Topcon cell tunneling oxide film layer uniformity detection device

Abstract

The utility model discloses a Topcon cell tunneling oxide film layer uniformity detection device, which belongs to the photovoltaic field, and comprises an experiment piece, a quantitative solution injector, a real-time humidity tester, a corrosive liquid and a data processor, the rear end of the quantitative solution injector is connected with the corrosive liquid, the front end of the quantitative solution injector is movably connected with the experiment piece, and a sample on the experiment piece is corroded through the quantitative solution injector; the front end of the real-time humidity tester is movably connected with the experiment piece, and the real-time humidity tester is used for real-time measurement; the rear end of the real-time humidity tester is connected with a data processor, and the data processor is used for data processing. The Topcon cell tunneling oxide film layer uniformity detection device provided by the utility model has an important meaning for realizing an excellent passivation effect and photoelectric conversion efficiency of Topcon.

Description

Technical Field

[0001] The present invention relates to the photovoltaic field, and in particular to a Topcon battery tunneling oxide layer film uniformity detection device. Background Art

[0002] Topcon battery (Tunnel oxide passivating contacts) is a new type of passivated contact battery. The passivation advantage of Topcon battery lies in the unique tunnel oxide layer (SiOx, 1-2nm) and polysilicon layer (poly). Its main mechanism of action is that SiOx allows majority carriers (electrons) to pass through and enter the poly layer, while blocking the recombination of minority carriers (holes). The majority carriers are transmitted laterally in the poly layer and collected by the metal, reducing the metal contact recombination current and improving Voc and Isc.

[0003] In addition, Topcon's passivation advantage also lies in hydrogen passivation. In order to better improve the photoelectric conversion efficiency of Topcon battery industrial production, it is necessary to reduce surface and internal impurities and defects through hydrogen passivation. Hydrogen passivation technology mainly uses the hydrogen inside the passivation layer on the surface of the battery to diffuse into the wafer during the metallization process to achieve the passivation effect. However, the density of the cell tunneling oxide layer will directly affect the content of hydrogen in the film layer, that is, the effect of hydrogen passivation. Therefore, ensuring the uniform density of the tunneling oxide layer at different positions of the same cell is crucial to improving the passivation effect.

[0004] To this end, the present invention proposes a Topcon battery tunneling oxide layer film uniformity detection device. Summary of the invention

[0005] In order to solve the deficiencies in the above-mentioned prior art, the present invention proposes a Topcon battery tunneling oxide layer film uniformity detection device. The application principle of the device of the present invention is: the SiOx layer is hydrophilic and HF acid is corrosive. When the test piece (after the tunneling oxide layer is deposited) contacts the HF solution, the solution will adsorb to the test piece and move upward, and then etch the tunneling SiOx layer. When the density is low, the SiOx layer is quickly etched completely, and when it contacts the hydrophobic silicon surface, the liquid level will immediately drop. At the same time, the change in liquid level will also cause a change in the humidity value at that point. The above method is used to solve the problems existing in the prior art.

[0006] The present invention is achieved in that:

[0007] A Topcon battery tunneling oxide layer film uniformity detection device, characterized in that the device includes: a test piece, a quantitative solution injector, a real-time humidity tester, a corrosive solution, and a data processor; the rear end of the quantitative solution injector is connected to the corrosive solution, the front end of the quantitative solution injector is movably connected to the test piece, and the sample on the test piece is corroded by the quantitative solution injector; the front end of the real-time humidity tester is movably connected to the test piece, and the real-time humidity tester is used for real-time measurement; the rear end of the real-time humidity tester is connected to the data processor, and the data processor is used for data processing.

[0008] In the present invention, different positions of the HF solution corrosion test piece are used, and the time when the corrosion liquid level reaches the humidity critical value is recorded by a real-time humidity tester. The variance of the etching time at different positions is calculated to illustrate the uniformity of the tunneling oxide layer film at different positions. The Topcon battery tunneling oxide layer film uniformity detection device proposed in the present invention is of great significance for Topcon to achieve excellent passivation effect and photoelectric conversion efficiency.

[0009] Furthermore, the test piece is fixed by a test piece vacuum suction cup, and the center of the test piece is placed on the test piece vacuum suction cup.

[0010] Furthermore, the quantitative solution injector can control the fixed position to add a quantitative and equal amount of corrosion solution; five corrosion positions a, b, c, d, and e are set on the test piece.

