Spraying device of double-adjustment wire cutting machine

Abstract

The utility model discloses a double-adjustment line cutting machine spraying device which comprises a liquid supply mechanism and an air supply mechanism, one end of a first spraying pipe and one end of a second spraying pipe of the liquid supply mechanism are respectively provided with a first spraying head and a second spraying head, and the other end of the first spraying pipe and the other end of the second spraying pipe are respectively connected with one end of a liquid supply header pipe. One end of a first air supply pipe and one end of a second air supply pipe of the air supply mechanism are connected with a first spraying pipe and a second spraying pipe respectively, and the other end of the first air supply pipe and the other end of the second air supply pipe are connected with one end of an air supply header pipe respectively. According to the utility model, double adjustment can be carried out on feeding spraying and material lifting spraying, the spraying pressure of the first spray head is increased, the sheet falling rate during material lifting is reduced, and the yield is improved for production; the consumption in the cooling liquid spraying process is reduced, the cooling liquid spraying effect is improved, and the cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a double-adjustment wire saw spray device. Background Art

[0002] In the multi-wire cutting system, the silicon rod needs to be sprayed before cutting to facilitate cutting. After the silicon wafer is cut, the silicon wafer needs to be sprayed during the upward lifting process. The spraying liquid is the silicon wafer coolant, the purpose is to remove the residual silicon powder between the silicon wafers, reduce the lifting torque, and prevent the risk of silicon wafers falling during lifting. However, in the prior art, the two spraying processes use the same spray system, which has poor spraying effect, low pressure, high torque, and high wafer drop rate. Utility Model Content

[0003] The purpose of the utility model is to overcome the above-mentioned technical problems and provide a double-adjustable wire saw spray device. During the feed spraying, the flow valve and the one-way throttle valve are adjusted to mix the compressed air and the coolant in a certain volume ratio, so that the coolant of the second nozzle has a relatively small pressure, which meets the wetting and cooling requirements of the feed spraying; during the material lifting spraying, the flow valve and the one-way throttle valve are adjusted to increase the volume ratio of the compressed air and the coolant for mixing, so that the coolant of the first nozzle has a relatively large pressure, which meets the requirement of gas-liquid mixing to separate silicon wafers during the material lifting spraying.

[0004] To achieve the above objectives, this application provides the following technical solutions:

[0005] A double-adjustable wire cutting machine spray device, comprising:

[0006] A liquid supply mechanism, the liquid supply mechanism comprising a first spray pipe, a second spray pipe and a liquid supply main pipe, one end of the first spray pipe and the second spray pipe are respectively provided with a first spray head and a second spray head, the first spray head is used for material lifting spraying, the second spray head is used for knife feeding spraying, the other ends of the first spray pipe and the second spray pipe are respectively connected to one end of the liquid supply main pipe;

[0007] The air supply mechanism includes a first air supply pipe, a second air supply pipe and an air supply main pipe, one end of the first air supply pipe and the second air supply pipe are respectively connected to the first spray pipe and the second spray pipe, and the other end of the first air supply pipe and the second air supply pipe are respectively connected to one end of the air supply main pipe.

[0008] Optionally, the other end of the liquid supply main pipe is connected to the coolant, and a flow valve is provided on the liquid supply main pipe; and / or, the other end of the air supply main pipe is connected to the air compression mechanism, and a one-way throttle valve is provided on the air supply main pipe.

[0009] Optionally, the first spray pipe includes a large diameter pipe and a small diameter pipe, the large diameter pipe, the small diameter pipe and one end of the first air supply pipe are connected by a reducing tee, the other end of the large diameter pipe is connected to the liquid supply main pipe, and the other end of the small diameter pipe is connected to the first nozzle.

[0010] Optionally, the diameter of the large-diameter tube is 1.5-2 times the diameter of the small-diameter tube.

[0011] Optionally, a mixing chamber for gas-liquid mixing is provided on the small-diameter tube.

[0012] Optionally, the second spray pipe includes one tube and two tubes of the same diameter, one end of the one tube, the second tube and the second air supply pipe are connected through a tee, the other end of the one tube is connected to the liquid supply main pipe, and the other end of the two tubes is connected to the second nozzle.

[0013] Optionally, the large diameter pipe, the first pipe, the first air supply pipe and the second air supply pipe are respectively provided with solenoid valves for controlling the opening and closing of the pipelines.

[0014] Optionally, the air compression mechanism is provided with a pressure regulating valve for regulating the compressed air pressure.

[0015] Optionally, the first nozzle and / or the second nozzle adopts a straight-line nozzle.

[0016] Optionally, the first air supply pipe, the second air supply pipe and the main air supply pipe are connected via a tee.

