Tooth-shaped occlusion clamping structure for semiconductor equipment part
By designing a tooth-shaped choking clamping structure, using the coordination of the tooth-shaped clamping block and spring, the problems of non-parallel raw material sizes and material deformation during the processing process of semiconductor equipment components are solved, and the stable clamping of uneven workpieces is achieved It improves processing stability and accuracy.
Patent Information
- Application Number
- CN202420072361.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-12
- Publication Date
- 2025-01-14
- Estimated Expiration
- 2034-01-12
AI Technical Summary
During the processing process, semiconductor equipment components are difficult to clamp due to the non-parallel width and dimensions of raw materials, and engineering plastics are prone to deform or loose when clamped on ordinary jaws, which affects processing accuracy and stability.
A toothed occlusion clamping structure is designed, including a base, sliding block, toothed clamping block, spring, gear and telescopic rod. The toothed design of the toothed clamping block and the spring's resilience to achieve uneven workpieces. The firm clamping reduces the stress area to avoid deformation.
This structure facilitates clamping of uneven workpieces, improves machining stability and accuracy, reduces vibration and loosening of parts during processing, and improves the reliability and consistency of semiconductor equipment components.
Smart Images
Figure CN222345283U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor equipment parts, in particular to a toothed bite clamping structure for semiconductor equipment parts. Background Art
[0002] Semiconductor equipment is composed of tens of thousands of parts. The performance, quality and precision of the parts directly determine the reliability and stability of the equipment, and are also the key basic elements for my country to leap forward in semiconductor manufacturing capabilities to high-end. The domestic semiconductor parts industry started late, and the overall level of my country's semiconductor parts industry is relatively low. The supply capacity of high-end products is insufficient, and the problems of poor product reliability, stability and consistency are becoming increasingly prominent. Semiconductor equipment parts include sealing rings, EFEM, RF power supplies, electrostatic chucks, silicon electrodes, vacuum pumps, gas flow meters, sprinkler heads and other products, which can be divided into mechanical, electrical, mechatronics, optical and other categories.
[0003] The width of the raw materials is cut by different manufacturers, and there is a non-parallel phenomenon. A separate milling and clamping process must be arranged before the next process can be carried out; engineering plastics are clamped in ordinary jaws, and due to the large force surface, it is easy to cause the workpiece to deform. If the clamping force is reduced to improve the deformation, the workpiece will loosen during the processing; the heightened workpiece is prone to vibration during rough processing, causing the workpiece to loosen, so a toothed bite clamping structure for semiconductor equipment parts is proposed to solve the above-mentioned problems. Utility Model Content
[0004] In view of the deficiencies in the prior art, the utility model provides a toothed interlocking clamping structure for semiconductor equipment parts, which has the advantages of convenient toothed clamping of uneven workpieces, and solves the problem that the clamping tools on the market are inconvenient to clamp uneven workpieces.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a toothed interlocking clamping structure for semiconductor equipment parts, comprising a base and a clamping mechanism, wherein the clamping mechanism is arranged at the top of the base; the clamping mechanism comprises a sliding block arranged inside the base, a first spring is fixedly connected to the opposite side of the sliding block, a toothed clamping block is fixedly connected to the top of the sliding block, a fixed block is arranged on the top of the base, a rotating shaft is fixedly connected to the inner side of the fixed block, a telescopic rod is rotatably connected to the outer surface of the rotating shaft, the front side of the sliding block is rotatably connected to the rotating rod, the outer surface of the rotating rod is fixedly connected to the gear, and the inner bottom of the base is fixedly connected to the rack.
[0006] Furthermore, a fixed rod extending to the right side of the base is fixedly connected to the left side of the base, the first spring is sleeved on the outer surface of the fixed rod, the sliding block passes through and extends to the outside of the fixed rod, and a movable groove matching the size of the sliding block is opened inside the fixed rod.
[0007] Furthermore, the bottom of the toothed clamping block is located on the top of the base and fits closely thereto, a sliding groove matching the size of the sliding block is provided on the top of the base, and a stabilizing member is provided on the top of the base.
[0008] Furthermore, the sliding block, the toothed clamping block, the rotating rod, and the gear are each two in number and are symmetrically distributed. The opposite sides of the toothed clamping block are tooth-shaped, the gear is meshed with the rack, and a rotating groove matching the size of the rotating rod is opened inside the sliding block.
