Deep dehydration device for ultra-pure krypton gas

Abstract

The utility model discloses an ultrapure krypton gas deep dehydration device which comprises a heat insulation pipe and a heater installed on the circular outer wall of the heat insulation pipe, and a gas inlet is formed in the outer wall of the left end of the heat insulation pipe to guide krypton gas containing water in the heat insulation pipe. An exhaust port is formed in the outer wall of the right end of the heat insulation pipe so that krypton gas after moisture removal can be discharged, an upper guide plate, a lower guide plate and a filter screen a are installed, moisture is blocked through the upper guide plate and the lower guide plate and is adsorbed to the upper guide plate and the lower guide plate, the moisture content in the krypton gas passing through the device is reduced, and the krypton gas passing through the device is prevented from being polluted. The water in the krypton gas is secondarily adsorbed by the filter screen a, so that the water in the krypton gas is further removed, and when the water in the krypton gas is heated by the heater subsequently, the water in the krypton gas can be uniformly heated and dried by the heater, so that the condition that the water in the krypton gas is locally overheated or insufficient is avoided, and the service life of the krypton gas is prolonged. And the drying degree of krypton after passing through the heater is ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field related to krypton gas dehydration, and specifically relates to an ultra-pure krypton gas deep dehydration device. Background Art

[0002] The ultra-pure krypton gas deep dehydration device is a device used to remove moisture from krypton gas. In some applications, such as semiconductor manufacturing, laser technology and other fields, high-purity krypton gas is required. Moisture is a common impurity that will affect the purity and performance of krypton gas. Therefore, the ultra-pure krypton gas deep dehydration device is designed to remove moisture from krypton gas to obtain high-purity krypton gas. However, when the krypton gas passes through the pipeline heated by the heater, the gas circulation speed is too fast and the gas contains a large amount of water vapor. The heating speed of the heater cannot completely remove the water vapor in the gas. Utility Model Content

[0003] The purpose of the utility model is to provide an ultra-pure krypton gas deep dehydration device to solve the problem raised in the above background technology that the gas circulation speed is too fast and the heating speed of the heater cannot completely remove the water vapor in the gas when the gas contains a large amount of water vapor.

[0004] To achieve the above object, the utility model provides the following technical solutions: an ultrapure krypton gas deep dehydration device, comprising a heat-insulating pipe and a heater installed on the circular outer wall of the heat-insulating pipe;

[0005] An air inlet is provided inside the outer wall of the left end of the heat insulation tube to guide krypton gas containing moisture into the heat insulation tube;

[0006] An exhaust port is provided inside the outer wall of the right end of the heat insulation tube to allow the krypton gas after the water is removed to be discharged;

[0007] The inner wall of the upper end of the insulation tube is equidistantly fixedly connected with a plurality of upper guide plates near the left side, and the inner wall of the lower end of the insulation tube is fixedly connected with a lower guide plate between two upper guide plates to block the flow rate of the krypton gas, and a filter a is arranged on the right side of the lower guide plate to absorb moisture in the krypton gas.

[0008] Preferably, a plurality of fixed frames are equidistantly fixedly connected to the right side of the filter a, and filter b is fixedly connected between the inner walls at the upper and lower ends of the plurality of fixed frames to secondary absorb moisture in the krypton gas.

[0009] Preferably, the interiors of the plurality of filter screens b are uniformly provided with openings that pass through to the left and right, and the plurality of upper guide plates and lower guide plates are all inclined to the left.

[0010] Preferably, the mesh diameters of the filter screen a and the filter screen b are the same, and the filter screen a and the insulation pipe are fixedly connected by welding.

[0011] Preferably, a plurality of heat-conducting tubes b are equidistantly arranged inside the heat-insulating tube from top to bottom, and a plurality of heat-conducting tubes a are fixedly connected between the plurality of heat-conducting tubes b and the heater to increase the contact area with the krypton gas.

[0012] Preferably, a heat-insulating shell is sleeved between the upper and lower outer walls of the heater to prevent the temperature of the heater from diffusing outward, and a temperature control panel is embedded in the front circular outer wall of the heat-insulating shell near the left side.

[0013] Preferably, the heater is electrically connected to an external power source, and a heating wire is provided between the heater, the heat conducting tube a and the inside of the heat conducting tube b.

[0014] Compared with the prior art, the utility model provides an ultrapure krypton gas deep dehydration device, which has the following beneficial effects:

[0015] By installing the upper guide plate, the lower guide plate and the filter a, after the krypton gas enters the inside of the insulation tube through the air inlet, the circulation speed of the krypton gas will be reduced by the upper guide plate and the lower guide plate, and the moisture contained in the krypton gas will be blocked. The moisture is blocked by the upper guide plate and the lower guide plate and adsorbed on the upper guide plate and the lower guide plate, so that the moisture content in the passing krypton gas is reduced, and then the moisture in the krypton gas is secondary adsorbed by the filter a, so as to further remove the moisture in the krypton gas. When the moisture in the krypton gas is subsequently heated by the heater, it can be ensured that the heater can evenly heat the moisture in the krypton gas for drying, avoiding local overheating or underheating, and ensuring the dryness of the krypton gas after passing through the heater. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a schematic structural diagram of an ultrapure krypton gas deep dehydration device.

