the reed relay adopts a glass tube sealed sintered packaging structure, so that the reed part included in it can be free from pollution and corrosion from the external environment, so it has unparalleled high contact reliability and excellent insulation performance. Therefore, reed relays are preferred in high-precision test scenarios such as semiconductor parameter testing.

[0003] However, since the reed switch is sensitive to temperature and humidity and is easily affected by the environment, its insulation resistance is low and the leakage current is large, which affects the performance and stability of the reed relay. Utility Model Content

[0004] The first aspect of the utility model aims to provide a low leakage current reed relay to solve the technical problem of large leakage current of reed relays in the prior art.

[0005] The second aspect of the present invention aims to provide a semiconductor testing device comprising the low leakage current reed relay.

[0006] According to the purpose of the first aspect of the utility model, the utility model provides a low leakage current reed relay, including at least one reed switch assembly, any of the reed switch assemblies including:

[0007] Reed switch;

[0008] The metal tube defines a first installation cavity, and the reed switch is suspended in the first installation cavity;

[0009] A first insulating layer, the first insulating layer covering the outer surface of the reed switch;

[0010] The second insulating layer is arranged between the first insulating layer and the metal tube, and the second insulating layer is a gas dielectric layer or a vacuum layer.

[0011] Optionally, the reed switch assembly includes a pair of reeds and a corresponding pair of reed pins;

[0012] The reed switch assembly further comprises:

[0013] Two fixing members are respectively arranged at two ends of the metal tube and enclosed with the metal tube to form the first installation cavity, and any one of the spring pins is passed through the fixing members; any one of the fixing members is made of insulating material.

[0014] Optionally, the fixing member includes a first portion extending into the installation cavity and a second portion abutting against an end portion of the metal tube, thereby closing the first installation cavity.

[0015] Optionally, the reed switch assembly further includes:

[0016] Two limiting members, any one of the limiting members is located in the first installation cavity, any one of the limiting members is sleeved on the corresponding reed pin, and any one of the limiting members is tightly arranged against the corresponding fixing member; any one of the limiting members is made of insulating material.

[0017] Optionally, the first insulating layer, any of the fixing members, and any of the limiting members are respectively made of one of polytetrafluoroethylene, polyethylene, polystyrene, polyvinyl chloride, and polypropylene;

[0018] The gas medium layer includes one of air, nitrogen and sulfur hexafluoride.

[0019] Optionally, the low leakage current reed relay further comprises:

[0020] The coil frame defines at least one second installation cavity, and each of the reed switch components is inserted into one of the second installation cavities;

[0021] The coil is wound on the coil frame.

[0022] Optionally, the low leakage current reed relay further comprises:

[0023] Two injection molded parts are respectively installed at two ends of the coil frame to fix the reed switch assembly.

[0024] Optionally, the low leakage current reed relay further comprises:

[0025] The heat sink is sleeved on the coil and is used to dissipate heat for the coil.

[0026] Optionally, the low leakage current reed relay further comprises:

[0027] The shielding element is sleeved on the outer side of the heat dissipation element to shield interference from the external environment.

[0028] Optionally, the metal tube is made of brass.

[0029] Optionally, the thickness of the first insulating layer ranges from 0.2 to 1 mm;

[0030] The thickness of the second insulating layer is in the range of 0.6 to 2 mm.

[0031] According to the purpose of the second aspect of the utility model, the utility model provides a semiconductor testing device, which includes at least one of the above-mentioned low leakage current reed relays.

[0032] The low leakage current reed relay of the utility model includes at least one reed switch assembly, and each reed switch assembly includes a reed switch, a metal tube, a first insulating layer and a second insulating layer. The metal tube defines a first installation cavity, and the reed switch is suspended in the first installation cavity. The first insulating layer covers the outer surface of the reed switch. The second insulating layer is arranged between the first insulating layer and the metal tube, and the second insulating layer is a gas dielectric layer or a vacuum layer. The above technical solution optimizes the fixing method of the reed switch and the metal tube by covering the first insulating layer on the outer surface of the reed switch and suspending the reed switch in the first installation cavity, thereby improving the insulation impedance of the reed switch, reducing the leakage current of the low leakage current reed relay, and reducing the parasitic capacitance value between the reed switch and the metal tube, so that the stabilization time of small signal measurement is shortened, and the performance of the low leakage current reed relay is optimized.

