Photovoltaic silicon wafer accurate positioning mechanical arm based on visual identification technology
By using photoelectric probes and real-time trigger data in the robotic arm combined with preset programs, adjusting the fork arm motion path, the support position offset problem caused by disassembly and assembly operations of the traditional robotic arm is solved, and higher handling accuracy and production efficiency are achieved .
Patent Information
- Application Number
- CN202421061927.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-05-15
AI Technical Summary
The traditional data-writing robotic arms are offset by disassembly and maintenance operations during silicon wafer handling, which affects the handling accuracy and thus affects the production process.
The photovoltaic silicon wafer is accurately positioned by a photovoltaic silicon wafer based on visual recognition technology. The scale lines are detected and real-time trigger data are detected through the photoelectric probe, and the fork arm movement path is adjusted in combination with preset program data to ensure accurate positioning and stability and simplify the maintenance process.
The movement path accuracy and handling accuracy of the robot arm are improved, the error and failure rate caused by operation changes are reduced, and the production efficiency and quality are improved.
Smart Images
Figure CN222308903U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a photovoltaic silicon wafer precision positioning mechanical arm based on visual recognition technology. Background Art
[0002] Silicon wafer processing robotic arms are automated equipment specially designed to perform various precise operations during the silicon wafer processing process. Such robotic arms usually have high flexibility, precision and reliability to meet the high standards and high requirements of silicon wafer processing. Silicon wafer processing robotic arms are usually equipped with advanced control systems and sensors to achieve precise positioning and motion control. They can perform various complex operations, such as handling, placing, aligning and processing silicon wafers. Through preset programs and algorithms, the robotic arms can autonomously complete a series of operations, greatly improving production efficiency and accuracy.
[0003] At present, the design of robotic arms used for handling silicon wafers is quite precise. Their key parameters such as motion trajectory, action sequence, speed and acceleration are usually defined by pre-written data programs. However, in the production and processing of silicon wafers, the silicon wafer placement box often needs to be disassembled and assembled, and some structures such as the fork arm of the robotic arm also need to be disassembled for inspection and maintenance. These operations will inevitably change the initial data settings of the relevant items, resulting in a certain degree of deviation in the support position of the fork arm of the robotic arm when supporting and carrying the silicon wafer. This deviation will directly affect the handling accuracy of the robotic arm for the silicon wafer, which may have an adverse effect on the entire production process. Utility Model Content
[0004] Based on this, the purpose of the utility model is to provide a photovoltaic silicon wafer precise positioning robot based on visual recognition technology to solve the technical problem that the traditional data writing type robot affects the robot's handling accuracy of silicon wafers.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a photovoltaic silicon wafer precise positioning robot arm based on visual recognition technology, comprising a support column, a placement box, a fork arm and a silicon wafer, a trigger mechanism is arranged on one side of the fork arm, the trigger mechanism comprises a mounting table, a photoelectric probe is installed on one side of the mounting table, a support inner ring is arranged on the inner side of the placement box, a support plate is arranged on the inner side of the support inner ring, and a detection scale line is arranged on the surface of one side of the support plate.
[0006] By adopting the above technical solution, the original preset program control is improved to a method in which program data and real-time trigger data are coordinated, which can significantly improve the motion path accuracy of the robot fork arm. By receiving and processing the trigger data detected by the photoelectric probe in real time, the control center can more accurately grasp the relative position relationship between the fork arm and the silicon wafer, thereby more finely adjusting the motion trajectory of the fork arm to ensure that it always moves along the predetermined path.
[0007] Furthermore, the photoelectric probe is used to sense and detect scale lines, and the detection scale lines are relative to the central axis of the silicon wafer.
[0008] By adopting the above technical solution, the robotic arm can accurately identify the center axis position of the silicon wafer. By detecting the relative position relationship between the scale line and the center axis of the silicon wafer, the photoelectric probe can quickly and accurately transmit signals to the control center, providing an important basis for the precise positioning of the robotic arm.
[0009] Furthermore, the mounting platform is used to standardize the installation position of the photoelectric probe.
