Nitrogen humidifying device

Abstract

The utility model discloses a nitrogen humidification device, which relates to the technical field of nitrogen humidification and comprises a mixing bin, a lower flow guide cover is arranged on the inner side of the mixing bin, an upper flow guide cover is arranged on the upper side of the lower flow guide cover, a gas mixing pipe is vertically arranged between the upper flow guide cover and the lower flow guide cover, and steam holes are arranged on the gas mixing pipe. Through the arrangement of the upper flow guide cover, the lower flow guide cover, the gas mixing pipe and the steam holes, nitrogen rapidly enters the gas mixing pipe from the lower end of the gas mixing pipe to flow upwards, the air pressure on the inner side of the gas mixing pipe is reduced, steam rapidly enters the gas mixing pipe from the outer side of the gas mixing pipe through the steam holes, and the steam and the nitrogen are rapidly mixed; and the gas mixing effect is guaranteed, and then the nitrogen humidifying effect is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of nitrogen humidification, in particular to a nitrogen humidification device. Background Art

[0002] Grinding is an important process step in silicon wafer processing. Grinding is to use the physical and chemical combined effects of grinding slurry to perform micro-cutting on the surface of silicon wafers. After grinding, the surface of silicon wafers can obtain a dimensional tolerance of less than 0.001mm. When using the grinding fluid, it needs to be humidified by a humidifier to ensure the quality of the grinding fluid.

[0003] When the existing nitrogen humidifying device is in use, the nitrogen and steam are mixed in a mixing chamber, and part of the steam cannot be quickly and fully mixed with the nitrogen. There is a possibility that the steam contacts and liquefies the inner wall of the mixing chamber, so that the humidification effect of the nitrogen cannot be guaranteed. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the existing defects and provide a nitrogen humidifying device. By arranging an upper flow guide cover, a lower flow guide cover, a gas mixing tube and a steam hole, nitrogen can quickly enter from the lower end of the gas mixing tube and flow upward, so that the air pressure inside the gas mixing tube is reduced, and steam can quickly enter the gas mixing tube from the outside of the gas mixing tube through the steam hole, so that the steam and nitrogen can be quickly mixed, thereby ensuring the mixing effect of the gas and further ensuring the humidification effect of the nitrogen, which can effectively solve the problems in the background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a nitrogen humidifying device, comprising a mixing chamber, a lower flow guide cover is arranged on the inner side of the mixing chamber, an upper flow guide cover is arranged on the upper side of the lower flow guide cover, a gas mixing pipe is vertically arranged between the upper flow guide cover and the lower flow guide cover, a steam hole is arranged on the gas mixing pipe, a guide slope is arranged on the bottom side of the mixing chamber, a drain pipe is arranged at the lower center of the mixing chamber, and an electronic valve is arranged on the drain pipe.

[0006] Furthermore, a steam pipe is provided on a side surface of the mixing bin, and a steam generator is provided at one end of the steam pipe away from the mixing bin.

[0007] Furthermore, a nitrogen pipe is provided at a lower part of the mixing bin away from the steam generator, and a gas collecting hood is provided at an upper part of the mixing bin.

[0008] Furthermore, an air outlet pipe is arranged at the upper part of the air collecting hood, and a humidity sensor is arranged at the lower part of the air outlet pipe.

[0009] Furthermore, a flow regulating valve is provided on the steam pipe, and the upper flow guide cover and the lower flow guide cover are both welded to the inner side surface of the mixing bin.

[0010] Compared with the prior art, the beneficial effects of the utility model are:

[0011] 1. The utility model provides an upper flow guide cover, a lower flow guide cover, a gas mixing tube and a steam hole, so that nitrogen quickly enters from the lower end of the gas mixing tube and flows upward, so that the air pressure inside the gas mixing tube is reduced, and steam quickly enters the gas mixing tube from the outside of the gas mixing tube through the steam hole, so that the steam and nitrogen are quickly mixed, thereby ensuring the mixing effect of the gas and further ensuring the humidification effect of the nitrogen. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a front view schematic diagram of the structure of the utility model;

[0013] Figure 2 This is a schematic diagram of the main cross-sectional structure of the mixing bin in the utility model;

[0014] Figure 3 It is a schematic diagram of the main cross-sectional structure of the gas mixing tube in the utility model.

