Polycrystal synthesis device convenient for temperature adjustment

CN222332138UActive Publication Date: 2025-01-10ANHUI CHENGYU SEMICON MATERIAL TECH CO LTD
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Patent Information

Application Number
CN202420235759.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-01-31
Publication Date
2025-01-10
Estimated Expiration
2034-01-31

AI Technical Summary

Technical Problem

[0005]本实用新型的目的在于提供一种便于调温的多晶合成装置,以解决上述背景技术中提出为使其始终保持在合适温度需要人工不断调整,但人工调整会浪费掉个人的时间的问题

Benefits of technology

[0014]1、该便于调温的多晶合成装置,通过安装调温组件,可使得该多晶合成装置在使用时能够根据多晶合成装置内部的热量消耗实现自主的温度补偿,使得多晶合成装置内部的温度能够保持在多晶合成的合适范围内,增强多晶合成装置在使用时的实用性与稳定性;

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Abstract

The utility model relates to the technical field of polycrystal synthesis, and discloses a polycrystal synthesis device convenient for temperature regulation, which comprises a bottom plate, a synthesis shell is fixedly arranged at the upper end of the bottom plate, a temperature regulation component is arranged in the synthesis shell, the temperature regulation component comprises a heating cavity, the heating cavity is fixedly arranged in the synthesis shell, and the temperature regulation component is arranged in the synthesis shell. A heating copper frame is fixedly installed in the middle of the heating cavity, a supporting block is fixedly installed at the outer end of the heating copper frame, the outer end of the supporting block is fixedly connected with the heating copper frame and the synthesis shell, and a heating plate is fixedly installed at the outer end of the heating copper frame. According to the polycrystal synthesis device convenient for temperature regulation, by mounting the temperature regulation assembly, the polycrystal synthesis device can realize autonomous temperature compensation according to heat consumption in the polycrystal synthesis device during use, so that the temperature in the polycrystal synthesis device can be kept in a suitable range of polycrystal synthesis; and the practicability and the stability of the polycrystalline synthesis device in use are enhanced.
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Description

Technical Field

[0001] The utility model relates to the technical field of polycrystal synthesis, in particular to a polycrystal synthesis device which is convenient for temperature regulation. Background Art

[0002] The horizontal gradient solidification method is a widely used method. The horizontal gradient solidification method uses a three-temperature zone synthesis furnace, that is, there are high-temperature zone, medium-temperature zone and low-temperature zone in the synthesis furnace. Gallium is placed in the high-temperature zone, and arsenic is placed in the low-temperature zone. The main function of the medium-temperature zone is to inhibit the diffusion of silicon in the quartz boat into the polycrystal by controlling the temperature of the medium-temperature zone. The existing polycrystal synthesis furnaces all have a certain temperature control function.

[0003] However, when the current polycrystalline synthesis device is heated for synthesis, the temperature inside the polycrystalline synthesis device will gradually drop below the appropriate temperature due to the natural consumption of heat. Therefore, in order to always keep it at the appropriate temperature, manual adjustments are required. However, manual adjustments waste personal time and are inconvenient to use. Utility Model Content

[0004] 1. Technical issues to be resolved

[0005] The utility model aims to provide a polycrystalline synthesis device which is easy to adjust the temperature, so as to solve the problem in the above background technology that manual adjustment is required to keep the temperature at a suitable level, but the manual adjustment wastes personal time.

[0006] (II) Technical solution

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a polycrystalline synthesis device that is easy to adjust the temperature, comprising a bottom plate, a synthesis shell is fixedly installed on the upper end of the bottom plate, a temperature adjustment component is arranged inside the synthesis shell, the temperature adjustment component comprises a heating chamber, the heating chamber is fixedly arranged inside the synthesis shell, a heating copper frame is fixedly installed in the middle of the heating chamber, a support block is fixedly installed on the outer end of the heating copper frame, the outer end of the support block is fixedly connected to the heating copper frame and the synthesis shell, a heating plate is fixedly installed on the outer end of the heating copper frame, a temperature sensor is fixedly installed on the outer end of the heating copper frame, and the heating plate is fixedly installed on the outer end of the heating copper frame. A controller is fixedly installed at the front end of the synthesis shell, a temperature digital display screen is fixedly installed at the front end of the controller, a temperature controller is fixedly installed at the front end of the controller on the right side of the temperature digital display screen, the temperature sensor is electrically connected to the controller, and the controller is electrically connected to the temperature digital display screen and the temperature controller. An adjustment component is arranged above the synthesis shell, so that the polycrystalline synthesis device can achieve autonomous temperature compensation according to the heat consumption inside the polycrystalline synthesis device when in use, so that the temperature inside the polycrystalline synthesis device can be maintained within the appropriate range of polycrystalline synthesis, thereby enhancing the practicality and stability of the polycrystalline synthesis device when in use.

