Rapid arc extinguishing direct current sputtering power supply device

Abstract

The utility model discloses a rapid arc-extinguishing direct-current sputtering power supply device, relates to the technical field of power supply devices, and aims to solve the problems in the prior art that when a movable contact and a static contact of a circuit breaker of a power supply are disconnected, a high-temperature electric arc is generated, the electric arc is not easy to extinguish, the arcing time is long, the movable contact and the static contact are easy to burn out, and the practicability is poor. An inner groove body is fixedly installed in the power supply box body, a ventilation cavity is formed between the power supply box body and the inner groove body, a supporting column is fixedly installed below the inner groove body, a power supply body is arranged in the inner groove body, a power circuit breaker is arranged on one side of the inner groove body, and the power circuit breaker is fixedly connected with the power supply box body. A semiconductor refrigeration plate is fixedly installed in the power supply box body along one side of the power supply circuit breaker, the power supply circuit breaker is attached to the semiconductor refrigeration plate, the refrigeration surface of the semiconductor refrigeration plate faces the power supply circuit breaker, and a fan is arranged above the power supply circuit breaker.

Description

Technical Field

[0001] The utility model relates to the technical field of power supply devices, in particular to a fast arc-extinguishing DC sputtering power supply device. Background Art

[0002] The DC sputtering power supply is a key component in DC sputtering technology. It is mainly used to provide the required power to drive the sputtering process. In DC sputtering, the power is output by the power supply and then converted into high-energy ions. These ions then bombard the target material, causing the target atoms or molecules to escape from the surface and deposit on the substrate to form a thin film.

[0003] For example, the authorized patent with announcement number CN214736058U (a DC magnetron sputtering power supply): includes an installation box, a magnetron power supply and a temperature sensor, wherein the temperature sensor is provided inside the installation box, and the magnetron power supply is provided above the temperature sensor inside the installation box;

[0004] Although the above-mentioned prior art is extremely easy for workers to install and saves a lot of time, when the moving and static contacts of the circuit breaker of the power supply are disconnected, the voltage between the moving and static contacts causes the air medium to discharge, thereby generating a high-temperature arc. The arc is not easy to extinguish, the arc burning time is long, and the moving and static contacts are easily burned, and the practicality is poor. Therefore, the market urgently needs to develop a fast arc extinguishing DC sputtering power supply device to help people solve the existing problems. Utility Model Content

[0005] The purpose of the utility model is to provide a fast arc-extinguishing DC sputtering power supply device to solve the problem raised in the above-mentioned background technology that when the moving and static contacts of the circuit breaker of the power supply are disconnected, a high-temperature arc will be generated, the arc is not easy to extinguish, the arc burning time is long, the moving and static contacts are easily burned, and the practicality is poor.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a fast arc-extinguishing DC sputtering power supply device, comprising a power supply box, an inner tank body is fixedly installed inside the power supply box, a ventilation cavity is arranged between the power supply box and the inner tank body, a support column is fixedly installed below the inner tank body, a power supply body is arranged inside the inner tank body, a power circuit breaker is arranged on one side of the inner tank body, and the power circuit breaker is fixedly connected to the power supply box, a semiconductor refrigeration plate is fixedly installed inside the power supply box along one side of the power circuit breaker, the power circuit breaker is fitted with the semiconductor refrigeration plate, and the cooling surface of the semiconductor refrigeration plate faces the power circuit breaker, a fan is arranged above the power circuit breaker, and the power supply box and the inner tank body are both fixedly connected to the fan.

[0007] Preferably, a thermally conductive insulating sheet is fixedly installed on the inner side of the inner trough body, a thermally conductive plate is symmetrically fixedly installed on the inside of the inner trough body along both sides of the thermally conductive insulating sheet, a thermally conductive sheet is fixedly installed on the outer side of the thermally conductive plate, and multiple thermally conductive sheets are provided, and a plurality of ventilation holes are provided inside the thermally conductive sheet.

[0008] Preferably, ventilation bars are symmetrically fixedly installed on both sides above the power supply box, the ventilation bars are connected to the ventilation cavity between the power supply box and the inner tank body, and a grille plate is fixedly installed on one side of the ventilation bars.

[0009] Preferably, a heat sink one is symmetrically fixedly installed on the front end surface and the rear end surface of the power supply box body, a heat sink one is fixedly installed on the outer side of the heat sink one, and a plurality of heat sinks one are provided, and a plurality of ventilation holes two are provided inside the heat sink one.

