Heat insulation bag and furnace door structure

Abstract

The utility model provides a heat insulation bag and a furnace door structure, particularly relates to the field of photovoltaic and semiconductor manufacturing, and aims to solve the problems that a heat insulation material is difficult to place in a traditional heat insulation bag, and an integrated structure is high in processing difficulty and high in use cost. The heat insulation bag is applied to the reaction furnace, the reaction furnace comprises a furnace body and a furnace door, and the heat insulation bag is arranged on the side, close to the furnace body, of the furnace door and configured to block heat radiation of the furnace body to the furnace door; the heat insulation bag comprises a cavity and a cover plate which are detachably connected, the cavity comprises an opening, and the cover plate covers the cavity to seal the opening; wherein a containing space is formed after the cavity and the cover plate are closed in a covering mode, and the containing space is configured to contain heat insulation materials. When the heat insulation bag is used, the cavity and the cover plate can be combined through simple assembly, heat insulation materials are more convenient to place, and therefore the problem that the heat insulation materials are difficult to place in a traditional heat insulation bag is solved. In addition, the heat insulation bag can be independently processed or replace the cavity and the cover plate, so that the processing technology difficulty is reduced.

Description

Technical Field

[0001] The present application relates to the fields of photovoltaic and semiconductor manufacturing, and in particular to a heat insulation bag and a furnace door structure. Background Art

[0002] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Semiconductor and photovoltaic materials usually need to be chemically treated before they can be applied to products. The processing of semiconductor or photovoltaic materials is usually achieved by feeding the sheet materials into the furnace to react under certain temperature and pressure conditions. Therefore, after the sheet materials are processed, the temperature of the boat out of the furnace is relatively high, and the heat in the furnace during processing is likely to cause burns to the operator.

[0003] In order to reduce the risk of burns to operators, an insulation bag is usually used to isolate the heat in the furnace and the heat of the boat to ensure the safety of the operators. However, the traditional insulation bag is usually an integrated structure, with small holes reserved for placing insulation materials, and the insulation materials are filled into the insulation bag through the small holes to achieve the insulation effect. However, since the traditional insulation bag is an integrated structure, it is usually difficult to place insulation materials, and the integrated structure is difficult to process. Utility Model Content

[0004] In view of this, the embodiments of the present application provide an insulation bag and a furnace door structure, which solve the problems of difficulty in placing insulation materials in traditional insulation bags and difficulty in processing integrated structures.

[0005] In a first aspect, an embodiment of the present application provides an insulation bag, which is applied to a reaction furnace, wherein the reaction furnace comprises a furnace body and a furnace door, wherein the insulation bag is arranged on a side of the furnace door close to the furnace body, and is configured to block heat radiation from the furnace body to the furnace door; wherein the insulation bag comprises: a detachably connected cavity and a cover plate, wherein the cavity comprises an opening, and the cover plate covers the cavity to close the opening; wherein a receiving space is formed when the cavity and the cover plate are covered, and the receiving space is configured to receive insulation material.

[0006] In one embodiment, an opening is formed at the edge of the cavity, the edge of the cavity includes a through hole, and the cover plate is embedded in the opening; wherein, the insulation package further includes: a first connecting piece, which is inserted into the through hole and abuts against the outer surface of the cover plate, wherein the outer surface of the cover plate is a surface located outside the accommodating space.

[0007] In one embodiment, the furnace door is connected to the paddle, and the paddle extends from the inner wall of the furnace door toward the furnace body; wherein the cavity includes an avoidance groove, and the avoidance groove is configured to accommodate the paddle.

[0008] In one embodiment, the heat insulation pack further comprises an abutment block, which is disposed in the avoidance groove, with one side of the abutment block in contact with the avoidance groove and the other side in contact with the paddle.

[0009] In one embodiment, there are multiple abutment blocks, and the multiple abutment blocks are arranged at intervals.

[0010] In one embodiment, the abutment block is detachably connected to the avoidance groove.

[0011] In one embodiment, the cavity includes a bottom plate and side plates that are detachably connected, and the side plates are arranged around the edge of the bottom plate to form a cavity with an opening.

