Linear ultrasonic motor vibrator module and driving module

Abstract

The utility model discloses a linear ultrasonic motor vibrator module and a driving module, and the linear ultrasonic motor vibrator module comprises a vibrator which is annular, and the outer annular surface of the vibrator is provided with two connecting ends which are oppositely arranged; the piezoelectric ceramic group is connected with the connecting ends, and the piezoelectric ceramic group transmits vibration to the vibrator through the two connecting ends; the fixed end is used for clamping the piezoelectric ceramic group and the vibrator; wherein each connecting end comprises a first surface and a second surface which are opposite to each other, and fixing structures for fixing the linear ultrasonic motor vibrator module are arranged on the first surfaces and the second surfaces of the two connecting ends. The fixing structure of the vibrator module is matched with the fixing device to form the driving module, so that the vibrator module of the linear ultrasonic motor is fixed and limited, and the stability and efficiency of the vibrator module are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of motors, and more specifically, to a linear ultrasonic motor vibrator module and a driving module. Background Art

[0002] Ultrasonic motors are drivers that use mechanical vibrations in the ultrasonic frequency domain as a driving source. They use electrical energy to generate ultrasonic vibrations to obtain driving force, and convert power into the movement of the rotor or slider through friction coupling. Compared with traditional motors, ultrasonic motors have small inertia, fast response, good controllability, are not affected by magnetic fields, and do not generate magnetic fields themselves, and have high positioning accuracy. Ultrasonic motors also have the characteristics of light weight, simple structure, high efficiency, low noise, low speed and high torque, and can directly drive loads. Since the load is driven directly, the vibration noise, gap, low efficiency, and difficult control problems caused by the use of gear speed change are avoided. Therefore, ultrasonic motors are a new automatic control actuator and a new transmission mode. They are a breakthrough and a powerful supplement to the traditional electromagnetic drive principle.

[0003] The linear ultrasonic motor is a widely used linear ultrasonic motor. The linear ultrasonic motor uses the inverse piezoelectric effect of piezoelectric materials to excite its micro-vibration at the resonant frequency of the elastic metal matrix, and then transmits the micro-vibration to the mover through friction coupling, thereby causing the mover to move linearly. The advantages of the linear ultrasonic motor over the electromagnetic motor are: the linear ultrasonic motor does not require electromagnetic windings, so the structure is compact and easy to miniaturize; the vibrator module of the linear ultrasonic motor transfers kinetic energy to the mover through friction, so it has strong anti-electromagnetic interference ability and has power-off self-locking ability.

[0004] The vibrator module of the current linear ultrasonic motor cannot be properly limited, which not only affects the stable operation of the motor, but also suppresses the vibration of the vibrator module and affects the motor efficiency. Therefore, it is urgent to design a new linear ultrasonic motor vibrator module and drive module to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide a linear ultrasonic motor vibrator module and a driving module to solve the defects of the existing linear ultrasonic motor vibrator module that is difficult to fix, has poor stability and low efficiency, so that the linear ultrasonic motor vibrator module can be well fixed to form a reliable driving module, thereby improving the stability and efficiency of the linear ultrasonic motor operation and meeting the corresponding application scenarios.

[0006] According to one aspect of the utility model, a linear ultrasonic motor vibrator module is provided, comprising: a vibrator, the vibrator being annular, the outer annular surface of the vibrator having two connecting ends arranged opposite to each other; a piezoelectric ceramic group connected to the connecting end, the piezoelectric ceramic group transmitting vibration to the vibrator through the two connecting ends; a fixed end, the fixed end clamping the piezoelectric ceramic group and the vibrator; wherein the connecting end comprises a first surface and a second surface opposite to each other, and a fixing structure for fixing the linear ultrasonic motor vibrator module is arranged on the first surface and the second surface of the two connecting ends.

[0007] Optionally, the fixing structure includes a boss or a positioning hole.

[0008] Optionally, the vibrator includes a first through hole, a second through hole is further provided between the first through hole and the connecting end, the axis of the second through hole is parallel to the axis of the first through hole, and the center of the second through hole and the center of the first through hole are both located on the central axis of the vibrator.

[0009] Optionally, the driving feet of the vibrator are located on the outer annular surfaces on two opposite sides where the connecting ends are not provided.

[0010] Optionally, the boss includes a base and a protrusion, and the boss has a first limiting surface, a second limiting surface and a third limiting surface, the first limiting surface is the two side surfaces of the protrusion, the first limiting surface is parallel to the plane formed by the first direction and the second direction, the second limiting surface is the top surface of the base, the second limiting surface is parallel to the plane formed by the second direction and the third direction, the third limiting surface is the same side surface of the base and the protrusion facing the vibrator, and the third limiting surface is parallel to the plane formed by the first direction and the third direction, wherein the first direction is perpendicular to the first surface, the second direction is parallel to the axis of the piezoelectric ceramic group, and the third direction is perpendicular to the first direction and the second direction.

[0011] The above-mentioned linear ultrasonic motor vibrator module, the first limiting surface is used to limit the degree of freedom of the linear ultrasonic motor vibrator module in the third direction, the second limiting surface is used to limit the degree of freedom of the linear ultrasonic motor vibrator module in the first direction, and the third limiting surface is used to limit the degree of freedom of the linear ultrasonic motor vibrator module in the second direction.

[0012] Optionally, a cross section of the boss taken along a plane parallel to the first direction and the third direction is in a convex shape.

[0013] Optionally, the piezoelectric ceramic group and the fixed end located on the same side of the vibrator form a driving arm, and the driving arms on both sides of the vibrator are symmetrically arranged.