[0011] Furthermore, the etching solution is an HF solution, and the molar concentration of the HF solution is 10%-20%; the tunneling SiOx layer on the back of the experimental piece is hydrophilic, and the HF acid in the etching solution is corrosive. When the experimental piece, that is, after the tunneling oxide layer is deposited, contacts the HF solution, the solution will be adsorbed to the experimental piece and move upward, and then the tunneling SiOx layer will be etched; when the SiOx density is uneven, the SiOx layer with a relatively low density is quickly etched completely, and when it contacts the hydrophobic silicon surface, the liquid level will immediately drop; at the same time, the change in the liquid level will also cause a change in the humidity value at that point.

[0012] Furthermore, the real-time humidity tester reads the humidity change value and time in the fixed area at the position in real time after the etching liquid is added; through multiple experiments, the critical humidity value after the etching liquid page starts to rise and fall is simulated, and recorded in the humidity tester as the setting value for the start and end of the timing.

[0013] Furthermore, a plastic cover for limiting the humidity test range is placed at the front end of the real-time humidity tester to ensure that the humidity test range is an area where humidity differences caused by liquid level changes can be measured.

[0014] Furthermore, the data processor can be a moving path for the quantitative solution injector and the real-time humidity tester; summarize the corrosion time values ​​of the real-time humidity tester and five different positions a, b, c, d, and e on the test piece, and calculate the mean and variance.

[0015] The present invention provides a Topcon battery tunneling oxide layer film uniformity detection device, characterized in that the device is used to detect the uniformity of the tunneling oxide layer, comprising the following steps:

[0016] Step 1: Fix the test piece on the test piece vacuum suction cup;

[0017] Step 2: using a quantitative solution syringe to add a quantitative and equal amount of etching solution to a fixed position of the test piece; the etching solution is a 10% HF solution;

[0018] Step 3: Use a real-time humidity tester to read the humidity change at the location after the corrosive liquid is added; and record the time interval for the humidity to reach the critical value;

[0019] Step 4: Move the quantitative solution syringe and the real-time humidity tester to test the five points a, b, c, d, and e on the test piece in turn, summarize the HF corrosion time values ​​at the five positions measured by the humidity tester, and calculate the mean and variance.

[0020] Compared with the prior art, the beneficial effects of the present invention are: high detection efficiency. The automatic detection device can realize rapid detection of the uniformity of the tunneling oxide layer of the test piece through automated and intelligent technical means, thereby greatly improving the detection efficiency; high detection accuracy. The automatic detection device adopts advanced data processing technology to realize high-precision qualitative and quantitative detection of the test piece. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the structure of a Topcon battery tunneling oxide layer film uniformity detection device according to the present invention;

[0022] Figure 2 It is a characteristic of a humidity tester reading a critical humidity value in an embodiment of a Topcon battery tunneling oxide layer film uniformity detection device of the present invention;

[0023] Among them, 1-experimental piece vacuum suction cup, 2-experimental piece, 3-quantitative solution syringe, 4-real-time humidity tester, 5-corrosive liquid, 6-data processor. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and effect of the present invention clearer and more specific, the present invention is further described in detail by enumerating examples below. It should be noted that the specific implementation described here is only used to explain the present invention and is not used to limit the present invention.

[0025] like Figure 1 As shown, the device of the present invention includes: a test piece 2, a quantitative solution injector 3, a real-time humidity tester 4, a corrosive liquid 5, and a data processor 6; the rear end of the quantitative solution injector 3 is connected to the corrosive liquid 5, and the front end of the quantitative solution injector 3 is movably connected to the test piece 2, and the sample on the test piece 2 is corroded by the quantitative solution injector 3; the quantitative solution injector 3 can control the addition of a quantitative and equal amount of corrosive liquid at a fixed point; five corrosion positions a, b, c, d, and e are set on the test piece 2.

[0026] The front end of the real-time humidity tester 4 is movably connected to the experimental piece 2, and the real-time humidity tester 4 is used for real-time measurement; the back end of the real-time humidity tester 4 is connected to the data processor 6, and the data processor 6 is used for data processing. Among them, the experimental piece 2 is fixed by the experimental piece vacuum suction cup 1, and the center position of the experimental piece 2 is placed on the experimental piece vacuum suction cup 1. The real-time humidity tester 4 reads the humidity change value and time in the fixed area of ​​the position in real time after the corrosive liquid is dripped; through multiple experiments, the critical humidity value after the corrosive liquid page starts to rise and fall is simulated, and recorded in the humidity tester as the setting value for the start and end of the timing. A plastic cover that limits the humidity test range is placed at the front end of the real-time humidity tester 4 to ensure that the humidity test range is the area where the humidity difference caused by the liquid level change can be measured.

