Feeding mechanism of photoetching machine

Abstract

The utility model discloses a feeding mechanism of a photoetching machine, and relates to the technical field of photoetching machines, the feeding mechanism comprises a feeding device body, the top and the bottom of the feeding device body are respectively provided with a limiting assembly, an adjusting assembly and a stabilizing assembly, the adjusting assembly comprises a driving motor, a fixing plate, a glue spreading roller and a connecting column, the output end of the driving motor is in spline connection with one side of the fixing plate, one end of the connecting column is rotationally connected to the other side of the fixing plate, the interior of the fixing plate is in threaded connection with a threaded bolt, and the other end of the connecting column is fixedly connected to one end of the gluing roller. According to the glue spreading device, the connecting column and the glue spreading roller are driven to move synchronously, and then the position of the adjusted fixing plate is fixed in cooperation with a threaded bolt, so that the glue spreading roller can adjust the distance between the glue spreading roller and the conveying belt according to different silicon wafer thicknesses, and the silicon wafers are more uniform in the coating process.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography machines, in particular to a feeding mechanism of a photolithography machine. Background Art

[0002] The feeding mechanism of the photolithography machine is a key component in the photolithography equipment. It is used to evenly coat the photoresist on the surface of the silicon wafer, providing a basis for subsequent pattern transfer and processing. The feeding mechanism of the photolithography machine usually includes a coating device, a silicon wafer clamping device, a feeding control system and a cleaning device. The coating device evenly coats the photoresist on the surface of the silicon wafer through a coating head and a coating roller to ensure the thickness and uniformity of the adhesive layer. The silicon wafer clamping device is used to stably clamp the silicon wafer to ensure the stable position of the silicon wafer during the coating process.

[0003] After searching, the applicant found that a Chinese patent disclosed "a feeding mechanism for a photolithography machine", and its publication (announcement) number is "CN219468952U". This patent mainly accumulates raw materials on the upper side of the placement plate, and the second drive motor drives the connected threaded block to drive the placement plate to move upward in a straight line. When the raw material is parallel to one side of the push plate, the push plate is driven by the repeated extension and retraction of the telescopic end of the electric telescopic rod to push the raw material to the surface of the conveyor belt and transport it to the lower side of the photolithography machine body, reducing manpower and improving efficiency. However, in the original document description of the application, when facing different silicon wafer sizes, the device is difficult to smoothly transport the silicon wafer to the bottom of the glue coating head, thereby affecting the overall glue coating effect of the glue coating head. For this reason, we propose a feeding mechanism for a photolithography machine. Utility Model Content

[0004] The utility model aims to provide a feeding mechanism for a photolithography machine.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a feeding mechanism of a photolithography machine, comprising a feeding device body, a limiting assembly, an adjustment assembly and a stabilization assembly are respectively installed on the top and bottom of the feeding device body, the adjustment assembly comprises a driving motor, a fixed plate, a glue coating roller and a connecting column, the output end of the driving motor is spline-connected to one side of the fixed plate, one end of the connecting column is rotatably connected to the other side of the fixed plate, and the internal thread of the fixed plate is connected with a threaded bolt, and the other end of the connecting column is fixedly connected to one end of the glue coating roller.

[0006] As a further solution of the utility model: the feeding device body includes a servo motor, a rotating rod, a limit plate, a glue coating plate and a conveyor belt, and the output end of the servo motor is spline-connected to the side of the rotating rod.

[0007] As a further solution of the utility model: both ends of the rotating rod pass through the interior of the limit plate, and the two are rotationally connected, the outer surface of the rotating rod is rotationally connected to the inner wall of the conveyor belt, the top surface of the limit plate is fixedly connected to the bottom surface of the rubber-coated plate, the outer surface of the limit plate is provided with a sliding hole, and threaded holes suitable for threaded bolts are provided on both sides of the sliding hole, and the two are threadedly connected, and the outer surface of the connecting column passes through the interior of the sliding hole.

[0008] As a further solution of the utility model: the limit assembly includes a connecting plate, a rotating rod A, a movable arm, a rotating rod B and a limit arm, the two ends of the rotating rod A are rotatably connected to the inner wall of the connecting plate, and the outer surface of the rotating rod A is fixedly connected to the inside of the movable arm.