[0014] Optionally, an end cover is further included, and the end cover is located between the fixed end and the piezoelectric ceramic group.

[0015] Optionally, the fixed end includes a bolt, and the piezoelectric ceramic group and the end cover are both provided with through holes for the bolt to pass through, and the bolt passes through the end cover, the piezoelectric ceramic group and the threaded hole of the connecting end.

[0016] Optionally, the piezoelectric ceramic group includes a plurality of the piezoelectric ceramics and a plurality of the conductive sheets, the piezoelectric ceramics and the conductive sheets are alternately arranged, the number of the piezoelectric ceramics is 2n, the number of the conductive sheets is 2n+1, and 1≤n≤3, n is a positive integer, and the connecting end and the end cover are both adjacent to the conductive sheet.

[0017] Optionally, it also includes: two driving arms, the two driving arms are respectively connected to the two connecting ends of the vibrator, and each driving arm is also provided with a receiving groove; wherein the piezoelectric ceramic group is located in the receiving groove of the driving arm, at least a part of the fixed end is located in the receiving groove of the driving arm, and the fixed end presses the piezoelectric ceramic group.

[0018] In the above-mentioned linear ultrasonic motor vibrator module, the driving arm and the vibrator are an integrated structure, or the driving arm and the vibrator are connected by a mortise and tenon structure.

[0019] Optionally, the axis of the positioning hole is parallel to the axis of the first through hole, and the center of the positioning hole is located on the central axis of the vibrator.

[0020] According to another aspect of the utility model, a driving module of a linear ultrasonic motor is provided, comprising: the above-mentioned linear ultrasonic motor vibrator module; and a fixing device for fixing the linear ultrasonic motor vibrator module.

[0021] Optionally, when the fixing structure is a boss, notches are provided on both sides of the fixing device parallel to the second direction, and a step is provided on a side of the fixing device facing the linear ultrasonic motor vibrator module; wherein the sizes of the notch and the step of the fixing device correspond to the boss of the linear ultrasonic motor vibrator module.

[0022] Optionally, the fixing device is in the shape of a rectangular plate, and the two opposite side surfaces in the notch parallel to the first direction and the second direction are first contact surfaces, a side surface of the step facing the linear ultrasonic motor vibrator module and parallel to the second direction and the third direction is a second contact surface, and a surface of the step perpendicular to the second contact surface and parallel to the first direction and the third direction is a third contact surface, the first contact surface is used to contact with a first limiting surface of the linear ultrasonic motor vibrator module; the second contact surface is used to contact with a second limiting surface of the linear ultrasonic motor vibrator module; and the third contact surface is used to contact with a third limiting surface of the linear ultrasonic motor vibrator module.

[0023] Optionally, when the fixing structure is a positioning hole, the fixing device includes a positioning pin perpendicular to the first surface and the second surface of the linear ultrasonic motor vibrator module; wherein the positioning pin of the fixing device matches the positioning hole of the linear ultrasonic motor vibrator module to fix the linear ultrasonic motor vibrator module.

[0024] Optionally, the fixing device is in the shape of a rectangular plate, and further comprises a window for allowing a conductive sheet in the piezoelectric ceramic group to pass through.

[0025] Optionally, the fixing devices include two, and the two fixing devices clamp the linear ultrasonic motor vibrator module from the first surface and the second surface of the linear ultrasonic motor vibrator module respectively.

[0026] The utility model provides a linear ultrasonic motor vibrator module and a driving module, wherein a fixing structure is arranged at the connection ends on both sides of the vibrator of the linear ultrasonic motor vibrator module, and the fixing structure can be a boss or a positioning hole. When the fixing structure is a boss, the first limiting surface, the second limiting surface and the third limiting surface of the boss are used to fix and limit the linear ultrasonic motor vibrator module, and the boss is located close to the modal vibration node of the linear ultrasonic motor vibrator module. The linear ultrasonic motor vibrator module is fixed by using the boss there, which can significantly reduce the degree of suppression of the vibration of the linear ultrasonic motor vibrator module by the fixing method, thereby improving the stability and efficiency of the linear ultrasonic motor. Correspondingly, the fixing device of the driving module includes a notch and a step, so that the fixing device has a contact surface corresponding to the limiting surface of the linear ultrasonic motor vibrator module, and the contact surface of the fixing device contacts the limiting surface of the linear ultrasonic motor vibrator module, and two fixing devices are respectively arranged on both sides of the first surface and the second surface of the linear ultrasonic motor vibrator module to clamp the linear ultrasonic motor vibrator module to form a driving module, thereby realizing the limiting and fixing of the linear ultrasonic motor vibrator module.

[0027] Furthermore, the boss structure of the linear ultrasonic motor vibrator module is simple, and its corresponding fixing device is also simple and easy to process. Through the cooperation of the boss and the fixing device, the linear ultrasonic motor vibrator module can be fixed to form a driving module, thereby improving the operating stability of the corresponding linear ultrasonic motor and improving the operating efficiency.

[0028] When the fixing structure is a positioning hole, the position of the positioning hole is close to the modal vibration node of the linear ultrasonic motor vibrator module, and the positioning hole for fixing is set there, which can significantly reduce the degree of suppression of the vibration of the linear ultrasonic motor vibrator module by the fixing method, thereby improving the stability and efficiency of the linear ultrasonic motor. Correspondingly, the fixing device of the driving module includes a positioning pin matching the positioning hole of the linear ultrasonic motor vibrator module, the positioning pin contacts the positioning hole of the linear ultrasonic motor vibrator module, and two fixing devices are respectively set on both sides of the first surface and the second surface of the linear ultrasonic motor vibrator module to clamp the linear ultrasonic motor vibrator module to form a driving module, thereby realizing the limiting and fixing of the linear ultrasonic motor vibrator module.