[0012] In a second aspect, an embodiment of the present application provides a furnace door structure, which is applied to a reaction furnace, wherein the reaction furnace includes a furnace body, wherein the furnace door structure includes: a furnace door, which is configured to cooperate with the furnace body to form a processing chamber; and the insulation bag mentioned in the first aspect above, which is arranged on a side of the furnace door close to the furnace body and is configured to block the heat radiation of the furnace body to the furnace door.

[0013] In one embodiment, the furnace door structure further includes a heat insulation sheet, which is arranged on a side of the heat insulation bag away from the furnace door.

[0014] In one embodiment, the furnace door structure also includes: a paddle, connected to the furnace door, and extending from the inner wall of the furnace door toward the furnace body; wherein the thermal insulation sheet includes an avoidance gap, and the avoidance gap is configured to accommodate the paddle; wherein the paddle includes a limiting protrusion, and the limiting protrusion is configured to limit the movement of the thermal insulation sheet in the extension direction of the paddle.

[0015] The heat insulation bag provided in the embodiment of the present application is applied to a reactor, and the reactor includes a furnace body and a furnace door. The heat insulation bag is arranged on the side of the furnace door close to the furnace body, and is configured to block the heat radiation of the furnace body to the furnace door. The heat insulation bag includes a detachably connected cavity and a cover plate, and the cavity includes an opening, and the cover plate covers the cavity to close the opening; wherein, the cavity and the cover plate are covered to form a storage space, and the storage space is configured to accommodate heat insulation materials. The heat insulation bag provided in the embodiment of the present application can be used to realize the combination of the cavity and the cover plate through simple assembly, and it is more convenient to place the heat insulation material. In addition, during the use of the heat insulation bag, if the cavity or the cover plate is damaged, the cavity or the cover plate can be replaced separately, thereby reducing the use cost of the heat insulation bag. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a schematic structural diagram of a thermal insulation bag provided in one embodiment of the present application.

[0017] Figure 2a Shown Figure 1 Exploded view of the insulation pack shown.

[0018] Figure 2b Shown Figure 2a A partial enlarged schematic diagram of the insulation pack in area A is shown.

[0019] Figure 3Shown is a schematic structural diagram of a thermal insulation bag provided in another embodiment.

[0020] Figure 4 Shown Figure 3 The schematic diagram of the insulation pack shown is a partial enlargement of area B.

[0021] Figure 5 Shown is a schematic structural diagram of a thermal insulation bag provided in another embodiment.

[0022] Figure 6 Shown Figure 5 The schematic diagram of the insulation pack shown is a partial enlargement of the C area.

[0023] Figure 7 Shown is a schematic structural diagram of a cavity provided in one embodiment of the present application.

[0024] Figure 8 Shown is a structural schematic diagram of a furnace door structure provided in one embodiment of the present application.

[0025] Fig. 9 Shown is a structural schematic diagram of a furnace door structure provided in another embodiment of the present application.

[0026] Fig.10 Shown Fig. 9 The shown schematic diagram is a partial enlargement of the furnace door structure in area D.

[0027] Marking Description:

[0028] 100, insulation bag; 110, cavity; 120, cover plate; 111, through hole; 130, first connecting member; 112, avoidance groove; 140, abutment block; 113, bottom plate; 114, side plate; 200, furnace door structure; 210, furnace door; 220, insulation sheet; 300, paddle; 310, limiting protrusion. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] Combine the following Figures 1 to 7 The structure of the thermal insulation bag provided in this application is briefly introduced.

