Exhaust funnel for single crystal furnace cavity and pressure container

Abstract

The utility model discloses an exhaust funnel for a single crystal furnace cavity and a pressure vessel, the exhaust funnel comprises a barrel body, a wind scooper and a heat exchange tube group, the barrel body is provided with an air inlet tube, an air outlet tube, a first connecting tube and a second connecting tube; the wind scooper is provided with an air inlet and an air outlet, the air inlet covers the outlet of the air inlet pipe, and the air outlet is arranged downwards. According to the exhaust funnel, the outlet of the gas inlet pipe is covered with the wind scooper, waste gas sucked by a vacuum pump is blown to the funnel bottom through the wind guiding effect of the wind scooper, waste gas buffering is formed, silicides in the waste gas can be condensed in the collision process between the wind scooper and the funnel bottom, the silicides are prevented from being condensed on the funnel body gas outlet pipe, and meanwhile the service life of the exhaust funnel is prolonged. Through the action of the heat exchange tube group, the temperature in the cylinder body is reduced, silicides in waste gas can be greatly condensed, and cold water, helium and other substances can be introduced into the heat exchange tube group to recover heat energy in the cylinder body.

Description

Technical Field

[0001] The utility model relates to the technical field of exhaust pipes, in particular to an exhaust pipe and a pressure vessel used in a single crystal furnace cavity. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method. The exhaust pipe is a device for discharging exhaust gas. It is connected to the vacuum pump through a pipeline to maintain the vacuum degree in the furnace. In a Czochralski single crystal furnace, the crystal growth process needs to be carried out at high temperature and must be carried out under vacuum conditions or a protective atmosphere to avoid oxidation. In this process, the exhaust pipe not only ensures the vacuum degree and controls the atmosphere in the single crystal furnace, but also helps to maintain the temperature stability in the furnace, thereby ensuring the stability and high quality of the single crystal growth process.

[0003] The production waste gas of the single crystal furnace contains silicide and other impurities. The silicide will condense during the exhaust process and block pipes, vacuum pumps and other equipment. Generally, it is necessary to use an exhaust hood and exhaust pipe to deal with it in advance before passing through the vacuum pump. The waste gas is extracted from the furnace body by a vacuum pump. Since the furnace body is at a high temperature, the waste gas contains a large amount of heat energy. After a large amount of waste gas is extracted, the heat energy is also taken out of the furnace body, resulting in excessive heat loss in the furnace body, which leads to an increase in the overall energy consumption of single crystal silicon production.

[0004] In the prior art, most exhaust hoods / exhaust pipes use some technical means to solve the problem of exhaust hole blockage, but relatively few technical reports have the problem of how to recover the heat energy in the exhaust gas. Patent CN208136381U discloses a furnace bottom exhaust hood device for a CZ silicon furnace, which is provided with a main body, a connecting part and a drainage part. The exhaust gas is guided by the blocking effect of the drainage part to control the discharge speed of the airflow, so that the overall furnace body can achieve the purpose of reducing heat loss during exhaust and saving energy and reducing consumption. However, this method does not involve heat recovery in the exhaust gas. Utility Model Content

[0005] In order to overcome the deficiencies of the prior art, one of the purposes of the utility model is to provide an exhaust chimney for a single crystal furnace cavity to solve the above-mentioned traditional problems. It can not only solve the problem of blockage of the exhaust holes of the exhaust chimney, but also recover the heat of the exhaust gas and reduce production energy consumption.

[0006] The second purpose of the utility model is to provide a pressure vessel using the exhaust pipe for a single crystal furnace cavity. The pressure vessel is a single crystal furnace and can also be applied to double crystal furnaces, gemstone furnaces and other fields.

[0007] One of the purposes of the utility model is achieved by the following technical solution:

[0008] An exhaust chimney for a single crystal furnace cavity comprises a cylinder body, an air duct arranged in the cylinder body and a heat exchange tube group, the cylinder body is provided with an air inlet pipe, an air outlet pipe, a first connecting tube and a second connecting tube, the air inlet pipe, the air outlet pipe and the first connecting tube are all located at the upper end of the cylinder body, and the second connecting tube is located at the lower end of the cylinder body; the air duct has an air inlet and an air outlet, the air inlet is covered at the outlet of the air inlet pipe, and the air outlet is arranged downward; the heat exchange tube group is installed on one side of the air duct and is located at the upper end of the air outlet of the air duct, one end of the heat exchange tube group is connected to the first connecting tube, and the other end of the heat exchange tube group is connected to the second connecting tube.