[0033] Based on the detailed description of the specific embodiments of the present invention in combination with the accompanying drawings below, those skilled in the art will become more aware of the above and other purposes, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0035] Figure 1 is a schematic structural diagram of a low leakage current reed relay according to an embodiment of the utility model;

[0036] Figure 2 yes Figure 1 A schematic structural diagram of the reed switch assembly shown;

[0037] Figure 3 yes Figure 2 The schematic structural diagram of the reed switch shown;

[0038] Figure 4 is a schematic structural diagram of a fixing member according to an embodiment of the utility model;

[0039] Figure 5 is a schematic side view of a low leakage current reed relay according to an embodiment of the utility model;

[0040] Figure 6 yes Figure 5 A schematic cross-sectional view of the low leakage current reed relay shown along the section line AA;

[0041] Figure 7 yes Figure 5 Schematic structural diagram of the coil skeleton shown.

[0042] Description of reference numerals:

[0043] 100-low leakage current reed relay, 10-reed switch assembly, 11-reed switch, 111-reed, 112-reed pin, 12-metal tube, 121-first installation cavity, 13-second insulating layer, 14-fixing member, 141-first part, 142-second part, 15-limiting member, 20-coil skeleton, 21-second installation cavity, 30-coil, 40-injection molded part, 50-heat sink, 60-shielding member. DETAILED DESCRIPTION

[0044] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0045] In the description of the present invention, it should be understood that the terms "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0046] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features, that is, include one or more of the features. In the description of the present utility model, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. When a feature "includes or contains" one or some of the features it covers, unless otherwise specifically described, this indicates that other features are not excluded and may further include other features.

[0047] Unless otherwise clearly defined and limited, the term "connection" and other terms should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. A person skilled in the art should be able to understand the specific meanings of the above terms in this utility model according to the specific circumstances.

[0048] Unless otherwise defined, all terms (including technical terms and scientific terms) used in the description of this embodiment have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0049] The existing reed switch relay is mainly composed of a reed switch (also called a magnetic reed switch), a winding frame, a coil, and a metal shielding shell. In order to meet the requirements of low leakage current in small signal testing, a metal tube needs to be put on the outside of the reed switch, and an insulating sleeve is used between the reed switch and the metal tube for insulation.

[0050] Reed switches are sensitive to temperature and humidity, especially in humid environments, which can easily reduce the insulation resistance of the reed contacts. Before being assembled into a reed relay, it is necessary to perform injection molding or glue filling between the reed switch and the metal tube. The insulation resistance of the reed relay is affected by the injection molding material and is limited to a few GΩ to a few hundred TΩ, which limits the insulation resistance of traditional reed switch relays to a few hundred TΩ, ultimately causing the leakage current of the reed switch relay to reach 100fA.

[0051] In view of the above problems, an embodiment of the utility model provides a low leakage current reed relay 100 that overcomes the above problems or at least partially solves the above problems, and can reduce the parasitic capacitance between the reed switch 11 and the metal tube 12, thereby shortening the stabilization time of small signal measurement, reducing the leakage current of the low leakage current reed relay 100, and optimizing the performance of the low leakage current reed relay 100.

[0052] Figure 1 is a schematic structural diagram of a low leakage current reed relay 100 according to an embodiment of the utility model, Figure 2 yes Figure 1 The schematic structural diagram of the reed switch assembly 10 is shown in FIG. Figure 3 yes Figure 2 A schematic structural diagram of the reed switch 11 is shown.

[0053] like Figure 1-Figure 3As shown, the low leakage current reed relay 100 of the embodiment of the utility model includes at least one reed switch assembly 10, and any reed switch assembly 10 includes a reed switch 11, a metal tube 12, a first insulating layer (not shown) and a second insulating layer 13. Among them, the metal tube 12 defines a first installation cavity 121, and the reed switch 11 is suspended in the first installation cavity 121. The first insulating layer covers the outer surface of the reed switch 11. The second insulating layer 13 is arranged between the first insulating layer and the metal tube 12, and the second insulating layer 13 is a gas dielectric layer or a vacuum layer.

