Furnace chassis capable of increasing heat exchange efficiency and single crystal furnace
By setting up multiple independent heat exchange channels on the chassis of the single crystal furnace furnace and using the circulating flow of coolant for heat transfer, the problem of short service life of the heater in the prior art is solved, and efficient cooling of the furnace chassis and heater is achieved and stability protection.
Patent Information
- Application Number
- CN202323371130.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-11
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2033-12-11
AI Technical Summary
There is only one sealed waterway in the bottom of the existing single crystal furnace for heat exchange and dissipation, which shortens the service life of the heater and affects the service life of the furnace bottom.
Design a furnace chassis that increases heat exchange efficiency, and divides the heat exchange space into an independent first heat exchange channel and a second heat exchange channel by providing a cover plate, a first partition and a second partition on the furnace chassis main body. , the coolant circulates and flows in these two channels and is cooled using the principles of heat conduction and convection heat transfer.
Effectively protect the stability of the heater and extend its service life, while improving the stability and service life of the furnace chassis, and efficiently cool the heater position through independent heat exchange channels.
Smart Images
Figure CN222294265U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal furnace components, in particular to a furnace chassis and a single crystal furnace capable of increasing heat exchange efficiency. Background Art
[0002] A single crystal furnace is a device used to prepare single crystal materials. When preparing single crystal materials, the single crystal furnace will provide a suitable environmental condition, such as controlling the temperature, atmosphere and pressure, so that the crystals in the material maintain a single lattice structure during the growth process. Single crystal furnaces usually use the melting method to prepare single crystal materials.
[0003] During the process of preparing single crystal materials, the single crystal furnace is in a high temperature environment, and the temperature at the heater position is higher than that at other positions on the furnace bottom. In the prior art, there is only one sealed water channel in the furnace bottom of the single crystal furnace to exchange and dissipate heat for the entire furnace bottom. The heat dissipation effect at the heater position is poor, resulting in a shortened service life of the heater, which in turn affects the service life of the single crystal furnace bottom.
[0004] The utility model is proposed in view of the deficiencies in the prior art. Utility Model Content
[0005] The utility model aims to solve the problem that the existing single crystal furnace bottom mentioned above has only one sealed water channel for heat exchange and heat dissipation of the entire furnace bottom, the heat dissipation effect at the heater position is poor, resulting in a shortened service life of the heater, which in turn affects the service life of the single crystal furnace bottom. The utility model proposes a furnace chassis and a single crystal furnace with increased heat exchange efficiency.
[0006] The technical solution adopted by the utility model to solve its technical problems is:
[0007] A furnace bottom plate for increasing heat exchange efficiency comprises a furnace bottom plate main body, a cover plate is arranged on the furnace bottom plate main body, a first partition, a second partition and a heater are arranged between the cover plate and the furnace bottom plate main body, a heat exchange space is formed between the cover plate and the furnace bottom plate main body, the first partition and the second partition respectively divide the heat exchange space into a first heat exchange channel and a second heat exchange channel which are independent of each other, the second heat exchange channel is arranged around the outside of the heater, and the first heat exchange channel is arranged around the outside of the second heat exchange channel.
[0008] In a furnace bottom plate for increasing heat exchange efficiency as described above, the cover plate is provided with a first liquid inlet and a first liquid outlet which are respectively connected to the second heat exchange channel and are arranged adjacent to each other, and the second heat exchange channel is provided with a third partition for separating the first liquid inlet and the first liquid outlet, and the flow direction of the second heat exchange channel is from the first liquid inlet around the outside of the heater to the first liquid outlet.
[0009] In a furnace bottom plate for increasing heat exchange efficiency as described above, a plurality of heaters are provided, and each of the heaters is arranged around the outside of the center of the furnace bottom plate body, the second partition is arranged around the outside of each of the heaters to form a sealed second heat exchange channel, and the head end and the tail end of the second partition form a gap connected to the first heat exchange channel between two adjacent heaters, and the first liquid inlet and the first liquid outlet are arranged on one side of any one of the heaters.
[0010] As described above, in a furnace bottom plate for increasing heat exchange efficiency, a fourth partition connected between each of the heaters is further provided in the second heat exchange channel, and the second heat exchange channel is divided into an inlet channel and an outflow channel by each of the fourth partitions, and the first liquid inlet, inlet channel, outflow channel and first liquid outlet are connected in sequence.
