Grabbing device of trough type cleaning equipment and trough type cleaning equipment

Abstract

The embodiment of the utility model relates to a grabbing device of trough type cleaning equipment and the trough type cleaning equipment. The grabbing device of the groove type cleaning equipment comprises at least two pairs of mechanical arms, and a plurality of pairs of clamping jaw assemblies move along with the mechanical arms under the driving force of a first driving assembly so as to clamp or loosen flower baskets at the same time; one of each pair of mechanical arms is connected with the first linkage rod; and the other one of each pair of mechanical arms is connected with the second linkage rod, and the first linkage rod and the second linkage rod do back-to-back movement or opposite movement under the driving force of the first driving assembly. According to the grabbing device provided by the embodiment of the invention, the multiple flower baskets are grabbed at the same time through the at least two pairs of mechanical arms and the multiple pairs of clamping jaw assemblies, and the multiple flower baskets are further cleaned and dried at the same time, so that the cleaning efficiency of wafers is greatly improved.

Description

Technical Field

[0001] The present application relates to the technical field of wafer cleaning, and in particular to a gripping device for a tank-type cleaning device and a tank-type cleaning device. Background Art

[0002] Semiconductor wafer cleaning machines are roughly divided into tank-type cleaning equipment and single-wafer cleaning machines. Among them, tank-type cleaning equipment has the advantage of quantitative production compared to single-wafer cleaning machines, and the production efficiency of tank-type cleaning equipment is also the highest among current wafer cleaning machines.

[0003] In the process of cleaning wafers, the existing tank cleaning equipment needs to immerse the entire wafer basket in the cleaning tank and wait for a specific time to complete the cleaning of a certain process, and then dry the cleaned wafers. However, only the wafers in one basket can be cleaned and dried, and a large number of baskets and wafers in the baskets cannot be cleaned and dried at the same time, which reduces the cleaning efficiency of the wafers. Utility Model Content

[0004] In view of this, an embodiment of the present application provides a gripping device for a tank-type cleaning device to solve at least one problem existing in the background technology.

[0005] In a first aspect, an embodiment of the present application provides a gripping device for a tank cleaning device, the gripping device comprising:

[0006] a first drive assembly;

[0007] at least two pairs of mechanical arms, the mechanical arms being connected to the first drive assembly;

[0008] A plurality of pairs of jaw assemblies, wherein the jaw assemblies are connected to the mechanical arm, and the plurality of pairs of jaw assemblies follow the movement of the mechanical arm under the driving force of the first driving assembly to simultaneously clamp or release a flower basket, wherein the flower basket is used to hold wafers;

[0009] a first linkage rod, one of each pair of the mechanical arms being connected to the first linkage rod;

[0010] A second connecting rod, the other one in each pair of the mechanical arms is connected to the second connecting rod, the first connecting rod and the second connecting rod are both connected to the first driving assembly, and the first connecting rod and the second connecting rod move in opposite directions or towards each other under the driving force of the first driving assembly.

[0011] In combination with the first aspect of the present application, in an optional embodiment, the first driving component includes a motor, a conveyor belt and a transmission component, the conveyor belt is connected between the motor and the transmission component, the two ends of the transmission component are respectively connected to the first connecting rod and the second connecting rod, and the first connecting rod and the second connecting rod move in opposite directions or towards each other under the drive of the motor.

[0012] In conjunction with the first aspect of the present application, in an optional implementation manner, the gripping device further includes:

[0013] a first base, the motor being mounted on the first base;

[0014] The sliding assembly includes a first slide rail and a plurality of first sliders, wherein the plurality of first sliders are slidably connected to the first slide rail, the first slide rail is mounted on the first base, the first slider is connected to the robotic arm, and the robotic arm follows the first slider to perform reciprocating motion along the direction of the first slide rail under the driving force of the motor.