[0010] Preferably, an inspection cover is fixedly mounted on the front end surface of the power supply box body, and a top cover is fixedly mounted on the top of the power supply box body.

[0011] Preferably, a pressure box is fixedly installed below the top cover, a compression spring is fixedly installed inside the pressure box, a pressure plate is fixedly installed below the compression spring, and the pressure plate passes through the interior of the pressure box, and an insulating pad is fixedly installed below the pressure plate.

[0012] Preferably, a second heat sink is provided on the outer side of the semiconductor refrigeration plate, and the semiconductor refrigeration plate is in contact with the second heat sink, the second heat sink is fixedly connected to the power supply box by screws, a second heat sink is fixedly installed on one side of the second heat sink, and a plurality of heat sinks are provided.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The utility model has a semiconductor refrigeration plate fixedly installed along one side of the power circuit breaker inside the power box, and the power circuit breaker is fitted with the semiconductor refrigeration plate, so that low temperature can be generated by the power supply of the semiconductor refrigeration plate. Through temperature transfer, the cold temperature can be transferred to the inside of the power circuit breaker, so that the inside of the power circuit breaker is kept at a low temperature. Furthermore, when the moving and static contacts of the power circuit breaker are disconnected, the voltage between the moving and static contacts causes the air medium to discharge and generate a high-temperature arc. The low-temperature environment allows the contacts to cool down rapidly during the arcing process, reducing the burning speed of the arc, causing the arc to lose its stability and extinguish, which is conducive to rapid arc extinguishing and increases the stability of the use of the power circuit breaker.

[0015] 2. The utility model arranges a heat-conducting insulating sheet inside the inner slot body, so that the inner slot body can be insulated and the internal temperature can be dissipated outwards, and the temperature inside the inner slot body can be quickly transferred to the inside of the ventilation cavity by the arranged heat conduction plate and the heat conduction sheet, and then by starting the arranged fan, the flow speed of the air in the ventilation cavity can be accelerated to dissipate heat, thereby stably and quickly dissipating the heat of the inner slot body, which is beneficial to the heat dissipation and cooling of the power supply body and increases practicality.

[0016] 3. The utility model arranges a pressure box under the top cover, wherein a compression spring and a pressure plate are arranged inside the pressure box, so that when the top cover is installed on the power supply box body, the pressure plate can be elastically pressed down under the tension of the compression spring, which is beneficial to the stability of the placement of the power supply body. At the same time, an insulating pad is arranged under the pressure plate to increase the insulation capacity and improve the practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of a fast arc-extinguishing DC sputtering power supply device of the utility model;

[0018] Figure 2 It is a cross-sectional view of a fast arc-extinguishing DC sputtering power supply device of the utility model;

[0019] Figure 3 It is an enlarged schematic diagram of the A part of the utility model;

[0020] Figure 4 It is a cross-sectional view of the press box of the present utility model.

[0021] In the figure: 1. power supply box; 2. top cover; 3. ventilation bar box; 4. grille plate; 5. heat sink one; 6. heat sink one; 7. inspection cover; 8. inner tank; 9. power supply body; 10. thermal insulation sheet; 11. thermal conductive plate; 12. thermal conductive sheet; 13. fan; 14. power circuit breaker; 15. semiconductor refrigeration plate; 16. pressure box; 17. heat sink two; 18. heat sink two; 19. compression spring; 20. pressure plate; 21. insulation pad; 22. support column. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0023] See also Figure 1-4The utility model provides an embodiment: a fast arc extinguishing DC sputtering power supply device, including a power supply box 1, an inner tank 8 is fixedly installed inside the power supply box 1, a ventilation cavity is arranged between the power supply box 1 and the inner tank 8, a support column 22 is fixedly installed below the inner tank 8, a power supply body 9 is arranged inside the inner tank 8, a power circuit breaker 14 is arranged on one side of the inner tank 8, and the power circuit breaker 14 is fixedly connected to the power supply box 1, the input end of the power circuit breaker 14 is electrically connected to the power supply body 9, and the output end of the power circuit breaker 14 is electrically connected to the DC sputtering equipment, so as to facilitate the power supply of DC sputtering, a semiconductor refrigeration plate 15 is fixedly installed inside the power supply box 1 along one side of the power circuit breaker 14, the power circuit breaker 14 is fitted with the semiconductor refrigeration plate 15, and the cooling surface of the semiconductor refrigeration plate 15 faces the power circuit breaker 14, a fan 13 is arranged above the power circuit breaker 14, and the power supply box 1 and the inner tank 8 are both fixedly connected to the fan 13.