[0009] As a further solution of the utility model: both ends of the B rotating rod are rotatably connected to the inner wall of the limiting arm, and the outer surface of the B rotating rod is fixedly connected to the inner wall of the movable arm, the side of the connecting plate away from the movable arm is fixedly connected to the inner wall of the limiting plate, and the movable arm and the limiting arm are located directly above the conveyor belt.

[0010] As a further solution of the utility model: the stabilizing assembly includes a placement plate, a connecting block and a stabilizing column, and the top surface of the stabilizing column is fixedly connected to the bottom surface of the placement plate.

[0011] As a further solution of the utility model: the bottom surfaces of the connecting block and the limiting plate are fixedly connected to the top surface of the placement plate, and the bottom of the servo motor is fixedly connected to the top of the connecting block.

[0012] By adopting the above technical solution, compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The utility model drives the connecting column and the glue coating roller to move synchronously by moving the position of the fixed plate, and then uses the threaded bolt to fix the position of the adjusted fixed plate, so that the glue coating roller can adjust the distance between itself and the conveyor belt according to the different thickness of the silicon wafers, so that the silicon wafers are more evenly coated.

[0014] 2. The utility model adjusts the overall position of the movable arm by rotating the A rotating rod, and then adjusts the overall position of the limit arm by rotating the B rotating rod. By utilizing the mutual cooperation between the movable arm and the limit arm, silicon wafers of different sizes can be stably transported to the bottom of the coating plate, so that the coating plate can more accurately coat the photoresist on the outer surface of the silicon wafer.

[0015] Other advantages, objectives and features of the present invention will be described in the following description to some extent, and will be apparent to those skilled in the art based on the following examination and study, or may be taught from the practice of the present invention to some extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is an overall schematic diagram of an embodiment of the utility model;

[0017] Figure 2 This is a schematic diagram of the feeding device body in the embodiment of the utility model;

[0018] Figure 3 This is a schematic diagram of a position limiting component in an embodiment of the utility model;

[0019] Figure 4 It is a schematic diagram of the adjustment component in the embodiment of the utility model.

[0020] In the figure: 1. Feeding device body; 11. Servo motor; 12. Rotating rod; 13. Limiting plate; 14. Gluing plate; 15. Conveyor belt; 2. Limiting assembly; 21. Connecting plate; 22. A rotating rod; 23. Movable arm; 24. B rotating rod; 25. Limiting arm; 3. Adjusting assembly; 31. Driving motor; 32. Fixing plate; 321. Threaded bolt; 33. Gluing roller; 34. Connecting column; 4. Stabilizing assembly; 41. Placing plate; 42. Connecting block; 43. Stabilizing column. DETAILED DESCRIPTION

[0021] The specific implementation methods of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the description of these implementation methods is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in each implementation method of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0022] Example 1, please refer to the attached Figure 1 -Attached Figure 4 A feeding mechanism of a photolithography machine includes a feeding device body 1, a limiting component 2, an adjusting component 3 and a stabilizing component 4 are respectively installed on the top and the bottom of the feeding device body 1, the adjusting component 3 includes a driving motor 31, a fixing plate 32, a glue coating roller 33 and a connecting column 34, the output end of the driving motor 31 is spline-connected to one side of the fixing plate 32, one end of the connecting column 34 is rotatably connected to the other side of the fixing plate 32, and the internal thread of the fixing plate 32 is connected with a threaded bolt 321, and the other end of the connecting column 34 is fixedly connected to one end of the glue coating roller 33.

[0023] In this embodiment, the feeding device body 1 includes a servo motor 11, a rotating rod 12, a limit plate 13, a glue coating plate 14 and a conveyor belt 15, and the output end of the servo motor 11 is spline-connected to the side of the rotating rod 12;

[0024] By setting the servo motor 11, when the servo motor 11 is started, the rotating rod 12 can be used to drive the conveyor belt 15 to move, and by setting the glue coating plate 14, the silicon wafer can be sprayed.