[0015] In a second aspect, an embodiment of the present application provides a tank-type cleaning device, including a frame, a transmission mechanism, a loading mechanism, a process unit and a unloading mechanism, wherein the transmission mechanism, the loading mechanism, the process unit and the unloading mechanism are all installed on the frame, and the transmission mechanism is used to sequentially transfer the flower basket between the loading mechanism, the process unit and the unloading mechanism;

[0016] In which, the transmission mechanism includes a second driving component, a second slider, a second slide rail and a grabbing device of the trough cleaning equipment described in any one of the first aspects, the second driving component and the second slide rail are installed on the frame, the second slider is slidably connected to the second slide rail, the grabbing device is connected to the second slider, and the grabbing device follows the second slider to make reciprocating motion along the direction of the second slide rail under the driving force of the second driving component.

[0017] In combination with the second aspect of the present application, in an optional implementation, the loading mechanism and the unloading mechanism both include an even number of workstations, and the number of the workstations corresponds to the number of the clamping jaw assemblies.

[0018] In combination with the second aspect of the present application, in an optional embodiment, the process unit includes a plurality of processing units, each of the processing units is provided with an even number of cavities, each of the cavities can accommodate and process one of the flower baskets, and the flower basket contains wafers to be processed.

[0019] In combination with the second aspect of the present application, in an optional embodiment, the process unit includes a cleaning mechanism and a drying mechanism, the cleaning mechanism is used to clean the wafers to be processed contained in the flower basket, and the drying mechanism is used to dry the flower basket and the wafers to be processed contained in the flower basket.

[0020] In conjunction with the second aspect of the present application, in an optional embodiment, the drying mechanism includes a first controller, a second controller, an air source, a first pipeline, a second pipeline, and a plurality of nozzles connected to the first pipeline and the second pipeline.

[0021] The gas source is used to provide gas, and the gas is transported through the first pipeline and the second pipeline to be ejected from the nozzle and act on the flower basket and the wafer surface. The first controller is connected to the first pipeline, and the second controller is connected to the second pipeline. The nozzles connected to the first pipeline and the second pipeline respectively spray gas towards different positions of the flower basket and the wafer surface under the action of the first controller and the second controller.

[0022] In combination with the second aspect of the present application, in an optional embodiment, a first angle is formed between a spray surface formed by the nozzle connected to the first pipeline spraying gas and an inner wall of the flower basket, and spray surfaces formed by adjacent nozzles spraying gas are parallel.

[0023] In combination with the second aspect of the present application, in an optional embodiment, the second pipeline surrounds the flower basket, and the multiple nozzles connected to the second pipeline include a side blowing nozzle, a bottom blowing nozzle and a pit blowing nozzle. The side blowing nozzle is used to blow towards the side of the flower basket, the bottom blowing nozzle is used to blow towards the bottom of the flower basket, and the pit blowing nozzle is used to blow towards the pits on the outer wall of the flower basket.

[0024] The embodiment of the present application provides a gripping device for a trough-type cleaning device, which can grasp multiple flower baskets at the same time and further clean and dry multiple flower baskets at the same time through at least two pairs of robotic arms and multiple pairs of jaw assemblies, thereby greatly improving the cleaning efficiency of wafers; in addition, the movement of at least two pairs of robotic arms is synchronized through the connection between the first connecting rod and the second connecting rod, ensuring that the flower basket is located in the middle position of the two robotic arms when grabbing the flower basket, thereby avoiding position deviation.

[0025] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0027] Figure 1 A schematic diagram of the three-dimensional structure of a grabbing device for a tank-type cleaning device provided in an embodiment of the present application;

[0028] Figure 2 for Figure 1 The enlarged view of point A in the middle;

[0029] Figure 3 A top view of a tank-type cleaning device provided in an embodiment of the present application;

[0030] Figure 4 A schematic diagram of the three-dimensional structure of a drying mechanism of a tank-type cleaning device provided in an embodiment of the present application;

[0031] Figure 5 A schematic diagram of the distribution of a first pipeline and a second pipeline of a drying mechanism of a tank-type cleaning device provided in an embodiment of the present application;