[0009] Preferably, in cross section, the air guide cover is arranged in an inverted L shape.

[0010] Preferably, a plurality of first wind-disturbing protrusions and second wind-disturbing protrusions are sequentially arranged in the wind direction in the wind guide cover, and the first wind-disturbing protrusions and the second wind-disturbing protrusions are staggeredly arranged on the inner walls on two opposite sides of the wind guide cover.

[0011] Preferably, the first wind-disturbing protrusion and / or the second wind-disturbing protrusion has a wavy structure on a side facing the wind.

[0012] Preferably, a first ventilation gap is provided between the first wind-disturbing protrusion and the inner wall of the wind guide cover, and a second ventilation gap is provided between the second wind-disturbing protrusion and the inner wall of the wind guide cover, and the widths of the first ventilation gap and the second ventilation gap are both smaller than the inner diameter of the air inlet.

[0013] Preferably, the width of the first ventilation gap and the width of the second ventilation gap are equal to the inner diameter of the air inlet.

[0014] Preferably, the cylinder body comprises an upper cylinder portion and a lower cylinder portion, and the upper cylinder portion and the lower cylinder portion are threadedly connected.

[0015] Preferably, the lower cylinder is funnel-shaped, a sewage pipe is provided at the bottom of the lower cylinder, and a sewage valve is installed on the sewage pipe.

[0016] Preferably, the heat exchange tube group is a stainless steel bare tube heat exchange group, and the heat exchange tubes in the heat exchange tube group are fixed by a fixing frame.

[0017] The second purpose of the utility model is achieved by the following technical solution:

[0018] A pressure vessel comprises the above-mentioned exhaust pipe for a single crystal furnace cavity.

[0019] Compared with the prior art, the beneficial effects of the present invention are:

[0020] The exhaust pipe of the utility model covers the outlet of the air inlet pipe through the air guide cover, so that the exhaust gas sucked by the vacuum pump passes through the air guiding effect of the air guide cover, and the exhaust gas is blown to the bottom of the pipe, forming a buffer for the exhaust gas, so that the silicide in the exhaust gas can be condensed in the collision between the air guide cover and the bottom of the pipe, and the silicide is prevented from condensing on the exhaust pipe of the pipe body. At the same time, through the effect of the heat exchange tube group, the temperature in the pipe body is reduced, so that the silicide in the exhaust gas can be greatly condensed, and cold water, helium and other substances can be introduced into the heat exchange tube group to recover the heat energy in the pipe body, and the recovered heat is returned to the crystal furnace or used in other places, so that the overall structure can not only solve the problem of blockage of the exhaust hole of the exhaust pipe, but also recover the heat of the exhaust gas, thereby reducing production energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional structural schematic diagram of the exhaust pipe of the utility model;

[0022] Figure 2 for Figure 1 Schematic diagram of the internal structure of the exhaust pipe shown.

[0023] In the figure: 10, cylinder; 11, air inlet pipe; 12, air outlet pipe; 13, first connecting pipe; 14, second connecting pipe; 20, air guide cover; 21, air inlet; 22, air outlet; 23, first wind-disturbing protrusion; 24, second wind-disturbing protrusion; 30, heat exchange tube group. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0025] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0026] In the description of the present utility model, it is necessary to understand that when an element is considered to be "connected" to another element, it may be directly connected to another element or there may be intermediate elements at the same time. On the contrary, when an element is said to be "directly" connected to another element, there are no intermediate elements.