[0029] Furthermore, the positioning hole structure of the linear ultrasonic motor vibrator module is simple, and its corresponding fixing device is also simple and easy to process. Through the cooperation of the positioning hole and the positioning pin, the linear ultrasonic motor vibrator module can be fixed to form a driving module, thereby improving the stability of the corresponding linear ultrasonic motor operation and improving the operating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The above and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings.

[0031] Figure 1 A schematic diagram of a linear ultrasonic motor vibrator module according to a first embodiment of the utility model is shown;

[0032] Figure 2 It shows a front view of a linear ultrasonic motor vibrator module according to a first embodiment of the utility model;

[0033] Figure 3a A schematic diagram showing a vibrator of a linear ultrasonic motor vibrator module of a first embodiment of the utility model is shown;

[0034] Figure 3b A schematic diagram showing a vibrator of a linear ultrasonic motor vibrator module according to a second embodiment of the utility model is shown;

[0035] Figure 3c A schematic diagram showing a vibrator of a linear ultrasonic motor vibrator module according to a third embodiment of the utility model is shown;

[0036] Figure 4The utility model shows the first embodiment of the linear ultrasonic motor vibrator module along Figure 2 A cross-sectional view taken along the mid-section line AA;

[0037] Figure 5 The utility model shows the first embodiment of the linear ultrasonic motor vibrator module along Figure 2 A cross-sectional view taken along the median section line BB;

[0038] Figure 6 A three-dimensional schematic diagram of a linear ultrasonic motor vibrator module according to a first embodiment of the utility model is shown;

[0039] Figures 7 to 10 A schematic diagram showing a fixing device for a linear ultrasonic motor vibrator module according to a first embodiment of the utility model is shown;

[0040] Figures 11 to 13 A schematic diagram of a driving module according to a first embodiment of the present utility model is shown;

[0041] Fig.14a and Fig.14b The top view and the three-dimensional schematic diagram of the linear ultrasonic motor of the first embodiment of the utility model are respectively shown;

[0042] Fig.15a and Fig.15b It shows the working schematic diagram of different modes of the linear ultrasonic motor vibrator module of the first embodiment of the utility model;

[0043] Fig.16 A schematic diagram of a linear ultrasonic motor vibrator module according to a fourth embodiment of the present utility model is shown;

[0044] Fig.17 A schematic diagram of a linear ultrasonic motor vibrator module according to a fifth embodiment of the present utility model is shown;

[0045] Fig.18 A schematic diagram of a linear ultrasonic motor vibrator module according to a sixth embodiment of the present utility model is shown;

[0046] Fig.19 A schematic diagram showing a fixing device for a linear ultrasonic motor vibrator module according to a sixth embodiment of the utility model is shown;

[0047] Fig. 20 A schematic diagram showing a driving module corresponding to a linear ultrasonic motor vibrator module according to a sixth embodiment of the utility model;

[0048] Fig.21 Shows Fig. 20 A schematic cross-sectional view of the middle drive module;

[0049] Fig. 22A schematic diagram of a piezoelectric ceramic component in a linear ultrasonic motor vibrator module according to a sixth embodiment of the utility model is shown. DETAILED DESCRIPTION

[0050] The present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, the same elements are represented by similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale. In addition, some well-known parts may not be shown.

[0051] It should be understood that when describing a structure, when a component or a region is referred to as being "on" or "over" another component or region, it may mean that it is directly on the other component or region, or that other components or regions are included between it and the other component or region. Furthermore, if the part is turned over, the component or region will be "below" or "under" the other component or region.

[0052] If it is intended to describe a situation where a component or region is directly on another component or region, this document will use the expression “directly on” or “on and adjacent to”.

[0053] Many specific details of some embodiments of the present invention are described below, such as the structure, materials, dimensions, processing techniques and technologies of the components, so as to more clearly understand the present invention. However, as those skilled in the art will appreciate, the present invention may be implemented without following these specific details.

[0054] The present invention may be embodied in various forms, some examples of which will be described below.

[0055] Figure 1The schematic diagram of the linear ultrasonic motor vibrator module of the first embodiment of the utility model is shown; the linear ultrasonic motor vibrator module includes: a vibrator 110, a piezoelectric ceramic 131, a conductive sheet 132, an end cover 140 and a fixed end 150. The vibrator 110 is annular, with a first through hole 111 in the middle, the first through hole 111 is, for example, a circular through hole, the piezoelectric ceramic 131 and the conductive sheet 132 form a piezoelectric ceramic group, the vibrator 110 includes a first surface and a second surface opposite to each other, the first through hole 111 is perpendicular to the first surface and the second surface, the outer annular surface of the vibrator 110 has two oppositely arranged connecting ends, the connecting ends on both sides are respectively provided with bosses 120 protruding outwards perpendicular to the first surface and the second surface on the first surface and the second surface; the vibrator 110 is connected to the first through hole 111 and the boss 120 protruding outwards. 0 is also provided with a second through hole 113, through which the two working modes of the linear ultrasonic motor vibrator module are adjusted to reduce the frequency difference between the two working modes, the axis of the second through hole 113 is parallel to the axis of the first through hole 111, the second through hole 113 is also a circular through hole, the diameter of the second through hole 113 is smaller than the diameter of the first through hole 111, and the centers of the second through hole 113 and the first through hole 111 are both located on the central axis of the vibrator 110; the outer annular surfaces on the opposite sides of the vibrator 110 where the connection end is not provided are used as the driving foot 114. Further, the existence of the second through hole 113 is used to adjust the frequency difference between the two working modes, and when the difference between the two modes is small, the diameter of the second through hole 113 can be very small or even no second through hole 113 can be provided.