[0017] Figure 2 It is a front view cross-sectional structural schematic diagram of an ultrapure krypton gas deep dehydration device of the utility model.

[0018] Figure 3 This is a schematic diagram of the partial structure of the front cross-section of the filter screen b area of ​​the present invention.

[0019] In the figure: 1. Insulated shell; 2. Insulated pipe; 3. Exhaust port; 4. Temperature control panel; 5. Air inlet; 6. Upper guide plate; 7. Lower guide plate; 8. Filter a; 9. Heat pipe a; 10. Heat pipe b; 11. Heater; 12. Through port; 13. Filter b; 14. Fixed frame. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] The utility model provides Figure 1-3 An ultrapure krypton gas deep dehydration device shown includes a heat-insulating tube 2 and a heater 11 installed on the circular outer wall of the heat-insulating tube 2;

[0022] An air inlet 5 is provided inside the outer wall of the left end of the heat insulation tube 2 to guide the krypton gas containing moisture into the heat insulation tube 2;

[0023] An exhaust port 3 is provided inside the outer wall of the right end of the heat-insulating tube 2 for the krypton gas after the water is removed to be discharged. When the water in the krypton gas is separated, the krypton gas containing water is input from the air inlet 5 on one side of the heat-insulating tube 2. After the krypton gas passes through the heat-insulating tube 2 area heated by the heater 11, the high temperature will evaporate the water in the krypton gas, thereby completing the dehydration process. The krypton gas after the water is evaporated will be discharged from the exhaust port 3.

[0024] A plurality of upper guide plates 6 are fixedly connected to the inner wall of the upper end of the insulation tube 2 at equal intervals near the left side, and a lower guide plate 7 is fixedly connected to the inner wall of the lower end of the insulation tube 2 and between the two upper guide plates 6 to block the flow rate of the krypton gas. A filter a8 is arranged on the right side of the lower guide plate 7 to absorb moisture in the krypton gas. When the krypton gas enters the insulation tube 2 through the air inlet 5, it will be guided by the upper guide plate 6 and the lower guide plate 7 to limit the circulation speed of the krypton gas, and the moisture in the krypton gas will adhere to the surface of the upper guide plate 6 and the lower guide plate 7 to reduce the moisture content in the krypton gas. After passing through the upper guide plate 6 and the lower guide plate 7, the moisture in the krypton gas will be adsorbed by the filter a8, and the moisture content in the krypton gas will be reduced again, thereby accelerating the subsequent heating and evaporation time of the moisture in the krypton gas, and the moisture in the upper guide plate 6, the lower guide plate 7 and the filter a8 will be gradually evaporated by the temperature transmitted by the heater 11.

[0025] like Figure 2 and Figure 3 As shown, a plurality of fixed frames 14 are equidistantly fixedly connected to the right side of the filter a8, and filter b13 is fixedly connected between the inner walls of the upper and lower ends of the plurality of fixed frames 14 to secondary adsorb moisture in the krypton gas, and openings 12 are equidistantly opened inside the plurality of filter screens b13 to penetrate left and right, and the plurality of upper guide plates 6 and lower guide plates 7 are all inclined to the left.

[0026] By fixing the filter b13 inside the frame 14, the moisture contained in the krypton gas can be adsorbed for a second time when the krypton gas passes through the heating area of ​​the heater 11, thereby accelerating the evaporation rate of the moisture in the krypton gas, and the through port 12 can contact the heat pipe b10 to transfer the temperature to evaporate the moisture adsorbed inside the filter b13. The upper guide plate 6 and the lower guide plate 7 to the left can increase the contact area with the moisture in the krypton gas, thereby blocking most of the moisture.

[0027] like Figure 2 As shown, the mesh diameters of the filter screen a8 and the filter screen b13 are the same, and the filter screen a8 and the insulation pipe 2 are fixedly connected by welding.

[0028] The filter screen a8 and the insulation tube 2 can be connected by welding, and the fixing frame 14 and the insulation tube 2 can also be connected by welding to avoid the filter screen a8 and the filter screen b13 being pushed to fall during the circulation of krypton gas.

[0029] like Figure 1 and Figure 2 As shown, a plurality of heat-conducting tubes b10 are equidistantly arranged inside the insulation tube 2 from top to bottom, a plurality of heat-conducting tubes a9 are fixedly connected between the plurality of heat-conducting tubes b10 and the heater 11 to increase the contact area with the krypton gas, and a heat-insulating outer shell 1 is sleeved between the upper and lower outer walls of the heater 11 to prevent the temperature of the heater 11 from diffusing outward, and a temperature control panel 4 is embedded in the front circular outer wall of the heat-insulating outer shell 1 near the left side.