[0008] Preferably, the adjustment component includes a first movable door, which is movably installed on the upper end of the synthesis shell, and a sealing surrounding door is rotatably installed on the upper end of the synthesis shell located in the middle of the first movable door, a sealing gasket is fixedly installed on the outer end of the sealing surrounding door, a sealing ring is opened in the middle of the sealing surrounding door, and a sealing gasket is fixedly installed in the middle of the sealing ring, so that the quartz tube in the polycrystalline synthesis device can be conveniently taken out to the outside of the polycrystalline synthesis device after heating synthesis.

[0009] Preferably, a load-bearing rod is movably installed in the middle of the sealing ring, a connecting plate is fixedly installed at the lower end of the load-bearing rod, a load-bearing placement frame is fixedly installed at the lower end of the connecting plate, a placement opening is opened in the middle of the connecting plate, the interior of the load-bearing placement frame is hollow, the placement opening is connected to the load-bearing placement frame, and a driving assembly is arranged on the outside of the synthetic shell, which makes cooling and standby operations more convenient and enhances practicality during use.

[0010] Preferably, the driving assembly includes side plates, which are fixedly mounted on the left and right ends of the synthesis shell, and a concave support plate is fixedly mounted on the upper end of the side plate, and a cylinder is fixedly mounted on the upper end of the concave support plate, and the lower end of the cylinder is fixedly connected to the upper end of the supporting weight rod, and a guide groove is opened in the middle part of the concave support plate to facilitate the discharge of the heating and temperature-controlling liquid when the polycrystalline synthesis device is in use, and the water level mark plate prompts external personnel to the maximum liquid level that should be injected.

[0011] Preferably, a guide rod is fixedly mounted on the outer end of the cylinder, the guide rod is matched with the guide groove, and an adjustment component is arranged in front of the synthesis shell to improve the practicability of the synthesis device when in use.

[0012] Preferably, the adjustment assembly includes a drain pipe, which is fixedly mounted at the front end of the heating copper frame, and the liquid outlet end of the front end of the drain pipe extends forward to the front end of the synthesis shell. A water level mark plate is fixedly mounted at the right end of the heating copper frame to enhance the handling convenience of the polycrystalline synthesis device after use.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The polycrystalline synthesis device that is easy to adjust the temperature can realize autonomous temperature compensation according to the heat consumption inside the polycrystalline synthesis device when in use by installing the temperature adjustment component, so that the temperature inside the polycrystalline synthesis device can be maintained within a suitable range for polycrystalline synthesis, thereby enhancing the practicality and stability of the polycrystalline synthesis device when in use;

[0015] 2. The polycrystalline synthesis device that is easy to adjust the temperature can be conveniently taken out of the polycrystalline synthesis device after heating and synthesis by installing a driving component and an adjusting component, so that the quartz tube in the polycrystalline synthesis device can be conveniently taken out to the outside of the polycrystalline synthesis device, and the cooling standby operation can be more conveniently performed, thereby enhancing the practicality during use;

[0016] 3. The polycrystalline synthesis device that is easy to adjust the temperature can be installed with an adjustment component to facilitate the discharge of the heating and temperature-controlling liquid when the polycrystalline synthesis device is in use, and the water level mark plate prompts external personnel to the maximum liquid level that should be injected. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the cross-sectional structure of the utility model;

[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of the sealed enclosure door of the utility model;

[0020] Figure 4 For this utility model Figure 1 The enlarged structural diagram at A in the middle;

[0021] Figure 5 For this utility model Figure 2 Enlarged structural diagram at B in the middle.

[0022] In the figure: 1. bottom plate; 2. composite shell; 3. adjustment component; 301. first movable door; 302. sealed surrounding door; 303. sealing gasket; 304. sealing ring; 305. sealing gasket; 306. load-bearing rod; 307. connecting plate; 308. load-bearing placement frame; 309. placement port; 4. driving component; 401. side plate; 402. concave support plate; 403. cylinder; 404. guide groove; 405. guide rod; 5. temperature control component; 501. heating chamber; 502. heating copper frame; 503. support block; 504. heating plate; 505. temperature sensor; 506. controller; 507. temperature digital display screen; 508. thermostat; 6. adjustment component; 601. discharge pipe; 602. water level mark plate. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Embodiment 1