[0056] Figure 2 The front view of the linear ultrasonic motor vibrator module of the first embodiment of the utility model is shown; Figure 2It can be seen that the linear ultrasonic motor vibrator module is bilaterally symmetrical, and driving arms are symmetrically arranged on the left and right sides of the vibrator 110. The driving arms are arranged, for example, along the second direction (y direction), and the third direction (z direction) is, for example, perpendicular to the y direction and the plane formed by the y direction and the z direction is parallel to the first surface and the second surface of the vibrator 110, and the first surface and the second surface are perpendicular to the outer annular surface of the vibrator 110. Each driving arm includes a piezoelectric ceramic 131, a conductive sheet 132, an end cap 140 and a fixed end 150; the linear ultrasonic motor vibrator module excites the piezoelectric ceramic 131 in the driving arm to vibrate at a specific frequency, so that the linear ultrasonic motor vibrator module excites two working modes, and uses the upper and lower driving feet 114 of the vibrator 110 to output linear displacement. Specifically, for example, taking the sinusoidal signal applied to the piezoelectric ceramic 131 on the left driving arm as a reference, at the same electrical signal frequency, when the sinusoidal signal applied to the piezoelectric ceramic 131 on the right driving arm is 90° ahead of the sinusoidal signal applied to the piezoelectric ceramic 131 on the left driving arm, the linear ultrasonic motor vibrator module will generate two vibration working modes respectively, and the two vibration working modes of the linear ultrasonic motor vibrator module are superimposed on each other, so that the driving foot 114 performs an elliptical motion, thereby pushing the structure in contact with the driving foot to move forward; at the same electrical signal frequency, when the sinusoidal signal applied to the piezoelectric ceramic 131 on the right driving arm is 90° behind the sinusoidal signal applied to the piezoelectric ceramic 131 on the left driving arm, the driving foot 114 can push the structure in contact with the driving foot to move in the opposite direction. The linear ultrasonic motor vibrator module is fixed by the boss 120 on the connecting end. Specifically, the cross section of the boss 120 is, for example, a convex shape (such as Figure 4 As shown in the figure, the boss 120 includes a base 121 and a protrusion 122, the protrusion 122 is located on the base 121, and the left and right sides of the protrusion 122 are flush with the left and right sides of the base 121. Of course, the boss 120 is used as a fixed structure to limit the linear ultrasonic motor vibrator module, and it can also adopt other shapes, such as a semicircular protrusion, a rectangular protrusion, a triangular protrusion, etc., or a concave in the middle and convex at both ends. The shape of the boss 120 can be square, fan-shaped, and can also be provided with slots, etc. The boss 120 as a fixed structure can be specifically designed according to specific circumstances.

[0057] Since the linear ultrasonic motor vibrator module is bilaterally symmetrical, only the structure of one driving arm is described in detail below. The connecting end is provided with a connecting hole corresponding to the fixed end 150. The fixed end 150 is, for example, a bolt, and the connecting hole is, for example, a threaded hole. Of course, a buckle-to-buckle connection method can also be adopted. The piezoelectric ceramic 131, the conductive sheet 132 and the end cover 140 are all provided with through holes for the fixed end 150 to pass through. The piezoelectric ceramic 131, the conductive sheet 132 and the end cover 140 are, for example, annular. Specifically, the piezoelectric ceramic 131 and the conductive sheet 132 are, for example, circular rings, and the end cover 140 is, for example, cylindrical. Of course, the piezoelectric ceramic 131 and the conductive sheet 132 can also be other rings, such as rectangular rings, elliptical rings, etc.; the end cover 140 can also be other cylindrical shapes, such as rectangular cylindrical, elliptical cylindrical, etc. The piezoelectric ceramic group (conductive sheet 132 and piezoelectric ceramic 131) is, for example, arranged between the connection end and the end cover 140, the fixed end 150 passes through the end cover 140, the piezoelectric ceramic group is connected to the connection end, and the fixed end 150 presses the conductive sheet 132 and the piezoelectric ceramic 131 to the connection end through the end cover 140. The conductive sheet 132 is, for example, a copper sheet, and the end cover 140 is, for example, a hollow structure, for example, made of heavy metal material, so that the vibration energy is transmitted to the vibrator 110 as much as possible rather than the end of the driving arm away from the vibrator 110, thereby improving the energy conversion efficiency of converting electrical energy into mechanical energy. Specifically, each driving arm, for example, includes 4 piezoelectric ceramics 131 and 5 conductive sheets 132, wherein the piezoelectric ceramics 131 and the conductive sheets 132 on the same driving arm form a piezoelectric ceramic group, and the two conductive sheets 132 at both ends of the piezoelectric ceramic group are adjacent to the connection end and the end cover 140 respectively, and the piezoelectric ceramics 131 and the conductive sheets 132 are alternately arranged. Of course, the number of piezoelectric ceramics 131 and conductive sheets 132 can be adjusted according to demand, for example, there are 2n piezoelectric ceramics 131 and 2n+1 conductive sheets 132, and 1≤n≤3, n is a positive integer. The outer surface of the piezoelectric ceramic 131 and the end cover 140 are flush, the outer diameter of the conductive sheet 132 is, for example, slightly larger than the end cover 140, and the annular portion of the conductive sheet 132 is slightly protruding compared to the outer surface of the end cover 140.

