Boat support for LPCVD (Low Pressure Chemical Vapor Deposition)
By designing an adjustable LPCVD boat holder, the sliding card block and electromagnet fixing card blocks are used to solve the problem of placement of silicon wafers in different sizes, achieving flexible adaptation of silicon wafer specifications and improving production efficiency.
Patent Information
- Application Number
- CN202421153959.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-05-24
AI Technical Summary
The existing vehicle boat carriers cannot be compatible with silicon wafers of different sizes. Silicon wafers with sizes less than 182mm can be fixed, but silicon wafers of 192mm or 210mm cannot be placed, resulting in the need to replace the boat carriers when switching to produce products of different sizes, and the addition of production costs.
A boat holder for LPCVD is designed, which is slidably connected to the frame through the first card block and the second card block, allowing the adjustment of the distance between multiple sets of card blocks, and uses an electromagnetic to fix the card block position and emit light The device and receiver board remind you of misalignment to ensure the correct placement of the silicon wafer specifications.
It realizes flexible placement of silicon wafers of different sizes, avoids contact between silicon wafers, reduces the need for boat support replacement, and improves production efficiency and cost-effectiveness.
Smart Images
Figure CN222294196U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer coating, in particular to a boat support for LPCVD. Background Art
[0002] LPCVD is a method used to deposit thin films on semiconductor wafers.
[0003] Current photovoltaic cell manufacturing equipment, such as diffusion furnaces, oxidation annealing furnaces, low-pressure chemical vapor deposition LPCVD, etc., mostly use multi-tube equipment, and the multi-tube equipment shares a clean bench and loading and unloading equipment. LPCVD equipment is used to grow tunneling oxide layers, intrinsic amorphous silicon, doped amorphous silicon and silicon dioxide films. With the development of the photovoltaic industry, production capacity requirements are getting higher and higher, the size of silicon wafers is getting larger and larger, and different customers require different product sizes. The production workshop will need to frequently switch to produce products of different sizes according to customer needs, which places higher and higher requirements on the compatibility of the carrier.
[0004] Conventional carrier boats can only hold silicon wafer boats smaller than 182mm in size, but cannot hold larger silicon wafer boats of 192mm or 210mm in size. When the production line switches to produce 192mm or 210mm silicon wafers, the carrier boat needs to be replaced, increasing production costs. Utility Model Content
[0005] The main purpose of the utility model is to provide a boat support for LPCVD, in which the first card block and the second card block are slidably connected to the frame. Therefore, the distances between multiple groups of first card blocks and second card blocks can be adjusted, so that after a silicon wafer boat of corresponding specifications is placed on the frame, the silicon wafers loaded therein will not contact each other, and there is no need to replace the boat support.
[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:
[0007] A boat support for LPCVD includes a frame with two parallel sides, a first card block and a second card block are slidably connected to the two parallel sides of the frame, the first card block and the second card block are both provided with card slots on the top, one side of the first card block is threadedly connected to a locking screw for supporting the frame, and the side of the second card block in contact with the frame is provided with a fixing device for fixing the second card block to the frame.
[0008] Furthermore, the first clamping block and the second clamping block are both provided with sliding grooves matching the shape of the side edges, and the first clamping block and the second clamping block are respectively slidably connected to the frame through the sliding grooves.
[0009] Furthermore, the fixing device is an electromagnet.
[0010] Furthermore, a plug hole is formed on a side of the second card block close to the first card block.
[0011] Furthermore, a light emitter is fixed to one end of the first card block, and a light receiving plate matching the position of the light emitter is fixed to one end of the second card block.
[0012] Furthermore, length scales are provided on two parallel sides of the frame.
[0013] Compared with the prior art, the utility model has the following beneficial effects:
[0014] The first card block and the second card block of the utility model are slidably connected to the frame, so the distances between multiple groups of first card blocks and second card blocks can be adjusted, so that after a silicon wafer boat of corresponding specifications is placed on the frame, the silicon wafers loaded therein will not contact each other, and there is no need to replace the boat support.
[0015] After the positions of the first clamping block and the second clamping block of the utility model are adjusted, they can be fixed on the frame, thereby ensuring that the position of the silicon wafer boat carried on the frame through the first clamping block and the second clamping block will not change.
[0016] When the first card block and the second card block of the utility model are misaligned, the light emitter cannot irradiate the center position of the light receiving plate, so it can remind personnel to readjust the positions of the first card block and the second card block. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is an overall schematic diagram of a boat support for LPCVD according to the utility model.
[0018] Figure 2 This is a schematic diagram of a first clamping block of a boat support for LPCVD according to the utility model.
[0019] Figure 3 This is a schematic diagram of the second clamping block of a boat support for LPCVD according to the utility model.
[0020] Figure 4 This is a schematic diagram of the positions of a light receiving plate and a light emitter of a boat support for LPCVD according to the utility model.
[0021] In the figure: 1, frame; 2, first card block; 3, second card block; 4, light receiving plate; 5, locking screw; 6, jack; 7, length scale; 8, fixing device; 9, card slot; 10, sliding slot; 11, light emitter; 12, side. DETAILED DESCRIPTION
[0022] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.
[0023] like Figure 1-4 As shown, a boat support for LPCVD includes a frame 1 with two parallel sides 12, a first card block 2 and a second card block 3 are slidably connected to the two parallel sides 12 of the frame 1, and a card slot 9 is provided on the top of the first card block 2 and the second card block 3. The silicon wafer boat is respectively carried on the first card block 2 and the second card block 3 through the card slot 9, a locking screw 5 for supporting the frame 1 is threadedly connected to one side of the first card block 2, and a fixing device 8 is provided on the side of the second card block 3 in contact with the frame 1 to fix the second card block 3 on the frame 1, and a length scale 7 is provided on the two parallel sides 12 of the frame 1, and the distance between the first card block 2 and the second card block 3 can be controlled by the length scale 7.