[0017] In summary, the utility model has at least the following technical effects and advantages:

[0018] During the knife feed spraying, the compressed air and the coolant are mixed in a certain volume ratio by adjusting the flow valve and the one-way throttle valve, so that the coolant of the second nozzle has a relatively small pressure, which meets the wetting and cooling requirements of the knife feed spraying; during the material lifting spraying, the volume ratio of the compressed air and the coolant is increased by adjusting the flow valve and the one-way throttle valve for mixing, so that the coolant of the first nozzle has a relatively large pressure, which meets the requirement of gas-liquid mixing to separate silicon wafers during the material lifting spraying; the utility model can perform dual regulation on the material feed spraying and the material lifting spraying, increase the spraying pressure of the first nozzle, reduce the material lifting chip drop rate, and improve the production yield; reduce the consumption of the coolant spraying process, improve the coolant spraying effect, and reduce costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 This is a schematic diagram of the pipeline connection of the double-adjustable wire cutting machine spray device in one embodiment of the utility model.

[0021] In the figure:

[0022] 1. Liquid supply main pipe; 2. First nozzle; 3. Second nozzle; 4. Flow valve; 5. First air supply pipe; 6. Second air supply pipe; 7. Air supply main pipe; 8. One-way throttle valve; 9. Large diameter pipe; 10. Small diameter pipe; 11. Mixing chamber; 12. One pipe; 13. Two pipes; 14. Solenoid valve. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0027] This embodiment provides a double-adjustable wire cutting machine spray device, such as Figure 1As shown, it includes a liquid supply mechanism and an air supply mechanism. The liquid supply mechanism includes a first spray pipe, a second spray pipe and a liquid supply main pipe 1, one end of the first spray pipe and the second spray pipe are respectively provided with a first nozzle 2 and a second nozzle 3, the first nozzle 2 is used for material lifting spraying, and the second nozzle 3 is used for knife feeding spraying, the other ends of the first spray pipe and the second spray pipe are respectively connected to one end of the liquid supply main pipe 1, and the other end of the liquid supply main pipe 1 is connected to the coolant, and the liquid supply main pipe 1 is provided with a flow valve 4, which is suitable for water systems that require flow control. The air supply mechanism includes a first air supply pipe 5, a second air supply pipe 6 and an air supply main pipe 7, one end of the first air supply pipe 5 and the second air supply pipe 6 are respectively connected to the first spray pipe and the second spray pipe, the other end of the first air supply pipe 5 and the second air supply pipe 6 are respectively connected to one end of the air supply main pipe 7, the other end of the air supply main pipe 7 is connected to the air compression mechanism, and a one-way throttle valve 8 is respectively provided on the air supply main pipe 7, and the one-way throttle valve is a valve that controls the fluid flow by changing the throttling section or throttling length.

[0028] Before cutting the silicon rod and during the cutting process, the knife spray is required, the purpose of which is to wet and cool the silicon rod and the cutting chamber; after the cutting is completed, it is necessary to rinse and remove the residual silicon powder between the silicon wafers, reduce the material lifting torque, and prevent the risk of silicon wafers falling during the material lifting. It is the most important spray in the material lifting process. In this embodiment, during the knife spray, by adjusting the flow valve 4 and the one-way throttle valve 8, the compressed air and the coolant are mixed in a certain volume ratio, so that the coolant of the second nozzle 3 has a relatively small pressure to meet the wetting and cooling requirements of the knife spray; during the material lifting spray, by adjusting the flow valve 4 and the one-way throttle valve 8, the volume ratio of compressed air and coolant is increased for mixing, so that the coolant of the first nozzle 2 has a relatively large pressure, which meets the gas-liquid mixing during the material lifting spray to separate the silicon wafers.

[0029] Optionally, the first spray pipe includes a large diameter pipe 9 and a small diameter pipe 10, and the large diameter pipe 9, the small diameter pipe 10 and one end of the first air supply pipe 5 are connected by a reducing tee, the other end of the large diameter pipe 9 is connected to the liquid supply main pipe 1, and the other end of the small diameter pipe 10 is connected to the first nozzle 2. By adopting a reducing pipeline of the large diameter pipe 9 and the small diameter pipe 10, the spray pressure of the coolant can be increased. The reducing tee can be a stainless steel reducing internal thread tee. Optionally, the diameter of the large diameter pipe 9 is 1.5-2 times the diameter of the small diameter pipe 10. For example, the diameter of the large diameter pipe 9 in this embodiment is 12mm, and the diameter of the small diameter pipe 10 is 8mm.

[0030] Optionally, a mixing chamber 11 for gas-liquid mixing is provided on the small-diameter tube 10. The mixing chamber 11 is provided after the gas and liquid are connected, so as to increase the mixing degree of the gas and liquid.

[0031] Optionally, the second spray pipe includes one tube 12 and two tubes 13 of the same diameter, one end of the one tube 12, the second tube 13 and the second air supply pipe 6 are connected through a tee, the other end of the one tube 12 is connected to the liquid supply main pipe 1, and the other end of the two tubes 13 is connected to the second nozzle 3.

[0032] Optionally, the large diameter pipe 9, the first pipe 12, the first air supply pipe 5 and the second air supply pipe 6 are respectively provided with a solenoid valve 14. The solenoid valve 14 is a two-position two-way normally closed solenoid valve, which is used to control the opening and closing of each pipeline.