[0027] See also Figure 1-Figure 2 , which is an exhaust pipe of a preferred embodiment of the utility model, is used to be installed in a pressure vessel such as a single crystal furnace cavity. One end of the exhaust pipe is connected to the single crystal furnace cavity, and the other end of the exhaust pipe is connected to a vacuum pump. Through the function of the exhaust pipe, the waste gas such as silicide is reduced from blocking the pipeline. Specifically, the exhaust pipe includes a cylinder 10, an air guide cover 20 and a heat exchange tube group 30 arranged in the cylinder 10. The cylinder 10 is provided with an air inlet pipe 11, an air outlet pipe 12, a first connecting pipe 13 and a second connecting pipe 14. The air inlet pipe 11 , the air outlet pipe 12, and the first connecting pipe 13 are all located at the upper end of the cylinder 10, and the second connecting pipe 14 is arranged at the lower end of the cylinder 10; the air guide cover 20 has an air inlet 21 and an air outlet 22, the air inlet 21 covers the outlet of the air inlet pipe 11, and the air outlet 22 is arranged downward; the heat exchange tube group 30 is installed on one side of the air guide cover 20 and is located at the upper end of the air outlet 22 of the air guide cover 20, one end of the heat exchange tube group 30 is connected to the first connecting pipe 13, and the other end of the heat exchange tube group 30 is connected to the second connecting pipe 14.

[0028] The exhaust pipe mentioned above covers the outlet of the air inlet pipe 11 through the air guide hood 20, so that the exhaust gas sucked in by the vacuum pump passes through the air guiding effect of the air guide hood 20, and the exhaust gas is blown to the bottom of the pipe, forming a buffer for the exhaust gas, so that the silicide in the exhaust gas can condense during the collision between the air guide hood 20 and the bottom of the pipe, thereby preventing the silicide from condensing on the exhaust pipe 12 of the cylinder body 10. At the same time, through the action of the heat exchange tube group 30, the temperature inside the cylinder body 10 is reduced, so that the silicide in the exhaust gas can be greatly condensed, and cold water, helium and other substances can be introduced into the heat exchange tube group 30 to recover the heat energy in the cylinder body 10, and the recovered heat is returned to the crystal furnace or used in other places, so that the overall structure can not only solve the problem of blockage of the exhaust hole of the exhaust pipe, but also recover the heat of the exhaust gas and reduce production energy consumption.

[0029] It can be understood that cold water, helium and other substances can enter from the first connecting pipe 13 and flow out from the second connecting pipe 14, forming a flow direction opposite to the flow direction of the exhaust gas, countercurrent heat exchange, so that the cylinder 10 can achieve better cooling. If helium is used as the heat exchange medium, the helium after heat exchange can be introduced into the single crystal furnace again, which can not only achieve the effect of quickly taking away the exhaust gas from the furnace body, but also reduce energy consumption, so that the crystal rod can be cooled slowly.

[0030] The above-mentioned cylinder 10 is connected to the exhaust port of the single crystal furnace through the air inlet pipe 11, and is connected to the vacuum pump through the air outlet pipe 12, so that the exhaust gas first passes through the cylinder 10, condenses the silicide and other easily condensable substances, and adheres to the wind guide cover 20 or the lower end of the cylinder 10, which is convenient for later replacement or cleaning. The specific cylinder 10 includes an upper cylinder part and a lower cylinder part. The upper cylinder part and the lower cylinder part are threadedly connected, which is convenient for disassembling the cylinder 10 and cleaning the inside. The lower cylinder part is arranged in a funnel shape, and a sewage pipe is provided at the bottom of the lower cylinder part. A sewage valve (not shown) is installed on the sewage pipe. If the exhaust gas contains other particulate matter, it can be discharged through the sewage pipe, or after disassembly, it can be flushed with water or other substances, which is convenient for later cleaning.