[0031] The thermal insulation bag provided in the present application is applied to a reaction furnace, which includes a furnace body and a furnace door. The thermal insulation bag is arranged on a side of the furnace door close to the furnace body and is configured to block heat radiation from the furnace body to the furnace door. Figure 1The figure is a schematic diagram of the structure of a heat insulation bag provided by an embodiment of the present application. Figure 1 As shown, an insulation bag 100 provided in one embodiment of the present application includes a cavity 110 and a cover plate 120, and the cavity 110 and the cover plate 120 are detachably connected, for example, by a slot connection, a slot or a protrusion is provided on the cavity 110, and correspondingly, a protrusion structure or a slot structure corresponding to the slot or protrusion on the cavity 110 is provided on the cover plate 120. It should be understood that the detachable connection between the cavity 110 and the cover plate 120 can also include a nut, a latch, etc., and the connection method can achieve the detachability between the cavity 110 and the cover plate 120. The embodiment of the present application does not further limit the specific detachable method. The cavity 110 includes an opening, and the cover plate 120 covers the cavity 110 to close the opening; after the cavity 110 and the cover plate 120 are covered, a storage space is formed, and the storage space is configured to accommodate thermal insulation materials. The thermal insulation material includes high-temperature cotton or other high-temperature resistant materials. The material of the insulation bag 100 includes quartz. It should be understood that the thermal insulation material and the material of the thermal insulation bag 100 can be selected according to demand, and have the characteristics of high temperature resistance, slow heat transfer, and good thermal insulation effect, and can meet the requirements of blocking the heat radiation of the furnace body to the furnace door. The embodiment of the present application does not further limit the material of the thermal insulation material and the thermal insulation bag 100.

[0032] The cavity 110 and the cover plate 120 of the insulation bag 100 provided in the embodiment of the present application can be detachably connected, and the insulation bag 100 can be disassembled. When in use, the cavity 110 and the cover plate 120 can be combined through simple assembly, and the placement of insulation materials is more convenient. During the use of the insulation bag 100, if the cavity 110 or the cover plate 120 is damaged, the cavity 110 or the cover plate 120 can be replaced separately, thereby reducing the use cost of the insulation bag 100. In addition, since the cavity 110 and the cover plate 120 of the insulation bag 100 are detachably connected, the cavity 110 and the cover plate 120 can be processed separately during the processing stage, which is simpler than the traditional insulation bag processing technology. The insulation bag provided in the embodiment of the present application reduces the processing cost of the insulation bag.

[0033] Figure 2a Shown Figure 1 An exploded view of insulation pack 100 is shown. Figure 2b Shown Figure 2a The enlarged schematic diagram of the insulation package in area A is shown in FIG. Figure 2a and Figure 2bAs shown, the heat insulation bag 100 provided in the embodiment of the present application has an opening formed at the edge of the heat cavity 110, and the edge of the cavity 110 includes a through hole 111, and the cover plate 120 can be embedded in the opening; wherein, the heat insulation bag 100 also includes: a first connecting member 130, which is inserted into the through hole 111 and abuts against the outer surface of the cover plate 120, wherein the outer surface of the cover plate 120 is a surface located outside the accommodation space. Exemplarily, the first connecting member 130 is a limit pin, and the cavity 110 and the cover plate 120 are connected by the limit pin, and the limit pin is locked by other structures such as a pin retaining ring. Since the cavity 110 and the cover plate 120 are connected by the limit pin, the stability of the connection between the cavity 110 and the cover plate 120 can be guaranteed. The first connecting member 130 can also be a bolt, and correspondingly, the through hole 111 has a built-in thread, which cooperates with the bolt to realize the detachable connection between the cavity 110 and the cover plate 120. It should be understood that the first connecting member 130 can also be other structures, which can be selected according to needs, as long as it can achieve a detachable connection between the cavity 110 and the cover plate 120. The embodiment of the present application does not further limit the specific structure of the first connecting member 130.

[0034] The thermal insulation bag 100 provided in the embodiment of the present application is connected via a first connecting member 130, and the first connecting member 130 can realize a detachable connection between the cavity 110 and the cover plate 120. During use, the first connecting member 130 can be simply and efficiently assembled. When the thermal insulation material needs to be replaced or added, the thermal insulation material can be quickly added by disassembling and installing the first connecting member 130. The thermal insulation bag 100 provided in the embodiment of the present application includes the first connecting member 130, and therefore, the combination of the thermal insulation bag 100 can be realized more conveniently and quickly, and the convenience of adding the thermal insulation material is ensured.

[0035] In one embodiment of the present application, the furnace door of the reaction furnace is connected to the paddle, and the paddle extends from the inner wall of the furnace door toward the furnace body. Figure 2a As shown, the cavity 110 of the insulation bag 100 provided in the embodiment of the present application includes an avoidance groove 112, and the avoidance groove 112 is configured to accommodate the paddle. The avoidance groove 112 of the insulation bag 100 can accommodate the paddle, so that the insulation bag 100 can be placed on the paddle, and the purpose of blocking the heat radiation of the furnace body to the furnace door can be achieved. The size of the avoidance groove 112 matches the size of the paddle, so that the insulation bag 100 can be stably attached to the paddle, ensuring the stability of the insulation bag 100 during use.