[0032] Figure 6 A schematic diagram of the spraying direction of nozzles in a first pipeline and a second pipeline in a drying mechanism of a tank-type cleaning device provided in an embodiment of the present application;

[0033] Reference numerals:

[0034] a. Flower basket;

[0035] 100, transmission mechanism; 10, grasping device; 11, first driving assembly; 111, motor; 112, conveyor belt; 113, double-headed screw; 114, screw nut; 121, first mechanical arm; 122, second mechanical arm; 123, third mechanical arm; 124, fourth mechanical arm; 14, first linkage rod; 15, second linkage rod; 16, first base; 17, sliding assembly; 171, first slide rail; 172, first slider; 18, first detection assembly; 19, second detection assembly;

[0036] 200, rack; 300, loading mechanism; 400, process unit; 401, cavity; 40, cleaning mechanism; 410, alkali cleaning unit; 420, ultrasonic cleaning unit; 50, drying mechanism; 520, first pipeline; 530, second pipeline; 541, side blowing nozzle; 542, bottom blowing nozzle; 600, unloading mechanism. DETAILED DESCRIPTION

[0037] The exemplary embodiments disclosed in the present application will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the specific embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope disclosed in the present application to those skilled in the art.

[0038] In the following description, a large number of specific details are given to provide a more thorough understanding of the present application. However, it is obvious to those skilled in the art that the present application can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present application, some technical features known in the art are not described; that is, all features of the actual embodiments are not described here, and well-known functions and structures are not described in detail.

[0039] In the drawings, the sizes of layers, regions, elements and their relative sizes may be exaggerated for clarity. Like reference numerals denote like elements throughout.

[0040] It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to other elements or layers, or there can be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there is no intervening element or layer. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present application, the first element, component, region, layer or part discussed below can be represented as the second element, component, region, layer or part. And when the second element, component, region, layer or part is discussed, it does not indicate that the present application necessarily has the first element, component, region, layer or part.

[0041] Spatially relative terms such as "under", "beneath", "below", "under", "above", "above", etc., may be used here for convenience of description to describe the relationship between an element or feature shown in the figure and other elements or features. It should be understood that in addition to the orientation shown in the figure, the spatial relationship terms are intended to also include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is turned over, then the elements or features described as "under other elements" or "under it" or "under it" will be oriented as "on" other elements or features. Therefore, the exemplary terms "under" and "under" may include both upper and lower orientations. The device can be oriented otherwise (rotated 90 degrees or other orientations) and the spatial descriptors used herein are interpreted accordingly.

[0042] The purpose of the terms used herein is only to describe specific embodiments and is not intended to be limiting of the present application. When used herein, the singular forms "one", "an" and "said / the" are also intended to include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "consisting of" and / or "comprising", when used in this specification, determine the presence of the features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.

[0043] In order to thoroughly understand the present application, detailed steps and detailed structures will be presented in the following description to illustrate the technical solution of the present application. The preferred embodiments of the present application are described in detail below, but in addition to these detailed descriptions, the present application may also have other implementation methods.

[0044] like Figure 1 and Figure 2 As shown, an embodiment of the present application provides a gripping device for a tank-type cleaning device, wherein the gripping device 10 includes a first driving assembly 11 , at least two pairs of mechanical arms, multiple pairs of jaw assemblies, a first connecting rod 14 and a second connecting rod 15 .

[0045] The robot arm is connected to the first driving assembly 11. The clamping assembly is connected to the robot arm, and the plurality of pairs of clamping assemblies follow the movement of the robot arm under the driving force of the first driving assembly 11 to simultaneously clamp or release the flower basket a, which is used to hold wafers.

[0046] One of each pair of mechanical arms is connected to the first connecting rod 14. The other of each pair of mechanical arms is connected to the second connecting rod 15. The first connecting rod 14 and the second connecting rod 15 are both connected to the first driving assembly 11. The first connecting rod 14 and the second connecting rod 15 move in opposite directions or towards each other under the driving force of the first driving assembly 11.