[0015] In the figure: 1. Mixing chamber; 2. Nitrogen pipe; 3. Steam generator; 4. Exhaust pipe; 5. Humidity sensor; 6. Gas collection hood; 7. Steam pipe; 8. Upper guide hood; 9. Lower guide hood; 10. Gas mixing pipe; 11. Drain pipe; 12. Electronic valve; 13. Steam hole. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] See also Figure 1-3 This embodiment provides a technical solution: a nitrogen humidifying device, including a mixing chamber 1, a lower guide cover 9 is arranged inside the mixing chamber 1, an upper guide cover 8 is arranged on the upper side of the lower guide cover 9, a gas mixing pipe 10 is vertically arranged between the upper guide cover 8 and the lower guide cover 9, a steam hole 13 is arranged on the gas mixing pipe 10, a guide slope is arranged on the bottom side of the mixing chamber 1, a drain pipe 11 is arranged at the lower center of the mixing chamber 1, and an electronic valve 12 is arranged on the drain pipe 11. Figure 1-Figure 3 As shown, the electronic valve 12 can adjust the opening and closing of the drain pipe 11, and the drain pipe 11 can discharge the liquefied water inside the mixing chamber 1.

[0018] A steam pipe 7 is disposed on one side of the outside of the mixing chamber 1, and a steam generator 3 is disposed on one end of the steam pipe 7 away from the mixing chamber 1. Figure 1-Figure 3 As shown, the steam generator 3 can generate a large amount of steam, and then transport the steam to between the upper guide cover 8 and the lower guide cover 9 through the steam pipe 7, so that the steam can enter the inner side of the gas mixing pipe 10 through the steam hole 13 to ensure the mixing effect of nitrogen and steam.

[0019] A nitrogen pipe 2 is provided at the lower part of the mixing chamber 1 away from the steam generator 3, and a gas collecting hood 6 is provided at the upper part of the mixing chamber 1. Figure 1-Figure 3 As shown, the gas collecting hood 6 can transport the humidified mixed gas to the outlet pipe 4, and the humidity sensor 5 can detect the humidity of the gas inside the outlet pipe 4.

[0020] An air outlet pipe 4 is provided on the upper part of the air collecting hood 6, and a humidity sensor 5 is provided on the lower part of the air outlet pipe 4. Figure 1-Figure 3 As shown, the gas outlet pipe 4 can output the humidified nitrogen.

[0021] A flow regulating valve is provided on the steam pipe 7 , and the upper flow guide cover 8 and the lower flow guide cover 9 are both welded to the inner side of the mixing bin 1 .

[0022] The working principle of the nitrogen humidifying device provided by the utility model is as follows: Figure 1-Figure 3 As shown, nitrogen is transported to the lower part of the mixing bin 1 through the nitrogen pipe 2, and the steam generator 3 transports the generated steam to the cavity between the upper guide cover 8 and the lower guide cover 9 through the steam pipe 7. The fast-flowing nitrogen in the gas mixing tube 10 generates a low pressure inside, and the steam enters the center of the gas mixing tube 10 under the action of the pressure difference, so that the nitrogen and the steam are mixed, and the nitrogen is humidified. Part of the liquefied liquid in the mixing bin 1 is discharged through the drain pipe 11, and the humidity sensor 5 on the outlet pipe 4 can detect the humidity of the humidified nitrogen in real time, and adjust the amount of steam required for mixing in time according to the detected humidity to ensure the humidification effect.

[0023] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A nitrogen humidifying device, comprising a mixing chamber (1), characterized in that: A lower flow guide cover (9) is arranged on the inner side of the mixing chamber (1), an upper flow guide cover (8) is arranged on the upper side of the lower flow guide cover (9), a gas mixing pipe (10) is vertically arranged between the upper flow guide cover (8) and the lower flow guide cover (9), a steam hole (13) is arranged on the gas mixing pipe (10), a flow guide slope is arranged on the inner bottom side of the mixing chamber (1), a drain pipe (11) is arranged at the lower center of the mixing chamber (1), and an electronic valve (12) is arranged on the drain pipe (11).

2. The nitrogen humidifying device according to claim 1, characterized in that: A steam pipe (7) is arranged on a side surface outside the mixing bin (1), and a steam generator (3) is arranged at one end of the steam pipe (7) away from the mixing bin (1).

3. The nitrogen humidifying device according to claim 2, characterized in that: A nitrogen pipe (2) is arranged on the lower part of the mixing chamber (1) away from the steam generator (3), and a gas collecting hood (6) is arranged on the upper part of the mixing chamber (1).

4. The nitrogen humidifying device according to claim 3, characterized in that: An air outlet pipe (4) is arranged at the upper part of the air collecting hood (6), and a humidity sensor (5) is arranged at the lower part of the air outlet pipe (4).

5. The nitrogen humidifying device according to claim 2, characterized in that: The steam pipe (7) is provided with a flow regulating valve, and the upper flow guide cover (8) and the lower flow guide cover (9) are both welded to the inner side of the mixing bin (1).

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