Small sports table

Abstract

The utility model relates to the field of motion platforms, in particular to a small motion platform which comprises a base, a carrying platform arranged above the base, and a driving device and a guide rail assembly which are arranged between the base and the carrying platform. A first mounting groove is formed in the lower end of the carrying table, and a second mounting groove corresponding to the first mounting groove is formed in the upper end of the base; the driving device is fixedly connected in the second mounting groove, and the driving end of the driving device is connected with the first mounting groove; the guiding direction of the guide rail assembly is parallel to the driving direction of the driving device. The corresponding mounting grooves are formed in the multiple carrying tables and the base, space is provided for mounting of the driving device, the guide rail assembly and the like, and the overall height of the motion platform can be reduced through embedded mounting; and meanwhile, the side walls of the mounting grooves are equivalent to reinforcing ribs, so that the strength of the base or the carrying table is enhanced, and the stability during use is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sports platforms, in particular to a small sports platform. Background Art

[0002] In stepper lithography equipment, a motion platform is required to load the wafer for reciprocating motion. However, the height space at the top of the electric cylinder of the lithography machine is limited, and a motion platform with a smaller structure is required. The motion platform of the prior art is usually too high to be directly applied to the lithography machine; in addition, the motion platform used in the lithography machine has a high precision, and the thin plate directly used as the base or stage in the prior art is prone to deformation after long-term use, and is unstable to use. Therefore, how to set up a small and precise motion platform in a limited space is a problem that technicians in this field need to consider. Utility Model Content

[0003] The utility model aims to provide a small sports platform to solve the problems of large size and low stability in use of the sports platform in the prior art.

[0004] The technical solution of the utility model is: a small sports table, comprising a base and a carrier arranged above the base, and a driving device and a guide rail assembly arranged between the base and the carrier; a first mounting groove is arranged at the lower end of the carrier, and a second mounting groove corresponding to the first mounting groove is arranged at the upper end of the base; the driving device is fixedly connected in the second mounting groove and its driving end is connected to the first mounting groove; the guiding direction of the guide rail assembly is parallel to the driving direction of the driving device;

[0005] The lower end of the base is provided with a third mounting groove and a fourth mounting groove connected to the third mounting groove, a grating sensor is arranged in the third mounting groove, and a connecting line of the grating sensor is led out of the base through the fourth mounting groove.

[0006] Preferably, a cover plate is embedded in the lower end of the base, the lower end surface of the cover plate and the lower end surface of the base are on the same horizontal plane, and the cover plate covers the third mounting groove and the fourth mounting groove.

[0007] Preferably, a grating ruler is connected to the lower end of the carrier, and a clearance hole is opened on the bottom surface of the third mounting groove, and the grating sensor can sense the grating ruler through the clearance hole.

[0008] Preferably, the driving ends of the driving device are symmetrically arranged and arranged on both sides of the driving device, and one end of the driving end away from the driving device is connected to a fixing block, and the fixing block is fixedly connected to the bottom of the first mounting groove.

[0009] Preferably, at least two guide rail assemblies are provided, which are parallel to each other and symmetrically arranged at both ends of the base; the fixed part of the guide rail assembly is fixedly arranged on the base, and the sliding part is fixedly arranged on the carrier.

[0010] Preferably, the guide rail assembly is a cross roller guide rail.

[0011] Preferably, a first limit block is connected to the bottom of the first installation slot, and a second limit block is connected to the bottom of the second installation slot; in the driving direction of the driving device, two second limit blocks are provided and are arranged on both sides of the first limit block.

[0012] Compared with the prior art, the advantages of the utility model are:

[0013] (1) By setting corresponding mounting grooves on the multi-carrier and the base, space is provided for the installation of the drive device, guide rail assembly, etc., and the overall height of the motion platform can be reduced through embedded installation; at the same time, the side walls of the mounting grooves are equivalent to reinforcing ribs, which strengthen the strength of the base or carrier and increase stability during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0015] Figure 1 The structure of the small sports platform described in the utility model is shown in FIG. Figure 1 ;

[0016] Figure 2 The structure of the small sports platform described in the utility model is shown in FIG. Figure 2 ;

[0017] Figure 3 The structure of the base of the utility model is shown in FIG. Figure 1 ;

[0018] Figure 4 The structure of the base of the utility model is shown in FIG. Figure 2 ;

[0019] Figure 5 It is a structural schematic diagram of the carrier described in the utility model.

[0020] Among them: base 1, second mounting groove 11, second limit block 111, third mounting groove 12, clearance hole 121, fourth mounting groove 13, cover plate 14, carrier 2, first mounting groove 21, first limit block 211, drive device 3, drive end 31, fixed block 311, guide rail assembly 4, grating sensor 5, grating ruler 51. DETAILED DESCRIPTION

[0021] The following is a further detailed description of the present invention in conjunction with specific embodiments:

[0022] like Figure 1-5 As shown, a small motion table includes a base 1 and a carrier 2 arranged above the base 1, the lower end surface of the base 1 and the upper end surface of the carrier 2 are parallel to each other, and the base 1 and the carrier 2 are not in direct contact with each other, and are connected by a driving device 3 and a guide rail assembly 4 arranged between the base 1 and the carrier 2, wherein the guiding direction of the guide rail assembly 4 is parallel to the driving direction of the driving device 3; the base 1 is fixedly mounted on the electric cylinder of the lithography machine; under the drive of the driving device 3, the carrier 2 can reciprocate along the transmission direction of the guide rail assembly 4.