[0047] In the embodiment of the present application, multiple pairs of gripper assemblies are used to simultaneously grasp multiple flower baskets a for holding wafers, thereby improving the grasping efficiency of the flower baskets a and further improving the cleaning and drying efficiency of the flower baskets a. In addition, the first linkage rod 14 and the second linkage rod 15 can synchronize the movements of at least two pairs of mechanical arms, ensuring that the flower basket a is located in the middle of each pair of mechanical arms during grasping, thereby avoiding positional deviation.

[0048] In an alternative embodiment, if Figure 2 As shown, the first driving component 11 includes a motor 111, a conveyor belt 112 and a transmission component. The conveyor belt 112 is connected between the motor 111 and the transmission component. The two ends of the transmission component are respectively connected to the first connecting rod 14 and the second connecting rod 15. The first connecting rod 14 and the second connecting rod 15 move in opposite directions or towards each other under the drive of the motor 111.

[0049] That is, the motor 111 is used to drive the conveyor belt 112 to rotate, and the conveyor belt 112 is used to drive the transmission assembly to move, and further drive the first linkage rod 14 and the second linkage rod 15 to move, and the first linkage rod 14 and the second linkage rod 15 move to drive the mechanical arm to move, and the mechanical arm moves to clamp and release the flower basket A. In the embodiment of the present application, at least two pairs of mechanical arms can be driven to move synchronously by one motor 111, and multiple clamping claw assemblies can be driven to grab multiple flower baskets a. The grabbing device 10 has a simple structure and high grabbing efficiency.

[0050] In an optional embodiment, the transmission assembly includes a double-ended screw 113 and two screw nuts 114, the two screw nuts 114 are respectively mounted on both ends of the double-ended screw 113, the two screw nuts move in opposite directions as the double-ended screw rotates, and the two screw nuts 114 are respectively connected to the first connecting rod 14 and the second connecting rod 15. The first connecting rod 14 and the second connecting rod 15 move in opposite directions following the screw nuts 114 under the driving force of the motor 111.

[0051] In a specific embodiment, if Figure 1 As shown, the grasping device 10 includes two pairs of mechanical arms, including a first mechanical arm 121, a second mechanical arm 122, a third mechanical arm 123 and a fourth mechanical arm 124. The first mechanical arm 121 and the third mechanical arm 123 are both connected to the first linkage rod 14, and the second mechanical arm 122 and the fourth mechanical arm 124 are both connected to the second linkage rod 15. The first mechanical arm 121 and the second mechanical arm 122 are connected to multiple pairs of clamping claw assemblies, and of course, the third mechanical arm 123 and the fourth mechanical arm 124 are connected to multiple pairs of clamping claw assemblies. The number of clamping claw assemblies is set according to the specific situation, and the embodiment of the present application is not limited thereto.

[0052] In addition, the distance between the first robotic arm 121 and the second robotic arm 122 is set based on the size of the flower basket a, which is not limited in the embodiment of the present application. Based on the synchronization of the actions of the first robotic arm 121 and the third robotic arm 123, the actions of the second robotic arm 122 and the fourth robotic arm 124 are synchronized, thereby ensuring that the flower basket a is in the middle position when grasping the flower basket a, avoiding the position of the flower basket a from being offset, and further improving the grasping efficiency of the flower basket a.

[0053] In an alternative embodiment, if Figure 2 As shown, the gripping device 10 further includes a first base 16 and a sliding assembly 17, and the motor 111 is mounted on the first base 16. The sliding assembly 17 includes a first slide rail 171 and a plurality of first sliders 172, and the plurality of first sliders 172 are slidably connected to the first slide rail 171, the first slide rail 171 is mounted on the first base 16, and the first slider 172 is connected to the mechanical arm, and the mechanical arm follows the first slider 172 to reciprocate along the direction of the first slide rail 171 under the driving force of the motor 111.