[0010] By adopting the above technical solution, the mounting table is used to standardize the installation position of the photoelectric probe, which can ensure the accuracy and stability of the photoelectric probe. By fixing the photoelectric probe at a specific position on the mounting table, the photoelectric probe can be correctly aligned and spaced from the detection scale line, thereby improving the sensing accuracy of the photoelectric probe to the detection scale line.
[0011] Furthermore, the photoelectric probe is electrically connected to an external power supply through a control center, and the photoelectric probe is located opposite to a front end center point of the fork arm.
[0012] By adopting the above technical solution, it is ensured that the photoelectric probe can stably receive power supply and always remain in working state, the power transmission path is simplified, and the reliability of power supply is improved, thereby ensuring the continuity and stability of the photoelectric probe during the operation of the robotic arm.
[0013] Furthermore, a plurality of the supporting inner rings are provided and are arranged linearly and equidistantly, and the supporting inner rings are used to support and store silicon wafers.
[0014] By adopting the above technical solution, the placement box can support and store multiple silicon wafers at the same time. Through the equidistantly arranged support inner rings, each silicon wafer can obtain uniform and stable support, avoiding tilting, collision or damage that may occur during transportation or storage.
[0015] Furthermore, the top of the support column is rotatably connected to a first movable arm, the top of the other end of the first movable arm is rotatably connected to a second movable arm, and the top of the other end of the second movable arm is rotatably connected to a mounting block.
[0016] By adopting the above technical solution, the first movable arm can be flexibly rotated in the horizontal direction. Then, the top of the other end of the first movable arm is connected to the second movable arm by rotation, which further increases the range of motion of the robot arm in the vertical direction. Finally, the top of the other end of the second movable arm is connected to the mounting block by rotation, so that key components such as the fork arm and the photoelectric probe can adjust their position and angle as the mounting block rotates.
[0017] Furthermore, one side of the mounting block is detachably connected to the fork arm via bolts.
[0018] By adopting the above technical solution, the maintenance and inspection process of the robot arm is simplified. When the fork arm needs to be repaired or replaced, the staff can quickly and conveniently remove it from the mounting block without disassembling the entire robot arm, thereby saving a lot of time and energy.
[0019] Furthermore, a visual recognition device is provided on the other side of the mounting block, and the visual recognition device is used to identify the number and position of the silicon wafers.
[0020] By adopting the above technical solution, the visual recognition device enables the robotic arm system to accurately identify the number and position of silicon wafers in real time. This direct visual recognition method greatly improves the speed and accuracy of obtaining silicon wafer status information, providing important data support for subsequent handling operations.
[0021] Furthermore, a plurality of negative pressure suction holes are provided on the surface of the fork arm, and the plurality of negative pressure suction holes are arranged in a rectangular array.
[0022] By adopting the above technical solution, the contact area between the fork arm and the silicon wafer is increased, thereby improving the stability and reliability of adsorption. Through the effect of negative pressure, the fork arm can more firmly adsorb the silicon wafer, effectively preventing slipping or shaking during transportation.
[0023] In summary, the utility model mainly has the following beneficial effects:
[0024] The utility model uses a trigger mechanism, combined with program data and real-time trigger data, to more accurately regulate the movement path of the fork arm of the robot arm. The program data provides a basic movement framework and a preset path, ensuring the stability and accuracy of the robot arm in routine operations. At the same time, the real-time trigger data is collected in real time by sensors such as photoelectric probes, reflecting the current state of the robot arm and its interaction with the environment. These data are used to make real-time adjustments and optimizations to the movement of the robot arm, especially in cases of fork arm disassembly and maintenance, and disassembly and assembly of placement boxes. Due to the introduction of real-time trigger data, even in these changing working environments, the support position of the fork arm for the silicon wafer can always be maintained on the central axis of the silicon wafer, thereby reducing errors and failure rates caused by operational changes and improving production efficiency and quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;
[0026] Figure 2 It is a side view structural schematic diagram of the utility model;
[0027] Figure 3 This is a schematic diagram of the cross-sectional structure of the storage box of the utility model when viewed from above;
[0028] Figure 4 For this utility model Figure 1 Schematic diagram of the structure enlarged at point A in the middle.