[0023] The lower end of the carrier 2 is provided with a first mounting groove 21, and the upper end of the base 1 is provided with a second mounting groove 11 corresponding to the first mounting groove 21; the driving device 3 is fixedly connected in the second mounting groove 11 and its driving end 31 is connected to the first mounting groove 21. A first limit block 211 is connected to the bottom of the first mounting groove 21, and a second limit block 111 is connected to the bottom of the second mounting groove 11; in the driving direction of the driving device 3, two second limit blocks 111 are provided, and are arranged on both sides of the first limit block 211.

[0024] In this embodiment, the two second limit blocks 111 are respectively arranged on both sides of the second mounting groove 11 and along the direction of the reciprocating motion of the carrier 2. When the first limit block 211 reciprocates with the carrier 2, it approaches the second limit blocks 111 at both ends at the maximum strokes in the two reciprocating directions, but does not touch them. By setting the first limit block 211 and the second limit block 111, it is possible to avoid the carrier 2 from moving beyond the maximum stroke during a malfunction or debugging, that is, to avoid exceeding the maximum movement stroke of the guide rail assembly 4. In other preferred embodiments, two first limit blocks 211 can also be provided and symmetrically arranged, and the two first limit blocks 211 correspond to the second limit blocks 111 at both ends respectively.

[0025] The lower end of the base 1 is provided with a third mounting groove 12 and a fourth mounting groove 13 connected to the third mounting groove 12. The third mounting groove 12 is provided with a grating sensor 5, and the connecting line of the grating sensor 5 (not shown in the figure) is led out of the base 1 through the fourth mounting groove 13. A cover plate 14 is embedded in the lower end of the base 1. The lower end surface of the cover plate 14 is on the same horizontal plane as the lower end surface of the base 1, and the cover plate 14 covers the third mounting groove 12 and the fourth mounting groove 13. The lower end of the carrier 2 is connected with a grating ruler 51. A clearance hole 121 is opened on the bottom surface of the third mounting groove 12. The grating sensor 5 can sense the grating ruler 51 through the clearance hole 121. In this embodiment, the fourth mounting groove 13 is shallower than the third mounting groove 12, and the third mounting groove 12 is embedded in the bottom surface of the base 1 to ensure the overall strength of the base 1 to the greatest extent. In addition, the positions of the third mounting groove 12 and the fourth mounting groove 13 are staggered from the second mounting groove 11 to further increase the utilization of space and reduce the overall height of the exercise platform. The cover plate 14 covers the third mounting groove 12 and the fourth mounting groove 13 and is connected to both sides of the third mounting groove 12 by bolts, which further strengthens the base 1.

[0026] The driving end 31 of the driving device 3 is symmetrically arranged and arranged on both sides of the driving device 3. The end of the driving end 31 away from the driving device 3 is connected to a fixing block 311, and the fixing block 311 is fixedly connected to the bottom of the first mounting groove 21. At least two guide rail assemblies 4 are provided, which are parallel to each other and symmetrically arranged at both ends of the base 1; the guide rail assembly 4 can be a cross roller guide rail, and of course other high-precision guide rail equipment can also be selected, and its fixed part is fixedly arranged on the base 1, and the sliding part is fixedly arranged on the carrier 2.

[0027] In this embodiment, in order to ensure the precision and speed of the drive, the drive device 3 can use a linear motor. Of course, according to the actual use requirements, a servo motor or other high-precision drive equipment can also be used. In order to further ensure the stability of the movement of the carrier 2, the drive device 3 is set as a double-head drive, and the transmission end can be a transmission shaft, and both ends are connected to the carrier 2 through the fixed block 311 at the same time, so that when the drive device 3 drives the movement, the force on the carrier 2 in the front and back of the movement direction is the same; especially in the process of acceleration or deceleration of the high-speed movement of the carrier 2, the instability caused by the problem of uneven force on the driving movement is avoided.

[0028] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

Claims

1. A small sports table, characterized in that: The invention comprises a base and a platform arranged above the base, and a driving device and a guide rail assembly arranged between the base and the platform; a first mounting groove is arranged at the lower end of the platform, and a second mounting groove corresponding to the first mounting groove is arranged at the upper end of the base; the driving device is fixedly connected in the second mounting groove and its driving end is connected to the first mounting groove; the guiding direction of the guide rail assembly is parallel to the driving direction of the driving device; The lower end of the base is provided with a third mounting groove and a fourth mounting groove connected to the third mounting groove, a grating sensor is arranged in the third mounting groove, and a connecting line of the grating sensor is led out of the base through the fourth mounting groove.

2. A small sports table according to claim 1, characterized in that: A cover plate is embedded in the lower end of the base, the lower end surface of the cover plate and the lower end surface of the base are on the same horizontal plane, and the cover plate covers the third installation groove and the fourth installation groove.

3. A small sports table according to claim 1, characterized in that: The lower end of the carrier is connected with a grating ruler, and a clearance hole is opened on the bottom surface of the third installation groove, and the grating sensor can sense the grating ruler through the clearance hole.

4. A small sports table according to claim 1, characterized in that: The driving ends of the driving device are symmetrically arranged and arranged on both sides of the driving device. One end of the driving end away from the driving device is connected to a fixing block, and the fixing block is fixedly connected to the bottom of the first mounting groove.

5. A small sports table according to claim 1, characterized in that: At least two guide rail assemblies are provided, which are parallel to each other and symmetrically arranged at two ends of the base; the fixed part of the guide rail assembly is fixedly arranged on the base, and the sliding part is fixedly arranged on the carrier.

6. A small sports table according to claim 4, characterized in that: The guide rail assembly is a cross roller guide rail.

7. A small sports platform according to claim 1, characterized in that: A first limiting block is connected to the bottom of the first installation slot, and a second limiting block is connected to the bottom of the second installation slot; in the driving direction of the driving device, two second limiting blocks are provided and are arranged on both sides of the first limiting block.

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