Parallelism detection device and calibration system

Abstract

The embodiment of the utility model provides a parallelism detection device and a calibration system, the detection device comprises a detection assembly, the detection assembly comprises a first cover plate, a second cover plate and a zero calibration plate, the first cover plate is provided with a plurality of pressure sensors, the plurality of pressure sensors are connected with springs, the other ends of the springs are connected with the second cover plate, and the zero calibration plate is connected with the second cover plate; the zero calibration plate is matched with the second cover plate; the pressure gauge is connected with the plurality of pressure sensors through cables, and the pressure gauge is used for detecting the pressure value borne by the pressure sensors. A first cover plate and a second cover plate are arranged, the first cover plate and the second cover plate are connected through a spring, the initial pressure of the spring is adjusted through a zero calibration plate and a pressure sensor, the parallelism between the first cover plate and the second cover plate is guaranteed, the position of a heater is adjusted, so that the first cover plate makes contact with the heater, and the heating efficiency is improved. And the second cover plate is in contact with the spraying head, so that the parallelism between the heater and the spraying head is ensured.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a parallelism detection device and a calibration system. Background Art

[0002] In semiconductor device manufacturing, the uniformity of thin films determines the yield of products, so it is very important to quickly and effectively calibrate the uniformity of the cavity. This also affects the running time of the machine.

[0003] The existing DXZ cavity uniformity calibration methods are generally as follows: Figure 1 As shown:

[0004] Figure 1 The calibration method shown in the figure calibrates the level between the heater and the chamber body. However, the process gas and magnetic field are transmitted to the chamber body through the showerhead during the process. Therefore, we need to try our best to ensure that the heater surface carrying the wafer and the showerhead surface are relatively level. Figure 1 The basis of the calibration method in the paper is that it is assumed that when the chamber is in the process state, the chamber body and the showerhead are in a completely horizontal relationship. In fact, during the process, the chamber body and the showerhead are not in an absolutely horizontal relationship. There are many influencing factors, such as different installation strengths of the fixing screws, or stacking of the sealing rings, or uneven coating on the surface of the showerhead, etc. Therefore, after the equipment is maintained or repaired, due to insufficient calibration accuracy, the uniformity results of the first test are usually not perfect, and the horizontal position of the heater needs to be adjusted again according to the wafer film thickness. Summary of the invention

[0005] In view of this, an embodiment of the present specification provides a parallelism detection device and a calibration system, by setting a first cover plate and a second cover plate, the first cover plate and the second cover plate are connected by a spring, and the initial pressure of the spring is adjusted by a zero point calibration plate and a pressure sensor to ensure the parallelism between the first cover plate and the second cover plate, and the position of the heater is adjusted so that the first cover plate contacts the heater and the second cover plate contacts the shower head, thereby ensuring the parallelism between the heater and the shower head.

[0006] The embodiments of this specification provide the following technical solutions: a parallelism detection device, comprising:

[0007] A detection assembly, the detection assembly comprising a first cover plate, a second cover plate and a zero point calibration plate, the first cover plate is provided with a plurality of pressure sensors, the plurality of pressure sensors are connected with springs, the other end of the springs is connected with the second cover plate, the zero point calibration plate cooperates with the second cover plate to calibrate the initial pressure value of the springs;

[0008] A pressure gauge, the pressure gauge is connected to the plurality of pressure sensors via cables, and the pressure gauge is used to detect the pressure value received by the pressure sensors;

[0009] Wherein, the first cover plate contacts with a first object to be detected, and the second cover plate contacts with a second object to be detected.

[0010] Preferably, a positioning hole is provided on the second cover plate, and a positioning column matched with the positioning hole is provided on the zero point calibration plate. When the zero point calibration plate is matched with the second cover plate, the positioning column is inserted into the positioning hole.

[0011] Preferably, the positioning hole is arranged at the center of the second cover plate, so that when the positioning column is inserted into the positioning hole, the zero point calibration plate is concentric with the second cover plate.

[0012] Preferably, the pressure sensors are arranged in one-to-one correspondence with the springs, and the pressure sensors are evenly distributed in a circle.

[0013] Preferably, four groups of pressure sensors are provided, and the four groups of pressure sensors are evenly distributed in a circle around the axis of the first cover plate.

[0014] Preferably, the pressure gauge comprises a digital pressure gauge, and the digital pressure gauge is provided with a display screen, and the display screen is used to display the pressure values ​​of the plurality of pressure sensors.

[0015] Preferably, the digital pressure gauge is also provided with a pressure calibration knob, and the pressure calibration knob is used to adjust the value on the display screen.