[0036] The cavity 110 of the heat insulation pack 100 provided in the embodiment of the present application includes an avoidance groove 112, which is configured to accommodate the paddle, so that the heat insulation pack 100 can be placed on the paddle and the purpose of blocking the heat radiation of the furnace body to the furnace door is achieved. In addition, since the size of the avoidance groove 112 matches the size of the paddle, the stability of the heat insulation pack 100 during use is guaranteed.

[0037] Figure 3 FIG. 1 is a schematic diagram of the structure of a heat insulation bag provided by another embodiment. Figure 1 Based on the embodiment shown, Figure 3 The embodiment shown is described below in detail. Figure 3 The embodiment shown and Figure 1 The differences and similarities of the illustrated embodiments are not described in detail.

[0038] Figure 3 FIG. 1 is a schematic structural diagram of another thermal insulation bag provided by another embodiment. Figure 4 Shown Figure 3 The enlarged schematic diagram of the insulation package in area B is shown in FIG. Figure 3 and Figure 4 As shown, in one embodiment of the present application, the heat insulation pack 100 further includes an abutment block 140, which is disposed in the avoidance groove 112, and one side of the abutment block 140 contacts the avoidance groove 112, and the other side contacts the paddle. Exemplarily, one side of the abutment block 140 contacts the upper end surface of the paddle, which can reduce the contact area between the paddle and the heat insulation pack 100, and avoid the heat insulation pack 100 being difficult to separate from the paddle after use due to an excessively large contact area. Exemplarily, the abutment block 140 and the avoidance groove 112 (and / or the cavity 110) can be separated. During the processing stage, the abutment block 140 and the avoidance groove 112 (and / or the cavity 110) can be processed separately and then connected as a whole by welding, bonding, etc. It should be understood that the abutment block 140 and the avoidance groove 112 (and / or the cavity 110) can be processed as a whole according to the needs. The abutment block 140 and the avoidance groove 112 (and / or the cavity 110) are a whole. When the abutment block 140 and the avoidance groove 112 (and / or the cavity 110) are a whole, the strength of the overall structure of the insulation bag 100 can be increased. In addition, the integrated processing of the abutment block 140 and the avoidance groove 112 (and / or the cavity 110) reduces the welding, bonding and other processes during the subsequent assembly and installation, saves the process flow, and simplifies the processing technology of the insulation bag 100.

[0039] The heat insulation pack 100 provided in the embodiment of the present application further includes a resistance block 140, which is disposed in the avoidance groove 112, and one side of the resistance block 140 contacts the avoidance groove 112, and the other side contacts the paddle. One side of the resistance block 140 contacts the upper end surface of the paddle, which can reduce the contact area between the paddle and the heat insulation pack 100, avoid the problem that the heat insulation pack is difficult to separate from the paddle after use due to the large contact area, and reduce the problem of damage to the paddle or the heat insulation pack 100 due to the difficulty in separating the heat insulation pack 100 from the paddle.

[0040] Figure 5 The figure shows a schematic diagram of the structure of a heat insulation bag provided by another embodiment. Figure 3 Based on the embodiment shown, Figure 5 The embodiment shown is described below in detail. Figure 5 The embodiment shown and Figure 3 The differences and similarities of the illustrated embodiments are not described in detail.

[0041] Figure 5 FIG. 1 is a schematic structural diagram of another thermal insulation bag provided by another embodiment. Figure 6 Shown Figure 5 The heat insulation package is shown in the enlarged schematic diagram of the C area. Figure 5 and Figure 6 In the insulation pack 100 provided in one embodiment of the present disclosure, the number of abutment blocks 140 is 2, and the two abutment blocks 140 are spaced apart. For example, when the number of abutment blocks 140 is plural, the size of the abutment blocks 140 is adaptively adjusted according to the size of the avoidance groove 112, so as to achieve the spaced arrangement of the plurality of abutment blocks 140. For example, the plurality of abutment blocks 140 can be processed separately from the cavity 110 during the processing stage, or can be processed as an integrated whole, and the processing method can be selected according to the process conditions and process requirements. For example, the distance at which the plurality of abutment blocks 140 are spaced apart can be selected according to the number of abutment blocks 140 or the use requirements, thereby further reducing the contact area between the paddle and the abutment block 140, and making it easier to separate the paddle from the insulation pack 100.

