Reversible nanometer coating deposition cavity
By designing a flip-flopable nano-coated deposition cavity, the problem of cumbersome equipment replacement and large site occupancy in the prior art is solved, and flexible conversion of vertical and horizontal coatings is realized, which improves production efficiency and saves equipment costs.
Patent Information
- Application Number
- CN202421177883.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-27
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-05-27
AI Technical Summary
The existing coating deposition chambers are divided into vertical and horizontal types, and equipment needs to be replaced to meet different technical requirements. The process is cumbersome and occupies a large site, which lacks flexibility and high efficiency.
A flip-fitting nano-coated deposition cavity is designed, through the inlet connection pipe, clamping sleeve, isolation ring, locking nut, deposition cavity, built-in rack, rotary seal, sealing cover, outlet connection pipe, rotary support The components realize vertical and horizontal rotation conversion, save equipment costs and improve production efficiency.
It realizes flexible conversion of vertical and horizontal coatings, saves equipment costs and significantly improves production efficiency.
Smart Images
Figure CN222294177U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum coating, and more specifically to a reversible nano coating deposition chamber. Background Art
[0002] With the development of science and technology, there are more and more electronic products, and the requirements for coating methods have been improved. The existing coating deposition chambers are divided into two types: vertical and horizontal. Different products need to be plated with replaced equipment to adapt to the corresponding technical requirements to complete the coating. The process is relatively cumbersome and occupies a large area.
[0003] Therefore, a reversible nano-film deposition chamber is urgently needed to solve the above problems. Utility Model Content
[0004] In order to overcome the above-mentioned defects of the prior art, an embodiment of the utility model provides a flippable nano-coating deposition chamber, which is provided with a chamber inlet connecting pipe, a first ferrule, a first isolating ring, a first locking nut, a deposition chamber, a chamber built-in rack, a bottom rotating seal, a chamber sealing cover, a chamber outlet connecting pipe, a second ferrule, a second isolating ring, a second locking nut, a first deposition chamber rotating support and a second deposition chamber rotating support. The utility model can be used for vertical coating horizontal rotation or horizontal rolling rotation, which greatly improves production efficiency while saving equipment purchase costs, so as to solve the problems raised in the above-mentioned background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a reversible nano-coating deposition chamber, comprising a chamber inlet connecting pipe, a first ferrule, a first isolating ring, a first locking nut, a deposition chamber, a chamber built-in rack, a bottom rotating seal, a chamber sealing cover, a chamber outlet connecting pipe, a second ferrule, a second isolating ring, a second locking nut, a first deposition chamber rotating support and a second deposition chamber rotating support, wherein the chamber built-in rack is arranged inside the deposition chamber, the chamber sealing cover is arranged at the top of the deposition chamber, and the bottom rotating seal is arranged at the bottom of the deposition chamber.
[0006] In a preferred embodiment, the chamber inlet connecting pipe and the chamber outlet connecting pipe are respectively arranged on both sides of the deposition chamber.
[0007] In a preferred embodiment, the first ferrule, the first isolating ring, the first locking nut and the first deposition chamber rotation support are all arranged at one end of the chamber inlet connecting pipe close to the deposition chamber.
[0008] In a preferred embodiment, the second ferrule, the second isolating ring, the second locking nut and the second deposition chamber rotation support are arranged at one end of the chamber outlet connecting pipe close to the deposition chamber.
[0009] Technical effects and advantages of the utility model:
[0010] The utility model is provided with a cavity inlet connecting pipe, a first ferrule, a first isolating ring, a first locking nut, a deposition cavity, a cavity built-in rack, a bottom rotating seal body, a cavity sealing cover, a cavity outlet connecting pipe, a second ferrule, a second isolating ring, a second locking nut, a first deposition cavity rotating support and a second deposition cavity rotating support, so that the utility model can be used for vertical coating horizontal rotation and horizontal rolling rotation, thereby greatly improving production efficiency while saving equipment purchase costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 It is a schematic diagram of the overall structure of the utility model.