[0024] In this embodiment, the first card block 2 and the second card block 3 are both provided with a sliding groove 10 that matches the shape of the side 12. The first card block 2 and the second card block 3 are respectively slidably connected to the frame 1 through the sliding grooves 10. When the specifications of the silicon wafer boat need to be changed, the personnel should manually make the multiple first card blocks 2 and the second card blocks 3 slide on the two side edges 12 respectively, so as to adjust the distance between the multiple first card blocks 2 and the second card blocks 3, and ensure that the positions of the first card blocks 2 and the second card blocks 3 correspond to each other. Then, when the silicon wafer boat of the specified specifications is placed on the frame 1 through the corresponding first card blocks 2 and the second card blocks 3, the silicon wafers loaded on the silicon wafer boat will not touch the silicon wafers loaded on other silicon wafer boats.
[0025] like Figure 1 , Figure 2 and Figure 3 As shown, the fixing device 8 is an electromagnet. When the position of the first clamping block 2 is determined, the personnel should use a wrench to rotate the locking screw 5 so that the locking screw 5 is against the frame 1, thereby fixing the position of the first clamping block 2;
[0026] When the position of the second card block 3 is determined, the personnel controls the electromagnet to be energized, and because the frame 1 is made of iron, the electromagnet can be adsorbed on the frame 1 after being energized, thereby fixing the second card block 3. Therefore, after the positions of the first card block 2 and the second card block 3 are adjusted, each can be fixed on the frame 1, thereby ensuring that the position of the silicon wafer boat will not move after it is loaded on the frame 1 through the first card block 2 and the second card block 3.
[0027] Among them, Figure 1 and Figure 3As shown, a socket 6 is provided on the side of the second card block 3 close to the first card block 2, and two levers are prepared, one is inserted into the socket 6, and the other is placed in the card slot 9 of the second card block 3 and contacts the side of the card slot 9. At this time, the personnel applies a moving force to the second card block 3 through the two levers, so that the second card block 3 slides on the side 12, thereby solving the problem that the second card block 3 is far away from the personnel and the personnel cannot directly move the second card block 3 by hand.
[0028] Among them, Figure 1 and Figure 4 As shown, a light emitter 11 is fixed at one end of the first card block 2, and a light receiving board 4 matching the position of the light emitter 11 is fixed at one end of the second card block 3. Personnel should regularly control the operation of the light emitter 11, which can emit light and shine on the center position of the light receiving board 4. When the first card block 2 and the second card block 3 are misaligned, the light cannot shine on the center position of the light receiving board 4, so it can remind personnel to readjust the positions of the first card block 2 and the second card block 3 to ensure that the silicon wafer boat can be carried on the frame 1 through the first card block 2 and the second card block 3; the light emitter 11 is preferably an infrared emitter.
[0029] Working principle: the first clamping block 2 and the second clamping block 3 are slidably connected to the frame 1. Therefore, when the specifications of the silicon wafer boat need to be changed, the personnel should manually make the multiple first clamping blocks 2 and the second clamping blocks 3 slide on the two side edges 12 respectively, so as to adjust the distance between the multiple first clamping blocks 2 and the second clamping blocks 3, and ensure that the positions of the first clamping blocks 2 and the second clamping blocks 3 correspond to each other. In the next step, when the position of the first clamping block 2 is determined, the personnel should use a wrench to rotate the locking screw 5 so that the locking screw 5 is against the frame 1, thereby fixing the position of the first clamping block 2. When the position of the second clamping block 3 is determined, the personnel control the electromagnet to energize, thereby fixing the second clamping block 3. In the next step, the silicon wafer boat is loaded onto the frame 1 through the card slots 9 of the first clamping block 2 and the second clamping block 3, ensuring that the silicon wafers loaded on the silicon wafer boat on the frame 1 will not touch the silicon wafers loaded on other silicon wafer boats, so as to facilitate the coating operation loaded on the silicon wafer boat.
[0030] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.
Claims
1. A boat support for LPCVD, comprising a frame (1) having two parallel sides (12), characterized in that: A first clamping block (2) and a second clamping block (3) are slidably connected to two parallel sides (12) of the frame (1), respectively; a clamping groove (9) is provided on the top of each of the first clamping block (2) and the second clamping block (3); a locking screw (5) for supporting the frame (1) is threadedly connected to one side of the first clamping block (2); and a fixing device (8) is provided on the side of the second clamping block (3) in contact with the frame (1) for fixing the second clamping block (3) on the frame (1).
2. The boat support for LPCVD according to claim 1, characterized in that: The first card block (2) and the second card block (3) are both provided with a sliding groove (10) matching the shape of the side edge (12); the first card block (2) and the second card block (3) are respectively slidably connected to the frame body (1) via the sliding groove (10).
3. The boat support for LPCVD according to claim 2, characterized in that: The fixing device (8) is an electromagnet.
4. A boat support for LPCVD according to any one of claims 1 to 3, characterized in that: A plug hole (6) is provided on the side of the second card block (3) close to the first card block (2).
5. The boat support for LPCVD according to claim 1, characterized in that: A light emitter (11) is fixed to one end of the first card block (2), and a light receiving plate (4) matching the position of the light emitter (11) is fixed to one end of the second card block (3).
6. The boat support for LPCVD according to claim 1, characterized in that: A length scale (7) is provided on two parallel sides (12) of the frame (1).