[0042] The insulation pack 100 provided in the embodiment of the present application has a plurality of resistance blocks 140, which can further reduce the contact area between the paddle and the resistance blocks 140, thereby further reducing the possibility of difficulty in separating the paddle and the resistance blocks 140, and further reducing the probability of damage to the insulation pack 100.

[0043] In one embodiment, the abutment block 140 is detachably connected to the avoidance groove 112. Exemplarily, the abutment block 140 is detachably connected to the avoidance groove 112 by means of screws, slots, etc. When the abutment block 140 is damaged, it can be replaced separately, thereby reducing the use cost of the insulation bag 100. In addition, the detachable connection between the abutment block 140 and the cavity 110 can reduce the difficulty of processing during the processing stage. Exemplarily, when the abutment block 140 is connected to the avoidance groove 112 by screws and slots, corresponding structures are set at corresponding positions of the abutment block 140 and the avoidance groove 112, such as slots, protrusions, threads, screws and other structures, so as to achieve the detachable connection between the abutment block 140 and the avoidance groove 112.

[0044] The abutment block 140 of the heat insulation pack 100 provided in the embodiment of the present application is detachably connected to the avoidance groove 112. When the abutment block 140 is damaged, it can be replaced separately, thereby reducing the use cost of the heat insulation pack 100. In addition, during the processing stage, the abutment block 140 can be processed separately, thereby reducing the difficulty of the processing technology.

[0045] Figure 7 FIG. 1 is a schematic diagram of the structure of a cavity provided in an embodiment of the present application. Figure 7 As shown, the cavity 110 provided in an embodiment of the present application includes a bottom plate 113 and a side plate 114 that are detachably connected, and the side plate 114 is arranged around the edge of the bottom plate 113 to form a cavity 110 with an opening. Exemplarily, during the processing stage, the side plate 114 can be split into multiple plates, processed separately, and then welded, bonded, etc. to form the side plate 114. The side plate 114 can also be processed as a whole, which can be selected according to demand and process requirements. The embodiment of the present application does not further limit the processing method of the side plate 114. In addition, since the bottom plate 113 and the side plate 114 are detachably connected, the bottom plate 113 and the side plate 114 are processed separately during the processing stage, and have a corresponding structure at the detachable connection position to achieve the detachable connection between the bottom plate 113 and the side plate 114. When the bottom plate 113 or the side plate 114 is damaged, it can be replaced separately to reduce the use cost of the insulation bag 100.

[0046] The cavity 110 of the heat insulation bag 100 provided in the embodiment of the present application includes a detachably connected bottom plate 113 and a side plate 114. When the bottom plate 113 or the side plate 114 is damaged, it can be replaced separately, thereby reducing the use cost of the heat insulation bag 100. In addition, the bottom plate 113 or the side plate 114 can be processed separately, thereby reducing the processing difficulty of the cavity 110 and simplifying the process of the cavity 110.

[0047] Combine the following Figures 8 to 10 A brief introduction is given to the furnace door structure provided in the embodiment of the present application.

[0048] An embodiment of the present application provides a furnace door structure, which is applied to a reaction furnace. The reaction furnace includes a furnace body. Figure 8 FIG. 1 is a schematic diagram of a furnace door structure provided by an embodiment of the present application. Figure 8 As shown, the furnace door structure 200 provided in one embodiment of the present application includes a furnace door 210, which is configured to cooperate with a furnace body (not shown in the figure) to form a processing chamber; and a heat insulation bag 100, which is arranged on the side of the furnace door 210 close to the furnace body and is configured to block the heat radiation of the furnace body to the furnace door 210. Exemplarily, since the furnace door structure 200 includes the heat insulation bag 100, the heat insulation bag 100 of the furnace door structure 200 can be disassembled and connected, and the heat insulation bag 100 can be simply assembled when in use, which is more convenient to use. In addition, the heat insulation bag 100 is arranged on the side of the furnace door 210 close to the furnace body. Optionally, the opening of the cover plate 120 of the heat insulation bag 100 is arranged facing the furnace door 210. Therefore, if the heat insulation material in the heat insulation bag 100 overflows from the opening, the furnace door 210 can block the heat insulation material to prevent the heat insulation material from affecting other structures in the furnace body.