[0011] In the furnace bottom plate for increasing heat exchange efficiency as described above, the first heat exchange channel is spirally shaped, and its flow direction is from the periphery to the center of the furnace bottom plate body.
[0012] As described above, a furnace bottom plate for increasing heat exchange efficiency is provided with a central pipe on the furnace bottom plate body corresponding to its central position, the first heat exchange channel is provided with a second liquid inlet and a second liquid outlet, the second liquid inlet is provided in the cover plate and close to the outer periphery of the furnace bottom plate body, and the second liquid outlet is provided in the central pipe.
[0013] In the furnace bottom plate for increasing heat exchange efficiency as described above, a fifth partition is further provided between the second partition and the central pipe, and the fifth partition is close to the second liquid outlet.
[0014] In the furnace bottom plate with increased heat exchange efficiency as described above, the end of the first partition is connected to the second partition, and the end of the first partition is located at one side of the notch.
[0015] In the furnace bottom plate for increasing heat exchange efficiency as described above, a flow guide is further provided in the first heat exchange channel.
[0016] The utility model also discloses a single crystal furnace, comprising the furnace bottom plate as described above.
[0017] Compared with the prior art, the beneficial effects of the utility model are:
[0018] 1. The coolant circulates in the first heat exchange channel and the second heat exchange channel respectively and absorbs heat, and the heat of the furnace bottom plate body and the heater is transferred to the coolant by the principle of heat conduction and convection heat transfer, and the heat of the furnace bottom plate body and the heater is taken away, so as to realize the cooling of the furnace bottom plate body and the heater, so as to protect the stability of the heater and prolong the service life of the heater, thereby protecting the stability of the furnace bottom plate and prolonging the service life of the furnace bottom plate;
[0019] 2. By setting an independent second heat exchange channel at the heater position, the heater position can be subjected to targeted heat exchange cooling to improve the heat exchange efficiency and cooling efficiency at the heater position.
[0020] The present invention will be further described below in conjunction with the accompanying drawings and specific implementation methods. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a top view of the furnace chassis of the utility model;
[0022] Figure 2 for Figure 1 A magnified view of part B in FIG.
[0023] Figure 3 It is a schematic diagram of the first heat exchange channel and the second heat exchange channel of the utility model;
[0024] Figure 4 for Figure 1 A-A section view in. DETAILED DESCRIPTION
[0025] The implementation modes of the present utility model are described in detail below in conjunction with the accompanying drawings.
[0026] See also Figure 1—4. The utility model provides a single crystal furnace, including a furnace bottom plate body 1, a cover plate 2 is provided on the furnace bottom plate body 1, a first partition 3, a second partition 4 and a heater 5 are provided between the cover plate 2 and the furnace bottom plate body 1, a heat exchange space 10 is formed between the cover plate 2 and the furnace bottom plate body 1, the first partition 3 and the second partition 4 respectively divide the heat exchange space 10 into mutually independent first heat exchange channels 101 and second heat exchange channels 102, the second heat exchange channels 102 are arranged around the outer side of the heater 5, and the first heat exchange channels 101 are arranged around the outer side of the second heat exchange channels 102. In this embodiment, the cover plate 2 is installed on the furnace bottom plate body 1, and the heat exchange space 10 is formed between the cover plate 2 and the furnace bottom plate body 1, the heater 5 is installed between the cover plate 2 and the furnace bottom plate body 1, and the heater 5 can extend into the heat exchange space 10, the first partition 3 and the second partition 4 are respectively arranged in the heat exchange space 10, and the heat exchange space 10 is separated by the first partition 3 and the second partition 4 to form a mutually independent first heat exchange channel 101 and a second heat exchange channel 102, and the first heat exchange channel 101 and the second heat exchange channel 102 are both sealed channels; coolant can be added to the first heat exchange channel 101 and the second heat exchange channel 102 respectively, some coolant circulates in the second heat exchange channel 102 to absorb heat, and the second heat exchange channel 102 is arranged around the outside of the heater 5, and the heat at the position of the heater 5 can be transferred to the coolant in the second heat exchange channel 102 to take away the heating The heat at the position of the heater 5 is absorbed, thereby realizing independent cooling of the heater 5, which is beneficial to protecting the stability of the heater 5 and extending the service life of the heater 5. Moreover, by arranging an independent second heat exchange channel 102 at the position of the heater 5, the position of the heater 5 can be subjected to targeted heat exchange cooling, so as to improve the heat exchange efficiency and cooling efficiency of the position of the heater 5. Some coolant circulates in the first heat exchange channel 101 to absorb heat, and the first heat exchange channel 101 is arranged in the furnace bottom plate body 1 and surrounds the outer side of the second heat exchange channel 102. The heat of the furnace bottom plate body 1 and the heat in the second heat exchange channel 102 can be transferred to the coolant in the first heat exchange channel 101, so as to realize the overall cooling of the furnace bottom plate body 1, and through the convection heat exchange of the coolant in the first heat exchange channel 101 and the second heat exchange channel 102, the heat exchange efficiency and cooling effect of the furnace bottom plate body 1 and the heater 5 are further improved, thereby protecting the stability of the furnace bottom plate and extending the service life of the furnace bottom plate.
