Safe storage steel cylinder for fluorine-containing compound gas

Abstract

The utility model relates to the field of electronic special gas transportation, in particular to a safe storage steel cylinder for fluorine-containing compound gas. The safety storage steel cylinder for the fluorine-containing compound gas comprises steel cylinders, at least two bases, rotating pieces and connecting mechanisms, through the arranged connecting mechanisms, when the steel cylinders are loaded on a vehicle, one end of each connecting mechanism is connected to the rotating piece of one steel cylinder, and the other end of each connecting mechanism is connected to the rotating piece of the adjacent steel cylinder; according to the utility model, more than two steel cylinders are supported mutually, so that the steel cylinders loaded on a vehicle form a whole during transportation, the stability is better, and the steel cylinders are not easy to topple over. And when the two steel cylinders are connected, the rotating piece can rotate at a preset angle, so that the butt joint positions of the two steel cylinders do not need to be precisely butted, and the butt joint can be completed within a relative butt joint angle.

Description

Technical Field

[0001] The present application relates to the field of electronic special gas transportation, and in particular to a safe storage cylinder for fluorine-containing compound gas. Background Art

[0002] In industry, products that are gaseous at room temperature and pressure are collectively referred to as industrial gas products. According to different preparation methods and application fields, industrial gases can be divided into bulk gases and special gases. Bulk gases mainly include air separation gases such as oxygen, nitrogen, argon, and synthetic gases such as acetylene and carbon dioxide. Special gases mainly include electronic gases, high-purity gases and standard gases. Electronic special gases (electronic special gases) are high-tech, high-value-added products and are widely used in the semiconductor and microelectronics industries. Electronic special gases mainly include hydrides, fluorides, fluoroalkanes, metal organic compounds, etc. They are important materials indispensable for the production of electronic industries such as ultra-large-scale integrated circuits, flat-panel display devices, compound semiconductor devices, solar cells, optical fibers, etc. They are widely used in thin film manufacturing, etching, doping, vapor deposition, diffusion and other processes in the production of integrated circuits and display panels.

[0003] The transportation of electronic special gases is usually stored in steel cylinders and then transported by vehicles. When loading, multiple cylinders are placed in rows. As the vehicle accelerates and decelerates while driving, the cylinders may shake or even fall over, causing damage or falling of the cylinders. Utility Model Content

[0004] The present application provides a safe storage cylinder for fluorine-containing compound gas, which can support the cylinders on a vehicle as a whole and prevent a single cylinder from tipping over.

[0005] An embodiment of the present application provides a safe storage cylinder for fluorine-containing compound gas, comprising:

[0006] Cylinders;

[0007] At least two bases are bonded to the steel cylinder, and at least one of the bases is provided on two opposite sides of the steel cylinder;

[0008] A rotating member, rotatably connected to the base;

[0009] The connecting mechanism has one end detachably connected to the rotating member and the other end oppositely connected to the rotating member on another steel cylinder.

[0010] In the safe storage cylinder for fluorine-containing compound gases provided in the present application, the base includes a bottom plate and a seat body, the bottom plate is bonded to the side wall of the cylinder by an adhesive, the seat body is connected to the bottom plate, and the shape of the bottom plate fits the side wall of the cylinder.

[0011] In the safe storage cylinder for fluorine-containing compound gas provided in the present application, the area a of the bottom plate and the area b of the seat body satisfy the following relationship:

[0012] a>b, where b is equal to 1 and a is greater than or equal to 6.

[0013] The safe storage cylinder for fluorine-containing compound gases provided in the present application also includes a connecting belt, one end of which extends to the base plate, and the other end extends to the seat body, and the connecting belt is crimped onto the base plate and the base plate respectively by fastening bolts, and the connecting belt includes multiple ones that are evenly distributed around the seat body.

[0014] In the safe storage cylinder for fluorine-containing compound gases provided in the present application, the rotating part includes a rotating ball and a rotating seat, the rotating ball is rotatably connected to a ball groove opened on the base, and the opening of the ball groove is smaller than the diameter of the rotating ball, and the rotating seat is connected to the rotating ball and is located outside the ball groove.

[0015] In the safe storage cylinder for fluorine-containing compound gases provided in the present application, the connecting mechanism includes a first connecting rod, a connecting sleeve, a second connecting rod, and a rotating shaft. The end of the first connecting rod is provided with a thread, the first connecting rod is threadedly connected to the rotating member, the rotating shaft is connected to the other end opposite to the first connecting rod, one end of the connecting sleeve is sleeved outside the first connecting rod, the rotating shaft is passed through a rotating hole opened on the connecting sleeve, and the two are rotatably connected, the rotation direction of the connecting sleeve and the first connecting rod is a vertical direction, and the second connecting rod is inserted into the connecting sleeve.