[0054] In the embodiment of the present application, the first slide rail 171 is slidably connected to the plurality of first sliders 172 , which has a simple structure and can improve the smoothness of the movement of the robot arm and reduce the driving pressure of the motor 111 .

[0055] In an optional embodiment, the grasping device 10 further includes a first detection component 18 and a second detection component 19, wherein the first detection component 18 is connected to the clamping claw component, and the second detection component 19 is connected to the first base 16, wherein the first detection component 18 is used to detect whether the clamping claw component is clamping the flower basket a, and the second detection component 19 is used to detect the displacement of the mechanical arm. The first detection component 18 and the second detection component 19 are used to improve the grasping efficiency of the grasping device 10.

[0056] Specifically, the first detection component 18 is a photoelectric sensor, and the second detection component 19 can be a displacement sensor. Of course, the first detection component 18 and the second detection component 19 can also be other types of sensors, which are not limited in the embodiment of the present application. The embodiment of the present application also provides a tank cleaning device, such as Figure 3 As shown, it includes a frame 200, a transmission mechanism 100, a loading mechanism 300, a process unit 400 and a unloading mechanism 600. The transmission mechanism 100, the loading mechanism 300, the process unit 400 and the unloading mechanism 600 are all installed on the frame 200. The transmission mechanism 100 is used to transfer the flower basket a among the loading mechanism 300, the process unit 400 and the unloading mechanism 600 in sequence.

[0057] Among them, the transmission mechanism 100 includes a second driving component (not shown in the figure), a second slider (not shown in the figure), a second slide rail (not shown in the figure) and a grasping device 10 of the trough cleaning equipment provided by any of the above embodiments, the second driving component and the second slide rail are installed on the frame 200, the second slider is slidably connected to the second slide rail, the grasping device 10 is connected to the second slider, and the grasping device 10 follows the second slider to reciprocate along the direction of the second slide rail under the driving force of the second driving component.

[0058] In the embodiment of the present application, the grasping device 10 grasps a plurality of flower baskets a at the loading mechanism 300, and the plurality of flower baskets a are transmitted to the process unit 400 under the driving force of the second driving assembly, and the flower baskets a are cleaned and dried in the process unit 400. After the operation is completed, the plurality of flower baskets a are moved to the unloading mechanism 600 for unloading under the action of the transmission mechanism 100. The embodiment of the present application grasps a plurality of flower baskets a at the same time and cleans and dries the plurality of flower baskets a at the same time, thereby improving the cleaning efficiency of the wafer.

[0059] In an alternative embodiment, if Figure 3 As shown, both the loading mechanism 300 and the unloading mechanism 600 include an even number of workstations, and the number of the workstations corresponds to the number of the clamping jaw assemblies.

[0060] In the embodiment of the present application, one workstation corresponds to one flower basket a. When flower baskets a are placed at multiple workstations of the feeding mechanism 300, the distance between adjacent workstations corresponds to the distance between adjacent clamping jaw assemblies. The grasping device 10 grasps multiple flower baskets a at the workstations of the feeding mechanism 300 at the same time and transfers them to the process unit 400. A corresponding number of workstations are set at the unloading mechanism 600. When multiple flower baskets a are cleaned and dried in the process unit 400, the grasping device 10 grasps multiple flower baskets a at the same time and unloads them. When the number of workstations is an even number, the grasping of the grasping device 10 can be maximized, thereby improving the transportation efficiency of the flower baskets a. The flower baskets a can be moved to the workstations of the feeding mechanism 300 manually or by a transport mechanism.

[0061] It should be noted that the number of workstations provided in the embodiment of the present application may also be an odd number. When the number of workstations is an odd number, the gripping efficiency of the gripping device 10 will be reduced.

[0062] In an optional embodiment, the process unit 400 includes a plurality of processing units, each of which is provided with an even number of cavities 401 , and each cavity 401 is capable of accommodating and processing a wafer in a basket a.

