Detachable chemical vapor deposition spraying device

Abstract

The utility model discloses a detachable chemical vapor deposition spraying device which comprises a furnace cover and a sprayer, the sprayer is arranged in the middle of the interior of the furnace cover in a penetrating mode and fixedly connected with the furnace cover through screws, and the sprayer comprises a shaft sleeve, a suspension, an air cylinder A, a sleeve, a spraying pipe and an air cylinder B. The shaft sleeve is arranged in the middle of the interior of the furnace cover in a penetrating mode. The detachable chemical vapor deposition spraying device adopts an internal and external combined mounting mode, the internal sprayer can be quickly taken out from the furnace body under the driving of the external air cylinder assembly, the spraying assembly can be quickly disassembled and maintained without opening the furnace cover, the maintenance difficulty is reduced, meanwhile, the sprayer adopts a folding design, and the maintenance cost is reduced. And the shrunk spray thrower can be perfectly hidden in the shaft sleeve after being shrunk and is matched with the plug at the bottom end, so that the shrunk spray thrower does not make contact with the internal space any more, and vapor deposition reaction on the surface of the spray thrower is avoided.

Description

Technical Field

[0001] The utility model relates to the field of chemical vapor deposition spraying devices, in particular to a detachable chemical vapor deposition spraying device. Background Art

[0002] The chemical vapor deposition spray device is a device used to prepare thin film materials. It is usually composed of a gas source system, a spray head, a reaction chamber and a bottom collection device. It is widely used in materials science and industrial production. It can prepare thin film materials with specific functions and properties, such as optical films, thin film layers of electronic devices, etc.

[0003] The chemical vapor deposition spray device is technologically advanced, but it still has some problems: since the spray device is installed inside the furnace body, it is difficult to disassemble for subsequent maintenance, and the furnace cover must be opened first during disassembly, which is a cumbersome and time-consuming process; therefore, in view of the above situation, there is an urgent need to develop a detachable chemical vapor deposition spray device to overcome the shortcomings in current practical applications and meet current needs. Utility Model Content

[0004] The purpose of the utility model is to provide a detachable chemical vapor deposition spray device to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A detachable chemical vapor deposition spray device comprises a furnace cover and a spray mechanism, the spray mechanism is arranged through the middle position of the interior of the furnace cover and is fixedly connected to the furnace cover by screws, the spray mechanism comprises a shaft sleeve, a suspension, a cylinder A, a sleeve, a spray pipe and a cylinder B, the shaft sleeve is arranged through the middle position of the interior of the furnace cover and is fixedly connected to the furnace cover by screws, the suspension is vertically installed in the middle position of the top of the furnace cover, the cylinder A is vertically installed in the middle position of the suspension, the sleeve is embedded in the middle position of the interior of the sleeve and is slidably connected to the shaft sleeve, the top end of the sleeve is drivingly connected to the output shaft of the cylinder A, the bottom end of the sleeve is hinged to the middle position of the side wall of the spray pipe, the cylinder B is located between the inner wall of the sleeve and the spray pipe, and the two ends of the cylinder B are respectively hinged to the sleeve and the spray pipe, the spray mechanism adopts a lifting design, and the spray mechanism can be taken out and disassembled from the furnace without opening the furnace cover.

[0007] As a further solution of the utility model: the spray pipe also includes a plug, an end cover and a hose, the plug is nested and installed at the bottom end of the spray pipe, a plurality of equally distributed spray holes are opened on one side of the spray pipe, the end cover is nested and installed at the top end of the spray pipe, one end of the hose passes through the end cover and extends to the interior of the spray pipe, and the hose is connected and fixed to the spray pipe. The foldable spray pipe can facilitate the quick removal and disassembly of the spray mechanism.

[0008] As a further solution of the utility model: the outer diameter of the plug is equal to the inner diameter of the sleeve. After the sleeve and the spray pipe move upward driven by the cylinder A, the plug at the bottom end of the spray pipe will be embedded in the bottom end of the sleeve, and the outer diameters of the two match, thereby completely sealing the sleeve.

[0009] As a further solution of the utility model: the outer diameter of the spray pipe is smaller than the inner diameter of the sleeve, and the spray pipe can be driven by the cylinder B to be folded longitudinally into the interior of the sleeve.

[0010] Beneficial effects: This detachable chemical vapor deposition spray device adopts an internal and external combined installation method, and the internal spray mechanism can be quickly taken out of the furnace body under the drive of the external cylinder assembly. The spray assembly can be quickly disassembled and maintained without opening the furnace cover, reducing the difficulty of maintenance. At the same time, its spray mechanism adopts a folding design, which can be perfectly hidden in the shaft sleeve after shrinkage. Combined with the plug at the bottom, the shrunken spray mechanism no longer contacts the internal space, avoiding vapor deposition reaction on the surface of the spray mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a front structural schematic diagram of the utility model.

[0012] Figure 2 It is a schematic diagram of the suspension structure of the utility model.

[0013] Figure 3 It is a side longitudinal sectional view of the spray mechanism of the utility model.