[0016] In the safe storage cylinder for fluorine-containing compound gas provided in the present application, the connection mechanism further includes a support frame connected to the bottom of the first connecting rod.

[0017] In the safe storage cylinder for fluorine-containing compound gas provided in the present application, threads are provided at both ends of the rotating shaft and detachable nuts are provided. The rotating shaft is also inserted into the movable hole on the first connecting rod, and the nut is located outside the connecting sleeve.

[0018] The safe storage cylinder for fluorine-containing compound gas provided by the present application mainly includes a cylinder, at least two bases, a rotating part, and a connecting mechanism. Through the provided connecting mechanism, when a vehicle is loaded with cylinders, one end of the connecting mechanism is connected to the rotating part of a cylinder, and the other end is connected to the rotating part of an adjacent cylinder, so that two or more cylinders can support each other. During transportation, the cylinders loaded on the vehicle form a whole, which has better stability and is not easy to tip over. When connecting two cylinders, the rotating part can be rotated at a predetermined angle, so that the docking position of the two cylinders does not need to be precisely docked, and the docking can be completed within a relative docking angle.

[0019] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 It is a schematic diagram of the overall structure of a safe storage cylinder for fluorine-containing compound gas provided in an embodiment of the present application;

[0022] Figure 2 This is a schematic diagram of an embodiment of a safe storage cylinder for fluorine-containing compound gas provided in an embodiment of the present application;

[0023] Figure 3 This is a schematic diagram of another embodiment of a safe storage cylinder for fluorine-containing compound gases provided in an embodiment of the present application.

[0024] Description of main components and symbols:

[0025] 10. Steel cylinder;

[0026] 20, base; 201, seat body; 202, bottom plate; 203, connecting belt;

[0027] 30. Rotating member; 301. Rotating seat; 302. Ball groove; 303. Rotating ball;

[0028] 40. Connecting mechanism; 401. First connecting rod; 402. Connecting sleeve; 403. Second connecting rod; 404. Rotating shaft; 405. Support frame. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] In conjunction with the accompanying drawings, some embodiments of the present application are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0031] It should be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the application. As used in this application specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0032] It should be understood that, in order to facilitate the clear description of the technical solutions of the embodiments of the present application, in the embodiments of the present application, the words "first", "second", etc. are used to distinguish the same items or similar items with substantially the same functions and effects. For example, the first groove and the second groove are only used to distinguish different grooves, and their order is not limited. Those skilled in the art can understand that the words "first", "second", etc. do not limit the quantity and execution order, and the words "first", "second", etc. do not necessarily limit them to be different.

[0033] It should be further understood that the term “and / or” used in the specification and appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0034] The quality of electronic special gases mainly depends on their purity and cleanliness. Generally speaking, the purity requirement for electronic special gases reaches 5N-6N (N refers to the number of 9s in the purity percentage, for example, 5.7N means 99.9997%, and 6N means 99.9999%), and the metal elements are also required to be purified to levels 10-9 to 10-12. Every increase in purity by one N, and every order of magnitude decrease in the concentration of particles and metal impurities, will bring about a significant increase in process complexity and difficulty. Once the purity or cleanliness of electronic special gases does not meet the standards, the quality of downstream products will be unsatisfactory at best, and the entire product line will be spread and polluted at worst, causing all products to be scrapped.

[0035] Chlorine trifluoride is a corrosive, colorless gas with a sweet odor that is highly irritating even in low concentrations. It is a strong oxidizer and can ignite many organic compounds and many metals at high temperatures. It reacts violently with water and is transported as a liquefied gas under its own pressure.

[0036] In the semiconductor industry, chlorine trifluoride is used to clean chemical vapor deposition chambers. It has the advantage that it can be used to remove semiconductor material from the chamber walls without having to disassemble the chamber. Unlike most alternatives, it does not require the use of plasma activation, the heat of the chamber is sufficient to cause it to decompose and react with the semiconductor material.

[0037] It can be loaded in containers such as steel, aluminum, and copper, because it can form a stable fluoride film on the contact surface of these metals, isolating the metals, just like the dense aluminum oxide on the surface of aluminum, protecting the aluminum from further oxidation. Therefore, the surface of the cylinder can be treated with fluoride gas before loading chlorine trifluoride.

[0038] Chlorine trifluoride introduction

[0039] Chinese name: Chlorine trifluoride

[0040] English nameCh l or i ne tr ifl uor i de

[0041] Other name: Chlorine trifluoride

[0042] English alias CHLORI NE TRI FLUORIDE

[0043] Trifle or i de ch l or i ne

[0044] Ch l or i ne tr ifl uor i de

[0045] CAS 7990-91-2

[0046] Chemical formula: ClF3

[0047] Molecular weight: 92.45

[0048] Chlorine trifluoride (ClF3) is a very strong oxidizing agent and fluorinating agent. It can react with most organic and inorganic materials and even plastics, and can cause many materials to burn without contact with fire. These reactions are usually violent and can even explode in some cases.