[0058] Furthermore, each part of the vibrator 110 of the linear ultrasonic motor vibrator module must also satisfy certain size relationships, see Figure 3a and Figure 4 ,in, Figure 3a Schematic diagram of the vibrator 110 of the linear ultrasonic motor vibrator module of the first embodiment of the utility model, Figure 4 The first embodiment of the utility model is a linear ultrasonic motor vibrator module. Figure 2 In the cross-sectional view taken along the middle section line AA, each part of the ultrasonic vibrator module needs to meet the following requirements:

[0059] d+2b<a<gb

[0060] 0<b<(ga) / 2

[0061] 0<c<w

[0062] 0<e<f

[0063] 0<f<h / 4

[0064] Among them, a is the distance between the centers of the bosses 120 on both sides of the vibrator 110; b is the width of the base 121 of the boss 120 in the y direction, c is the width of the protrusion 122 of the boss 120 in the z direction; d is the distance between the centers of the two second through holes 113 on both sides of the first through hole 111; w is the width of the connection end of the vibrator 110 in the z direction; g is the width of the vibrator 110 in the y direction. The first direction (x direction) is perpendicular to the first surface of the vibrator 110 (the plane formed by the y direction and the z direction). e is the thickness of the boss 120 in the x direction; f is the thickness of the protrusion 122 in the boss 120 in the x direction, and h is the thickness of the vibrator in the x direction. The connection end of the vibrator 110 has a connection hole 112 perpendicular to its end surface and corresponding to the fixed end 150. The connection hole 112 extends from the outside of the connection end to the first through hole 111 of the vibrator 110. In addition to the annular portion corresponding to the piezoelectric ceramic 131, the conductive sheet 132 also includes a rectangular portion extending outward along the x direction to facilitate connection with an external power supply portion. In this embodiment, the rectangular portions of the conductive sheet 132 are aligned in the z direction. In other embodiments, the rectangular portions of the conductive sheet 132 may also be staggered in the z direction.

[0065] Further, see Figure 3b and Figure 3c The shape of the vibrator 110 can be elliptical, circular, rectangular or other shapes, the first through hole 111 can also be elliptical, cylindrical or other shapes, and the number of the first through hole 111 is at least one, and the upper and lower driving feet 114 of the vibrator 110 can be driven in the same direction to improve the output power of the linear ultrasonic motor.

[0066] Figure 5 The first embodiment of the utility model is a linear ultrasonic motor vibrator module. Figure 2The cross-sectional view taken along the middle section line BB shows that the vibrator 110 of the linear ultrasonic motor vibrator module includes a first through hole 111 penetrating through the first surface and the second surface thereof, and second through holes 113 located on both sides of the first through hole 111. The connection ends on the left and right sides of the vibrator 110 also include connection holes 112, and the connection holes 112 are, for example, threaded holes. The connection holes 112 extend from the outer side of the connection end to the first through hole 111 and are connected to the first through hole 111, and the axis of the connection hole 112 passes through the center of the first through hole 111. The fixed end 150 is, for example, a bolt, and its threaded end is connected to the connection hole 112. By tightening the bolt, the nut of the bolt presses the end cover 140, the piezoelectric ceramic 131, and the conductive sheet 132 against the connection end, so that the piezoelectric ceramic group is tightly connected to the vibrator 110. Furthermore, the preload force applied to the piezoelectric ceramic group can be adjusted by changing the torque applied when tightening the bolt.

[0067] The linear ultrasonic motor vibrator module is fixed by the boss 120. Figure 6 The three-dimensional diagram of the linear ultrasonic motor vibrator module of the first embodiment of the utility model shown in the figure, the boss 120 includes a base 121 and a protrusion 122, the protrusion 122 includes a side surface parallel to the plane formed by the x-direction and the y-direction as a first limiting surface 1201, the base 121 includes a top surface parallel to the plane formed by the y-direction and the z-direction as a second limiting surface 1202, and the boss 120 also includes a side surface parallel to the plane formed by the x-direction and the z-direction and close to the first through hole 111 as a third limiting surface 1203. Among them, the first limiting surface 1201 is used to limit the freedom of the linear ultrasonic motor vibrator module in the z-direction, the second limiting surface 1202 is used to limit the freedom of the linear ultrasonic motor vibrator module in the x-direction, and the third limiting surface 1203 is used to limit the freedom of the linear ultrasonic motor vibrator module in the y-direction.

[0068] Figure 7 A three-dimensional diagram showing a fixing device for a linear ultrasonic motor vibrator module according to a first embodiment of the utility model is shown. Figure 8 , Fig. 9 , Fig.10 The front view, bottom view and left view of the fixing device are shown respectively; Figures 7 to 10 As can be seen, the fixing device 200 is in the shape of a rectangular plate, and is symmetrical left and right, and top and bottom. Both left and right sides include a notch 210. The width of the notch 210 along the z direction corresponds to the width c of the protrusion 122 in the boss 120 of the linear ultrasonic motor vibrator module, for example. The left and right sides of the fixing device 200 are also provided with steps 220 corresponding to the base 121 of the boss 120.

