Monocrystalline silicon substrate clamp
By introducing a retractable fixture structure and rubber pad into the single crystal silicon substrate fixture, the problems of inconvenient operation and limited fixture space in the prior art are solved, and more efficient and safer clamping of single crystal silicon substrates are achieved and deal with.
Patent Information
- Application Number
- CN202421054310.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-05-15
AI Technical Summary
The existing single crystal silicon substrate fixtures are inconvenient to operate when space is limited, which can easily damage the single crystal silicon wafer, affecting working efficiency and quality.
A fixture including a base plate, an equidistant clip seat, a vertical plate, a toothed rod, a side plate, a gear disc, a clamp block and a telescopic clip bar are designed to realize a single crystal silicon substrate through the telescopic mechanism of the toothed rod and the side plate. Flexible clamping and stable limits, combined with rubber pads to improve safety.
It improves the working efficiency and stability of the fixture of the single crystal silicon substrate, simplifies operation, reduces the risk of damage, and enhances the safety and convenience of the fixture.
Smart Images
Figure CN222308625U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon, in particular to a single crystal silicon substrate fixture. Background Technique
[0002] A single crystal silicon substrate is a sheet-like component made of single crystal silicon material and is also one of the most commonly used basic components in the manufacture of integrated circuits. Single crystal silicon wafers can be used to manufacture products such as electronic keyboards, displays, and low-power chips, and can also be used to replace traditional silicon wafers. Single crystal silicon wafers are gradually developing towards large size and thinness. During the production and manufacturing of single crystal silicon, fixtures are required for movement between different processes.
[0003] In current single crystal silicon substrate fixtures, usually multiple different clamping grooves are simply arranged inside a box body to achieve the placement and storage of single crystal silicon. When adding single crystal silicon inside the box body-like structure, due to limited space, the operation is inconvenient, time-consuming, and it is easy to damage the single crystal silicon wafer, affecting the working efficiency and quality of the fixture. Content of the Utility Model
[0004] In view of the deficiencies of the prior art, the utility model provides a single crystal silicon substrate fixture, which solves the problems mentioned in the above background.
[0005] The utility model provides the following technical solution: a single crystal silicon substrate fixture, including: a bottom plate, and further including: multiple groups of clamping seats are equidistantly arranged on the surface of the bottom plate, and vertical plates are fixedly connected to both sides of the bottom plate, and side plates are telescopically arranged on both sides of the vertical plates through rack bars;
[0006] A gear disk is rotatably connected inside the vertical plate through an operating rod, and rack bars are symmetrically meshed on the outer wall of the gear disk, and the rack bars are fixedly installed on both sides of the side plate;
[0007] Multiple groups of clamping blocks are equidistantly arranged on the surface of the side plate, and clamping strips are symmetrically telescopically arranged inside the clamping blocks.
[0008] Furthermore, a through groove for accommodating the telescopic movement of the symmetric rack bars is penetrated and opened inside the vertical plate, and a gear disk is arranged in the middle of the through groove.
[0009] Furthermore, the side plate is perpendicular to the bottom plate, and the two side plates are parallel to each other.
[0010] Furthermore, the outer wall of the rack bar is slidably connected to the through groove through a sliding strip.
[0011] Furthermore, a groove is opened inside the clamping block, and the groove is arranged in a "U" shape.
[0012] Furthermore, the interior of the clamp block is connected to a movable plate via a telescopic spring, and a plurality of groups of clamp strips are fixedly connected to the surface of the movable plate, and the clamp strips are arranged to penetrate the interior of the groove of the clamp block.
[0013] Furthermore, a rubber pad is provided on the surface of the clamping strip.