[0029] In the figure: 1. support column; 2. first movable arm; 3. second movable arm; 4. mounting block; 5. placement box; 6. fork arm; 7. trigger mechanism; 701. mounting table; 702. photoelectric probe; 8. silicon wafer; 9. support inner ring; 10. support plate; 11. detection scale line; 12. negative pressure suction hole; 13. visual recognition device. DETAILED DESCRIPTION
[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model.
[0031] The following describes an embodiment of the utility model based on its overall structure.
[0032] Embodiment 1:
[0033] Photovoltaic silicon wafer precision positioning robot based on visual recognition technology, such as Figure 1-Figure 4As shown, it includes a support column 1, a placement box 5, a fork arm 6 and a silicon wafer 8. A trigger mechanism 7 is arranged on one side of the fork arm 6. The trigger mechanism 7 includes a mounting platform 701. A photoelectric probe 702 is installed on one side of the mounting platform 701. A support inner ring 9 is arranged on the inner side of the placement box 5. A support plate 10 is arranged on the inner side of the support inner ring 9. A detection scale line 11 is arranged on the surface of one side of the support plate 10. The original preset program control is improved to a mode in which program data and real-time trigger data are coordinated together, which can significantly improve the motion path accuracy of the robot fork arm 6. By receiving and processing the trigger data detected by the photoelectric probe 702 in real time, the control center can more accurately grasp the relative position relationship between the fork arm 6 and the silicon wafer 8, thereby more finely adjusting the motion trajectory of the fork arm 6 to ensure that it always moves along the predetermined path. At the same time, this improvement also enables the robot arm to maintain the stability of the support position of the silicon wafer 8 when facing changes such as disassembly and maintenance of the fork arm 6 and disassembly and assembly of the placement box 5. Due to the introduction of real-time trigger data, the control center can adjust the motion strategy of the fork arm 6 in real time to adapt to changes in the external environment.
[0034] See also Figure 3 , Figure 4 The photoelectric probe 702 is used to sense the detection scale line 11. The detection scale line 11 is relative to the center axis of the silicon wafer 8, so that the robot arm can accurately identify the center axis position of the silicon wafer 8. By detecting the relative position relationship between the scale line 11 and the center axis of the silicon wafer 8, the photoelectric probe 702 can quickly and accurately transmit signals to the control center, providing an important basis for the precise positioning of the robot arm. At the same time, this setting also ensures the stability and reliability of the robot arm when transporting the silicon wafer 8. Since the photoelectric probe 702 can sense the changes in the detection scale line 11 in real time, even when the fork arm 6 is disassembled and repaired or the placement box 5 is disassembled and assembled, the robot arm can adjust its movement path according to real-time data to ensure that the fork arm 6 is always supported on the center axis position of the silicon wafer 8.
[0035] See also Figure 1 , Figure 4 The mounting platform 701 is used to standardize the mounting position of the photoelectric probe 702. The mounting platform 701 is used to standardize the mounting position of the photoelectric probe 702, which can ensure the accuracy and stability of the photoelectric probe 702. By fixing the photoelectric probe 702 at a specific position on the mounting platform 701, the photoelectric probe 702 can be correctly aligned and spaced from the detection scale line 11, thereby improving the sensing accuracy of the photoelectric probe 702 to the detection scale line 11. At the same time, the standardized mounting position also helps to reduce the shaking or deviation of the photoelectric probe 702 during the movement of the robotic arm. Since the mounting platform 701 provides stable support and positioning, the photoelectric probe 702 can better maintain the stability of its working state, thereby ensuring that the robotic arm can continuously and accurately obtain real-time trigger data when transporting the silicon wafer 8, further improving the handling accuracy and reliability of the robotic arm.
[0036] See also Figure 1 , Figure 4 The photoelectric probe 702 is electrically connected to the external power supply through the control center. The photoelectric probe 702 is relative to the front end center point of the fork arm 6, ensuring that the photoelectric probe 702 can stably receive power supply and always keep working, simplifying the power transmission path, and improving the reliability of power supply, thereby ensuring the continuity and stability of the photoelectric probe 702 during the operation of the robotic arm. At the same time, the photoelectric probe 702 is relative to the front end center point of the fork arm 6, so that the photoelectric probe 702 can more accurately sense the detection scale line 11. Since the front end center point of the fork arm 6 is the key reference point when the robotic arm transports the silicon wafer 8, aligning the photoelectric probe 702 with it can ensure that the photoelectric probe 702 is always facing the detection scale line 11 during the transportation process, thereby improving the sensing accuracy and response speed.