[0009] Furthermore, there are four fixed blocks and rotating shafts, which are symmetrically distributed. There are two telescopic rods, which are symmetrically distributed. Both ends of the telescopic rods are provided with rotating holes that are adapted to the size of the rotating shafts. The fixed blocks are respectively fixedly connected to the left and right sides of the top of the base and the outer side of the toothed clamping block.
[0010] Furthermore, the stabilizing member includes a fixing frame, a second spring, and a limiting rod. The fixing frame is fixedly connected to the left and right sides of the base, the limiting rod is fixedly connected to the opposite side of the toothed clamping block, and the second spring is sleeved on the outer surface of the limiting rod.
[0011] Furthermore, there are two fixing frames, which are symmetrically distributed, and there are two second springs and two limiting rods, which penetrate and extend to the toothed clamping block.
[0012] Furthermore, one end of the limit rod is fixedly connected to the opposite side of the fixing frame, and the two ends of the second spring are respectively fixedly connected to the inner sides of the fixing frame and the toothed clamping frame, and the toothed clamping block is provided with a movable groove that is adapted to the size of the limit rod and the second spring.
[0013] Compared with the prior art, the technical solution of this application has the following beneficial effects:
[0014] The toothed interlocking clamping structure for semiconductor equipment parts is provided with a clamping mechanism, and a toothed clamping block is driven to move by a spring, a gear and a rack. Since the opposite side of the toothed clamping block is in a tooth shape, it is convenient to clamp the parts, the clamping effect is better, and the force-bearing area of the parts is reduced. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the structure of the utility model;
[0016] Figure 2 This is a top view of the structural stabilizing member of the utility model;
[0017] Figure 3 This is a three-dimensional diagram of the toothed clamping block of the utility model.
[0018] In the figure: 1 base, 2 sliding block, 3 first spring, 4 toothed clamping block, 5 fixing rod, 6 fixing block, 7 rotating shaft, 8 telescopic rod, 9 rotating rod, 10 gear, 11 rack, 12 stabilizing member. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0020] See also Figure 1-3 In this embodiment, a toothed interlocking clamping structure for semiconductor equipment parts includes a base 1 and a clamping mechanism, wherein the clamping mechanism is arranged at the top of the base 1; the clamping mechanism includes a sliding block 2 arranged inside the base 1, a first spring 3 is fixedly connected to the opposite side of the sliding block 2, a toothed clamping block 4 is fixedly connected to the top of the sliding block 2, a fixed block 6 is arranged on the top of the base 1, a rotating shaft 7 is fixedly connected to the inner side of the fixed block 6, a telescopic rod 8 is rotatably connected to the outer surface of the rotating shaft 7, a rotating rod 9 is rotatably connected to the front of the sliding block 2, a gear 10 is fixedly connected to the outer surface of the rotating rod 9, and a rack 11 is fixedly connected to the inner bottom of the base 1.
[0021] Among them, a fixed rod 5 extending to the right side of the interior is fixedly connected to the left side of the base 1, the first spring 3 is sleeved on the outer surface of the fixed rod 5, the sliding block 2 passes through and extends to the outside of the fixed rod 5, and a movable groove adapted to the size of the sliding block 2 is opened inside the fixed rod 5; the bottom of the toothed clamping block 4 is located at the top of the base 1 and fits closely, a sliding groove adapted to the size of the sliding block 2 is opened at the top of the base 1, and a stabilizing member 12 is provided on the top of the base 1; the sliding block 2, the toothed clamping block 4, the rotating rod 9, and the gear 10 are all two in number and are symmetrically distributed, the opposite sides of the toothed clamping block 4 are toothed, the gear 10 is meshed with the rack 11, and a rotating groove adapted to the size of the rotating rod 9 is opened inside the sliding block 2.
[0022] In addition, the number of the fixed blocks 6 and the rotating shafts 7 are both four and symmetrically distributed, the number of the telescopic rods 8 are both two and symmetrically distributed, and both ends of the telescopic rods 8 are provided with rotating holes adapted to the size of the rotating shafts 7, and the fixed blocks 6 are respectively fixedly connected to the left and right sides of the top of the base 1 and the outer side of the toothed clamping block 4; the stabilizing member 12 includes a fixing frame, a second spring, and a limiting rod, the fixing frame is fixedly connected to the left and right sides of the base 1, the limiting rod is fixedly connected to the side opposite to the toothed clamping block 4, and the second spring is sleeved on the outer surface of the limiting rod; the number of the fixed frames is two and symmetrically distributed, the number of the second springs and limiting rods are both two, and the limiting rods and the second springs penetrate and extend to the toothed clamping block 4; one end of the limiting rod is fixedly connected to the side opposite to the fixing frame, and the two ends of the second spring are respectively fixedly connected to the inner sides of the fixing frame and the toothed clamping frame, and the toothed clamping block 4 is provided with a moving groove adapted to the size of the limiting rod and the second spring.