[0054] Here, it can be understood that there is no direct contact between the reed switch 11 and the metal tube 12, and the first insulating layer is provided on the outer surface of the reed switch 11 in a coating manner, which can insulate the outer surface of the reed switch 11 and prevent the external environment from affecting the reed switch 11. In addition, the first insulating layer occupies a smaller space in the first installation cavity 121, and the reed switch 11 can be suspended in the first installation cavity 121 of the metal tube 12. The second insulating layer 13 is a vacuum layer or a gas medium layer between the metal tube 12 and the reed switch 11. This is the result of evacuating the first installation cavity 121 or introducing a gas medium, which can improve the insulation between the metal tube 12 and the reed switch 11. The metal tube 12 serves as an equipotential discharge path for the reed switch 11, which can reduce the leakage current of the reed switch 11.

[0055] In this embodiment, since an insulating sleeve is not provided on the outside of the reed switch 11, and injection molding or glue pouring is not required between the reed switch 11 and the metal tube 12, the reed switch 11 can be suspended in the first installation cavity 121 of the metal tube 12. In this way, a vacuum environment or a gas medium environment can be formed between the reed switch 11 and the metal tube 12, which can reduce the parasitic capacitance value between the reed switch 11 and the metal tube 12, thereby shortening the stabilization time of small signal measurement.

[0056] The low leakage current reed relay 100 of the embodiment of the utility model can improve the insulation resistance of the reed switch 11 by covering the outer surface of the reed switch 11 with a first insulating layer, and arrange the reed switch 11 to be suspended in the first mounting cavity 121, optimize the fixing method of the reed switch 11 and the metal tube 12, thereby improving the insulation resistance of the reed switch 11, reducing the leakage current of the low leakage current reed relay 100, and reducing the parasitic capacitance value between the reed switch 11 and the metal tube 12, so that the stabilization time of the small signal measurement is shortened, thereby optimizing the performance of the low leakage current reed relay 100.

[0057] In this embodiment, the low leakage current reed relay 100 covers the outer surface of the reed switch 11 with a first insulating layer and sets a second insulating layer 13 between the first insulating layer and the metal tube 12, so that the insulation property of the relay contact of the reed switch 11 is greater than 10PΩ and the leakage current is less than 1fA. The low leakage current reed relay 100 can be used for ultra-high precision small signal measurement in the fields of semiconductor parameter testing, etc.

[0058] Figure 4 It is a schematic structural diagram of a fixing member 14 according to an embodiment of the utility model.

[0059] In some embodiments, Figure 4 As shown, and see Figure 2 The reed switch includes a pair of reeds 111 and a corresponding pair of reed pins 112. The reed switch assembly 10 also includes two fixing members 14, which are respectively disposed at both ends of the metal tube 12 and enclosed with the metal tube 12 to form a first mounting cavity 121, and any reed pin 112 is passed through the fixing member 14. Any fixing member 14 is made of insulating material.

[0060] Here, any reed switch assembly 10 includes two fixing members 14, which are respectively connected to the two ends of the metal tube 12 to block the two ends of the metal tube 12, so that the interior of the first installation cavity 121 of the metal tube 12 is a closed environment, which can improve the stability of the reed switch assembly 10. Any fixing member 14 is made of insulating material, which can ensure the insulation between the reed switch 11 and the metal tube 12 and reduce the leakage current of the reed switch 11.

[0061] The reed switch 11 includes a pair of reeds 111 encapsulated inside the reed switch 11. The two reeds 111 can conduct electricity and conduct magnetism. When the reed switch is not subjected to the magnetic field, the two reeds 111 are separated. When the reed switch 11 is subjected to the magnetic field, the two reeds 111 are magnetized and attract each other to contact, so that a circuit is formed between the two reeds 111.

[0062] The reed pin 112 of the reed switch 11 is an interface connecting the reed 111 with an external circuit. When the two reeds 111 are attracted to each other by the magnetic field, the current flows through the two reed pins 112 to close the circuit. When the two reeds 111 are separated, the current cannot flow through the reed pins 112.

[0063] The reed 111 and the reed pin 112 in the low leakage current reed relay 100 work together to realize the on-off control of the circuit through the effect of the magnetic field, so that the low leakage current reed relay 100 has the advantages of no contact wear, high reliability, and long service life.

[0064] The two reed pins 112 of the reed switch 11 extend out from the corresponding fixing member 14 , so that the reed switch 11 can be suspended in the first installation cavity 121 , thereby improving the insulation of the reed switch 11 and effectively reducing the leakage current of the reed switch 11 .