[0049] The furnace door structure 200 and the furnace door 210 provided in the embodiment of the present application are configured to cooperate with the furnace body to form a processing chamber; the heat insulation bag 100 is arranged on the side of the furnace door 210 close to the furnace body, and is configured to block the heat radiation of the furnace body to the furnace door 210. The use of the heat insulation bag 100 can block the heat radiation of the furnace body to the furnace door 210, and the heat insulation bag 100 can be simply assembled into a whole, so that the use of the furnace door structure 200 is more convenient.

[0050] Fig. 9 The figure shows a schematic diagram of a furnace door structure provided by another embodiment of the present application. Figure 8 Based on the embodiment shown, Fig. 9 The embodiment shown is described below in detail. Fig. 9 The embodiment shown and Figure 8 The differences and similarities of the illustrated embodiments are not described in detail.

[0051] like Fig. 9 As shown, another furnace door structure 200 provided in another embodiment of the present application also includes a heat insulation sheet 220, and the heat insulation sheet 220 is arranged on the side of the heat insulation bag 100 away from the furnace door 210. For example, the heat insulation sheet 200 and the heat insulation bag 100 can both achieve a heat insulation effect, reduce the heat diffused to the position of the furnace door 210, thereby reducing the temperature of the furnace door 210, thereby reducing the occurrence of scalding of the staff. For example, when the heat insulation bag 100 fails due to overflow of the heat insulation material or other reasons, the heat insulation sheet 220 can be used as a heat insulation structure to achieve the purpose of reducing the temperature of the furnace door 210, thereby reducing the staff from being scalded by heat during operation, and achieving the purpose of protecting the operator. For example, the material of the heat insulation sheet 220 and the material of the heat insulation bag 100 are both high temperature resistant materials. In the embodiment of the present application, the number of the heat insulation sheet 220 and the heat insulation bag 100 can be one or more respectively, and the number can be selected according to the needs.

[0052] The furnace door structure 200 provided in the embodiment of the present application further includes a heat insulation sheet 220. The heat insulation sheet 220 and the heat insulation bag 100 can both achieve a heat insulation effect to reduce the occurrence of scalding of workers. Therefore, the furnace door structure 200 provided in the embodiment of the present application can ensure a heat insulation effect to avoid scalding of workers when the heat insulation bag 100 or the heat insulation sheet 220 fails.

[0053] In one embodiment, if Fig. 9 As shown, the furnace door structure 200 further includes: a paddle 300, which is connected to the furnace door 210 and extends from the inner wall of the furnace door 210 toward the furnace body. The heat insulation sheet 220 includes an avoidance gap, which is configured to accommodate the paddle. Fig.10 Shown Fig. 9 The enlarged schematic diagram of the furnace door structure in the D area is shown in FIG. Fig.10As shown, the paddle 300 includes a limiting protrusion 310, and the limiting protrusion 310 is configured to limit the movement of the heat insulating sheet 220 in the extension direction of the paddle 300. For example, the position of the limiting protrusion 310 is set on the paddle 300 according to the demand, and the position of the limiting protrusion 310 is determined according to the size, thickness and number of the heat insulating sheet 220. The position of the limiting protrusion 310 can also be positioned at the position of the heat insulating sheet 220 through the adjustment structure, so as to achieve the clamping of the heat insulating sheet 220, adapt to the number and thickness of different heat insulating sheets 220, and reduce the use cost of the furnace door structure 200. For example, the position of the limiting protrusion 310 on the paddle can be matched with an adjustable structure, and the adjustment structure is set at the position corresponding to the paddle and the limiting protrusion, for example, the paddle 300 is provided with an adjustment through hole, and the limiting protrusion 310 is provided with a bolt, and the bolt passes through the adjustment through hole and cooperates with the nut to achieve the purpose of adjusting the position of the limiting protrusion 310 on the paddle 300. It should be understood that when the limiting protrusion 310 can be adjusted on the paddle 300, it can be achieved through other adjustment methods, as long as the purpose of adjusting the limiting protrusion 310 on the paddle 300 is met, and the embodiment of the present application does not further limit the specific method of adjusting the limiting protrusion 310 on the paddle 300. In addition, the heat insulation sheet 220 includes an avoidance notch, which is configured to accommodate the paddle, and the size of the avoidance notch matches the size of the paddle, ensuring that the heat insulation sheet 220 can be stably set on the paddle 300 and that the heat insulation sheet 220 can achieve its function of heat insulation effect.