[0069] Among them, the notch 210 includes a first contact surface 2101, and the two first contact surfaces 2101 are, for example, arranged opposite to each other. The first contact surface 2101 is parallel to the plane formed by the x-direction and the y-direction, and the first contact surface 2101 corresponds to the first limiting surface 1201, for example; the step 220 includes a second contact surface 2202, and the second contact surface 2202 is parallel to the plane formed by the y-direction and the z-direction, and the second contact surface 2202 corresponds to the second limiting surface 1202, for example; the step 220 also includes a third contact surface 2203, and the third contact surface 2203 is parallel to the z-direction and the x-direction, and the third contact surface 2203 corresponds to the third limiting surface 1203, for example.

[0070] Specifically, see Figures 11 to 13 , Figures 11 to 13 The front view, bottom view and left view of the driving module of the first embodiment of the utility model are respectively shown. The driving module includes a linear ultrasonic motor vibrator module and a fixing device 200, wherein the parts of the linear ultrasonic motor vibrator module and the fixing device 200 are not repeated. The linear ultrasonic motor vibrator module can be fixed by the fixing device 200. Specifically, the first contact surface 2101 of the fixing device 200 is used to contact with the first limiting surface 1201 of the linear ultrasonic motor vibrator module to achieve the restriction of the freedom degree of the linear ultrasonic motor vibrator module in the z direction; the second contact surface 2202 is used to contact with the second limiting surface 1202 of the linear ultrasonic motor vibrator module to achieve the restriction of the freedom degree of the linear ultrasonic motor vibrator module in the x direction; the third contact surface 2203 is used to contact with the third limiting surface 1203 of the linear ultrasonic motor vibrator module to achieve the restriction of the freedom degree of the linear ultrasonic motor vibrator module in the y direction. A fixing device 200 is respectively arranged on the first surface and the second surface of the linear ultrasonic motor vibrator module, and the two fixing devices 200 are arranged relative to each other to clamp the linear ultrasonic motor vibrator module, and the linear ultrasonic motor vibrator module is limited by the contact surface in the fixing device 200 and the boss in the linear ultrasonic motor vibrator module.

[0071] Fig.14a Fig.14b The top view and stereoscopic schematic diagram of the linear ultrasonic motor of the first embodiment of the utility model are respectively shown; the figure shows that the linear ultrasonic motor vibrator module and the fixing device 200 are assembled into a driving module, and the driving module can perform linear motion along the guide rail in the direction indicated by the arrow within a set range.

[0072] Fig.15a and Fig.15bSchematic diagrams of different working modes of the linear ultrasonic motor vibrator module of the first embodiment of the utility model are respectively shown. A high-frequency signal with a phase difference of 90° is applied by two groups of piezoelectric ceramics located on the left and right sides of the vibrator 110, thereby exciting two vibration modes with a time difference of 90° to form an elliptical trajectory, thereby driving the structure in contact with the driving foot to move.

[0073] Specifically, the linear ultrasonic motor vibrator module is fixed at the node surface 1 and the node surface 2, the node surface 1 and the node surface 2 correspond to the positioning hole or the boss, and the driving foot 114 is located in the node surface 3. When the second-order vibration mode of the linear ultrasonic motor is excited, Fig.15a As shown, the vibrator modules on both sides of the nodal plane 1 move away from the nodal plane 1, and the vibrator modules on both sides of the nodal plane 2 move close to the nodal plane 2, or the vibrator modules on both sides of the nodal plane 1 move close to the nodal plane 1, and the vibrator modules on both sides of the nodal plane 2 move away from the nodal plane 2, so that the driving foot 114 vibrates left and right, providing the driving foot 114 with left and right translation; when the third-order vibration mode of the linear ultrasonic motor is excited, as shown in FIG. Fig.15b As shown, the vibrator modules on both sides of the nodal plane 1 move away from the nodal plane 1, the vibrator modules on both sides of the nodal plane 3 move close to the nodal plane 3, and the vibrator modules on both sides of the nodal plane 2 move away from the nodal plane 2, or the vibrator modules on both sides of the nodal plane 1 move close to the nodal plane 1, the vibrator modules on both sides of the nodal plane 3 move away from the nodal plane 3, and the vibrator modules on both sides of the nodal plane 2 move close to the nodal plane 2, so that the driving foot 114 vibrates up and down, providing the driving foot 114 with up and down translation. When two electrical signals with a phase difference of ninety degrees are applied to the two piezoelectric ceramic groups respectively, two modes will be excited and form an elliptical trajectory, thereby outputting displacement to the outside.

[0074] Fig.16The schematic diagram of the linear ultrasonic motor vibrator module of the fourth embodiment is shown. The overall composition of the linear ultrasonic motor vibrator module of the fourth embodiment is similar to that of the first embodiment. The linear ultrasonic motor vibrator module of the fourth embodiment includes: a vibrator 310, a piezoelectric ceramic 331, a conductive sheet 332, a driving arm 340 and a fixed end 350. The vibrator 310 is annular and has a first through hole 311 in the middle. The vibrator 310 includes a first surface and a second surface opposite to each other. The first through hole 311 is perpendicular to the first surface and the second surface. Two driving arms 340 are arranged oppositely on opposite sides of the outer annular surface of the vibrator 310. The driving arm 340 and the vibrator 310 are, for example, an integrated structure. A receiving groove is provided in the driving arm 340 to accommodate the piezoelectric ceramic 331 and the conductive sheet 332. The piezoelectric ceramic 331 and the conductive sheet 332 are alternately arranged in the receiving groove. At least a part of the fixed end 350 is located at In the receiving groove, the piezoelectric ceramic group and the vibrator 310 are pressed tightly, and the vibrator 310 is also provided with a second through hole 313 at the left and right sides of the first through hole 311 and the position corresponding to the driving arm 340. The vibrator 310 is also provided with a boss 320 protruding outward perpendicular to the first surface and the second surface on the first surface and the second surface respectively, and the boss 320 is located between the second through hole 313 and the receiving groove of the driving arm 340. Similarly, the linear ultrasonic motor vibrator module of the second embodiment is also limited and fixed by combining the boss 320 with the corresponding fixing device.