[0049] It reacts with some metals to form chlorides and fluorides, with phosphorus to form phosphorus trichloride and phosphorus pentafluoride, and with sulfur to form sulfur dichloride and sulfur tetrafluoride. C l F3 also reacts violently with water, hydrolyzing to produce toxic substances such as hydrogen fluoride. H2S will explode when mixed with C l F3 at room temperature.

[0050] The ability to exceed the oxidizing power of oxygen results in corrosiveness to oxygen-containing materials that are normally considered non-flammable.

[0051] In an industrial accident, a 900 kg leak of Cl F3 burned itself through 30 cm of concrete and 90 cm of gravel. Any equipment that comes into contact with chlorine trifluoride must be carefully selected and cleaned, as any contamination can ignite the contact material.

[0052] Chlorine trifluoride is usually packed in metal containers. This is almost the only way to temporarily control it. As long as it is pre-treated to form a metal fluoride protective layer, it can remain stable in containers made of some common metals.

[0053] Because of the active chemical properties of chlorine trifluoride, any equipment that comes into contact with it must be carefully cleaned and airtight. It will immediately react with the inner wall of the container to form fluoride that no longer participates in the reaction, so we can store it conveniently.

[0054] refer to Figure 1-Figure 3 The present application provides a safe storage cylinder 10 for fluorine-containing compound gas, comprising:

[0055] A steel cylinder 10; at least two bases 20 bonded to the steel cylinder 10, with at least one base 20 on opposite sides of the steel cylinder 10; a rotating member 30 rotatably connected to the base 20; a connecting mechanism 40, one end of which is detachably connected to the rotating member 30 and the other end of which is connected to the rotating member 30 on another steel cylinder 10.

[0056] When loading the steel cylinders 10 on the vehicle, one end of the connecting mechanism 40 is connected to the rotating member 30 of one steel cylinder 10, and the other end is connected to the rotating member 30 of the adjacent steel cylinder 10, so that two or more steel cylinders 10 can support each other. During transportation, the steel cylinders 10 loaded on the vehicle form a whole, which has better stability and is not easy to tip over. When connecting two steel cylinders 10, the rotating member 30 can be rotated at a predetermined angle, so that the docking position of the two steel cylinders 10 does not need to be accurately docked, and the docking can be completed within a relative docking angle.

[0057] In this embodiment, there can be four bases 20 and rotating parts 30, and two connecting mechanisms 40, which are distributed around the cylinder 10 and spaced ninety degrees apart. In this way, the cylinder 10 can be connected both horizontally and vertically, and the stability is better.

[0058] In some embodiments, the base 20 includes a bottom plate 202 and a seat body 201 . The bottom plate 202 is bonded to the side wall of the cylinder 10 by an adhesive. The seat body 201 is connected to the bottom plate 202 . The shape of the bottom plate 202 fits the side wall of the cylinder 10 .

[0059] The area a of the bottom plate 202 and the area b of the base body 201 satisfy the following relationship:

[0060] a>b, where b is equal to 1 and a is greater than or equal to 6. Through these settings, the bottom plate 202 is bonded to the side wall of the steel cylinder 10 by an adhesive, which does not cause damage to the steel cylinder 10. At the same time, since the area of ​​the bottom plate 202 is much larger than the area of ​​the seat body 201, the connection effect provided by the bottom plate 202 is also good, which is sufficient to transmit force to the surrounding steel cylinder 10 and provide support. It should be noted that the force of tipping the steel cylinder 10 is much smaller than the weight of the steel cylinder 10 itself.

[0061] In some embodiments, a connecting belt 203 is further included, one end of the connecting belt 203 extends to the bottom plate 202, and the other end extends to the seat body 201, and the connecting belt 203 is respectively pressed on the bottom plate 202 and the bottom plate 202 by fastening bolts, and the connecting belt 203 includes a plurality of connecting belts 203, which are evenly distributed around the seat body 201. The connecting belt 203 is provided to evenly distribute the tension on the bottom plate 202.

[0062] The rotating member 30 includes a rotating ball 303 and a rotating seat 301. The rotating ball 303 is rotatably connected to a ball groove 302 provided on the base 20, and the opening of the ball groove 302 is smaller than the diameter of the rotating ball 303. The rotating seat 301 is connected to the rotating ball 303 and is located outside the ball groove 302. The combination of the rotating ball 303 and the rotating seat 301 allows the rotating seat 301 to move within a moving range, and the moving range is a circle.