[0025] In this embodiment, both ends of the rotating rod 12 pass through the interior of the limit plate 13, and the two are rotationally connected. The outer surface of the rotating rod 12 is rotationally connected to the inner wall of the conveyor belt 15. The top surface of the limit plate 13 is fixedly connected to the bottom surface of the rubber coating plate 14. A sliding hole is provided on the outer surface of the limit plate 13. Threaded holes suitable for threaded bolts 321 are provided on both sides of the sliding hole, and the two are threadedly connected. The outer surface of the connecting column 34 passes through the interior of the sliding hole.

[0026] In this embodiment, the limiting assembly 2 includes a connecting plate 21, an A rotating rod 22, a movable arm 23, a B rotating rod 24 and a limiting arm 25, both ends of the A rotating rod 22 are rotatably connected to the inner wall of the connecting plate 21, and the outer surface of the A rotating rod 22 is fixedly connected to the inside of the movable arm 23;

[0027] By disposing the A rotating rod 22 and the B rotating rod 24 , the positions of the movable arm 23 and the limiting arm 25 can be adjusted respectively, so that the limiting arm 25 can meet the requirements of different silicon wafers.

[0028] Specifically, the movement of the position of the fixed plate 32 drives the connecting column 34 and the glue coating roller 33 to move synchronously, and then the position of the fixed plate 32 is fixed by the threaded bolt 321 after adjustment, so that the glue coating roller 33 can adjust the distance between itself and the conveyor belt 15 according to the different thickness of the silicon wafers, so that the silicon wafers are more evenly coated.

[0029] Example 2, please refer to the attached Figure 1 -Attached Figure 4 A feeding mechanism of a photolithography machine includes a feeding device body 1, a limiting component 2, an adjusting component 3 and a stabilizing component 4 are respectively installed on the top and the bottom of the feeding device body 1, the adjusting component 3 includes a driving motor 31, a fixing plate 32, a glue coating roller 33 and a connecting column 34, the output end of the driving motor 31 is spline-connected to one side of the fixing plate 32, one end of the connecting column 34 is rotatably connected to the other side of the fixing plate 32, and the internal thread of the fixing plate 32 is connected with a threaded bolt 321, and the other end of the connecting column 34 is fixedly connected to one end of the glue coating roller 33.

[0030] In this embodiment, both ends of the B rotating rod 24 are rotatably connected to the inner wall of the limiting arm 25, and the outer surface of the B rotating rod 24 is fixedly connected to the inner wall of the movable arm 23, and the side of the connecting plate 21 away from the movable arm 23 is fixedly connected to the inner wall of the limiting plate 13, and the movable arm 23 and the limiting arm 25 are located directly above the conveyor belt 15.

[0031] In this embodiment, the stabilizing assembly 4 includes a placement plate 41 , a connecting block 42 and a stabilizing column 43 , and the top surface of the stabilizing column 43 is fixedly connected to the bottom surface of the placement plate 41 .

[0032] In this embodiment, the bottom surfaces of the connecting block 42 and the limiting plate 13 are fixedly connected to the top surface of the placing plate 41 , and the bottom of the servo motor 11 is fixedly connected to the top of the connecting block 42 .

[0033] Specifically, the A rotating rod 22 is rotated to adjust the overall position of the movable arm 23, and the B rotating rod 24 is rotated to adjust the overall position of the limiting arm 25. By utilizing the mutual cooperation between the movable arm 23 and the limiting arm 25, silicon wafers of different sizes can be stably transported to the bottom of the coating plate 14, so that the coating plate 14 can more accurately coat the photoresist on the outer surface of the silicon wafer.

[0034] Working principle:

[0035] First, the staff adjusts the position between the limit arm 25 and the movable arm 23 according to the size of the silicon wafer, and adjusts the movable arm 23 and the limit arm 25 to a suitable distance by rotating the A rotating rod 22 and the B rotating rod 24. Then, the position of the fixed plate 32 is adjusted up and down, so that the fixed plate 32 drives the connecting column 34 and the glue coating roller 33 to reach a suitable height, and fixes the position of the fixed plate 32 by the threaded bolt 321, and then starts the drive motor 31 and the drive motor 31, and drives the conveyor belt 15 to move by rotating the rotating rod 12. At this time, the silicon wafer is placed on the top of the conveyor belt 15, and smoothly reaches the bottom of the glue coating plate 14 through the limit arm 25. At this point, the entire workflow is completed.

