Semiconductor wafer conveying device

Abstract

The utility model belongs to the field of semiconductor production, and particularly relates to a semiconductor wafer conveying device, which comprises a closed conveying cavity, a front door and a rear door which are movably arranged are arranged on the side wall of the conveying cavity, the front door and the rear door are respectively connected with a door driving unit, a conveying arm used for transferring wafers is arranged in the conveying cavity, and the conveying arm is connected with the front door and the rear door. A suction cup is installed at the movable end of the conveying arm and communicated with a hydrogen source, a hydrogen concentration detector is installed in the conveying cavity, and the door driving unit and the conveying arm are connected with a control device. According to the utility model, the product quality of wafer production can be improved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor production, and in particular relates to a semiconductor wafer conveying device. Background Art

[0002] In the semiconductor processing technology, wafers (including substrates, etc.) need to be sent into or taken out of the reaction chamber. The traditional method is to use a vacuum suction cup or a vacuum generator. The disadvantages are that they are all contact-type, which can easily damage the substrate or wafer surface. Secondly, due to the use of a micro-angle suction method, mechanical dislocation and mechanical movement accidents are prone to occur.

[0003] The industry has also proposed the use of Bernoulli suction cups. When using Bernoulli suction cups to absorb and transfer wafers, the principle of Bernoulli suction cups is to use vacuum blowing rather than vacuum suction. When compressed air (CDA) is blown toward the wafer, it quickly diffuses radially from the center of the disc so that the airflow on the upper part of the wafer is much higher than that on the lower part, and the wafer is sucked at the same time. According to Bernoulli's inference, the flow rate increases and the pressure decreases. At this time, the air pressure at the bottom of the wafer is greater than the air pressure on the upper part, so the suction cup can be adsorbed without squeezing the silicon wafer to achieve the purpose of grasping. In this way, there is a gas layer between the wafer and the Bernoulli suction cup, and the wafer does not directly contact the Bernoulli suction cup. In actual use, nitrogen or compressed air is used as the actuating gas. However, nitrogen or nitrogen or oxygen in compressed air will undergo nitridation and oxidation reactions in the reaction chamber, which will cause pollution, affect the quality of the product, or require the addition of a cleaning process for the reaction chamber, which is not conducive to reducing production costs. Utility Model Content

[0004] The purpose of the utility model is to provide a semiconductor wafer conveying device to solve the above-mentioned problem and to improve the product quality of wafer production.

[0005] To achieve the above purpose, the utility model provides the following solutions:

[0006] A semiconductor wafer conveying device comprises a sealed transmission chamber, wherein the side walls of the transmission chamber are provided with a movably arranged front door and a rear door, wherein the front door and the rear door are respectively connected to a door drive unit, a transmission arm for transferring wafers is provided in the transmission chamber, a suction cup is installed at the movable end of the transmission arm, and the suction cup is connected to a hydrogen gas source, a hydrogen concentration detector is installed in the transmission chamber, and the door drive unit and the transmission arm are respectively connected to a control device.

[0007] Preferably, the transmission chamber is connected to an air extraction device.

[0008] Preferably, another hydrogen concentration detector is installed outside the transmission cavity.

[0009] Preferably, the suction cup is a Bernoulli suction cup.

[0010] Preferably, the transmission arm is a robotic arm, and the robotic arm is connected to the control device.

[0011] Preferably, an alarm is installed outside the transmission cavity, and the alarm is connected to the control device.

[0012] Compared with the prior art, the utility model has the following advantages and technical effects:

[0013] Hydrogen is used as a power source, and a hydrogen concentration detector is set in the transmission chamber to detect the concentration of hydrogen inside the transmission chamber. Only when the concentration of hydrogen inside the transmission chamber is lower than the set value, the front door and the rear door of the transmission chamber can be opened so that the transmission arm can perform the set function. In addition, if the hydrogen concentration detector detects that the concentration of hydrogen inside the transmission chamber is greater than the second preset value, the operation will be stopped and an alarm will be sounded to avoid accidents.

[0014] In this way, using hydrogen as a power source can avoid the problem of pollution caused by nitridation and oxidation reactions in the reaction chamber when using nitrogen or compressed air as an actuating gas, which is more conducive to improving product quality and shortening the process flow and processing time. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the implementation or the prior art description. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0016] The structures, proportions, sizes, etc. illustrated in this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with the technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantial technical significance. Any structural modification, change in proportion or adjustment of size shall still fall within the scope of the technical contents disclosed in the present invention without affecting the effects and purposes that can be achieved by the present invention.

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the functional module composition of the utility model.