[0012] The figures are marked as follows: 1. cavity inlet connecting pipe; 2. first ferrule; 3. first isolating ring; 4. first locking nut; 5. deposition cavity; 6. cavity built-in rack; 7. bottom rotating seal; 8. cavity sealing cover; 9. cavity outlet connecting pipe; 10. second ferrule; 11. second isolating ring; 12. second locking nut; 13. first deposition cavity rotating support; 14. second deposition cavity rotating support. DETAILED DESCRIPTION
[0013] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0014] As attached Figure 1 As shown, the utility model provides a reversible nano-coating deposition chamber, including a chamber inlet connecting pipe 1, a first ferrule 2, a first isolating ring 3, a first locking nut 4, a deposition chamber 5, a chamber built-in rack 6, a bottom rotating seal 7, a chamber sealing cover 8, a chamber outlet connecting pipe 9, a second ferrule 10, a second isolating ring 11, a second locking nut 12, a first deposition chamber rotating support 13 and a second deposition chamber rotating support 14, wherein the chamber built-in rack 6 is arranged inside the deposition chamber 5, the chamber sealing cover 8 is arranged at the top of the deposition chamber 5, and the bottom rotating seal 7 is arranged at the bottom of the deposition chamber 5;
[0015] The chamber inlet connecting pipe 1 and the chamber outlet connecting pipe 9 are respectively arranged on both sides of the deposition chamber 5;
[0016] The first ferrule 2, the first isolating ring 3, the first locking nut 4 and the first deposition chamber rotation support 13 are all arranged at one end of the chamber inlet connecting pipe 1 close to the deposition chamber 5;
[0017] The second ferrule 10 , the second isolating ring 11 , the second locking nut 12 and the second deposition chamber rotation support 14 are arranged at one end of the chamber outlet connecting pipe 9 close to the deposition chamber 5 .
[0018] The specific implementation method is as follows: when using the utility model, first, a first ferrule 2 is provided on the upper side of the inlet connecting pipe 1 for sealing, and the first ferrule 2 and the first isolation ring 3 are squeezed by the first locking nut 4 to achieve a sealing effect, and the deposition chamber 5 is used to place the product and the built-in rack 6 in the chamber, and the built-in rack 6 in the chamber is fixed on the turntable in the bottom rotating sealing body cavity with screws. When it is necessary to change to horizontal wall coating, the first locking nut 4 and the second locking nut 12 need to be loosened first, and the chamber can be rotated 90° to convert it into rolling coating. This allows the utility model to be used for vertical coating horizontal rotation, and also for horizontal rolling rotation, which greatly improves production efficiency while saving the cost of purchasing equipment.
[0019] Working principle of this utility model:
[0020] Refer to the instruction manual Figure 1 When using the utility model, by providing a cavity inlet connecting pipe 1, a first ferrule 2, a first isolating ring 3, a first locking nut 4, a deposition cavity 5, a cavity built-in rack 6, a bottom rotating seal 7, a cavity sealing cover 8, a cavity outlet connecting pipe 9, a second ferrule 10, a second isolating ring 11, a second locking nut 12, a first deposition cavity rotating support 13 and a second deposition cavity rotating support 14, the utility model can be used for vertical coating horizontal rotation, and can also be used for horizontal rolling rotation, which greatly improves production efficiency while saving the cost of purchasing equipment.
[0021] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;
[0022] Secondly: In the drawings of the embodiments disclosed in the present utility model, only the structures related to the embodiments disclosed in the present utility model are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present utility model can be combined with each other;
[0023] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.
Claims
1. A reversible nano-film deposition chamber, characterized in that: The invention comprises a chamber inlet connecting pipe (1), a first ferrule (2), a first isolating ring (3), a first locking nut (4), a deposition chamber (5), a chamber built-in rack (6), a bottom rotating seal (7), a chamber sealing cover (8), a chamber outlet connecting pipe (9), a second ferrule (10), a second isolating ring (11), a second locking nut (12), a first deposition chamber rotating support (13) and a second deposition chamber rotating support (14), wherein the chamber built-in rack (6) is arranged inside the deposition chamber (5), the chamber sealing cover (8) is arranged at the top of the deposition chamber (5), and the bottom rotating seal (7) is arranged at the bottom of the deposition chamber (5).
2. The reversible nano-film deposition chamber according to claim 1, characterized in that: The chamber inlet connecting pipe (1) and the chamber outlet connecting pipe (9) are respectively arranged on both sides of the deposition chamber (5).
3. The reversible nano-film deposition chamber according to claim 1, characterized in that: The first ferrule (2), the first isolating ring (3), the first locking nut (4) and the first deposition chamber rotating support (13) are all arranged at one end of the chamber inlet connecting pipe (1) close to the deposition chamber (5).
4. The reversible nano-film deposition chamber according to claim 1, characterized in that: The second ferrule (10), the second isolating ring (11), the second locking nut (12) and the second deposition chamber rotating support (14) are arranged at one end of the chamber outlet connecting pipe (9) close to the deposition chamber (5).