[0037] See also Figure 1 , Figure 3 There are multiple supporting inner rings 9, which are arranged in an equidistant linear manner. The supporting inner rings 9 are used to support and store silicon wafers 8, so that the placement box 5 can support and store multiple silicon wafers 8 at the same time. Through the equidistantly arranged supporting inner rings 9, each silicon wafer 8 can obtain uniform and stable support, avoiding tilting, collision or damage that may occur during transportation or storage. At the same time, the provision of multiple supporting inner rings 9 also improves the storage capacity and efficiency of the placement box 5. Since multiple silicon wafers 8 can be stored at the same time, the placement box 5 can achieve a higher storage density in a limited space, thereby saving storage space and improving storage efficiency.
[0038] See also Figure 1 , Figure 2 The top of the support column 1 is rotatably connected to the first movable arm 2, the top of the other end of the first movable arm 2 is rotatably connected to the second movable arm 3, and the top of the other end of the second movable arm 3 is rotatably connected to the mounting block 4, so that the first movable arm 2 can be flexibly rotated in the horizontal direction. Then, the top of the other end of the first movable arm 2 is rotatably connected to the second movable arm 3, further increasing the range of motion of the robot arm in the vertical direction. Finally, the top of the other end of the second movable arm 3 is rotatably connected to the mounting block 4, so that key components such as the fork arm 6 and the photoelectric probe 702 can adjust their positions and angles as the mounting block 4 rotates, giving the robot arm extremely high flexibility and adjustability, enabling it to adapt to various complex working environments and task requirements. At the same time, the rotatable connection of multiple movable arms also greatly expands the working range of the robot arm, enabling it to perform precise operations in three-dimensional space, thereby improving the efficiency and accuracy of transporting silicon wafers 8.
[0039] Embodiment 2:
[0040] See also Figure 1 , Figure 2 One side of the mounting block 4 is detachably connected to the fork arm 6 by bolts, which simplifies the maintenance and inspection process of the robotic arm. When the fork arm 6 needs to be repaired or replaced, the staff can quickly and conveniently remove it from the mounting block 4 without disassembling the entire robotic arm, thereby saving a lot of time and energy. At the same time, the detachable connection also makes the robotic arm more adaptable and flexible. According to different work needs and task scenarios, the staff can easily replace fork arms 6 of different types or specifications to better meet specific working environments and task requirements.
[0041] See also Figure 1 , Figure 2 A visual recognition device 13 is provided on the other side of the mounting block 4. The visual recognition device 13 is used to identify the number and position of the silicon wafers 8. The visual recognition device 13 enables the robot system to identify the number and position of the silicon wafers 8 in real time and accurately. This direct visual recognition method greatly improves the speed and accuracy of obtaining the status information of the silicon wafers 8, and provides important data support for subsequent handling operations. At the same time, the introduction of the visual recognition device 13 also enhances the intelligence and automation level of the robot system. It enables the robot to independently plan the optimal handling path and strategy based on the real-time identified number and position information of the silicon wafers 8, thereby further improving the handling efficiency and accuracy.
[0042] See also Figure 1 , Figure 2 , Figure 4 A plurality of negative pressure suction holes 12 are provided on the surface of the fork arm 6, and the plurality of negative pressure suction holes 12 are arranged in a rectangular array, which increases the contact area between the fork arm 6 and the silicon wafer 8, thereby improving the stability and reliability of adsorption. Through the action of negative pressure, the fork arm 6 can more firmly adsorb the silicon wafer 8, effectively preventing it from slipping or shaking during transportation. At the same time, the negative pressure suction holes 12 arranged in a rectangular array can also ensure the uniform distribution of adsorption force. Each negative pressure suction hole 12 can provide a certain adsorption force. Through the joint action of multiple suction holes, the fork arm 6 can achieve uniform adsorption of the silicon wafer 8, avoiding the problem of stress concentration or unstable adsorption that may be caused by single-point adsorption.