[0019] Figure numerals: 1. transmission chamber; 2. front door; 3. rear door; 4. transmission arm; 5. suction cup; 6. hydrogen gas source; 7. hydrogen concentration detector. DETAILED DESCRIPTION

[0020] The following is a specific embodiment of the present invention. People familiar with the technology can easily understand the other advantages and functions of the present invention from the contents disclosed in this specification. Obviously, the described embodiment is a part of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] Reference Figure 1-Figure 2 As shown, the utility model provides a semiconductor wafer conveying device, including a sealed transmission chamber 1, the side walls of the transmission chamber 1 are provided with a movably arranged front door 2 and a rear door 3, wherein the front door 2 and the rear door 3 are respectively connected to a door driving unit, a transmission arm 4 for transferring wafers is provided in the transmission chamber 1, a suction cup 5 is installed at the movable end of the transmission arm 4, the suction cup 5 is connected to a hydrogen gas source 6, a hydrogen concentration detector 7 is installed in the transmission chamber 1, and the driving unit and the transmission arm 4 are respectively connected to a control device.

[0022] According to a further optimized solution, the transmission chamber 1 is connected to a vacuum device.

[0023] According to a further optimized solution, the suction cup 5 is a Bernoulli suction cup.

[0024] According to a further optimization scheme, the transmission arm 4 is a robotic arm, which is connected to a control device, and a hydrogen gas source 6 and the transmission arm 4 are arranged in a gas transmission control unit (such as a mass flow control device) to control the gas flow rate, and the gas transmission control unit is connected to the control device.

[0025] To further optimize the solution, an alarm is installed on the outside of the transmission cavity 1, and the alarm is connected to the control device.

[0026] The hydrogen concentration detector 7 is used to detect the concentration of hydrogen inside the transmission chamber 1. Only when the concentration of hydrogen inside the transmission chamber 1 is lower than the set value, the front door 2 and the rear door 3 of the transmission chamber 1 can be opened (not opened at the same time, which door is opened according to the function to be realized), and used to take out or put in the wafer from the reaction chamber (not shown), or take out or put in the wafer from the loading chamber (not shown). The door drive unit of the front door 2 and the rear door 3 can be driven by a cylinder in combination with a valve. This driving method is a prior art and will not be repeated here. After the output signal of the hydrogen concentration detector 7 is judged by the control device, the control device can use a host computer or a single-chip microcomputer to determine whether to output a control signal to the door drive unit of the front door 2 and the rear door 3 to open the corresponding door according to the comparison result with the set value. In addition, if the hydrogen concentration detector 7 detects that the concentration of hydrogen inside the transmission chamber 1 is greater than the second preset value, the operation is stopped and an alarm is sounded to avoid accidents. At this time, the exhaust device can be started to extract the gas in the transmission chamber 1 to reduce the hydrogen concentration.

[0027] Another optimization scheme is that another hydrogen concentration detector 7 is also installed outside the transmission chamber 1. When the external hydrogen concentration detected is greater than a set value, an alarm is sounded. At this time, there should be hydrogen leakage in the transmission chamber 1 and the gas connector. At this time, an alarm should be sounded so that relevant risk avoidance measures can be taken.

[0028] Compared with the prior art, the utility model has the following advantages and technical effects:

[0029] Hydrogen is used as a power source, and a hydrogen concentration detector 7 is set in the transmission chamber to detect the concentration of hydrogen inside the transmission chamber 1. Only when the concentration of hydrogen inside the transmission chamber 1 is lower than the set value, the front door 2 and the rear door 3 of the transmission chamber can be opened so that the transmission arm 4 can perform the set function. In addition, if the hydrogen concentration detector 7 detects that the concentration of hydrogen inside the transmission chamber 1 is greater than the second preset value, the operation is stopped and an alarm is sounded to avoid accidents. In this way, using hydrogen as a power source can avoid the problem of pollution caused by nitridation and oxidation reactions in the reaction chamber when using nitrogen or compressed air as an actuating gas, which is more conducive to improving product quality and shortening process flow and processing time.

[0030] The embodiments described above are only descriptions of the preferred methods of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should fall within the protection scope determined by the claims of the present invention.

Claims

1. A semiconductor wafer conveying device, characterized in that: The invention comprises a sealed transmission chamber (1), wherein the side walls of the transmission chamber (1) are provided with a front door (2) and a rear door (3) which are movably arranged, wherein the front door (2) and the rear door (3) are respectively connected to a door drive unit, wherein a transmission arm (4) for transferring wafers is arranged in the transmission chamber (1), a suction cup (5) is installed at the movable end of the transmission arm (4), and the suction cup (5) is connected to a hydrogen gas source (6), wherein a hydrogen concentration detector (7) is installed in the transmission chamber (1), and the door drive unit and the transmission arm (4) are respectively connected to a control device.

2. A semiconductor wafer conveying device according to claim 1, characterized in that: The transmission chamber (1) is connected to an air extraction device.

3. The semiconductor wafer conveying device according to claim 1, characterized in that: Another hydrogen concentration detector (7) is installed outside the transmission chamber (1).

4. The semiconductor wafer conveying device according to claim 1, characterized in that: The suction cup (5) is a Bernoulli suction cup.

5. The semiconductor wafer conveying device according to claim 1, characterized in that: The transmission arm (4) is a mechanical arm, and the mechanical arm is connected to the control device.

6. The semiconductor wafer conveying device according to claim 1, characterized in that: An alarm is installed outside the transmission chamber (1), and the alarm is connected to the control device.

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