[0027] The etching solution 5 is an HF solution, and the concentration of the HF solution is 10%. The principle is that the SiOx layer is hydrophilic and the HF acid is corrosive. When the experimental piece (after the tunneling oxide layer is deposited) contacts the HF solution, the solution will be adsorbed to the experimental piece and move upward, and then the tunneling SiOx layer will be etched. When the density is low, the SiOx layer will be completely etched quickly, and when it contacts the hydrophobic silicon surface, the liquid level will drop immediately. At the same time, the change of the liquid level will also cause the change of the humidity value at that point.

[0028] The data processor 6 can calculate the moving paths of the quantitative solution injector 3 and the real-time humidity tester 4; summarize the corrosion time values ​​of five different positions a, b, c, d, and e on the real-time humidity tester 4 and the test piece 5, and calculate the mean and variance.

[0029] The device of the present invention is used to detect the uniformity of the tunneling oxide layer. The HF solution is used to corrode different positions of the test piece, and the time when the etching liquid level reaches the humidity critical value is recorded by using a real-time humidity tester. The variance of the etching time at different positions is calculated to illustrate the uniformity of the tunneling oxide layer film at different positions. The specific steps are:

[0030] Step 1, fix the test piece 2 on the test piece vacuum suction cup 1;

[0031] Step 2: using a quantitative solution syringe 3 to add a quantitative and equal amount of etching solution 5 to a fixed position of the test piece 2; the etching solution 5 is a HF solution with a concentration of 10%;

[0032] Step 3, using the real-time humidity tester 4, reading the humidity change at the location after the etching solution is added; and recording the time interval for the humidity to reach the critical value;

[0033] Step 4, move the quantitative solution injector 3 and the real-time humidity tester 4, test the five points a, b, c, d, and e on the test piece 2 in sequence, summarize the HF corrosion time values ​​of the five positions measured by the humidity tester, and calculate the mean and variance.

[0034] like Figure 2 As shown, Figure 2 This is a characteristic of the humidity tester reading the critical humidity value in an embodiment of a Topcon battery tunneling oxide layer film uniformity detection device of the present invention. After the test piece is fixed, a certain amount of etching liquid will first cover the fixed point, at which time the humidity value 1 is recorded; then the solution will be adsorbed to the test piece and move upward to etch the tunneling SiOx layer; when the SiOx layer is completely etched, it will contact the hydrophobic silicon surface, and the liquid level will drop immediately; when the liquid level just drops to a position below the fixed point, the time 2 and humidity value 2 are recorded. The difference between time 1 and 2 is the required corrosion time of SiOx at that point.

[0035] The above description is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several improvements without departing from the principle of the present invention, and these improvements should also be regarded as within the protection scope of the present invention.

Claims

1. A Topcon battery tunneling oxide layer film uniformity detection device, characterized in that: The device comprises: a test piece (2), a quantitative solution injector (3), a real-time humidity tester (4), a corrosive liquid (5), and a data processor (6); the rear end of the quantitative solution injector (3) is connected to the corrosive liquid (5), the front end of the quantitative solution injector (3) is movably connected to the test piece (2), and the sample on the test piece (2) is corroded by the quantitative solution injector (3); the front end of the real-time humidity tester (4) is movably connected to the test piece (2), and the real-time humidity tester (4) is used for real-time measurement; the rear end of the real-time humidity tester (4) is connected to the data processor (6), and the data processor (6) is used for data processing.

2. A Topcon battery tunneling oxide layer film uniformity detection device according to claim 1, characterized in that: The test piece (2) is fixed by the test piece vacuum suction cup (1), and the center position of the test piece (2) is placed on the test piece vacuum suction cup (1).

3. A Topcon battery tunneling oxide layer film uniformity detection device according to claim 1, characterized in that: The quantitative solution injector (3) can control the fixed point position to add a quantitative and equal amount of etching solution; five etching positions a, b, c, d, and e are set on the test piece (2).

4. A Topcon battery tunneling oxide layer film uniformity detection device according to claim 1, characterized in that: The etching solution (5) is an HF solution, and the molar concentration of the HF solution is 10%-20%; the tunneling SiOx layer on the back of the experimental piece is hydrophilic, and the HF acid in the etching solution (5) is corrosive.

5. A Topcon battery tunneling oxide layer film uniformity detection device according to claim 1, characterized in that: A plastic cover for limiting the humidity test range is placed at the front end of the real-time humidity tester (4) to ensure that the humidity test range is an area where humidity differences caused by liquid level changes can be measured.

6. A Topcon battery tunneling oxide layer film uniformity detection device according to claim 1, characterized in that: The data processor (6) can move the paths of the quantitative solution injector (3) and the real-time humidity tester (4); summarize the corrosion time values ​​of the real-time humidity tester (4) and five different positions a, b, c, d, and e on the test piece (2), and calculate the mean and variance.

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