[0075] Fig.17 A schematic diagram of a linear ultrasonic motor vibrator module of a fifth embodiment is shown. The linear ultrasonic motor vibrator module of the fifth embodiment is basically similar to that of the fourth embodiment, except that, in the fifth embodiment, the driving arm 340 and the vibrator 310 are split designs, and the two are connected by a mortise and tenon structure, so that the driving arm 340 can be made of a different material from the vibrator 310, thereby further improving the performance of the linear ultrasonic motor vibrator module.

[0076] Fig.18 A schematic diagram of a linear ultrasonic motor vibrator module of a sixth embodiment of the utility model is shown. The linear ultrasonic motor vibrator module of the sixth embodiment is basically similar to the first embodiment, except that, in the sixth embodiment, a positioning hole 420 is used instead of a boss, and the positioning hole 420 can be matched with a corresponding positioning pin to achieve the limitation and fixation of the linear ultrasonic motor vibrator module.

[0077] from Fig.19As can be seen in the figure, the fixing device 200 is in the shape of a rectangular plate and is bilaterally symmetrical. A positioning pin 250 protruding from its rectangular surface is provided on the side of the fixing device 200 facing the linear ultrasonic motor vibrator module. The diameter of the positioning pin 250 is, for example, larger than the diameter of the positioning hole 420, and the end of the positioning pin 250 may have a tapered surface. Of course, the size of the positioning pin 250 may also match the size of the positioning hole 420, so that at least a portion of the positioning pin 250 is inserted into the positioning hole 420 to achieve positioning and fixing.

[0078] Furthermore, the fixing device 200 is also provided with a window 260 for the conductive sheet 132 to pass through, and a bolt hole 230 for connecting with the fixing device 200 on the other side of the linear ultrasonic motor vibrator module.

[0079] See also Fig. 20 and Fig.21 The linear ultrasonic motor vibrator module can be fixed by the fixing device 200. Specifically, the positioning pin 250 of the fixing device 200 contacts the positioning hole 420 of the linear ultrasonic motor vibrator module to limit the freedom of the linear ultrasonic motor vibrator module. By respectively setting a fixing device 200 on the first surface and the second surface of the linear ultrasonic motor vibrator module, the two fixing devices 200 are arranged relative to each other to clamp the linear ultrasonic motor vibrator module. There are some differences between the fixing devices 200 on both sides. The bolt hole 230 of the fixing device 200 on one side is, for example, a step hole, and the corresponding bolt 240 can be a countersunk bolt. The fixing device 200 on the other side is provided with a threaded hole at the corresponding position of the bolt hole 230 for the bolt 240 to connect.

[0080] Fig. 22 The schematic diagram of the piezoelectric ceramic group in the linear ultrasonic motor vibrator module of the sixth embodiment of the utility model is shown. The piezoelectric ceramic group of the sixth embodiment includes five conductive sheets 132 and four piezoelectric ceramics 131, wherein the piezoelectric ceramic 131 is annular, and its thickness is, for example, 0.5 mm to 5 mm. The thickness of each piezoelectric ceramic 131 is equal, and the polarization directions of adjacent piezoelectric ceramics 131 are opposite. The outermost conductive sheet 132 is connected to the negative electrode of the driving power supply, and the two adjacent conductive sheets 132 are respectively connected to the positive electrode and the negative electrode of the driving power supply. Specifically, from left to right, the conductive sheets 132 at the 1st, 3rd, and 5th positions are connected to the negative electrode, and the conductive sheets 132 at the 2nd and 4th positions are connected to the positive electrode. The piezoelectric ceramic groups in the other embodiments are similar and will not be elaborated herein. Of course, the protruding parts of the conductive sheet 132 connected to the positive electrode and the conductive sheet 132 connected to the negative electrode can be staggered to facilitate distinction and connection, and the number of conductive sheets 132 and piezoelectric ceramics 131 can be adjusted accordingly as required.

[0081] In the above description, the technical details such as the position combination and connection mode of each component are not described in detail. However, those skilled in the art should understand that various technical means can be used to form the required connection relationship, etc. In addition, in order to have the same function, those skilled in the art can also design a structure that is not completely the same as the structure described above. In addition, although each embodiment is described above separately, this does not mean that the measures in each embodiment cannot be used in combination to advantage.

[0082] The embodiments of the present invention are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Without departing from the scope of the present invention, a person skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. A linear ultrasonic motor vibrator module, characterized in that: include: A vibrator, wherein the vibrator is annular, and an outer ring surface of the vibrator has two connecting ends arranged oppositely; A piezoelectric ceramic group connected to the connection ends, wherein the piezoelectric ceramic group transmits vibration to the vibrator through the two connection ends; A fixed end, the fixed end clamps the piezoelectric ceramic group and the vibrator; Wherein, the connecting end comprises a first surface and a second surface which are opposite to each other, and a fixing structure for fixing the linear ultrasonic motor vibrator module is arranged on the first surface and the second surface of the two connecting ends.

2. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The fixing structure includes a boss or a positioning hole.

