Balancing structure of splitter plate
By designing a balanced structure of the shunt plate including gas box, air intake pipe, air expansion cover, shunt plate and spring, the fatigue fracture problem caused by expansion tension of the shunt plate in semiconductor processing is solved, and the stability and balance of the shunt plate are achieved. avoids breakage of connection.
Patent Information
- Application Number
- CN202421112243.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-21
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-05-21
AI Technical Summary
In semiconductor processing, the splitter plate is affected by the tension caused by plasma gas expansion, resulting in fatigue fracture at the connection to the gas box.
A balanced structure of a diverter plate is designed, including a gas box, an intake pipe, an air expansion cover, a diverter plate, a support rod, a lifting block, a limit seat, a slide column, a first and a second spring, and the gas flow is controlled through a solenoid valve. , use spring cushion to reduce impact force, and provide stable support through support rods and springs to avoid fixed connections.
It effectively reduces the impact force of gas on the shunt plate, avoids fatigue and fracture caused by expansion tension, ensures the stability and balance of the shunt plate, and extends the service life.
Smart Images
Figure CN222281919U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductors, in particular to a balancing structure of a diverter plate. Background Art
[0002] In semiconductor processing, a plasma etching process is required, in which plasma gas is needed. The plasma gas is heated by the semiconductor gas distribution plate body, and a diverter plate is set at the position of the air flow outlet to ensure the uniformity of the gas distribution.
[0003] However, during actual use, the distribution plate body will be heated, so that the plasma gas has a certain amount of heat, but the diverter plate fixedly connected to the gas box has not been heated at this time. When the plasma gas passes through the diverter plate, the diverter plate and the gas box will be affected by the tensile force after expansion. In the case of multiple heating and cooling, fatigue fracture is prone to occur at the connection.
[0004] Therefore, it is necessary to provide a new balance structure of the splitter plate to solve the above technical problems. Utility Model Content
[0005] In order to solve the above technical problems, the utility model provides a balancing structure of a diverter plate, which solves the problem that the diverter plate fixedly connected to the gas box will be affected by the tensile force after expansion, and its connection is prone to fatigue fracture under multiple heating and cooling conditions.
[0006] The balancing structure of the manifold provided by the utility model comprises a gas box, the top of the gas box is connected with an air intake pipe, a solenoid valve is installed on the air intake pipe, and the bottom of the air intake pipe is connected with an air expansion hood;
[0007] A flow divider plate with a plurality of flow divider holes on its surface is arranged directly below the gas expansion hood, a plurality of support rods are circumferentially fixed to one side of the flow divider plate, lifting blocks are symmetrically fixed to both sides of the flow divider plate, the lifting blocks are slidably connected to the inner wall of the gas box, a limit seat is arranged directly above the lifting block, and the limit seat is fixedly connected to the inner wall of the gas box;
[0008] A sliding column is fixed at the bottom of the limit seat, and the bottom of the sliding column passes through the lifting block. A first spring is sleeved on the sliding column, one end of the first spring is fixed on the limit seat, and the other end of the first spring is fixed on the lifting block.
[0009] In a preferred embodiment, the sliding column is slidably connected to the lifting block.
[0010] In a preferred embodiment, the inner arm of the gas box is provided with a plurality of slide grooves, the bottom of the support rod is slidably connected to the slide groove, a second spring is arranged inside the slide groove, one end of the second spring is fixed to the bottom of the support rod, and the other end of the second spring is fixed to the wall of the slide groove.
[0011] In a preferred embodiment, an air baffle ring frame is fixed on the diverter plate, and a contact ring is fixed on the bottom of the air diffuser hood.
[0012] In a preferred embodiment, a sealing gasket is provided on the outer surface of the contact ring.
[0013] In a preferred embodiment, the first spring and the second spring are both made of high-grade nitrided steel.
[0014] Beneficial effects of the utility model:
[0015] 1. Open the solenoid valve. When the gas enters the manifold from the air inlet pipe along the air expansion hood, the manifold will move downward when it is suddenly impacted by the gas. The impact of the gas on the manifold can be greatly reduced by the buffering effect of multiple first springs and second springs. At the same time, since the manifold is not fixedly connected to the inside of the gas box, it is also avoided that the connection device between the manifold and the gas box is affected by the tensile force after expansion in the case of multiple heating and cooling, and fatigue fracture occurs;
[0016] 2. By providing a plurality of symmetrically arranged support rods and a second spring, a stable supporting force can be formed on the diverter plate, thereby ensuring the stability and balance of the diverter plate when in use. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 A main structural stereoscopic view of the balancing structure of the splitter plate provided by the utility model;
[0018] Figure 2 for Figure 1 A schematic diagram of the enlarged structure of shown;
[0019] Figure 3 This is a main structural plane view of the balancing structure of the splitter plate provided by the utility model.
[0020] Numbers in the figure: 1. Gas box; 2. Inlet pipe; 3. Air expansion hood; 4. Diverter plate; 5. Support rod; 6. Lifting block; 7. Limit seat; 8. Sliding column; 9. First spring; 10. Slide groove; 11. Second spring; 12. Air baffle ring frame; 13. Contact ring; 14. Sealing gasket; 15. Diverter hole; 16. Solenoid valve. DETAILED DESCRIPTION
[0021] The utility model is further described below in conjunction with the accompanying drawings and implementation modes.
[0022] Please refer to Figure 1 , Figure 2 as well as Figure 3 ,in Figure 1 A main structural stereoscopic view of the balancing structure of the splitter plate provided by the utility model; Figure 2 for Figure 1 A schematic diagram of the enlarged structure of shown; Figure 3 This is a main structural plane view of the balancing structure of the splitter plate provided by the utility model.