[0065] In some embodiments, see Figure 2 and Figure 4 The fixing member 14 is connected to both ends of the metal tube, and the fixing member 14 includes a first portion 141 extending into the first installation cavity 121 and a second portion 142 abutting against the end of the metal tube 12, so that the first installation cavity 121 is closed. Here, the fixing member 14 is circular, and the diameter of the first portion 141 is smaller than the size of the second portion 142, so that the first portion 141 can extend into the first installation cavity 121, and the second portion 142 abuts against the end of the metal tube 12, so that the first installation cavity 121 is closed, effectively avoiding interference from external environmental factors, and improving the stability of the reed switch assembly 10.

[0066] In some embodiments, see Figure 3 The reed switch assembly 10 further includes two stoppers 15, any of which is located in the first mounting cavity 121, any of which is sleeved on the corresponding reed pin 112, and any of which is tightly arranged against the corresponding fixing member 14. Any of which is made of insulating material.

[0067] Here, the limiter 15 is an insulating member, and the limiter 15 can be used to avoid interfering with the current at the reed pin 112 or the magnetic field in the low leakage current reed relay 100. Each reed switch assembly 10 includes a reed switch 11, and each reed switch includes two reed pins 112, and two limiters 15 are respectively arranged on the two reed pins 112. The limiter 15 is located in the first installation cavity 121 and is tightly pressed against the fixing member 14. The limiter 15 limits the displacement of the reed switch 11 in the extension direction of the reed switch assembly 10, which can ensure the accurate positioning of the reed switch 11 in the metal tube 12, ensure the accuracy and stability of the installation process, and avoid quality problems or safety hazards of the low leakage current reed relay 100 due to improper placement or position displacement of the reed pin 112.

[0068] In some embodiments, the limit member 15 is connected to the reed pin 112 of the reed switch 11 by crimping. The limit member 15 is sleeved on the corresponding reed pin 112. The limit member 15 protrudes relative to the reed pin 112 and can abut against the fixing member 14, thereby limiting the displacement of the reed switch 11 in the metal tube 12 and ensuring the position accuracy of the reed switch 11 installed in the metal tube 12.

[0069] In some embodiments, the first insulating layer, any fixing member, and any limiting member are made of one of polytetrafluoroethylene, polyethylene, polystyrene, polyvinyl chloride, and polypropylene. These materials are polymer chains composed of a large number of repeated monomer units, have good insulation properties, can ensure the insulation performance of the low leakage current reed relay 100, and can be molded into various shapes under certain conditions, which is convenient for the production and assembly of the components of the low leakage current reed relay 100.

[0070] In some embodiments, the first insulating layer is made of polytetrafluoroethylene, which is also called Teflon. Teflon coating has high dielectric strength, low loss factor and high surface resistivity in a wide frequency range, and also has the advantages of low porosity, which can improve the impermeability and perform well in chemical environments. Teflon coating is applied on the reed switch 11, so that the performance of the reed switch 11 is greatly improved. The contact impedance of the reed switch 11 after spraying Teflon coating can reach more than 1PΩ, and can well avoid the influence of temperature and humidity environment and pollutants such as grease on the insulation impedance.

[0071] In some embodiments, the gas dielectric layer includes one of air, nitrogen, and sulfur hexafluoride, so that the second insulating layer 13 has better insulation when using the gas dielectric layer.

[0072] Figure 5 is a schematic side view of a low leakage current reed relay 100 according to an embodiment of the present invention, Figure 6 yes Figure 5 The schematic cross-sectional view of the low leakage current reed relay 100 along the section line AA is shown. Figure 7 yes Figure 5 A schematic structural diagram of the coil bobbin 20 is shown.

[0073] In some embodiments, Figure 5-Figure 7 As shown, the low leakage current reed relay 100 also includes a coil skeleton 20 and a coil 30. The coil skeleton 20 has at least one second mounting cavity 21, and each reed switch assembly 10 is inserted into a second mounting cavity 21. The coil 30 is sleeved on the coil skeleton 20. Here, the coil skeleton 20 mainly plays the role of supporting and fixing the coil 30. The coil 30 is sleeved on the coil skeleton 20, which is conducive to ensuring the stability of the coil 30, so that the magnetic field generated by the coil 30 when working can effectively act on the reed switch assembly 10. In some embodiments, the coil skeleton 20 can also enhance the magnetic field strength of the coil 30, thereby improving the performance of the low leakage current reed relay 100.