3. The linear ultrasonic motor vibrator module according to claim 2, characterized in that: The vibrator comprises a first through hole, a second through hole is arranged between the first through hole and the connecting end, the axis of the second through hole is parallel to the axis of the first through hole, and the center of the second through hole and the center of the first through hole are both located on the central axis of the vibrator.

4. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The driving feet of the vibrator are located on the outer annular surfaces on two opposite sides where the connecting ends are not arranged.

5. The linear ultrasonic motor vibrator module according to claim 2, characterized in that: The boss includes a base and a protrusion, and the boss has a first limiting surface, a second limiting surface and a third limiting surface, the first limiting surface is the two side surfaces of the protrusion, the first limiting surface is parallel to the plane formed by the first direction and the second direction, the second limiting surface is the top surface of the base, the second limiting surface is parallel to the plane formed by the second direction and the third direction, the third limiting surface is the same side surface of the base and the protrusion facing the vibrator, and the third limiting surface is parallel to the plane formed by the first direction and the third direction, wherein the first direction is perpendicular to the first surface, the second direction is parallel to the axis of the piezoelectric ceramic group, and the third direction is perpendicular to the first direction and the second direction.

6. The linear ultrasonic motor vibrator module according to claim 5, characterized in that: The first limiting surface is used to limit the freedom of the linear ultrasonic motor vibrator module in the third direction, the second limiting surface is used to limit the freedom of the linear ultrasonic motor vibrator module in the first direction, and the third limiting surface is used to limit the freedom of the linear ultrasonic motor vibrator module in the second direction.

7. The linear ultrasonic motor vibrator module according to claim 5, characterized in that: The cross section of the boss taken along a plane parallel to the first direction and the third direction is in a convex shape.

8. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: The piezoelectric ceramic group and the fixed end located on the same side of the vibrator form a driving arm, and the driving arms on both sides of the vibrator are symmetrically arranged.

9. The linear ultrasonic motor vibrator module according to claim 8, characterized in that: It also includes an end cover, which is located between the fixed end and the piezoelectric ceramic group.

10. The linear ultrasonic motor vibrator module according to claim 9, characterized in that: The fixed end includes a bolt, and the piezoelectric ceramic group and the end cover are both provided with through holes for the bolt to pass through. The bolt passes through the end cover, the piezoelectric ceramic group and the threaded hole of the connecting end.

11. The linear ultrasonic motor vibrator module according to claim 9, characterized in that: The piezoelectric ceramic group includes a plurality of piezoelectric ceramics and a plurality of conductive sheets, the piezoelectric ceramics and the conductive sheets are alternately arranged, the number of the piezoelectric ceramics is 2n, the number of the conductive sheets is 2n+1, and 1≤n≤3, n is a positive integer, and the connecting end and the end cover are both adjacent to the conductive sheet.

12. The linear ultrasonic motor vibrator module according to claim 1, characterized in that: Also includes: Two driving arms, the two driving arms are respectively connected to the two connecting ends of the vibrator, and each driving arm is further provided with a receiving groove; The piezoelectric ceramic group is located in the receiving groove of the driving arm, at least a portion of the fixed end is located in the receiving groove of the driving arm, and the fixed end presses the piezoelectric ceramic group.

13. The linear ultrasonic motor vibrator module according to claim 12, characterized in that: The driving arm and the vibrator are an integrated structure, or the driving arm and the vibrator are connected by a mortise and tenon structure.

14. The linear ultrasonic motor vibrator module according to claim 3, characterized in that: The axis of the positioning hole is parallel to the axis of the first through hole, and the center of the positioning hole is located on the central axis of the vibrator.

15. A driving module for a linear ultrasonic motor, characterized in that: include: The linear ultrasonic motor vibrator module according to any one of claims 1 to 14; A fixing device for fixing the linear ultrasonic motor vibrator module.

16. The driving module according to claim 15, characterized in that: When the fixing structure is a boss, notches are provided on both sides of the fixing device parallel to the second direction, and a step is provided on a side of the fixing device facing the linear ultrasonic motor vibrator module; The sizes of the notch and the step of the fixing device correspond to the boss of the linear ultrasonic motor vibrator module.

17. The driving module according to claim 16, characterized in that: The fixing device is in the shape of a rectangular plate, and the two opposite side surfaces in the notch parallel to the first direction and the second direction are first contact surfaces, a side surface of the step facing the linear ultrasonic motor vibrator module and parallel to the second direction and the third direction is a second contact surface, and a surface of the step perpendicular to the second contact surface and parallel to the first direction and the third direction is a third contact surface, the first contact surface is used to contact with the first limiting surface of the linear ultrasonic motor vibrator module; the second contact surface is used to contact with the second limiting surface of the linear ultrasonic motor vibrator module; and the third contact surface is used to contact with the third limiting surface of the linear ultrasonic motor vibrator module.

18. The driving module according to claim 15, characterized in that: When the fixing structure is a positioning hole, the fixing device includes a positioning pin perpendicular to the first surface and the second surface of the linear ultrasonic motor vibrator module; wherein the positioning pin of the fixing device matches the positioning hole of the linear ultrasonic motor vibrator module to fix the linear ultrasonic motor vibrator module.

19. The driving module according to claim 18, characterized in that: The fixing device is in the shape of a rectangular plate and further comprises a window for allowing the conductive sheet in the piezoelectric ceramic group to pass through.

20. The driving module according to claim 16 or 18, characterized in that: The fixing devices include two fixing devices, and the two fixing devices clamp the linear ultrasonic motor vibrator module from the first surface and the second surface of the linear ultrasonic motor vibrator module respectively.

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