[0036] The above-mentioned front, back, left, right, top and bottom are all based on the figures in the specification. Figure 1 As a benchmark, according to the person's observation perspective, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the scope of protection of the present invention.

[0038] It should be noted that the equipment structure and drawings of the utility model mainly describe the principle of the utility model. In terms of the technology of the design principle, the settings of the power mechanism, power supply system and control system of the device are not fully described. On the premise that the technical personnel in this field understand the principle of the above-mentioned utility model, the details of its power mechanism, power supply system and control system can be clearly known. The control method of the application document is automatic control through a controller, and the control circuit of the controller can be realized by simple programming by technical personnel in this field.

[0039] The standard parts used therein can all be purchased from the market and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt conventional models in the prior art, and the structures and principles of the components known to technical personnel in this field can be known by these technical personnel through technical manuals or through conventional experimental methods.

[0040] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0041] For those skilled in the art, various changes, modifications, substitutions and variations can be made to these implementations without departing from the principle and spirit of the present invention, and they still fall within the protection scope of the present invention.

Claims

1. A feeding mechanism of a photolithography machine, comprising a feeding device body (1), characterized in that: The top and bottom of the feeding device body (1) are respectively installed with a limit assembly (2), an adjustment assembly (3) and a stabilization assembly (4); the adjustment assembly (3) comprises a driving motor (31), a fixing plate (32), a glue coating roller (33) and a connecting column (34); the output end of the driving motor (31) is spline-connected to one side of the fixing plate (32); one end of the connecting column (34) is rotatably connected to the other side of the fixing plate (32); the internal thread of the fixing plate (32) is connected with a threaded bolt (321); the other end of the connecting column (34) is fixedly connected to one end of the glue coating roller (33).

2. The feeding mechanism of a photolithography machine according to claim 1, characterized in that: The feeding device body (1) comprises a servo motor (11), a rotating rod (12), a limit plate (13), a glue coating plate (14) and a conveyor belt (15); the output end of the servo motor (11) is spline-connected to the side of the rotating rod (12).

3. The feeding mechanism of a photolithography machine according to claim 2, characterized in that: The two ends of the rotating rod (12) pass through the interior of the limiting plate (13), and the two are rotatably connected. The outer surface of the rotating rod (12) is rotatably connected to the inner wall of the conveyor belt (15). The top surface of the limiting plate (13) is fixedly connected to the bottom surface of the rubber coating plate (14). A sliding hole is provided on the outer surface of the limiting plate (13). Both sides of the sliding hole are provided with threaded holes suitable for threaded bolts (321), and the two are threadedly connected. The outer surface of the connecting column (34) passes through the interior of the sliding hole.

4. The feeding mechanism of a photolithography machine according to claim 1, characterized in that: The limiting assembly (2) comprises a connecting plate (21), an A rotating rod (22), a movable arm (23), a B rotating rod (24) and a limiting arm (25), wherein both ends of the A rotating rod (22) are rotatably connected to the inner wall of the connecting plate (21), and the outer surface of the A rotating rod (22) is fixedly connected to the inside of the movable arm (23).

5. The feeding mechanism of a photolithography machine according to claim 4, characterized in that: The two ends of the B rotating rod (24) are rotatably connected to the inner wall of the limiting arm (25), and the outer surface of the B rotating rod (24) is fixedly connected to the inner wall of the movable arm (23), and the side of the connecting plate (21) away from the movable arm (23) is fixedly connected to the inner wall of the limiting plate (13), and the movable arm (23) and the limiting arm (25) are located directly above the conveyor belt (15).

6. The feeding mechanism of a photolithography machine according to claim 2, characterized in that: The stabilizing assembly (4) comprises a placement plate (41), a connecting block (42) and a stabilizing column (43), wherein the top surface of the stabilizing column (43) is fixedly connected to the bottom surface of the placement plate (41).

7. The feeding mechanism of a photolithography machine according to claim 6, characterized in that: The bottom surfaces of the connecting block (42) and the limiting plate (13) are both fixedly connected to the top surface of the placement plate (41), and the bottom of the servo motor (11) is fixedly connected to the top of the connecting block (42).

Images