[0027] The cooling liquid circulates and absorbs heat in the first heat exchange channel 101 and the second heat exchange channel 102 respectively, and the heat of the furnace bottom plate body 1 and the heater 5 is transferred to the cooling liquid by the principle of heat conduction and convection heat transfer, and the heat of the furnace bottom plate body 1 and the heater 5 is taken away, so as to realize the cooling of the furnace bottom plate body 1 and the heater 5, so as to protect the stability of the heater 5 and extend the service life of the heater 5, thereby protecting the stability of the furnace bottom plate and extending the service life of the furnace bottom plate. It should be noted that the heater 5 can be an electrode, a heating wire, etc.; the cooling liquid can be water, an aqueous solution, a high-temperature heat transfer oil, liquid nitrogen, etc.
[0028] Specifically, participate Figure 1 and Figure 2 The cover plate 2 is provided with a first liquid inlet 1021 and a first liquid outlet 1022 which are respectively connected to the second heat exchange channel 102 and are arranged adjacent to each other. The second heat exchange channel 102 is provided with a third partition 1023 for separating the first liquid inlet 1021 and the first liquid outlet 1022. The flow direction of the second heat exchange channel 102 is from the first liquid inlet 1021 around the outside of the heater 5 to the first liquid outlet 1022. In this embodiment, the first liquid inlet 1021 and the first liquid outlet 1022 are close to each other, and the third partition 1023 is connected in the second heat exchange channel 102 and is located between the first liquid inlet 1021 and the first liquid outlet 1022. The first liquid inlet 1021 and the first liquid outlet 1022 are isolated by the third partition 1023, so that the coolant is input into the second heat exchange channel 102 from the first liquid inlet 1021 and flows around the outside of the heater 5 to the first liquid outlet 1022, and finally flows out of the furnace bottom plate body 1 from the first liquid outlet 1022, ensuring that the direction of the coolant circulating in the second heat exchange channel 102 is certain and consistent, so as to avoid the chaotic flow of liquid in the second heat exchange channel 102 and cause the heat exchange efficiency to be reduced.
[0029] Optional, see Figure 1 and Figure 3In one embodiment, the heaters 5 are provided in a plurality, and each of the heaters 5 is arranged around the outside of the center of the furnace bottom plate body 1, the second partition 4 is arranged around the outside of each of the heaters 5 and forms a sealed second heat exchange channel 102, and the first end 401 and the tail end 402 of the second partition 4 form a notch 403 communicating with the first heat exchange channel 101 between two adjacent heaters 5, and the first liquid inlet 1021 and the first liquid outlet 1022 are arranged on one side of any one of the heaters 5. Further, the second heat exchange channel 102 is further provided with a fourth partition 1024 connected between each of the heaters 5, and the second heat exchange channel 102 is divided into an inflow channel 102a and an outflow channel 102b by each of the fourth partitions 1024, and the first liquid inlet 1021, the inflow channel 102a, the outflow channel 102b and the first liquid outlet 1022 are sequentially connected. In this embodiment, the heaters 5 may be provided with 6 to 8 pieces, and each of the heaters 5 is arranged at intervals approximately along the circumferential direction of the furnace bottom plate main body 1, and each of the heaters 5 is distributed between the center position of the furnace bottom plate main body 1 and its outer edge, wherein the first liquid inlet 1021 and the first liquid outlet 1022 are arranged on one side of any of the heaters 5, and the first liquid inlet 1021 and the first liquid outlet 1022 are isolated by the third partition 1023, so that the second heat exchange channel 102 is unidirectionally connected between the first liquid inlet 1021 and the first liquid outlet 1022, and the second heat exchange channel 102 is arranged around the outside of each of the heaters 5, the second heat exchange channel 102 is sealed relative to the first heat exchange channel 101, and only the first liquid inlet 1021 