[0014] Compared with the prior art, the utility model has the following beneficial effects:
[0015] In the utility model, multiple groups of clamping seats are arranged on the surface of the bottom plate, which facilitates the insertion of the single crystal silicon substrate on the surface of the bottom plate, and the upper space of the clamping seat can be flexibly moved under the telescopic effect of the side panels on both sides, avoiding the interference of the side panels on the placement of the single crystal silicon substrate, which is beneficial to improving the working efficiency of the clamp, and under the effect of multiple groups of clamping blocks arranged on the surface of the side panels, the clamping blocks can stably limit the single crystal silicon substrate through the clamping strips arranged on the inner wall for telescopic movement, thereby improving the stability of the single crystal silicon substrate inside the clamp, and the operation is simple and convenient, and the safety is strong. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 This is a schematic diagram of a single crystal silicon substrate fixture structure of the utility model;
[0017] Figure 2 This is a schematic diagram of the structure of the toothed rod and the vertical plate in the utility model;
[0018] Figure 3 This is a schematic diagram of the structure of the side plate and the clamping block in the utility model;
[0019] Figure 4 The top view of the cross-sectional structure of the clamping block in the utility model is shown;
[0020] Figure 5 It is a schematic diagram of the cross-sectional structure of the clamping block in the utility model.
[0021] In the figure: 1, bottom plate; 2, clamping seat; 3, vertical plate; 4, gear rod; 5, side plate; 6, clamping block; 7, gear plate; 8, operating lever; 9, sliding bar; 10, telescopic spring; 11, movable plate; 12, clamping bar. DETAILED DESCRIPTION
[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0023] See also Figure 1-Figure 5, a single-crystalline silicon substrate fixture, comprising: a bottom plate 1, a clamping seat 2, a vertical plate 3, a toothed rod 4, a side plate 5, a clamping block 6, a gear disc 7, an operating rod 8, a sliding bar 9, a telescopic spring 10, a movable plate 11 and a clamping strip 12, further comprising: a plurality of groups of clamping seats 2 are equidistantly arranged on the surface of the bottom plate 1, the clamping seats 2 are strip-shaped, and a slot for accommodating the gap of the single-crystalline silicon substrate is opened on the surface of the clamping seat 2, facilitating the insertion and installation of the bottom of the single-crystalline silicon substrate inside the clamping seat 2. At the same time, considering the clamping stability of the fixture for the single-crystalline silicon substrate, vertical plates 3 are fixedly connected to both sides of the bottom plate 1, the vertical plates 3 are arranged at both ends of the bottom plate 1, and side plates 5 are telescopically arranged on both sides of the vertical plates 3 through toothed rods 4. Considering the clamping effect of the side plates 5 on multiple groups of single-crystalline silicon substrates on both sides, the side plates 5 are arranged perpendicular to the bottom plate 1, and the two groups of side plates 5 are arranged in parallel, ensuring the balance of clamping the single-crystalline silicon substrate on both sides. Further, in order to realize the synchronous expansion and contraction of the two side plates 5 to clamp and limit the single-crystalline silicon substrate, a gear disc 7 is rotatably connected inside the vertical plate 3 through an operating rod 8, facilitating the user to drive the gear disc 7 to rotate outside the vertical plate 3. At the same time, toothed rods 4 are symmetrically meshed on the outer wall of the gear disc 7. Under the symmetrical meshing action of the toothed rods 4, the rotation of the gear disc 7 can realize the synchronous expansion and contraction of the upper and lower toothed rods 4, facilitating clamping or loosening the single-crystalline silicon substrate on both sides. The toothed rods 4 are fixedly installed on both sides of the side plate 5, so that the toothed rods 4 drive the two side plates 5 to move synchronously. Moreover, considering the telescopic movement effect of the toothed rods 4 inside the vertical plate 3, a through groove for accommodating the telescopic movement of the symmetrical toothed rods 4 is penetrated and opened inside the vertical plate 3, and the gear disc 7 is arranged in the middle of the through groove, facilitating the stable and balanced driving of the toothed rods 4 to move. At the same time, the outer wall of the toothed rod 4 is slidably connected with the through groove through a sliding bar 9. Through the setting of the sliding bar 9, the toothed rod 4 moves precisely inside the through groove, ensuring the precise movement of the two side plates 5, and the structure is simple, and the later maintenance cost is low;
[0024] Further, in order to realize the stable clamping and limiting of the single-crystalline silicon substrate by the side plates 5 on both sides, a plurality of groups of clamping blocks 6 are equidistantly arranged on the surface of the side plates 5, and the plurality of groups of clamping blocks 6 are arranged at the same spacing as the plurality of groups of clamping seats 2, ensuring the clamping accuracy of the single-crystalline silicon substrate. A groove is opened inside the clamping block 6, and the groove is arranged in a "U" shape, facilitating the insertion of the single-crystalline silicon substrate inside the groove. At the same time, considering the clamping of the single-crystalline silicon substrate, clamping strips 12 are symmetrically telescopically arranged inside the clamping block 6. Specifically, a movable plate 11 is connected inside the clamping block 6 through a telescopic spring 10, and a plurality of groups of clamping strips 12 are fixedly connected to the surface of the movable plate 11. The clamping strips 12 are penetrated and arranged inside the groove of the clamping block 6, so that the symmetrically arranged clamping strips 12 can clamp the single-crystalline silicon substrate on both sides inside the groove. Moreover, in order to avoid damaging the single-crystalline silicon substrate and ensure the clamping effect of the single-crystalline silicon substrate, a rubber pad is arranged on the surface of the clamping strip 12, which is beneficial to reducing the rejection rate and improving the clamping safety of the single-crystalline silicon substrate.