[0031] The air guide cover 20 is generally a square structure, one end of which extends to the bottom of the cylinder 10 to guide the exhaust gas to the bottom of the cylinder 10. In order to fix the air guide cover 20, other fixing structures can be added to fix it. Figure 2 As shown, in the cross section, the wind guide cover 20 is arranged in an inverted L shape. A plurality of first wind-disturbing protrusions 23 and second wind-disturbing protrusions 24 are sequentially arranged in the wind direction in the wind guide cover 20. The first wind-disturbing protrusions 23 and the second wind-disturbing protrusions 24 are staggered on the inner walls of the opposite sides of the wind guide cover 20. Through the cooperation of the first wind-disturbing protrusions 23 and the second wind-disturbing protrusions 24, the easily condensable substances in the exhaust gas collide more, thereby accelerating their condensation. In one embodiment, the first wind-disturbing protrusions 23 and / or the second wind-disturbing protrusions 24 have a wavy structure on the side facing the wind. Optionally, a first ventilation gap is provided between the first wind-disturbing protrusions 23 and the inner wall of the wind guide cover 20, and a second ventilation gap is provided between the second wind-disturbing protrusions 24 and the inner wall of the wind guide cover 20. The widths of the first ventilation gap and the second ventilation gap are both smaller than the inner diameter of the air inlet 21. In the embodiment, the width of the first ventilation gap and the second ventilation gap is equal to the inner diameter of the air inlet 21.

[0032] In other embodiments, the heat exchange tube group 30 is a stainless steel bare tube heat exchange group, and the heat exchange tubes in the heat exchange tube group 30 are fixed by a fixing frame, and the fixing frame is fixed to the flange of the cylinder 10. Through the action of the fixing frame, a larger gap is provided between the heat exchange tubes to prevent a small amount of silicide from condensing on the heat exchange tubes and squeezing the pipes.

[0033] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0034] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. An exhaust pipe for a single crystal furnace cavity, characterized in that: It includes a cylinder, an air guide hood arranged in the cylinder and a heat exchange tube group, the cylinder is provided with an air inlet pipe, an air outlet pipe, a first connecting tube and a second connecting tube, the air inlet pipe, the air outlet pipe and the first connecting tube are all located at the upper end of the cylinder, and the second connecting tube is located at the lower end of the cylinder; the air guide hood has an air inlet and an air outlet, the air inlet cover is located at the outlet of the air inlet pipe, and the air outlet is arranged downward; the heat exchange tube group is installed on one side of the air guide hood and is located at the upper end of the air outlet of the air guide hood, one end of the heat exchange tube group is connected to the first connecting tube, and the other end of the heat exchange tube group is connected to the second connecting tube.

2. The exhaust pipe for a single crystal furnace chamber according to claim 1, characterized in that: In cross section, the air guide cover is arranged in an inverted L shape.

3. The exhaust pipe for a single crystal furnace chamber according to claim 2, characterized in that: A plurality of first wind-disturbing protrusions and second wind-disturbing protrusions are sequentially arranged in the wind direction in the wind guide cover, and the first wind-disturbing protrusions and the second wind-disturbing protrusions are alternately arranged on the inner walls of the wind guide cover on both sides opposite to each other.

4. The exhaust pipe for a single crystal furnace chamber according to claim 3, characterized in that: The first wind-disturbing protrusion and / or the second wind-disturbing protrusion has a wavy structure on the side facing the wind.

5. The exhaust pipe for a single crystal furnace chamber according to claim 3, characterized in that: A first ventilation gap is provided between the first wind-disturbing protrusion and the inner wall of the wind guide cover, and a second ventilation gap is provided between the second wind-disturbing protrusion and the inner wall of the wind guide cover. The widths of the first ventilation gap and the second ventilation gap are both smaller than the inner diameter of the air inlet.

6. The exhaust pipe for a single crystal furnace chamber according to claim 5, characterized in that: The width of the first ventilation gap and the second ventilation gap is equal to the inner diameter of the air inlet.

7. The exhaust pipe for a single crystal furnace chamber according to claim 1, characterized in that: The cylinder body comprises an upper cylinder portion and a lower cylinder portion, and the upper cylinder portion and the lower cylinder portion are threadedly connected.

8. The exhaust pipe for a single crystal furnace chamber according to claim 7, characterized in that: The lower cylinder is arranged in a funnel shape, a sewage pipe is arranged at the bottom of the lower cylinder, and a sewage valve is installed on the sewage pipe.

9. The exhaust pipe for a single crystal furnace chamber according to claim 1, characterized in that: The heat exchange tube group is a stainless steel bare tube heat exchange group, and the heat exchange tubes in the heat exchange tube group are fixed by a fixing frame.

10. A pressure vessel, characterized in that: It comprises an exhaust pipe for a single crystal furnace cavity as described in any one of claims 1 to 9.

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