and the first liquid outlet 1022 are used as the input and output ports of the coolant; it should be noted that in order to further improve the heat exchange efficiency of each of the heaters 5, its The gap 403 is retained between two adjacent heaters 5, that is, the second partition 4 is not set at the gap 403 to avoid the first heat exchange channel 101 from being cut off, and the gap 403 is formed by the relative spacing of the head end 401 and the end 402 of the second partition 4, and the gap 403 can be used as a part of the first heat exchange channel 101. On this basis, the fourth partition 1024 is respectively connected between any two adjacent heaters 5 in the second heat exchange channel 102, and the second heat exchange channel 102 is divided into an inlet channel 102a and an outflow channel 102b by each of the fourth partitions 1024. The first liquid inlet 1021, the inlet channel 102a, the outflow channel 102b and the first liquid outlet 1022 are connected in sequence, further avoiding chaotic liquid flow in the second heat exchange channel 102, ensuring that the coolant circulates in one direction and performs heat exchange cooling on each of the heaters 5.
[0030] Preferably, see Figure 1 and Figure 3 Part of the second partition 4 is set to an arc shape, so that the inner wall of the second partition 4 forms a guide portion 404 for guiding the coolant. The specific shape of the arc-shaped guide portion 404 can be similar to the outer contour of the heater 5, so as to improve the fluidity of the coolant in the second heat exchange channel 102, and further improve the heat exchange efficiency and cooling efficiency of each heater 5.
[0031] Optional, see Figure 3 In one embodiment, the first heat exchange channel 101 is spiral, and its flow direction is from the periphery to the center of the furnace bottom plate body 1. Further, a central pipe 6 is provided on the furnace bottom plate body 1 corresponding to its center position, and the first heat exchange channel 101 is provided with a second liquid inlet 1011 and a second liquid outlet 1012, the second liquid inlet 1011 is provided in the cover plate 2 and close to the periphery of the furnace bottom plate body 1, and the second liquid outlet 1012 is provided in the central pipe 6. In this embodiment, the first partition 3 is a spiral partition, and the heat exchange space 10 is divided by the first partition 3 to form the first spiral heat exchange channel 101. Furthermore, the end 402 of the first partition 3 is connected to the second partition 4, and the end 402 of the first partition 3 is located on one side of the notch 403 to ensure that the flow direction of the first heat exchange channel 101 can be from the periphery of the furnace chassis main body 1 to the center direction of the furnace chassis main body 1, that is, the coolant flows into the first heat exchange channel 101 from the second liquid inlet 1011, flows along the first heat exchange channel 101 to the second liquid outlet 1012, and flows out of the outside of the furnace chassis main body 1 from the second liquid outlet 1012, thereby preventing the second partition 4 from cutting off the first heat exchange channel 101.
[0032] For further information, see Figure 1, a fifth partition 1014 is further provided between the second partition 4 and the central pipe 6, and the fifth partition 1014 is close to the second liquid outlet 1012. Since the first heat exchange channel 101 is a spiral channel, the first heat exchange channel 101 forms an annular channel outside the central pipe 6, and the second liquid outlet 1012 serves as the coolant outlet of the first heat exchange channel 101. A fifth partition 1014 connected between the second partition 4 and the central pipe 6 is provided in the annular channel, and the fifth partition 1014 is provided on one side of the second liquid outlet 1012 and close to the second liquid outlet 1012. The annular channel is cut off by the fifth partition 1014 to ensure that the second liquid outlet 1012 forms the terminal position of the liquid flow in the first heat exchange channel 101, thereby avoiding the confusion of the channels in the first heat exchange channel 101, and ensuring that the coolant can circulate in a single direction in the first heat exchange channel 101, thereby improving the heat exchange efficiency.