[0074] In some embodiments, the low leakage current reed relay 100 further includes two injection molded parts 40, which are respectively mounted at both ends of the coil frame 20 to fix the reed switch assembly 10. Figure 7 The two ends of the coil frame 20 are provided with slots, and the injection molded part 40 is disposed on the slots of the coil frame 20 by injection molding. The two ends of the reed switch assembly 10 are respectively connected to an injection molded part 40, so that the reed switch assembly 10 is fixed in the coil frame 20.

[0075] In some embodiments, the low leakage current reed relay 100 includes two reed switch assemblies 10, which are respectively disposed in a second mounting cavity 21 and are respectively connected to the injection molded part 40 to be fixed in the coil frame 20. Here, the two reed switches 11 are spaced apart in the coil frame 20 to avoid interference between them.

[0076] In some embodiments, the low leakage current reed relay 100 further includes a heat sink 50 mounted on the coil 30, and the heat sink 50 is used to dissipate heat for the coil 30. Here, the main function of the coil 30 is to generate an electromagnetic effect, and the coil generates heat when it works. The heat sink 50 is disposed on the periphery of the coil skeleton 20 by injection molding, which can dissipate heat for the low leakage current reed relay 100, avoid the influence of excessive temperature on the performance of the low leakage current reed relay 100, thereby improving the practicality and durability of the low leakage current reed relay 100.

[0077] In some embodiments, the low leakage current reed relay 100 further includes a shielding member 60 sleeved on the outside of the heat sink 50 to shield the external environment from interference. Here, the shielding member 60 is a metal shell, which can well shield the interference of external environmental factors on the internal components of the reed switch 11 relay. Figure 1 In this embodiment, the shielding member 60 covers the front, rear and top surfaces of the heat dissipation member 50 .

[0078] In some embodiments, the metal tube 12 is made of brass. Brass has good corrosion resistance, thermal conductivity and electrical conductivity. The brass tube can become a good equipotential discharge path for the reed switch 11, thereby reducing the leakage current of the low leakage current reed relay 100.

[0079] In some embodiments, the thickness of the first insulating layer ranges from 0.2 to 1 mm, such as 0.2 mm, 0.4 mm, 0.6 mm, 0.8 mm, 1 mm, etc. The thickness of the second insulating layer 13 ranges from 0.6 to 2 mm, such as 0.6 mm, 0.8 mm, 1 mm, 1.2 mm, 1.4 mm, 1.6 mm, 1.8 mm, 2 mm, etc.

[0080] The first insulating layer can isolate the current of the reed switch to prevent safety problems such as leakage current and short circuit. The thickness of the first insulating layer plays a direct role in the insulation performance of the reed switch. If the thickness of the first insulating layer is too thin, the reed switch 11 may not be completely isolated, resulting in a loss of insulation effect, which means that the current may pass through the first insulating layer, causing damage to the reed switch 11 or causing safety problems.

[0081] Increasing the thickness of the first insulating layer can improve the insulation of the reed switch 11 to a certain extent. Because in the insulating material, the electric field strength is proportional to the potential difference, and the potential difference is the potential difference between charges. When the potential difference increases, if the thickness of the first insulating layer is insufficient, the reed switch 11 may experience electrical breakdown or breakdown discharge, causing the low leakage current reed relay 100 to fail to work normally, and even pose a threat to personal safety. Therefore, increasing the thickness of the first insulating layer can improve the insulation strength of the first insulating layer and enhance the ability to resist electric field strength. However, the thickness of the first insulating layer cannot be too large. If the first insulating layer is too thick, it will not only increase the cost and weight, but also affect the heat dissipation performance of the low leakage current reed relay 100.

[0082] Since the thickness of the first insulating layer is relatively small, the thickness of the second insulating layer 13 can be approximately regarded as the difference between the thickness of the first mounting cavity 121 and the diameter of the reed switch 11. The larger the difference, the thicker the second insulating layer 13 is, and the smaller the difference, the thinner the second insulating layer is.