[0063] In the embodiment of the present application, the gripping device 10 includes an even number of gripper assemblies, and the gripper assemblies can grip an even number of baskets a at a time. The number of gripper assemblies corresponds to the number of cavities 401 in the process unit 400, that is, the baskets a gripped by the gripping device 10 are all placed in the cavities of a certain processing unit at one time, and after the wafers in the baskets have been processed through the corresponding process, they are synchronously transferred to the next processing unit for processing, and according to this process, the wafers in the baskets go through all the process steps, so that the wafers in multiple baskets a can be cleaned and dried at the same time, thereby improving the cleaning and drying efficiency.

[0064] In an alternative embodiment, if Figure 3 As shown, the process unit 400 includes a cleaning mechanism 40 and a drying mechanism 50. The cleaning mechanism 40 is used to clean the wafers to be processed contained in the flower basket a, and the drying mechanism 50 is used to dry the flower basket a and the wafers to be processed contained in the flower basket a.

[0065] Furthermore, the cleaning mechanism 40 includes an alkaline cleaning unit 410 and an ultrasonic cleaning unit 420 . The alkaline cleaning unit 410 is used to remove large particle contaminants on the surface of the wafer, and the ultrasonic cleaning unit 420 is used to remove small particle contaminants remaining after cleaning by the alkaline cleaning unit 410 .

[0066] like Figure 3 As shown, a plurality of cavities 401 are provided in the alkaline cleaning unit 410, the ultrasonic cleaning unit 420 and the drying mechanism 50. The grabbing device 10 places the grabbed plurality of flower baskets a in the alkaline cleaning unit 410, the ultrasonic cleaning unit 420 and the drying mechanism 50 in sequence to improve the cleaning and drying efficiency.

[0067] The commonly used drying method in the prior art includes transferring the cleaned wafers into a dry basket a, then sending the basket a and the wafers into a drying mechanism 50 for drying, and finally spinning or drying the wet basket a. Obviously, the above method requires a guide operation, which requires adding an additional mechanism to the cleaning equipment, which not only increases the size of the equipment, but also reduces the equipment's processing efficiency for the wafers. If the guide operation is omitted, because there are a large number of pits on the outer wall of the basket that are prone to water accumulation, the water accumulated in these pits is not easy to be dried, so drying the outer wall of the basket a will increase the drying difficulty, increase the drying cost and also greatly reduce the drying efficiency.

[0068] In view of the above technical problems, in an optional embodiment, as Figure 4 As shown, the drying mechanism 50 provided in the embodiment of the present application includes a first controller (not shown in the figure), a second controller (not shown in the figure), an air source (not shown in the figure), a first pipeline 520, a second pipeline 530 and a plurality of nozzles connected to the first pipeline 520 and the second pipeline 530.

[0069] The gas source is used to provide gas, and the gas is transported through the first pipeline 520 and the second pipeline 530 to be ejected from the nozzle and act on the flower basket a and the wafer surface. The first controller is connected to the first pipeline 520, and the second controller is connected to the second pipeline 530. The nozzles connected to the first pipeline 520 and the second pipeline 530 respectively spray gas towards different positions of the flower basket a and the wafer surface under the action of the first controller and the second controller.

[0070] In the embodiment of the present application, the first pipeline 520 and the second pipeline 530 are connected to the first controller and the second controller respectively, and the first pipeline 520 and the second pipeline 530 are independently controlled by the first controller and the second controller without interfering with each other. As an example, according to different process parameters, the first pipeline 520 and the second pipeline 530 have different jet times under the control of the first controller and the second controller respectively. As needed, the second pipeline 530 can be supplied with gas after the first pipeline 520 is supplied with gas.

[0071] The nozzle on the first pipeline 520 is used to spray gas to dry the inner cavity of the flower basket a, the surface of the wafer, and the inner wall of the flower basket a. The nozzle on the second pipeline 530 is used to spray gas to dry the outer wall of the flower basket a and the pit structure on the outer wall of the flower basket a. The embodiment of the present application controls the first pipeline 520 and the second pipeline 530 separately to dry different positions of the flower basket a separately, avoiding the operation of the guide during drying, and eliminating the need to dry the flower basket a separately, thereby greatly improving the drying efficiency.