[0023] The working principle of the above embodiment is:
[0024] The toothed interlocking clamping structure for semiconductor equipment parts pulls the toothed clamping block 4 to move in different directions, so that the parts are placed on the opposite side of the toothed clamping block 4. The toothed clamping block 4 is pulled in the same direction by the rebound force of the first spring 3 on the opposite side of the sliding block 2. At the same time, the gear 10 and the rack 11 are used in conjunction to reduce a part of the impact caused by the rebound force of the first spring 3.
[0025] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.
[0026] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A toothed clamping structure for semiconductor equipment parts, comprising a base (1) and a clamping mechanism, characterized in that: The clamping mechanism is arranged on the top of the base (1); The clamping mechanism comprises a sliding block (2) arranged inside a base (1), a first spring (3) is fixedly connected to one side opposite to the sliding block (2), a toothed clamping block (4) is fixedly connected to the top of the sliding block (2), a fixed block (6) is arranged on the top of the base (1), a rotating shaft (7) is fixedly connected to the inner side of the fixed block (6), a telescopic rod (8) is rotatably connected to the outer surface of the rotating shaft (7), a rotating rod (9) is rotatably connected to the front side of the sliding block (2), a gear (10) is fixedly connected to the outer surface of the rotating rod (9), and a rack (11) is fixedly connected to the inner bottom of the base (1).
2. A toothed engaging clamping structure for semiconductor equipment parts according to claim 1, characterized in that: The left side of the interior of the base (1) is fixedly connected to a fixed rod (5) extending to the right side of the interior, the first spring (3) is sleeved on the outer surface of the fixed rod (5), the sliding block (2) passes through and extends to the outside of the fixed rod (5), and the interior of the fixed rod (5) is provided with a movable groove that is adapted to the size of the sliding block (2).
3. The toothed engaging clamping structure for semiconductor equipment parts according to claim 1, characterized in that: The bottom of the toothed clamping block (4) is located on the top of the base (1) and fits closely thereto; a sliding groove matching the size of the sliding block (2) is provided at the top of the base (1); and a stabilizing member (12) is provided at the top of the base (1).
4. The toothed engagement clamping structure for semiconductor equipment parts according to claim 1, characterized in that: The number of the sliding block (2), the toothed clamping block (4), the rotating rod (9), and the gear (10) is two and they are symmetrically distributed. The opposite sides of the toothed clamping block (4) are both tooth-shaped. The gear (10) is meshed with the rack (11). The sliding block (2) is provided with a rotating groove that matches the size of the rotating rod (9).
5. The toothed engaging clamping structure for semiconductor device parts according to claim 1, characterized in that: The number of the fixed blocks (6) and the rotating shafts (7) are both four and symmetrically distributed. The number of the telescopic rods (8) is two and symmetrically distributed. Both ends of the telescopic rods (8) are provided with rotating holes that are matched with the size of the rotating shafts (7). The fixed blocks (6) are respectively fixedly connected to the left and right sides of the top of the base (1) and the outer side of the toothed clamping block (4).
6. The toothed engaging clamping structure for semiconductor device parts according to claim 3, characterized in that: The stabilizing member (12) comprises a fixing frame, a second spring and a limiting rod, wherein the fixing frame is fixedly connected to the left and right sides of the base (1), the limiting rod is fixedly connected to the opposite side of the toothed clamping block (4), and the second spring is sleeved on the outer surface of the limiting rod.
7. A toothed engaging clamping structure for semiconductor equipment parts according to claim 6, characterized in that: There are two fixing frames, which are symmetrically distributed. There are two second springs and two limiting rods. The limiting rods and second springs penetrate and extend to the toothed clamping block (4).
8. The toothed engaging clamping structure for semiconductor device parts according to claim 6, characterized in that: One end of the limit rod is fixedly connected to the side opposite to the fixing frame, and the two ends of the second spring are respectively fixedly connected to the fixing frame and the inner side of the toothed clamping frame, and the toothed clamping block (4) is provided with a movable groove matching the size of the limit rod and the second spring.