[0033] Optional, see Figure 1 In one embodiment, a guide member 1013 is further provided in the first heat exchange channel 101. A plurality of guide members 1013 may be provided, and each guide member 1013 may be provided along the spiral trend of the first heat exchange channel 101, and each guide member 1013 is provided close to the middle of the first heat exchange channel 101. The guide members 1013 guide the coolant to circulate along the first heat exchange channel 101, thereby enhancing the fluidity of the coolant in the first heat exchange channel 101 and improving the heat exchange efficiency.
[0034] The above examples are only used to further illustrate the technical content of the utility model, so that readers can understand it more easily, but it does not mean that the implementation methods of the utility model are limited to this. Any technical extension or re-creation made based on the utility model is protected by the utility model. The protection scope of the utility model shall be based on the claims.
Claims
1. A furnace bottom plate for increasing heat exchange efficiency, comprising a furnace bottom plate body (1), characterized in that: A cover plate (2) is provided on the furnace bottom plate body (1); a first partition (3), a second partition (4) and a heater (5) are provided between the cover plate (2) and the furnace bottom plate body (1); a heat exchange space (10) is formed between the cover plate (2) and the furnace bottom plate body (1); the first partition (3) and the second partition (4) respectively divide the heat exchange space (10) into a first heat exchange channel (101) and a second heat exchange channel (102) which are independent of each other; the second heat exchange channel (102) is arranged around the outer side of the heater (5); and the first heat exchange channel (101) is arranged around the outer side of the second heat exchange channel (102).
2. A furnace bottom plate for increasing heat exchange efficiency as claimed in claim 1, characterized in that: The cover plate (2) is provided with a first liquid inlet (1021) and a first liquid outlet (1022) which are respectively connected to the second heat exchange channel (102) and are arranged adjacent to each other; a third partition (1023) is provided in the second heat exchange channel (102) for separating the first liquid inlet (1021) and the first liquid outlet (1022); the flow direction of the second heat exchange channel (102) is from the first liquid inlet (1021) around the outside of the heater (5) to the first liquid outlet (1022).
3. A furnace bottom plate for increasing heat exchange efficiency as claimed in claim 2, characterized in that: A plurality of the heaters (5) are provided, and each of the heaters (5) is arranged around the outside of the center of the furnace bottom plate body (1); the second partition (4) is arranged around the outside of each of the heaters (5) to form a sealed second heat exchange channel (102); a first end (401) and a tail end (402) of the second partition (4) form a notch (403) communicating with the first heat exchange channel (101) between two adjacent heaters (5); and the first liquid inlet (1021) and the first liquid outlet (1022) are provided on one side of any one of the heaters (5).
4. A furnace bottom plate for increasing heat exchange efficiency as claimed in claim 3, characterized in that: A fourth partition (1024) connected between each of the heaters (5) is also provided in the second heat exchange channel (102), and the second heat exchange channel (102) is divided into an inflow channel (102a) and an outflow channel (102b) by each of the fourth partitions (1024), and the first liquid inlet (1021), the inflow channel (102a), the outflow channel (102b) and the first liquid outlet (1022) are sequentially connected.
5. A furnace bottom plate for increasing heat exchange efficiency as claimed in claim 3, characterized in that: The first heat exchange channel (101) is spirally shaped, and its flow direction is from the periphery to the center of the furnace bottom plate body (1).
6. A furnace bottom plate for increasing heat exchange efficiency as claimed in claim 5, characterized in that: A central pipe (6) is also provided on the furnace bottom plate body (1) at a corresponding central position thereof, and the first heat exchange channel (101) is provided with a second liquid inlet (1011) and a second liquid outlet (1012), the second liquid inlet (1011) being provided in the cover plate (2) and close to the outer periphery of the furnace bottom plate body (1), and the second liquid outlet (1012) being provided in the central pipe (6).
7. A furnace bottom plate for increasing heat exchange efficiency as claimed in claim 6, characterized in that: A fifth partition (1014) is also provided between the second partition (4) and the central pipe (6), and the fifth partition (1014) is close to the second liquid outlet (1012).
8. A furnace bottom plate for increasing heat exchange efficiency as claimed in claim 5, characterized in that: The end (402) of the first partition (3) is connected to the second partition (4), and the end (402) of the first partition (3) is located on one side of the notch (403).
9. A furnace bottom plate for increasing heat exchange efficiency as claimed in claim 1, characterized in that: A flow guide (1013) is also provided in the first heat exchange channel (101).
10. A single crystal furnace, characterized in that: It comprises a furnace bottom plate as described in any one of claims 1 to 9.