[0025] Working principle: When in use, the gear plate 7 is rotated by the operating rod 8, so that the gear plate 7 drives the gear rod 4 at the upper and lower ends to move, so that the gear rod 4 drives the side plates 5 on both sides to open on both sides of the vertical plate 3, so that the surface opening space of the bottom plate 1 is larger, which is convenient for the user to insert the single crystal silicon substrate inside the clamp seat 2 on the surface of the bottom plate 1. After the single crystal silicon substrate inside the clamp seat 2 is inserted, in order to improve the safety of the single crystal silicon substrate inside the fixture, the operating rod 8 is rotated in the opposite direction, so that the gear plate 7 drives the side plates 5 to shrink through the gear rod 4, so that the side plates 5 on both sides move inward, so that the side plates 5 drive the clamping block 6 to clamp the two sides of the single crystal silicon substrate, and by retracting the clamping strip 12 inside the clamping block 6, the clamping stability of the clamping block 6 and the two sides of the single crystal silicon substrate is improved, thereby improving the safety of the single crystal silicon substrate inside the fixture.
[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A single crystal silicon substrate fixture, comprising: Bottom plate (1), characterized in that it further comprises: a plurality of groups of clamping seats (2) are equidistantly arranged on the surface of the bottom plate (1), and vertical plates (3) are fixedly connected to both sides of the bottom plate (1), and side plates (5) are telescopically arranged on both sides of the vertical plate (3) through rack bars (4); A gear disk (7) is rotatably connected to the inside of the vertical plate (3) through an operating rod (8), and rack bars (4) are symmetrically engaged on the outer wall of the gear disk (7), and the rack bars (4) are fixedly installed on both sides of the side plate (5); A plurality of groups of clamping blocks (6) are equidistantly arranged on the surface of the side plate (5), and clamping strips (12) are symmetrically telescopically arranged inside the clamping blocks (6).
2. A single crystal silicon substrate fixture according to claim 1, characterized in that: A through groove for accommodating the telescopic movement of the symmetric rack bars (4) is penetrated and opened inside the vertical plate (3), and a gear disk (7) is arranged in the middle of the through groove.
3. The single crystal silicon substrate fixture according to claim 1, characterized in that: The side plate (5) is perpendicular to the bottom plate (1), and the two side plates (5) are parallel to each other.
4. A single crystal silicon substrate fixture according to claim 2, characterized in that: The outer wall of the rack bar (4) is slidably connected to the through groove through a slide bar (9).
5. The single crystal silicon substrate fixture according to claim 1, characterized in that: A groove is opened inside the clamping block (6), and the groove is arranged in a "U" - shaped structure.
6. A single crystal silicon substrate fixture according to claim 5, characterized in that: An active plate (11) is connected inside the clamping block (6) through a telescopic spring (10), and a plurality of groups of clamping strips (12) are fixedly connected to the surface of the active plate (11), and the clamping strips (12) penetrate through the groove inside the clamping block (6).
7. A single crystal silicon substrate fixture according to claim 6, characterized in that: A rubber pad is arranged on the surface of the clamping strip (12).