[0063] In some embodiments, the connection mechanism 40 includes a first connection rod 401, a connection sleeve 402, a second connection rod 403, and a rotating shaft 404. The end of the first connection rod 401 is provided with a thread, the first connection rod 401 is threadedly connected to the rotating member 30, the rotating shaft 404 is connected to the other end opposite to the first connection rod 401, one end of the connection sleeve 402 is sleeved outside the first connection rod 401, the rotating shaft 404 is passed through the rotating hole opened on the connection sleeve 402, and the two are rotatably connected, the rotation direction of the connection sleeve 402 and the first connection rod 401 is the vertical direction, and the second connection rod 403 is plugged into the connection sleeve 402. The second connection rod 403 is used to be detachably connected to the rotating member 30 of another cylinder 10.

[0064] The first connecting rod 401 and the connecting sleeve 402 are movable, and one end of the connecting sleeve 402 is sleeved outside the first connecting rod 401, that is, part of one end of the connecting sleeve 402 is sleeved with the first connecting rod 401. After the first connecting rod 401 is rotated relative to the connecting sleeve 402 by a predetermined angle, for example 30 degrees, through the rotating shaft 404, it will be blocked by the inner wall of the connecting sleeve 402. Such an arrangement allows a small shaking of the cylinder 10, and the force of the small shaking will not act on other cylinders 10, which reduces the wear of the connecting structure.

[0065] The connection mechanism 40 further includes a support frame 405 connected to the bottom of the first connection rod 401 .

[0066] Both ends of the rotating shaft 404 are provided with threads and detachable nuts. The rotating shaft 404 is also inserted into the movable hole on the first connecting rod 401 , and the nut is located outside the connecting sleeve 402 .

[0067] The detachable rotating shaft 404 is provided to facilitate the disassembly of the first connecting rod 401 and the connecting sleeve 402 and facilitate assembly. Other disassembly methods may also be adopted, such as the detachable rotating member 30, the detachable seat body 201 and the bottom plate 202, which can realize the separation between the two cylinders 10.

[0068] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A safe storage cylinder for fluorine-containing compound gas, characterized in that: include: Cylinders; At least two bases are bonded to the steel cylinder, and at least one of the bases is provided on two opposite sides of the steel cylinder; A rotating member, rotatably connected to the base; The connecting mechanism has one end detachably connected to the rotating member and the other end oppositely connected to the rotating member on another steel cylinder.

2. The safe storage cylinder for fluorine-containing compound gas according to claim 1, characterized in that: The base comprises a bottom plate and a seat body, the bottom plate is bonded to the side wall of the steel cylinder by an adhesive, the seat body is connected to the bottom plate, and the shape of the bottom plate fits the side wall of the steel cylinder.

3. The safe storage cylinder for fluorine-containing compound gas according to claim 2, characterized in that: The area a of the bottom plate and the area b of the seat body satisfy the following relationship: a>b, where b is equal to 1 and a is greater than or equal to 6.

4. The safe storage cylinder for fluorine-containing compound gas according to claim 3, characterized in that: It also includes a connecting belt, one end of which extends to the base plate, and the other end extends to the seat body, and the connecting belt is respectively crimped on the base plate and the base plate through fastening bolts, and the connecting belt includes multiple ones, which are evenly distributed around the seat body.

5. The safe storage cylinder for fluorine-containing compound gas according to claim 1, characterized in that: The rotating member includes a rotating ball and a rotating seat. The rotating ball is rotatably connected to a ball groove opened on the base, and the opening of the ball groove is smaller than the diameter of the rotating ball. The rotating seat is connected to the rotating ball and is located outside the ball groove.

6. The safe storage cylinder for fluorine-containing compound gas according to claim 1, characterized in that: The connecting mechanism includes a first connecting rod, a connecting sleeve, a second connecting rod, and a rotating shaft. The end of the first connecting rod is provided with a thread, the first connecting rod is threadedly connected to the rotating member, the rotating shaft is connected to the other end opposite to the first connecting rod, one end of the connecting sleeve is sleeved outside the first connecting rod, the rotating shaft is passed through a rotating hole opened on the connecting sleeve, and the two are rotatably connected, the rotation direction of the connecting sleeve and the first connecting rod is a vertical direction, and the second connecting rod is inserted into the connecting sleeve.

7. The safe storage cylinder for fluorine-containing compound gas according to claim 6, characterized in that: The connecting mechanism also includes a supporting frame connected to the bottom of the first connecting rod.

8. The safe storage cylinder for fluorine-containing compound gas according to claim 6, characterized in that: Both ends of the rotating shaft are provided with threads and detachable nuts. The rotating shaft is also inserted into the movable hole on the first connecting rod, and the nut is located outside the connecting sleeve.

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