Vacuum testing device for connecting corrugated pipe with molecular pump
By designing an automated vacuum testing device, using tee pipes and solenoid control valves to detect air leakage in the corrugated pipes connected to the molecular pump, the problem of disassembly of pipe fittings for testing in the existing technology is solved, and the effect of simplifying testing and reducing losses is achieved. .
Patent Information
- Application Number
- CN202421240602.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-31
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-05-31
AI Technical Summary
The existing vacuum testing equipment for connecting corrugated pipes of molecular pumps requires disassembly of pipe fittings for testing, resulting in wasted time and loss of pipe fittings, increasing the possibility of air leakage.
A vacuum testing device including a tee pipe, a vacuum gauge, a corrugated pipe, a front-end control valve and a rear-end control valve was designed. Through the solenoid control valve and controller, automatic opening and closing control and vacuum data recording can be detected, and corrugated can be detected. Air leakage of the tube.
It realizes the detection of air leakage of bellows without disassembling the pipe fittings, simplifies the testing process, reduces equipment loss and air leakage risks, and has the advantages of simple structure, safety and effectiveness.
Smart Images
Figure CN222299093U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of molecular pump auxiliary equipment, in particular to a vacuum testing device for connecting a molecular pump to a bellows. Background Art
[0002] A molecular pump is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, allowing them to obtain a directional velocity, thereby being compressed and driven to the exhaust port to be drawn away by the front stage.
[0003] Molecular pumps need to be connected with pipes for vacuuming. The pipes themselves are often leaking during use, which affects vacuuming. Most of the existing pipe vacuum testing equipment requires the pipes to be disassembled before vacuum testing. Disassembly and installation take time, and multiple disassemblies will cause certain damage to the pipes, increasing the possibility of leakage. Utility Model Content
[0004] The utility model aims to provide a vacuum testing device for a molecular pump connected to a bellows, so as to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum testing device for a molecular pump connected to a bellows, comprising: a three-way pipe, a vacuum gauge, a connecting bellows, a front-end control valve, and a rear-end control valve, wherein the three-way pipe is composed of a vertical pipe and a horizontal pipe horizontally fixed to the middle of the vertical pipe, the vacuum gauge is fixed to the cover at the top of the vertical pipe in the three-way pipe, the rear end of the connecting bellows is connected to the horizontal pipe in the three-way pipe, the rear end of the front-end control valve is connected to the front end of the connecting bellows, the front end of the front-end control valve is a gas inlet, the front end of the rear-end control valve is connected to the bottom end of the vertical pipe in the three-way pipe, and the rear end of the rear-end control valve is a gas outlet.
[0006] Furthermore, the front-end control valve and the rear-end control valve are both electromagnetic control valves.
[0007] Furthermore, the vacuum gauge, front-end control valve and rear-end control valve are electrically connected to the controller via signal lines respectively, and the controller controls the opening and closing of the front-end control valve and the rear-end control valve, and the controller records and processes the vacuum data detected by the vacuum gauge.
[0008] Compared with the prior art, the beneficial effects of the utility model are as follows: the vacuum testing device for the molecular pump connected to the bellows of the utility model improves the structure of the existing connected bellows, a front-end control valve is arranged at the front end of the connected bellows, and a rear-end control valve and a vacuum gauge are arranged at the rear end of the connected bellows. When the front-end control valve and the rear-end control valve are opened at the same time, the molecular pump device performs normal vacuuming work; when it is necessary to detect the leakage of the connected bellows, the front-end control valve is closed first, and the rear-end control valve is in an open state. At this time, the molecular pump device vacuums the connected bellows until the vacuum gauge reaches the required value, and then the rear-end control valve is closed, and the front-end control valve is still in a closed state. At this time, the vacuum gauge records the rate of change of the vacuum degree in the connected bellows. The rate of change of the vacuum degree can be used to know the leakage of the connected bellows, and compared with the standard parts, it is judged whether the connected bellows can continue to be used.