[0025] See also Figure 1 , Figure 2 and Figure 5 A polycrystalline synthesis device convenient for temperature adjustment comprises a bottom plate 1, a synthesis shell 2 is fixedly installed on the upper end of the bottom plate 1, a temperature adjustment component 5 is arranged inside the synthesis shell 2, the temperature adjustment component 5 comprises a heating chamber 501, the heating chamber 501 is fixedly arranged inside the synthesis shell 2, a heating copper frame 502 is fixedly installed in the middle of the heating chamber 501, a support block 503 is fixedly installed on the outer end of the heating copper frame 502, the outer end of the support block 503 is fixedly connected to the heating copper frame 502 and the synthesis shell 2, and the outer end of the heating copper frame 502 is fixedly installed. A heating plate 504 is installed, a temperature sensor 505 is fixedly installed on the outer end of the heating copper frame 502, a controller 506 is fixedly installed on the front end of the synthetic shell 2, a temperature digital display screen 507 is fixedly installed on the front end of the controller 506, a thermostat 508 is fixedly installed on the front end of the controller 506 and located on the right side of the temperature digital display screen 507, the temperature sensor 505 is electrically connected to the controller 506, the controller 506 is electrically connected to the temperature digital display screen 507 and the thermostat 508, and an adjustment component 3 is arranged above the synthetic shell 2.

[0026] Embodiment 2

[0027] See also Figure 1-Figure 4According to the first embodiment, an adjustment component 3 is added, including a first movable door 301, which is movably installed on the upper end of the synthetic shell 2, and the upper end of the synthetic shell 2 is located in the middle of the first movable door 301 and is rotatably installed with a sealed surrounding door 302, and a sealing gasket 305 is fixedly installed on the outer end of the sealed surrounding door 302, and a sealing ring 304 is provided in the middle of the sealed surrounding door 302, and a sealing gasket 305 is fixedly installed in the middle of the sealing ring 304, and a supporting rod 306 is movably installed in the middle of the sealing ring 304, and a connecting plate 307 is fixedly installed at the lower end of the supporting rod 306, and a load-bearing placement frame 308 is fixedly installed at the lower end of the connecting plate 307, A placement opening 309 is provided in the middle of the connecting plate 307, the interior of the load-bearing placement frame 308 is hollowed out, the placement opening 309 is communicated with the load-bearing placement frame 308, a driving assembly 4 is provided on the outside of the synthetic shell 2, and the driving assembly 4 includes a side plate 401, the side plate 401 is fixedly installed on the left and right ends of the synthetic shell 2, a concave support plate 402 is fixedly installed on the upper end of the side plate 401, a cylinder 403 is fixedly installed on the upper end of the concave support plate 402, the lower end of the cylinder 403 is fixedly connected to the upper end of the support rod 306, a guide groove 404 is provided in the middle of the concave support plate 402, and a guide rod 405 is fixedly installed on the outer end of the cylinder 403. The rod 405 is matched with the guide groove 404. An adjustment assembly 6 is arranged in front of the synthesis shell 2. The adjustment assembly 6 includes a discharge pipe 601. The discharge pipe 601 is fixedly installed at the front end of the heating copper frame 502. The liquid outlet end of the front end of the discharge pipe 601 extends forward to the front end of the synthesis shell 2. A water level mark plate 602 is fixedly installed at the right end of the heating copper frame 502. When it is necessary to perform polycrystalline synthesis on the sealed quartz tube, the first movable door 301 is rotated backward, and the sealing surrounding door 302 is rotated forward, and the sealed quartz tube after welding is placed in the load-bearing placement frame 308 through the placement port 309, and then the first movable door 301 and the sealing surrounding door 302 are closed. 02, so that the sealed surrounding door 302 seals the supporting rod 306, and then the heating plate 504 is started by controlling the temperature controller 508. The heating plate 504 heats the heating copper frame 502, so that the inner wall of the heating copper frame 502 is heated. After the temperature is raised, the quartz tube in the load-bearing placement frame 308 in the heating copper frame 502 is polycrystalline. When the temperature of the heating copper frame 502 drops, the temperature sensor 505 detects that the temperature is lower than the set threshold. The temperature sensor 505 sends a signal to the controller 506. The controller 506 controls the temperature controller 508, so that the temperature controller 508 adjusts the heating plate 504 to the appropriate threshold of the temperature sensor 505.