[0083] In some embodiments, the assembly process of the low leakage current reed relay 100 is to first coat the outside of the reed switch 11 with a first insulating layer, then crimp the limiter 15 at the reed pins 112 at both ends of the reed switch 11, then sleeve the metal tube 12 outside the reed switch 11, and use the fixing member 14 to suspend the reed switch 11 from the metal tube 12, so as to assemble a reed switch assembly 10. The assembled reed switch assembly 10 is inserted into the coil frame 20 with the coil 30 wound around it, and then the injection molding 40 is arranged at both ends of the coil frame 20, and the injection molding 40 is used to fix the reed switch assembly 10 in the coil frame 20, and then the heat sink 50 for dissipating the heat of the coil 30 is sleeved on the outer periphery of the coil 30, and finally the shielding member 60 is put on to complete the assembly of the low leakage current reed relay 100.

[0084] The embodiment of the utility model further provides a semiconductor testing device, which includes at least one of the aforementioned low leakage current reed relays 100. The low leakage current reed relays 100 will not be described in detail here.

[0085] Exemplarily, the semiconductor test equipment includes a low leakage switch matrix, a high precision source meter, etc. Among them, any one or more of the low leakage switch matrix and the high precision source meter include at least one low leakage current reed relay 100 .

[0086] In summary, the low leakage current reed relay 100 in this embodiment can improve the insulation resistance of the reed switch 11, reduce the leakage current of the low leakage current reed relay 100, and reduce the parasitic capacitance between the reed switch 11 and the metal tube 12 by optimizing the setting method of the reed switch 11 and the metal tube 12, thereby shortening the stabilization time of the small signal measurement and optimizing the performance of the low leakage current reed relay 100.

[0087] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived from the contents disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A low leakage current reed relay, characterized in that: At least one reed switch assembly is included, any of the reed switch assemblies comprising: Reed switch; The metal tube defines a first installation cavity, and the reed switch is suspended in the first installation cavity; A first insulating layer, the first insulating layer covering the outer surface of the reed switch; The second insulating layer is arranged between the first insulating layer and the metal tube, and the second insulating layer is a gas dielectric layer or a vacuum layer.

2. The low leakage current reed relay according to claim 1, characterized in that: The reed switch comprises a pair of reeds and a corresponding pair of reed pins; The reed switch assembly also includes: Two fixing members are respectively arranged at two ends of the metal tube and enclosed with the metal tube to form the first installation cavity, and any one of the spring pins is passed through the fixing members; any one of the fixing members is made of insulating material.

3. The low leakage current reed relay according to claim 2, characterized in that: The reed switch assembly further comprises: Two limiting members, any one of the limiting members is located in the first installation cavity, any one of the limiting members is sleeved on the corresponding reed pin, and any one of the limiting members is tightly arranged against the corresponding fixing member; any one of the limiting members is made of insulating material.

4. The low leakage current reed relay according to claim 3, characterized in that: The first insulating layer, any of the fixing members, and any of the limiting members are respectively made of one of polytetrafluoroethylene, polyethylene, polystyrene, polyvinyl chloride, and polypropylene; The gas medium layer includes one of air, nitrogen and sulfur hexafluoride.

5. The low leakage current reed relay according to claim 1, characterized in that: Also includes: The coil frame defines at least one second installation cavity, and each of the reed switch components is inserted into one of the second installation cavities; The coil is wound on the coil frame.

6. The low leakage current reed relay according to claim 5, characterized in that: Also includes: Two injection molded parts are respectively installed at two ends of the coil frame to fix the reed switch assembly.

7. The low leakage current reed relay according to claim 5, characterized in that: Also includes: The heat sink is sleeved on the coil and is used to dissipate heat for the coil.

8. The low leakage current reed relay according to claim 7, characterized in that: Also includes: The shielding element is sleeved on the outer side of the heat dissipation element to shield interference from the external environment.

9. The low leakage current reed relay according to claim 1, characterized in that: The metal tube is made of brass.

10. The low leakage current reed relay according to claim 1, characterized in that: The thickness of the first insulating layer ranges from 0.2 to 1 mm; The thickness of the second insulating layer is in the range of 0.6 to 2 mm.

11. A semiconductor testing device, characterized in that: Comprising at least one low leakage current reed relay as claimed in any one of claims 1 to 10.

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