[0023] In the specific implementation process, Figure 1-Figure 3 As shown, it includes a gas box 1, the top of the gas box 1 is connected to an air intake pipe 2, the air intake pipe 2 is installed with a solenoid valve 16, the bottom of the air intake pipe 2 is connected to an air diffuser 3, and a diverter plate 4 with a plurality of diverter holes 15 on the surface is arranged directly below the air diffuser 3. When the solenoid valve 16 is opened, when the gas enters the diverter plate 4 from the air intake pipe 2 along the air diffuser 3, the diverter effect can be achieved through the diverter holes 15 on the diverter plate 4.
[0024] A plurality of support rods 5 are circumferentially fixed to one side of the diverter plate 4, and lifting blocks 6 are symmetrically fixed to both sides of the diverter plate 4. The lifting block 6 is slidably connected to the inner wall of the gas box 1. A limit seat 7 is arranged directly above the lifting block 6, and the limit seat 7 is fixedly connected to the inner wall of the gas box 1. A sliding column 8 is slidably connected to the lifting block 6, and a sliding column 8 is fixed to the bottom of the limit seat 7. The bottom of the sliding column 8 passes through the lifting block 6. A first spring 9 is sleeved on the sliding column 8, and one end of the first spring 9 is fixed to the limit seat 7, and the other end of the first spring 9 is fixed to the lifting block 6. When the diverter plate 4 is subjected to impact force, the lifting block 6 will move downward with the diverter plate 4, and at this time the first spring 9 can play a buffering role.
[0025] A plurality of slide grooves 10 are provided in the inner arm of the gas box 1. The bottom of the support rod 5 is slidably connected to the slide groove 10. A second spring 11 is arranged inside the slide groove 10. One end of the second spring 11 is fixed to the bottom of the support rod 5, and the other end of the second spring 11 is fixed to the groove wall of the slide groove 10. The first spring 9 and the second spring 11 are both made of high-grade nitrided steel. By arranging a plurality of symmetrically arranged support rods 5 and the second spring 11, a stable supporting force can be formed for the diverter plate 4 to ensure the stability and balance of the diverter plate when in use. The first spring 9 and the second spring 11 are both made of high-grade nitrided steel, which have a long service life and high fatigue strength.
[0026] An air baffle ring frame 12 is fixed on the diverter plate 4, a contact ring 13 is fixed at the bottom of the air diffuser hood 3, and a sealing gasket 14 is provided on the outer surface of the contact ring 13 to prevent gas from overflowing from the gap between the diverter plate 4 and the air diffuser hood 3 and ensure the diversion quality.
[0027] The working principle of the utility model is as follows: when the solenoid valve 16 is opened, when the gas enters the diverter plate 4 from the air inlet pipe 2 along the air diffuser 3, the diverter plate 4 will move downward when it is suddenly subjected to the impact force of the gas, and the impact force of the gas on the diverter plate 4 can be greatly reduced through the buffering effect of the first springs 9 and the second springs 11. At the same time, since the diverter plate 4 is not fixedly connected to the inside of the gas box 1, it is also avoided that the connection device between the diverter plate 4 and the gas box 1 is affected by the tensile force after expansion in the case of multiple heating and cooling, and fatigue fracture occurs;
[0028] By providing a plurality of symmetrically arranged support rods 5 and second springs 11, a stable supporting force can be formed on the diverter plate 4, thereby ensuring the stability and balance of the diverter plate when in use.
[0029] The circuits and controls involved in the present invention are all prior art and will not be described in detail here.
[0030] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.
Claims
1. A balancing structure of a manifold, comprising a gas box (1), characterized in that: The top of the gas box (1) is connected to an air intake pipe (2), a solenoid valve (16) is installed on the air intake pipe (2), and the bottom of the air intake pipe (2) is connected to an air expansion cover (3); A flow divider plate (4) with a plurality of flow divider holes (15) on its surface is arranged directly below the gas expansion hood (3); a plurality of support rods (5) are circumferentially fixed to one side of the flow divider plate (4); lifting blocks (6) are symmetrically fixed to both sides of the flow divider plate (4); the lifting blocks (6) are slidably connected to the inner wall of the gas box (1); a limit seat (7) is arranged directly above the lifting block (6); the limit seat (7) is fixedly connected to the inner wall of the gas box (1); A sliding column (8) is fixed at the bottom of the limit seat (7), and the bottom of the sliding column (8) passes through the lifting block (6). A first spring (9) is sleeved on the sliding column (8), and one end of the first spring (9) is fixed on the limit seat (7), and the other end of the first spring (9) is fixed on the lifting block (6).
2. The balancing structure of the manifold according to claim 1, characterized in that: The sliding column (8) is slidably connected to the lifting block (6).
3. The balancing structure of the manifold according to claim 2, characterized in that: The inner arm of the gas box (1) is provided with a plurality of slide grooves (10), the bottom of the support rod (5) is slidably connected to the slide groove (10), a second spring (11) is arranged inside the slide groove (10), one end of the second spring (11) is fixed to the bottom of the support rod (5), and the other end of the second spring (11) is fixed to the groove wall of the slide groove (10).
4. The balancing structure of the manifold according to claim 3, characterized in that: An air baffle ring frame (12) is fixed on the diverter plate (4), and a contact ring (13) is fixed on the bottom of the air diffuser cover (3).
5. The balancing structure of the manifold according to claim 4, characterized in that: A sealing gasket (14) is provided on the outer surface of the contact ring (13).
6. The balancing structure of the manifold according to claim 5, characterized in that: The first spring (9) and the second spring (11) are both made of high-grade nitrided steel.