[0054] The furnace door structure 200 provided in the embodiment of the present application can limit the position of the heat insulation sheet 220 through the limiting protrusion 310, limit the movement of the heat insulation sheet 220 in the extension direction of the paddle 300, and avoid the influence of the movement of the heat insulation sheet 220 on the workpiece in the extension direction of the paddle 300. In addition, the heat insulation sheet 220 includes an avoidance notch to ensure that the heat insulation sheet 220 is set on the paddle 300, and ensure that the heat insulation sheet 220 can achieve its function of heat insulation effect.

[0055] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0056] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0057] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0058] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0059] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A thermal insulation bag, characterized in that: Applied to a reaction furnace, the reaction furnace comprises a furnace body and a furnace door, the heat insulation bag is arranged on a side of the furnace door close to the furnace body, and is configured to block the heat radiation from the furnace body to the furnace door; Wherein, the thermal insulation bag comprises: A cavity and a cover plate that are detachably connected, wherein the cavity comprises an opening, and the cover plate is engaged with the cavity to close the opening; The cavity and the cover plate are covered to form a receiving space, and the receiving space is configured to receive the heat insulating material.

2. The thermal insulation bag according to claim 1, characterized in that: The edge of the cavity forms the opening, the edge of the cavity includes a through hole, and the cover plate is embedded in the opening; Wherein, the thermal insulation bag also includes: The first connecting member is inserted into the through hole and abuts against the outer surface of the cover plate, wherein the outer surface of the cover plate is a surface located outside the accommodating space.

3. The thermal insulation bag according to claim 1, characterized in that: The furnace door is connected to a paddle, and the paddle extends from the inner wall of the furnace door toward the furnace body; Wherein, the cavity includes an avoidance groove, and the avoidance groove is configured to accommodate the paddle.

4. The thermal insulation bag according to claim 3, characterized in that: It also includes an abutment block, which is arranged in the avoidance groove, with one side of the abutment block in contact with the avoidance groove and the other side in contact with the paddle.

5. The thermal insulation bag according to claim 4, characterized in that: There are multiple abutment blocks, and the multiple abutment blocks are arranged at intervals.

6. The thermal insulation bag according to claim 4, characterized in that: The abutment block is detachably connected to the avoidance groove.

7. The thermal insulation bag according to any one of claims 1 to 6, characterized in that: The cavity comprises a bottom plate and side plates which are detachably connected, and the side plates are arranged around the edge of the bottom plate to form the cavity with the opening.

8. A furnace door structure, characterized in that: Applied to a reaction furnace, the reaction furnace comprises a furnace body, wherein the furnace door structure comprises: a furnace door configured to cooperate with the furnace body to form a processing chamber; The thermal insulation bag as described in any one of claims 1 to 7 above, wherein the thermal insulation bag is arranged on a side of the furnace door facing the furnace body, and is configured to block heat radiation from the furnace body to the furnace door.

9. The furnace door structure according to claim 8, characterized in that: Also includes: A heat insulation sheet is arranged on a side of the heat insulation bag away from the furnace door.

10. The furnace door structure according to claim 9, characterized in that: Also includes: A paddle connected to the furnace door and extending from the inner wall of the furnace door toward the furnace body; wherein the heat insulation sheet comprises an avoidance notch, and the avoidance notch is configured to accommodate the paddle; Wherein, the paddle includes a limiting protrusion, and the limiting protrusion is configured to limit the movement of the heat insulation sheet in the extension direction of the paddle.

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