[0072] In an alternative embodiment, if Figure 5 and Figure 6 As shown, the second pipeline 530 surrounds the flower basket a, and the multiple nozzles connected to the second pipeline 530 include a side blowing nozzle 541, a bottom blowing nozzle 542 and a pit blowing nozzle. The side blowing nozzle 541 is used to blow toward the side of the flower basket a, the bottom blowing nozzle 542 is used to blow toward the bottom of the flower basket a, and the pit blowing nozzle is used to blow toward the pits on the outer wall of the flower basket a.

[0073] In the embodiment of the present application, the side blowing nozzle 541, the bottom blowing nozzle 542 and the pit blowing nozzle are used to blow to different positions of the flower basket a respectively. According to the different characteristics of the external structure of the flower basket, different nozzles are used in a targeted manner, and different spray angles and different spray flow rates are used to dry the various structures of the outer wall of the flower basket while saving gas usage and reducing the time required for drying. The outer wall of the flower basket a is dried, and guide operation during drying is avoided. There is no need to dry the flower basket a separately, which greatly improves the drying efficiency.

[0074] It should be noted that, depending on the different structural designs on the outer wall of the basket a, other nozzles may be connected to the second pipeline 530, which is not limited in the present embodiment. The direction and pressure of the nozzle's spray gas are set according to the specific situation, which is not limited in the present embodiment.

[0075] In an alternative embodiment, if Figure 6 As shown, a first angle is formed between a jet surface formed by jetting gas from a nozzle connected to the first pipeline 520 and the inner wall of the basket a, and jet surfaces formed by jetting gas from adjacent nozzles are parallel.

[0076] In the embodiment of the present application, the spraying surface of the nozzle is fan-shaped, and the spraying surface of the nozzle forms a first angle with the inner wall of the flower basket a. The size of the first angle is set according to the specific structure of the flower basket a, and the embodiment of the present application does not limit it. The spraying surface of the nozzle forms a first angle with the inner wall of the flower basket a, which can make the spraying surface cover the limiting groove on the flower basket a for placing the wafer, so that the limiting groove and the edge of the wafer located in the limiting groove can also be dried quickly, thereby improving the drying efficiency. In addition, the parallel spraying surfaces formed by adjacent nozzles can avoid the situation where the spraying surfaces cancel each other out, thereby further improving the drying effect. In addition, the nozzle on the first pipeline 520 sprays from top to bottom, which can make a part of the liquid attached to the surface of the wafer and the flower basket a roll down along the surface of the wafer or the inner and outer walls of the surface of the flower basket a, thereby reducing the amount of liquid that needs to be dried on the surface of the wafer and the flower basket a, thereby further improving the drying efficiency.

[0077] It should be understood that the above embodiments are exemplary and are not intended to include all possible implementations included in the claims. Various modifications and changes may be made on the basis of the above embodiments without departing from the scope of the present disclosure. Similarly, the various technical features of the above embodiments may be arbitrarily combined to form other embodiments of the present application that may not be explicitly described. Therefore, the above embodiments only express several implementations of the present application and do not limit the scope of protection of the patent of this application.

Claims

1. A grabbing device for a tank cleaning device, characterized in that: The grabbing device comprises: a first drive assembly; at least two pairs of mechanical arms, the mechanical arms being connected to the first drive assembly; A plurality of pairs of jaw assemblies, wherein the jaw assemblies are connected to the mechanical arm, and the plurality of pairs of jaw assemblies follow the movement of the mechanical arm under the driving force of the first driving assembly to simultaneously clamp or release a flower basket, wherein the flower basket is used to hold wafers; a first linkage rod, one of each pair of the mechanical arms being connected to the first linkage rod; A second connecting rod, the other one in each pair of the mechanical arms is connected to the second connecting rod, the first connecting rod and the second connecting rod are both connected to the first driving assembly, and the first connecting rod and the second connecting rod move in opposite directions or towards each other under the driving force of the first driving assembly.