[0024] When in use, low temperature can be generated by energizing the semiconductor refrigeration plate 15, and the cold temperature can be transferred to the inside of the power circuit breaker 14 through temperature transfer, so that the inside of the power circuit breaker 14 maintains a low temperature. Furthermore, when the moving and static contacts of the power circuit breaker 14 are disconnected, the voltage between the moving and static contacts causes the air medium to discharge and generate a high-temperature arc. The low-temperature environment allows the contacts to cool down rapidly during the arcing process, reducing the burning speed of the arc, causing the arc to lose its stability and extinguish, which is conducive to rapid arc extinguishing and increases the stability of the use of the power circuit breaker.

[0025] Furthermore, a thermally conductive insulating sheet 10 is fixedly installed on the inner side of the inner trough body 8. The thermally conductive insulating sheet 10 is a thermally conductive insulating material made of thermally conductive silicone rubber reinforced with a high-performance polyimide film as a substrate. The interior of the inner trough body 8 is symmetrically fixedly installed with a thermal conductive plate 11 along both sides of the thermally conductive insulating sheet 10. A thermal conductive sheet 12 is fixedly installed on the outer side of the thermal conductive plate 11, and a plurality of thermal conductive sheets 12 are provided. Both the thermal conductive plates 11 and the thermal conductive sheets 12 are made of die-cast aluminum alloy. A plurality of ventilation holes are provided inside the thermal conductive sheet 12 to facilitate air circulation.

[0026] Furthermore, ventilation bars 3 are symmetrically fixedly installed on both sides above the power supply box 1, and the ventilation bars 3 are connected to the ventilation cavity between the power supply box 1 and the inner groove body 8. A grille plate 4 is fixedly installed on one side of the ventilation bars 3. By setting two ventilation bars 3, it is convenient for air to flow into the power supply box 1 and air to flow out of the power supply box 1.

[0027] Furthermore, a heat sink 5 is symmetrically fixedly installed on the front and rear surfaces of the power supply box 1, and a heat sink 6 is fixedly installed on the outer side of the heat sink 5, and a plurality of heat sinks 6 are provided. The heat sink 5 and the heat sink 6 are both made of die-cast aluminum alloy, and a plurality of ventilation holes 2 are provided inside the heat sink 6. The front and rear ends of the inner tank body 8 are in contact with the front and rear ends of the inner side of the power supply box 1, so that the natural heat dissipation inside the inner tank body 8 is facilitated by the heat sink 5 and the heat sink 6.

[0028] Furthermore, an inspection cover 7 is fixedly installed on the front end surface of the power supply box 1, and the inspection cover corresponds to the position of the power supply circuit breaker 14. A top cover 2 is fixedly installed on the top of the power supply box 1 to facilitate the opening and closing of the power supply box 1.

[0029] Furthermore, a pressure box 16 is fixedly installed below the top cover 2, a compression spring 19 is fixedly installed inside the pressure box 16, a pressure plate 20 is fixedly installed below the compression spring 19, and the pressure plate 20 passes through the interior of the pressure box 16, so that when the top cover 2 is installed on the power supply box body 1, the pressure plate 20 can be elastically pressed down under the tension of the compression spring 19, which is beneficial to the stability of the placement of the power supply body, and an insulating pad 21 is fixedly installed below the pressure plate 20 to increase the insulation capacity and improve practicality.

[0030] Furthermore, a heat sink 17 is provided on the outer side of the semiconductor refrigeration plate 15, and the semiconductor refrigeration plate 15 is in contact with the heat sink 17, the heat sink 17 is fixedly connected to the power supply box 1 by screws, a heat sink 18 is fixedly installed on one side of the heat sink 17, and a plurality of heat sinks 18 are provided, and the heat sink 17 and the heat sink 18 are both made of die-cast aluminum alloy, which is beneficial to the heat dissipation of the heating surface of the semiconductor refrigeration plate 15.