[0030] The heat of the heater 11 can be guided by the heat pipe a9 and the heat pipe b10. When krypton gas circulates, the contact area between the heater 11 and the krypton gas can be increased, and the evaporation rate of water in the krypton gas can be accelerated. The heat insulation shell 1 can block the temperature of the heater 11 from diffusing outward, avoiding the surrounding air of the working environment from being in a high temperature environment. The temperature of the internal heating of the heater 11 can be controlled by the temperature control panel 4.

[0031] like Figure 1 and Figure 2 As shown, the heater 11 is electrically connected to an external power source, and a heating wire is arranged between the heater 11, the heat pipe a9 and the inside of the heat pipe b10.

[0032] The heating wire will emit heat after being energized, thereby diffusing the heat outward through the heat pipe a9, the heat pipe b10 and the heater 11 to evaporate the moisture in the krypton gas.

[0033] The implementation principle of this embodiment is as follows: when separating the moisture in the krypton gas, the krypton gas containing moisture is input from the air inlet 5 on one side of the insulation tube 2. After the krypton gas passes through the insulation tube 2 area heated by the heater 11, the high temperature will evaporate the moisture in the krypton gas, thereby completing the dehydration process. The krypton gas after evaporation of the moisture will be discharged outward from the exhaust port 3. When the krypton gas enters the insulation tube 2 through the air inlet 5, it will be guided by the upper guide plate 6 and the lower guide plate 7 to limit the circulation speed of the krypton gas, and the moisture in the krypton gas will adhere to the surface of the upper guide plate 6 and the lower guide plate 7 to reduce the moisture content in the krypton gas. After passing through the upper guide plate 6 and the lower guide plate 7, the moisture in the krypton gas will be adsorbed by the filter a8, and the moisture content in the krypton gas will be reduced again, thereby accelerating the time for subsequent heating to evaporate the moisture in the krypton gas, and the moisture in the upper guide plate 6, the lower guide plate 7 and the filter a8 will be gradually evaporated by the temperature transmitted by the heater 11.

[0034] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An ultrapure krypton gas deep dehydration device, comprising a heat-insulating tube (2) and a heater (11) mounted on the circular outer wall of the heat-insulating tube (2); An air inlet (5) is provided inside the outer wall of the left end of the heat insulation tube (2) to guide krypton gas containing moisture into the heat insulation tube (2); An exhaust port (3) is provided inside the outer wall of the right end of the heat insulation tube (2) to allow the krypton gas after the water content is removed to be discharged; Features: A plurality of upper guide plates (6) are fixedly connected to the inner wall of the upper end of the heat-insulating tube (2) at equal intervals near the left side, and a lower guide plate (7) is fixedly connected to the inner wall of the lower end of the heat-insulating tube (2) between the two upper guide plates (6) to block the flow rate of the krypton gas, and a filter screen a (8) is arranged on the right side of the lower guide plate (7) to absorb moisture in the krypton gas.

2. The ultrapure krypton gas deep dehydration device according to claim 1, characterized in that: A plurality of fixed frames (14) are fixedly connected to the right side of the filter screen a (8) at equal intervals, and a filter screen b (13) is fixedly connected between the inner walls at the upper and lower ends of the plurality of fixed frames (14) to secondary absorb moisture in the krypton gas.

3. The ultrapure krypton gas deep dehydration device according to claim 2, characterized in that: The interiors of the plurality of filter screens b (13) are uniformly provided with openings (12) that pass through to the left and right, and the plurality of upper guide plates (6) and lower guide plates (7) are all inclined to the left.

4. The ultrapure krypton gas deep dehydration device according to claim 1, characterized in that: The mesh diameters of the filter screen a (8) and the filter screen b (13) are the same, and the filter screen a (8) and the heat insulation pipe (2) are fixedly connected by welding.

5. The ultrapure krypton gas deep dehydration device according to claim 1, characterized in that: A plurality of heat-conducting pipes b (10) are arranged equidistantly from top to bottom inside the heat-insulating pipe (2), and a plurality of heat-conducting pipes a (9) are fixedly connected between the plurality of heat-conducting pipes b (10) and the heater (11) to increase the contact area between the plurality of heat-conducting pipes b (10) and the heater (11) to increase the contact area with the krypton gas.

6. The ultrapure krypton gas deep dehydration device according to claim 1, characterized in that: A heat-insulating outer shell (1) is sleeved between the upper and lower outer walls of the heater (11) to prevent the temperature of the heater (11) from spreading outwards, and a temperature control panel (4) is embedded in the front circular outer wall of the heat-insulating outer shell (1) near the left side.

7. The ultrapure krypton gas deep dehydration device according to claim 1, characterized in that: The heater (11) is electrically connected to an external power source, and a heating wire is provided between the heater (11), the heat conducting pipe a (9) and the inside of the heat conducting pipe b (10).

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