2. The grabbing device of the tank cleaning equipment according to claim 1, characterized in that: The first driving assembly includes a motor, a conveyor belt and a transmission assembly. The conveyor belt is connected between the motor and the transmission assembly. The two ends of the transmission assembly are respectively connected to the first connecting rod and the second connecting rod. The first connecting rod and the second connecting rod move in opposite directions or towards each other under the drive of the motor.

3. The grabbing device of the tank cleaning equipment according to claim 2, characterized in that: The gripping device also includes: a first base, the motor being mounted on the first base; The sliding assembly includes a first slide rail and a plurality of first sliders, wherein the plurality of first sliders are slidably connected to the first slide rail, the first slide rail is mounted on the first base, the first slider is connected to the robotic arm, and the robotic arm follows the first slider to perform reciprocating motion along the direction of the first slide rail under the driving force of the motor.

4. A tank cleaning device, characterized in that: It includes a frame, a transmission mechanism, a loading mechanism, a process unit and a unloading mechanism, wherein the transmission mechanism, the loading mechanism, the process unit and the unloading mechanism are all installed on the frame, and the transmission mechanism is used to transfer the flower basket among the loading mechanism, the process unit and the unloading mechanism in sequence; Wherein, the transmission mechanism includes a second driving component, a second slider, a second slide rail and a grabbing device of the trough cleaning equipment as described in any one of claims 1 to 3, the second driving component and the second slide rail are installed on the frame, the second slider is slidably connected to the second slide rail, the grabbing device is connected to the second slider, and the grabbing device follows the second slider to make reciprocating motion along the direction of the second slide rail under the driving force of the second driving component.

5. The tank cleaning device according to claim 4, characterized in that: The loading mechanism and the unloading mechanism both include an even number of workstations, and the number of the workstations corresponds to the number of the clamping jaw assemblies.

6. The tank cleaning device according to claim 5, characterized in that: The process unit comprises a plurality of processing units, each of which is provided with an even number of cavities, and each of which is capable of accommodating and processing one flower basket, wherein the flower basket contains wafers to be processed.

7. The tank cleaning equipment according to claim 4, characterized in that: The process unit comprises a cleaning mechanism and a drying mechanism. The cleaning mechanism is used to clean the wafers to be processed contained in the flower basket, and the drying mechanism is used to dry the flower basket and the wafers to be processed contained in the flower basket.

8. The tank cleaning device according to claim 7, characterized in that: The drying mechanism includes a first controller, a second controller, an air source, a first pipeline, a second pipeline, and a plurality of nozzles connected to the first pipeline and the second pipeline. The gas source is used to provide gas, and the gas is transported through the first pipeline and the second pipeline to be ejected from the nozzle and act on the flower basket and the wafer surface. The first controller is connected to the first pipeline, and the second controller is connected to the second pipeline. The nozzles connected to the first pipeline and the second pipeline respectively spray gas towards different positions of the flower basket and the wafer surface under the action of the first controller and the second controller.

9. The tank cleaning device according to claim 8, characterized in that: A first angle is formed between a jet surface formed by the nozzles connected to the first pipeline spraying gas and the inner wall of the flower basket, and jet surfaces formed by adjacent nozzles spraying gas are parallel.

10. The tank cleaning equipment according to claim 8, characterized in that: The second pipeline surrounds the flower basket, and the multiple nozzles connected to the second pipeline include a side blowing nozzle, a bottom blowing nozzle and a pit blowing nozzle. The side blowing nozzle is used to blow toward the side of the flower basket, the bottom blowing nozzle is used to blow toward the bottom of the flower basket, and the pit blowing nozzle is used to blow toward the pits on the outer wall of the flower basket.

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