[0043] The implementation principle of the utility model is as follows: first, the movement of the robot arm's operating position is controlled by a preset program and a control center, and the fork arm 6 is gradually extended under the silicon wafer 8 until the detection scale line 11 on one side of the support plate 10 is detected by the photoelectric probe 702 on one side of the fork arm 6, indicating that the fork arm 6 is vertically opposite to the central axis of the silicon wafer 8, and at the same time, the signal is transmitted to the control center, and in conjunction with the original preset degree, the robot arm fork arm 6 is controlled to lift up to support the silicon wafer 8 on the top, and then the silicon wafer 8 is moved to the transport position. In this process, the original preset program control is improved to program data and real-time trigger data, which work together to standardize the movement path of the fork arm 6. Even if the fork arm 6 is disassembled for maintenance and the placement box 5 is disassembled and assembled, the support position of the fork arm 6 to the silicon wafer 8 is always the central axis position of the silicon wafer 8 to adapt to different working environments and task requirements.
[0044] Parts not involved in the present invention are the same as the prior art or can be implemented by using the prior art, and will not be described in detail here.
[0045] Although an embodiment of the utility model has been shown and described, this specific embodiment is only an explanation of the utility model and is not a limitation of the utility model. The specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions and variations to the embodiments without creative contribution as needed without departing from the principles and purpose of the utility model. However, as long as they are within the scope of the claims of the utility model, they are protected by patent law.
Claims
1. Photovoltaic silicon wafer precision positioning robot based on visual recognition technology, characterized by: The invention comprises a support column (1), a placement box (5), a fork arm (6) and a silicon wafer (8); a trigger mechanism (7) is arranged on one side of the fork arm (6); the trigger mechanism (7) comprises a mounting platform (701); a photoelectric probe (702) is installed on one side of the mounting platform (701); a support inner ring (9) is arranged on the inner side of the placement box (5); a support plate (10) is arranged on the inner side of the support inner ring (9); and a detection scale line (11) is arranged on one side of the surface of the support plate (10).
2. The photovoltaic silicon wafer precise positioning robot based on visual recognition technology according to claim 1, characterized in that: The photoelectric probe (702) is used to sense a detection scale line (11), and the detection scale line (11) is located opposite to the central axis of the silicon wafer (8).
3. The photovoltaic silicon wafer precise positioning robot based on visual recognition technology according to claim 1, characterized in that: The mounting platform (701) is used to standardize the mounting position of the photoelectric probe (702).
4. The photovoltaic silicon wafer precise positioning robot based on visual recognition technology according to claim 1, characterized in that: The photoelectric probe (702) is electrically connected to an external power source through a control center, and the photoelectric probe (702) is located opposite to the front end center point of the fork arm (6).
5. The photovoltaic silicon wafer precise positioning robot based on visual recognition technology according to claim 1, characterized in that: The supporting inner rings (9) are provided in plurality and are arranged linearly at equal distances. The supporting inner rings (9) are used to support and store silicon wafers (8).
6. The photovoltaic silicon wafer precise positioning robot based on visual recognition technology according to claim 1, characterized in that: The top of the support column (1) is rotatably connected to a first movable arm (2), the top of the other end of the first movable arm (2) is rotatably connected to a second movable arm (3), and the top of the other end of the second movable arm (3) is rotatably connected to a mounting block (4).
7. The photovoltaic silicon wafer precise positioning robot arm based on visual recognition technology according to claim 6, characterized in that: One side of the mounting block (4) is detachably connected to the fork arm (6) via bolts.
8. The photovoltaic silicon wafer precise positioning robot based on visual recognition technology according to claim 6, characterized in that: A visual recognition device (13) is provided on the other side of the mounting block (4), and the visual recognition device (13) is used to identify the number and position of the silicon wafers (8).
9. The photovoltaic silicon wafer precise positioning robot based on visual recognition technology according to claim 1, characterized in that: A plurality of negative pressure suction holes (12) are provided on the surface of the fork arm (6), and the plurality of negative pressure suction holes (12) are arranged in a rectangular array.