[0016] Preferably, the display screen is provided with four groups of display areas, the four groups of display areas correspond to four groups of pressure sensors respectively, and the pressure calibration knobs are provided with four groups, the four groups of pressure calibration knobs adjust the values ​​of the four groups of display areas respectively.

[0017] Preferably, the detection device further comprises a power supply, and the power supply supplies power to the pressure sensor and the pressure gauge.

[0018] A calibration system comprises a cavity, a cavity cover, a spray head, a heater, an adjustment mechanism and a detection device as described in any one of the above items, wherein the heater and the detection device are arranged in the cavity, the spray head is arranged on a side of the cavity cover close to the cavity, the first cover plate is in contact with the heater, the second cover plate is in contact with the spray head, the adjustment mechanism is in contact with the heater, and the adjustment mechanism adjusts the horizontality of the heater according to the value displayed by the pressure gauge.

[0019] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0020] A first cover plate and a second cover plate are provided, the first cover plate and the second cover plate are connected via a spring, and the initial pressure of the spring is adjusted via a zero point calibration plate and a pressure sensor to ensure the parallelism between the first cover plate and the second cover plate. The position of the heater is adjusted so that the first cover plate contacts the heater and the second cover plate contacts the shower head to ensure the parallelism between the heater and the shower head. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic diagram of the horizontal calibration of the heater and the sprinkler head in the prior art;

[0023] Figure 2 It is a schematic diagram of the structure of the parallelism detection device provided by the present application from the first perspective;

[0024] Figure 3 It is a schematic diagram of the structure of the parallelism detection device provided by the present application from the first perspective;

[0025] Figure 4 is a schematic diagram of the structure of the calibration system provided by the present application when the second cover plate is not in contact with the sprinkler head;

[0026] Figure 5 It is a schematic diagram of the structure when the second cover plate of the calibration system provided by the present application is in contact with the shower head.

[0027] In the figure, 1. first cover plate; 2. second cover plate; 3. zero point calibration plate; 4. pressure sensor; 5. spring; 6. pressure gauge; 7. cable; 8. positioning hole; 9. positioning column; 10. display screen; 11. pressure calibration knob; 12. cavity; 13. cavity cover; 14. sprinkler head; 15. heater. DETAILED DESCRIPTION

[0028] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0029] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0030] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0031] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0032] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0033] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0034] like Figure 2-Figure 3 As shown, a parallelism detection device comprises:

[0035] A detection component, the detection component includes a first cover plate 1, a second cover plate 2 and a zero point calibration plate 3, the first cover plate 1 is mounted with a plurality of pressure sensors 4, the plurality of pressure sensors 4 are connected with springs 5, the other end of the spring 5 is connected with the second cover plate 2, the zero point calibration plate 3 cooperates with the second cover plate 2 to calibrate the initial pressure value of the spring 5;

[0036] A pressure gauge 6, wherein the pressure gauge 6 is connected to the plurality of pressure sensors 4 via a cable 7, and the pressure gauge 6 is used to detect the pressure value received by the pressure sensor 4;

[0037] The first cover plate 1 contacts with a first object to be detected, and the second cover plate 2 contacts with a second object to be detected.

[0038] By setting a first cover plate 1 and a second cover plate 2, a plurality of pressure sensors 4 and a plurality of springs 5 ​​are set between the first cover plate 1 and the second cover plate 2, the pressure sensor 4 is set on the first cover plate 1, the first end of the spring 5 is connected to the pressure sensor 4, the second end of the spring 5 is connected to the second cover plate 2, the pressure sensor 4 is electrically connected to the pressure gauge 6, the pressure sensor 4 receives the pressure of the spring 5, and converts the pressure into a voltage signal and transmits it to the pressure gauge 6, the pressure gauge 6 is used to display the pressure size of the pressure sensor 4, and a zero point calibration plate 3 that can be matched with the second cover plate 2 is set at the same time, the zero point calibration plate 3 is placed on the second cover plate 2, so that the zero point calibration plate 3 is concentric with the second cover plate 2, to ensure that the same stress is generated by the plurality of springs 5, the pressure of each pressure sensor 4 is observed through the pressure gauge 6, and the displayed value of each pressure sensor 4 on the pressure gauge 6 is adjusted to the same value, to ensure the parallelism between the first cover plate 1 and the second cover plate 2.

[0039] like Figure 2-Figure 3 As shown, in some embodiments, a positioning hole 8 is opened on the second cover plate 2, and a positioning column 9 matching with the positioning hole 8 is set on the zero point calibration plate 3. When the zero point calibration plate 3 is matched with the second cover plate 2, the positioning column 9 is inserted into the positioning hole 8. By opening the positioning hole 8 on the second cover plate 2 and setting the positioning column 9 matching with the positioning hole 8 on the side of the zero point calibration plate 3 close to the second cover plate 2, when the zero point calibration plate 3 needs to be installed on the second cover plate 2, the positioning column 9 can be inserted into the positioning hole 8 to ensure the matching effect of the zero point calibration plate 3 and the second cover plate 2.