[0028] Working principle: When it is necessary to perform polycrystalline synthesis on the sealed quartz tube, rotate the first movable door 301 backward and rotate the sealed enclosure door 302 forward, and place the sealed quartz tube in the load-bearing placement frame 308 through the placement port 309, then close the first movable door 301 and the sealed enclosure door 302, so that the sealed enclosure door 302 seals the load-bearing rod 306, and then control the start of the heating plate 504 through the temperature controller 508. The heating plate 504 heats the heating copper frame 502, so that the inner wall of the heating copper frame 502 is heated. After the temperature is raised, polycrystalline generation is performed on the quartz tube in the load-bearing placement frame 308 in the heating copper frame 502. When the temperature of the heating copper frame 502 drops, the temperature sensor 505 detects that the temperature is lower than the set threshold, and the temperature sensor 505 sends a signal to the controller 506. The controller 506 controls the temperature controller 508, so that the temperature controller 508 adjusts the heating plate 504 to the appropriate threshold of the temperature sensor 505.

[0029] Finally, it should be noted that the above content is only used to illustrate the technical solution of the utility model, rather than to limit the protection scope of the utility model. Simple modifications or equivalent substitutions of the technical solution of the utility model by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the utility model.

Claims

1. A polycrystalline synthesis device that is easy to adjust the temperature, comprising a bottom plate (1), characterized in that: A synthetic housing (2) is fixedly mounted on the upper end of the bottom plate (1), a temperature regulating component (5) is arranged inside the synthetic housing (2), the temperature regulating component (5) comprises a heating chamber (501), the heating chamber (501) is fixedly arranged inside the synthetic housing (2), a heating copper frame (502) is fixedly mounted in the middle of the heating chamber (501), a supporting block (503) is fixedly mounted on the outer end of the heating copper frame (502), the outer end of the supporting block (503) is fixedly connected to the synthetic housing (2), and a heating plate (504) is fixedly mounted on the outer end of the heating copper frame (502). ), a temperature sensor (505) is fixedly installed on the outer end of the heating copper frame (502), a controller (506) is fixedly installed on the front end of the synthetic shell (2), a temperature digital display screen (507) is fixedly installed on the front end of the controller (506), a temperature controller (508) is fixedly installed on the front end of the controller (506) and located on the right side of the temperature digital display screen (507), the temperature sensor (505) is electrically connected to the controller (506), the controller (506) is electrically connected to the temperature digital display screen (507) and the temperature controller (508), and an adjustment component (3) is arranged above the synthetic shell (2).

2. The polycrystalline synthesis device that is easy to adjust the temperature according to claim 1, characterized in that: The adjustment component (3) comprises a first movable door (301), the first movable door (301) being movably mounted on the upper end of the synthetic shell (2), a sealing surrounding door (302) being rotatably mounted on the upper end of the synthetic shell (2) located in the middle of the first movable door (301), a sealing gasket (305) being fixedly mounted on the outer end of the sealing surrounding door (302), a sealing ring (304) being provided in the middle of the sealing surrounding door (302), and a sealing gasket (305) being fixedly mounted on the middle of the sealing ring (304).

3. The polycrystalline synthesis device that is easy to adjust the temperature according to claim 2, characterized in that: A load-bearing rod (306) is movably installed in the middle of the sealing ring (304), a connecting plate (307) is fixedly installed at the lower end of the load-bearing rod (306), a load-bearing placement frame (308) is fixedly installed at the lower end of the connecting plate (307), a placement opening (309) is opened in the middle of the connecting plate (307), the interior of the load-bearing placement frame (308) is hollow, and the placement opening (309) is connected to the load-bearing placement frame (308), and a driving component (4) is arranged on the outer side of the synthetic shell (2).

4. The polycrystalline synthesis device that is easy to adjust the temperature according to claim 3, characterized in that: The driving assembly (4) includes a side plate (401), and the side plate (401) is fixedly mounted on the left and right ends of the synthetic shell (2); a concave support plate (402) is fixedly mounted on the upper end of the side plate (401); a cylinder (403) is fixedly mounted on the upper end of the concave support plate (402); the lower end of the cylinder (403) is fixedly connected to the upper end of the supporting rod (306); and a guide groove (404) is provided in the middle of the concave support plate (402).

5. The polycrystalline synthesis device that is easy to adjust the temperature according to claim 4, characterized in that: A guide rod (405) is fixedly mounted on the outer end of the cylinder (403), and the guide rod (405) is matched with the guide groove (404). An adjustment component (6) is arranged in front of the composite housing (2).

6. The polycrystalline synthesis device that is easy to adjust the temperature according to claim 5, characterized in that: The adjustment component (6) comprises a drainage pipe (601), wherein the drainage pipe (601) is fixedly mounted at the front end of the heating copper frame (502), and the liquid outlet end of the front end of the drainage pipe (601) extends forward to the front end of the synthetic shell (2), and a water level marking plate (602) is fixedly mounted at the right end of the heating copper frame (502).