[0033] Optionally, a pressure regulating valve is provided at the air compression mechanism, and the pressure regulating valve is used to adjust the pressure of the compressed air, because the material spraying more needs to increase the mixed pressure of the coolant and the gas to separate the silicon wafers.

[0034] Optionally, the first nozzle 2 and / or the second nozzle 3 adopts a straight nozzle, and its structure belongs to the prior art and is not described here. Optionally, the first air supply pipe 5, the second air supply pipe 6 and the main air supply pipe 7 are connected by a tee; the tee can be a Y-type tee or a T-type tee, etc. In this embodiment, a Y-type tee PY-12mm is used, and the first air supply pipe 5 and the second air supply pipe 6 use a soft air pipe with a diameter of 12mm. The tee can divide the main pipeline into two branch pipelines to achieve the expansion of the pipeline system.

[0035] The working process of this embodiment is as follows: when spraying the cutting blade, the electromagnetic valve 14 on the first pipe 12 and the second air supply pipe 6 is opened, and the compressed air and the coolant are mixed in a volume ratio of 1:5 by adjusting the flow valve 4 and the one-way throttle valve 8, and the second nozzle 3 sprays the silicon rod and the cutting chamber to moisten and cool down;

[0036] When the silicon rod is cut, the electromagnetic valve 14 on the large diameter pipe 9 and the first air supply pipe 5 is opened to carry out material spraying. By adjusting the flow valve 4 and the one-way throttle valve 8, the compressed air and the coolant are mixed at a volume ratio of 1:2. At the same time, the pressure regulating valve at the air compression mechanism is adjusted to increase the compressed air pressure value. The high-pressure gas enters the coolant, the liquid-gas mixing pressure increases, and the silicon wafers are separated. In this embodiment, the coolant is a cutting liquid.

[0037] The present embodiment is provided with an air supply mechanism and a liquid supply mechanism, which can perform dual adjustments of knife feed spray and material lifting spray. Not only can it meet the use of knife feed spray, but also, after adding high-pressure air, the spray pressure of the first nozzle can be increased from 2000mbar to 3000-3800mbar. While increasing the spray pressure, it can reduce the consumption of coolant spraying process, improve silicon wafer separation efficiency, improve coolant spraying effect, and reduce costs.

[0038] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A double-adjustable wire cutting machine spray device, characterized in that: include: A liquid supply mechanism, the liquid supply mechanism comprising a first spray pipe, a second spray pipe and a liquid supply main pipe, one end of the first spray pipe and the second spray pipe are respectively provided with a first spray head and a second spray head, the first spray head is used for material lifting spraying, the second spray head is used for knife feeding spraying, the other ends of the first spray pipe and the second spray pipe are respectively connected to one end of the liquid supply main pipe; The air supply mechanism includes a first air supply pipe, a second air supply pipe and an air supply main pipe, one end of the first air supply pipe and the second air supply pipe are respectively connected to the first spray pipe and the second spray pipe, and the other end of the first air supply pipe and the second air supply pipe are respectively connected to one end of the air supply main pipe.

2. The double-adjustable wire cutting machine spraying device according to claim 1 is characterized in that: The other end of the liquid supply main pipe is connected to the coolant, and a flow valve is provided on the liquid supply main pipe; and / or the other end of the air supply main pipe is connected to the air compression mechanism, and a one-way throttle valve is provided on the air supply main pipe.

3. The double-adjustable wire cutting machine spraying device according to claim 1 is characterized in that: The first spray pipe includes a large diameter pipe and a small diameter pipe. The large diameter pipe, the small diameter pipe and one end of the first air supply pipe are connected through a reducing tee. The other end of the large diameter pipe is connected to the liquid supply main pipe, and the other end of the small diameter pipe is connected to the first nozzle.

4. The double-adjustable wire cutting machine spraying device according to claim 3 is characterized in that: The diameter of the large-diameter tube is 1.5-2 times the diameter of the small-diameter tube.

5. The double-adjustable wire cutting machine spraying device according to claim 3 or 4, characterized in that: The small diameter tube is provided with a mixing chamber for gas-liquid mixing.

6. The double-adjustable wire cutting machine spraying device according to claim 3 or 4, characterized in that: The second spray pipe includes a first pipe and a second pipe with the same diameter. One end of the first pipe, the second pipe and the second air supply pipe are connected through a tee, the other end of the first pipe is connected to the liquid supply main pipe, and the other end of the second pipe is connected to the second nozzle.

7. The double-adjustable wire-cutting machine spraying device according to claim 6, characterized in that: The large diameter pipe, the first pipe, the first air supply pipe and the second air supply pipe are respectively provided with electromagnetic valves for controlling the opening and closing of the pipelines.

8. The double-adjustable wire cutting machine spraying device according to claim 2 is characterized in that: The air compression mechanism is provided with a pressure regulating valve for regulating the compressed air pressure.

9. The double-adjustable wire-cutting machine spraying device according to claim 1, characterized in that: The first nozzle and / or the second nozzle adopts a straight nozzle.

10. The double-adjustable wire-cutting machine spraying device according to claim 1, characterized in that: The first air supply pipe, the second air supply pipe and the main air supply pipe are connected through a tee.

Images