[0040] like Figure 2-Figure 3As shown, in some embodiments, the positioning hole 8 is arranged at the center of the second cover plate 2, so that when the positioning column 9 is inserted into the positioning hole 8, the zero point calibration plate 3 is concentric with the second cover plate 2. By opening the positioning hole 8 at the center of the second cover plate 2, the positioning column 9 is also arranged at the center of the zero point calibration plate 3. When the positioning part is inserted into the positioning hole 8, the zero point calibration plate 3 is concentric with the second cover plate 2, ensuring that the pressure of the zero point calibration plate 3 on the plurality of springs 5 ​​is the same, so that the plurality of springs 5 ​​produce the same stress.

[0041] like Figure 2-Figure 3 As shown, in some embodiments, the pressure sensors 4 are arranged in one-to-one correspondence with the springs 5, the pressure sensors 4 are evenly distributed in a circle, each group of pressure sensors 4 corresponds to a spring 5, and the pressure sensors 4 are evenly distributed in a circle on the first cover plate 1 to ensure that each group of pressure sensors 4 is subjected to uniform force.

[0042] like Figure 2-Figure 3 As shown, in some embodiments, the pressure sensors 4 are provided in four groups, and the four groups of pressure sensors 4 are evenly distributed in a circle around the axis of the first cover plate 1. By providing four groups of evenly distributed pressure sensors 4 in a circle, springs 5 ​​are connected to the four groups of pressure sensors 4 to ensure the stability of the support for the second cover plate 2.

[0043] It should be noted that in other embodiments, the number of pressure sensors 4 can also be three groups, five groups, six groups or other numbers, as long as the multiple pressure sensors 4 are evenly distributed in a circle around the axis of the first cover plate 1, and can be set according to actual conditions.

[0044] like Figure 2-Figure 3 As shown, in some embodiments, the pressure gauge 6 includes a digital pressure gauge 6, and a display screen 10 is provided on the digital pressure gauge 6. The display screen 10 is used to display the pressure values ​​of several pressure sensors 4. The digital pressure gauge 6 is provided with a display screen 10 for respectively displaying the pressure values ​​of the pressure sensors 4. The display screen 10 is provided with multiple display areas for respectively displaying the pressure values ​​of the multiple pressure sensors 4.

[0045] like Figure 2-Figure 3 As shown, in some embodiments, a pressure calibration knob 11 is also provided on the digital pressure gauge 6, and the pressure calibration knob 11 is used to adjust the value of the display screen 10. By setting the pressure calibration knob on the digital pressure gauge 6, the pressure calibration knob 11 adjusts the zero point when calibrating the initial pressure value, thereby ensuring that the initial values ​​of the four pressure sensors 4 displayed on the display screen 10 are the same.

[0046] It should be noted that the initial values ​​of the four pressure sensors 4 can be adjusted to 0.1 through the pressure calibration knob 11.

[0047] like Figure 2-Figure 3 As shown, in some embodiments, the display screen 10 is provided with four groups of display areas, the four groups of display areas correspond to the four groups of pressure sensors 4 respectively, and the four groups of pressure calibration knobs 11 are provided with four groups, and the four groups of pressure calibration knobs 11 respectively adjust the numerical values ​​of the four groups of display areas. By setting four groups of display areas and four groups of pressure calibration knobs 11, the four groups of display areas respectively display the numerical values ​​of the four groups of pressure sensors 4, and the four groups of pressure calibration knobs 11 respectively adjust the initial numerical values ​​of the four groups of pressure sensors 4.

[0048] In some embodiments, the detection device also includes a power supply, which supplies power to the pressure sensor 4 and the pressure gauge 6. A 120V AC power supply is provided to power the pressure gauge 6 and the pressure sensor 4 to ensure the normal operation of the pressure gauge 6 and the pressure sensor 4.

[0049] The zero point calibration method of the detection device is as follows:

[0050] Place the above detection device on a horizontal platform, connect a 120V power supply, insert the zero point calibration plate 3 into the second cover plate 2, and make it completely concentric so that the four springs 5 ​​produce the same stress, check the value of the pressure gauge 6, and adjust the pressure calibration knob so that the four gauges display 0.1 at the same time, remove the zero point calibration plate 3, and complete the calibration operation of the detection device.