[0031] Working principle: During use, when the power supply device is used to supply power to the DC sputtering, the heat generated by the power supply body 9 is transferred outwardly through the heat-conducting insulating sheet 10, and the heat is transferred to the inside of the ventilation cavity through the action of the heat-conducting plate 11 and the heat-conducting plate 12, and the fan 13 is started to draw external air to the inside of the ventilation cavity, thereby increasing the air flow rate inside the ventilation cavity, so that the power supply body 9 can stably dissipate heat and cool down, and at the same time, the semiconductor refrigeration plate 15 is energized to generate cold temperature, which is transferred to the inside of the power circuit breaker 14 through temperature transfer, so that the inside of the power circuit breaker 14 is kept at a low temperature. When the moving and static contacts of the power circuit breaker 14 are disconnected, the voltage between the moving and static contacts causes the air medium to discharge and generate a high-temperature arc. The low-temperature environment causes the contacts to cool down rapidly during the arcing process, thereby reducing the burning speed of the arc, causing the arc to lose its stability and extinguish, which is conducive to rapid arc extinguishing and increases the stability of the use of the power circuit breaker.

[0032] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A fast arc extinguishing DC sputtering power supply device, comprising a power supply box (1), characterized in that: An inner tank body (8) is fixedly installed inside the power supply box (1), a ventilation cavity is provided between the power supply box (1) and the inner tank body (8), a support column (22) is fixedly installed below the inner tank body (8), a power supply body (9) is provided inside the inner tank body (8), a power circuit breaker (14) is provided on one side of the inner tank body (8), and the power circuit breaker (14) is fixedly connected to the power supply box (1), a semiconductor refrigeration plate (15) is fixedly installed inside the power supply box (1) along one side of the power circuit breaker (14), the power circuit breaker (14) is in contact with the semiconductor refrigeration plate (15), and the cooling surface of the semiconductor refrigeration plate (15) faces the power circuit breaker (14), a fan (13) is provided above the power circuit breaker (14), and the power supply box (1) and the inner tank body (8) are both fixedly connected to the fan (13).

2. A fast arc extinguishing DC sputtering power supply device according to claim 1, characterized in that: A heat-conducting insulating sheet (10) is fixedly mounted on the inner side of the inner tank body (8), a heat-conducting plate (11) is symmetrically fixedly mounted on the inside of the inner tank body (8) along both sides of the heat-conducting insulating sheet (10), a heat-conducting sheet (12) is fixedly mounted on the outer side of the heat-conducting plate (11), a plurality of heat-conducting sheets (12) are provided, and a plurality of ventilation holes are provided inside the heat-conducting sheet (12).

3. The rapid arc extinguishing DC sputtering power supply device according to claim 1, characterized in that: Ventilation bars (3) are symmetrically fixedly mounted on both sides above the power supply box (1), the ventilation bars (3) are connected to the ventilation cavity between the power supply box (1) and the inner tank (8), and a grille plate (4) is fixedly mounted on one side of the ventilation bars (3).

4. The rapid arc extinguishing DC sputtering power supply device according to claim 1, characterized in that: A heat sink 1 (5) is symmetrically fixedly mounted on the front and rear surfaces of the power supply box (1), a heat sink 1 (6) is fixedly mounted on the outer side of the heat sink 1 (5), and a plurality of heat sinks 1 (6) are provided, and a plurality of ventilation holes 2 are provided inside the heat sink 1 (6).

5. The rapid arc extinguishing DC sputtering power supply device according to claim 1, characterized in that: An inspection cover (7) is fixedly mounted on the front end surface of the power supply box (1), and a top cover (2) is fixedly mounted above the power supply box (1).

6. A fast arc extinguishing DC sputtering power supply device according to claim 5, characterized in that: A pressure box (16) is fixedly mounted below the top cover (2), a compression spring (19) is fixedly mounted inside the pressure box (16), a pressure plate (20) is fixedly mounted below the compression spring (19), and the pressure plate (20) passes through the interior of the pressure box (16), and an insulating pad (21) is fixedly mounted below the pressure plate (20).

7. The rapid arc extinguishing DC sputtering power supply device according to claim 1, characterized in that: A second heat sink (17) is provided on the outer side of the semiconductor refrigeration plate (15), and the semiconductor refrigeration plate (15) is in contact with the second heat sink (17). The second heat sink (17) is fixedly connected to the power supply box (1) by screws. A second heat sink (18) is fixedly installed on one side of the second heat sink (17), and a plurality of the second heat sinks (18) are provided.

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