[0009] The utility model has the advantages of simple structure, safety, effectiveness and good use effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Figure 1 It is a schematic diagram of the structure of the utility model;
[0011] In the figure: 1- three-way pipe; 2- vacuum gauge; 3- connecting bellows; 4- front control valve; 5- rear control valve; 11- vertical pipe; 12- horizontal pipe. DETAILED DESCRIPTION
[0012] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0013] See also Figure 1 The utility model provides a vacuum testing device for a molecular pump connected to a bellows, comprising: a three-way pipe 1, a vacuum gauge 2, a connecting bellows 3, a front-end control valve 4, and a rear-end control valve 5. The three-way pipe 1 consists of a vertical pipe 11 and a horizontal pipe 12 horizontally fixedly connected to the middle of the vertical pipe 11. The vacuum gauge 2 is fixedly connected to the cover at the top of the vertical pipe 11 in the three-way pipe 1. The rear end of the connecting bellows 3 is connected to the horizontal pipe 12 in the three-way pipe 1. The rear end of the front-end control valve 4 is connected to the front end of the connecting bellows 3. The front end of the front-end control valve 4 is a gas inlet. The front end of the rear-end control valve 5 is connected to the bottom end of the vertical pipe 11 in the three-way pipe 1. The rear end of the rear-end control valve 5 is a gas outlet.
[0014] By improving the structure of the existing connecting bellows 3, a front-end control valve 4 is arranged at the front end of the connecting bellows 3, and a rear-end control valve 5 and a vacuum gauge 2 are arranged at the rear end of the connecting bellows 3. When the front-end control valve 4 and the rear-end control valve 5 are opened at the same time, the molecular pump device performs normal vacuuming work; when it is necessary to detect the leakage of the connecting bellows 3, the front-end control valve 4 is closed first, and the rear-end control valve 5 is in an open state. At this time, the molecular pump device vacuumizes the connecting bellows 3 until the vacuum gauge reaches the required value, and then the rear-end control valve 5 is closed, and the front-end control valve 4 is still in a closed state. At this time, the vacuum gauge 2 records the rate of change of the vacuum degree in the connecting bellows 3. The leakage of the connecting bellows 3 can be known through the rate of change of the vacuum degree, and compared with the standard parts to determine whether the connecting bellows 3 can continue to be used.
[0015] Furthermore, the front-end control valve 4 and the rear-end control valve 5 are both electromagnetic control valves.
[0016] Furthermore, the vacuum gauge 2, the front-end control valve 4 and the rear-end control valve 5 are electrically connected to the controller through signal lines respectively, and the controller controls the opening and closing of the front-end control valve 4 and the rear-end control valve 5. At the same time, the controller records and processes the vacuum data detected by the vacuum gauge 2.
[0017] The front control valve 4 and the rear control valve 5 of the electromagnetic control valve can better perform opening and closing control, and the controller effectively coordinates and controls the vacuum gauge 2, the front control valve 4 and the rear control valve 5, which facilitates intelligence.
[0018] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A vacuum testing device for a molecular pump connected to a bellows, characterized in that: include: A three-way pipe (1), a vacuum gauge (2), a connecting bellows (3), a front-end control valve (4), and a rear-end control valve (5), wherein the three-way pipe (1) is composed of a vertical pipe (11) and a horizontal pipe (12) fixedly connected to the middle of the vertical pipe (11); the vacuum gauge (2) is fixedly connected to the cover at the top end of the vertical pipe (11) in the three-way pipe (1); the rear end of the connecting bellows (3) is connected to the horizontal pipe (12) in the three-way pipe (1); the rear end of the front-end control valve (4) is connected to the front end of the connecting bellows (3); the front end of the front-end control valve (4) is a gas inlet; the front end of the rear-end control valve (5) is connected to the bottom end of the vertical pipe (11) in the three-way pipe (1); and the rear end of the rear-end control valve (5) is a gas outlet.
2. A vacuum testing device for a molecular pump connected to a bellows according to claim 1, characterized in that: The front-end control valve (4) and the rear-end control valve (5) are both electromagnetic control valves.
3. A vacuum testing device for a molecular pump connected to a bellows according to claim 1, characterized in that: The front-end control valve (4) and the rear-end control valve (5) are both electromagnetic control valves. The vacuum gauge (2), the front-end control valve (4) and the rear-end control valve (5) are electrically connected to a controller via signal lines. The controller controls the opening and closing of the front-end control valve (4) and the rear-end control valve (5). At the same time, the controller records and processes the vacuum data detected by the vacuum gauge (2).