[0051] like Figure 2-Figure 5 As shown, based on the same inventive concept, an embodiment of the present specification provides a calibration system, comprising a cavity 12, a cavity cover 13, a spray head 14, a heater 15, an adjustment mechanism and a detection device as described in any one of the above items, wherein the heater 15 and the detection device are arranged in the cavity 12, the spray head 14 is arranged on the side of the cavity cover 13 close to the cavity 12, the first cover plate 1 is in contact with the heater 15, the second cover plate 2 is in contact with the spray head 14, the adjustment mechanism is in contact with the heater 15, and the adjustment mechanism adjusts the horizontality of the heater 15 according to the value displayed by the pressure gauge 6.

[0052] During implementation, the detection device is placed stably on the surface of the heater 15 in the cavity 12, the first cover plate 1 is in contact with the heater 15, the cavity cover 13 is closed, the cavity 12 is evacuated, and the position of the heater 15 in the cavity 12 is slowly raised. As the position of the heater 15 rises, the four pressure digital gauges display the pressure value at the current position until the second cover plate 2 is in contact with the spray head 14. The level of the heater 15 is adjusted according to the different pressure values ​​of the four pressure digital gauges until the four gauges display exactly the same, thereby ensuring the parallelism of the heater 15 and the spray head 14. After the adjustment is completed, the cavity 12 is deflated, the cavity cover 13 is opened, and the detection device is taken out.

[0053] It should be noted that before closing the cavity cover 13, make sure that the cable 7 is long enough in the cavity 12 to prevent measurement failure due to insufficient cable 7 when the heater 15 moves up and down.

[0054] The same or similar parts between the various embodiments in this specification can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the method embodiment described later, since it corresponds to the system, the description is relatively simple, and the relevant parts can be referred to the partial description of the system embodiment.

[0055] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A parallelism detection device, characterized in that: include: A detection assembly, the detection assembly comprising a first cover plate, a second cover plate and a zero point calibration plate, the first cover plate is provided with a plurality of pressure sensors, the plurality of pressure sensors are connected with springs, the other end of the springs is connected with the second cover plate, the zero point calibration plate cooperates with the second cover plate to calibrate the initial pressure value of the springs; A pressure gauge, the pressure gauge is connected to the plurality of pressure sensors via cables, and the pressure gauge is used to detect the pressure value received by the pressure sensors; Wherein, the first cover plate contacts with a first object to be detected, and the second cover plate contacts with a second object to be detected.

2. The parallelism detection device according to claim 1, characterized in that: A positioning hole is provided on the second cover plate, and a positioning column matched with the positioning hole is provided on the zero point calibration plate. When the zero point calibration plate is matched with the second cover plate, the positioning column is inserted into the positioning hole.

3. The parallelism detection device according to claim 2, characterized in that: The positioning hole is arranged at the center of the second cover plate, so that when the positioning column is inserted into the positioning hole, the zero point calibration plate is concentric with the second cover plate.

4. The parallelism detection device according to any one of claims 1 to 3, characterized in that: The pressure sensors are arranged in one-to-one correspondence with the springs, and the pressure sensors are evenly distributed in a circle.

5. The parallelism detection device according to claim 4, characterized in that: The pressure sensors are arranged in four groups, and the four groups of pressure sensors are evenly distributed in a circle around the axis of the first cover plate.

6. The parallelism detection device according to claim 5, characterized in that: The pressure gauge comprises a digital pressure gauge, and a display screen is arranged on the digital pressure gauge, and the display screen is used to display the pressure values ​​of several pressure sensors.

7. The parallelism detection device according to claim 6, characterized in that: The digital pressure gauge is also provided with a pressure calibration knob, and the pressure calibration knob is used to adjust the value on the display screen.

8. The parallelism detection device according to claim 7, characterized in that: The display screen is provided with four groups of display areas, and the four groups of display areas correspond to the four groups of pressure sensors respectively. The pressure calibration knobs are provided with four groups, and the four groups of pressure calibration knobs adjust the values ​​of the four groups of display areas respectively.

9. The parallelism detection device according to claim 1, characterized in that: The detection device also includes a power supply, which supplies power to the pressure sensor and the pressure gauge.

10. A calibration system, characterized in that: It includes a cavity, a cavity cover, a spray head, a heater, an adjustment mechanism and the detection device according to any one of claims 1 to 9, wherein the heater and the detection device are arranged in the cavity, the spray head is arranged on a side of the cavity cover close to the cavity, the first cover plate is in contact with the heater, the second cover plate is in contact with the spray head, the adjustment mechanism is in contact with the heater, and the adjustment mechanism adjusts the horizontality of the heater according to the value displayed by the pressure gauge.

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