[0014] In the figure: 1, furnace cover; 2, spray mechanism; 21, shaft sleeve; 22, suspension; 23, cylinder A; 24, sleeve; 25, spray pipe; 251, plug; 252, spray hole; 253, end cover; 254, hose; 26, cylinder B; DETAILED DESCRIPTION

[0015] Example

[0016] See also Figures 1 to 3In the embodiment of the utility model, a detachable chemical vapor deposition spray device includes a furnace cover 1 and a spray mechanism 2. The spray mechanism 2 is arranged in the middle position of the furnace cover 1 and is fixedly connected to the furnace cover 1 by screws. The spray mechanism 2 includes a sleeve 21, a suspension 22, a cylinder A23, a sleeve 24, a spray pipe 25 and a cylinder B26. The sleeve 21 is arranged in the middle position of the furnace cover 1 and is fixedly connected to the furnace cover 1 by screws. The suspension 22 is vertically installed at the top middle position of the furnace cover 1. The cylinder A23 is vertically installed. Installed in the middle position of the suspension 22, the sleeve 24 is embedded in the inner middle position of the sleeve 21 and is slidably connected to the sleeve 21, the top of the sleeve 24 is drivingly connected to the output shaft of the cylinder A23, the bottom end of the sleeve 24 is hinged to the middle position of the side wall of the spray pipe 25, the cylinder B26 is located between the inner wall of the sleeve 24 and the spray pipe 25, and the two ends of the cylinder B26 are respectively hinged to the sleeve 24 and the spray pipe 25. The spray mechanism 2 adopts a lifting design, and the spray mechanism 2 can be taken out and disassembled from the furnace without opening the furnace cover 1.

[0017] As a further solution of the utility model: the spray pipe 25 also includes a plug 251, an end cover 253 and a hose 254. The plug 251 is nested and installed at the bottom end of the spray pipe 25. A plurality of equidistantly distributed spray holes 252 are opened on one side of the spray pipe 25. The end cover 253 is nested and installed at the top of the spray pipe 25. One end of the hose 254 passes through the end cover 253 and extends to the interior of the spray pipe 25. The hose 254 is connected and fixed to the spray pipe 25. The foldable spray pipe 25 can facilitate the quick removal and disassembly of the spray mechanism 2.

[0018] As a further solution of the utility model: the outer diameter of the plug 251 is equal to the inner diameter of the sleeve 21. After the sleeve 24 and the spray pipe 25 move upward driven by the cylinder A23, the plug 251 at the bottom end of the spray pipe 25 will be embedded in the bottom end of the sleeve 21, and the outer diameters of the two match, thereby completely closing the sleeve 21.

[0019] As a further solution of the utility model: the outer diameter of the spray pipe 25 is smaller than the inner diameter of the sleeve 24, and the spray pipe 25 can be longitudinally folded into the inside of the sleeve 24 under the drive of the cylinder B26.

[0020] The working principle of the utility model is: when the detachable chemical vapor deposition spray device is in use, the cylinder A23 is started, and the cylinder A drives the sleeve 24 to move downward along the inner wall of the sleeve 21 through the cylinder shaft. When it moves to the bottom position, the cylinder B26 is started. After the cylinder B26 is started, it will drive the spray pipe 26 to rotate around the hinged part with the sleeve 24 to a horizontal state. At this time, the chemical reagent is guided to the spray pipe 25 through the hose 254, and finally sprayed on the surface of the workpiece to be processed in the furnace body through the spray hole 252. When the spraying is completed, the cylinder B26 is contracted and drives the spray pipe 25 to fold into the sleeve 24, and then the sleeve 24 and the spray pipe 25 are driven to move upward and reset through the cylinder A23. When it is reset, the plug 251 at the bottom end of the spray pipe 25 will close the bottom end of the sleeve 24, so that the furnace body is always in a closed state.

[0021] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A detachable chemical vapor deposition spray device, characterized in that: The invention comprises a furnace cover (1) and a spray mechanism (2), wherein the spray mechanism (2) is arranged through the middle position of the interior of the furnace cover (1) and is fixedly connected to the furnace cover (1) by screws, and the spray mechanism (2) comprises a shaft sleeve (21), a suspension (22), a cylinder A (23), a sleeve (24), a spray pipe (25) and a cylinder B (26), wherein the shaft sleeve (21) is arranged through the middle position of the interior of the furnace cover (1) and is fixedly connected to the furnace cover (1) by screws, and the suspension (22) is vertically installed at the middle position of the top of the furnace cover (1). The cylinder A (23) is vertically installed at the middle position of the suspension (22); the sleeve (24) is embedded in the middle position of the shaft sleeve (21) and is slidably connected to the shaft sleeve (21); the top end of the sleeve (24) is drivingly connected to the output shaft of the cylinder A (23); the bottom end of the sleeve (24) is hinged to the middle position of the side wall of the spray pipe (25); the cylinder B (26) is located between the inner wall of the sleeve (24) and the spray pipe (25), and the two ends of the cylinder B (26) are respectively hinged to the sleeve (24) and the spray pipe (25).

2. The detachable chemical vapor deposition spray device according to claim 1, characterized in that: The spray pipe (25) further comprises a plug (251), an end cover (253) and a hose (254); the plug (251) is nested and installed at the bottom end of the spray pipe (25); one side of the spray pipe (25) is provided with a plurality of spray holes (252) distributed at equal intervals; the end cover (253) is nested and installed at the top end of the spray pipe (25); one end of the hose (254) passes through the end cover (253) and extends to the inside of the spray pipe (25); and the hose (254) is connected to and fixed to the spray pipe (25).

3. The detachable chemical vapor deposition spray device according to claim 2, characterized in that: The outer diameter of the plug (251) is equal to the inner diameter of the shaft sleeve (21).

4. The detachable chemical vapor deposition spray device according to claim 3, characterized in that: The outer diameter of the spray pipe (25) is smaller than the inner diameter of the sleeve (24).

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