Mechanical finger sucker and mechanical finger

Abstract

The utility model relates to a mechanical finger sucker and a mechanical finger, and belongs to the technical field of semiconductor manufacturing. The mechanical finger suction cup comprises a lower suction cup body, an upper suction cup body and a hollow screw, the upper suction cup body comprises a cup portion and a cylinder portion, through holes are formed in the center of the lower suction cup body and the center of the upper suction cup body, and the hollow screw is screwed into the through holes so that the upper suction cup body can be fixed to the lower suction cup body; the diameter of the sucker lower body is greater than that of the cylinder part; the mechanical finger comprises a mechanical finger suction cup and a finger body, an air channel, a suction cup fixing groove communicated with the air channel and a stainless steel sheet are arranged in the finger body, and the stainless steel sheet is arranged on the surface, corresponding to the suction cup fixing groove, of the finger body to form the air channel. According to the mechanical finger suction cup and the mechanical finger, stable connection between the suction cup and the finger and convenient replacement of the suction cup are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a mechanical finger suction cup and a mechanical finger. Background Art

[0002] In semiconductor equipment, robots are generally used for automatic wafer transfer, that is, the wafers that need to be processed by the semiconductor process are automatically transferred into the process chamber by the robot, or the wafers that have been processed by the semiconductor process are automatically transferred out of the process chamber. In this process, semiconductor fingers play an important role in transporting wafers, but warped wafers require suction cup fingers, and most of the current finger suction cups use bonding and plugging, but these two methods have their own shortcomings. For example, the suction cup is bonded to the finger, which makes it more troublesome to replace the suction cup; the suction cup is plugged into the finger, and when the finger is flipped, the suction cup is easily brought out by the wafer, resulting in fragments. Therefore, its use is limited, which increases the time for suction cup replacement, reduces work efficiency, increases the probability of fragmentation, and affects the normal progress of subsequent work. Utility Model Content

[0003] The purpose of the utility model is to overcome the shortcomings of the prior art, meet the actual needs, and provide a mechanical finger suction cup and a mechanical finger. The lower body of the suction cup is arranged in the finger body, and the connection between the upper plate body of the suction cup and the finger body is achieved through hollow screws, thereby solving the problem that the upper plate body of the existing suction cup is inconvenient to replace and easy to fall off.

[0004] In order to achieve the purpose of the utility model, the technical solution adopted by the utility model is:

[0005] A mechanical finger suction cup comprises a suction cup lower body, a suction cup upper body and a hollow screw. The suction cup upper body is composed of a cup portion and a column portion. The suction cup lower body and the suction cup upper body have through holes at their centers. The hollow screw is screwed into the through hole to fix the suction cup upper body to the suction cup lower body. The diameter of the suction cup lower body is greater than the diameter of the column portion.

[0006] As an implementable embodiment, the hollow screw is a slotted screw or a cross screw.

[0007] As an implementable embodiment, the disc portion is a silicone suction cup.

[0008] As an implementation method, the center height of the disk portion is lower than the extension of the disk portion.

[0009] A mechanical finger comprises the mechanical finger suction cup and a finger body; an airway, a suction cup fixing groove connected to the airway and a stainless steel sheet are arranged in the finger body, and the stainless steel sheet is arranged on the surface of the finger body corresponding to the suction cup fixing groove to form the airway.

[0010] As an implementable embodiment, the size of the suction cup fixing groove matches the size of the suction cup lower body and the column portion.

[0011] As an implementable embodiment, the finger body is integrally formed of ceramic.

[0012] As an implementable embodiment, the finger body includes a finger portion formed by two fingers and a connecting portion; the mechanical finger suction cup is arranged at the finger tip and finger opening of the finger portion.

[0013] As an implementation method, the tail of the connecting portion has a connecting through hole for connecting with a mobile device.

[0014] As an implementable embodiment, the suction cup lower body and the stainless steel sheet are connected to the finger body by bonding.

[0015] Compared with the prior art, the utility model has the beneficial effect that: the utility model arranges the lower body of the suction cup in the finger body, and connects the upper plate body of the suction cup with the finger body through a hollow screw, thereby achieving a stable connection of the upper plate body of the suction cup and facilitating replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a schematic diagram of the structure of a mechanical finger suction cup.

[0017] Figure 2 The utility model is a schematic diagram of a mechanical finger structure.

[0018] Among them, 10 is the finger body; 11 is the airway; 12 is the suction cup fixing groove; 13 is the stainless steel sheet; 14 is the finger part; 15 is the connecting part; 16 is the connecting through hole; 20 is the mechanical finger suction cup; 21 is the suction cup lower body; 22 is the suction cup upper body; 221 is the disc part; 222 is the column part; 23 is the hollow screw. DETAILED DESCRIPTION

[0019] The utility model is further described below in conjunction with the accompanying drawings and embodiments: Example 1

[0020] See also Figure 1 , is a mechanical finger suction cup 20, including a suction cup lower body 21, a suction cup upper body 22 and a hollow screw 23. The suction cup upper body 22 is composed of a disc portion 221 and a column portion 222. There are through holes at the centers of the suction cup lower body 21 and the suction cup upper body 22. The hollow screw 23 is screwed into the through hole to fix the suction cup upper body 22 to the suction cup lower body 21; the diameter of the suction cup lower body 21 is larger than the diameter of the column portion 222.

[0021] The mechanical finger suction cup of the utility model realizes the fixed connection between the suction cup lower body 21 and the suction cup upper body 22 through the hollow screw 23, which realizes stable fixation on the one hand and facilitates the disassembly and replacement of the suction cup upper body 22 on the other hand.

[0022] The hollow screw 23 can be a slotted screw or a cross screw, and its purpose is to facilitate the use of a screwdriver or other tools to screw the hollow screw in and out. The disk portion 221 of the utility model adopts a silicone suction cup, which can prevent static electricity and reduce friction on the adsorbed object. Specifically, the center height of the disk portion 221 is lower than the extension of the disk portion, and the whole has a concave structure in the middle, so that the hollow screw 23 does not directly contact the adsorbed object to avoid scratches. Example 2

[0023] See also Figure 1 , 2 , which is a mechanical finger, including the above-mentioned mechanical finger suction cup 20 and a finger body 10; an airway 11, a suction cup fixing groove 12 connected to the airway 11 and a stainless steel sheet 13 are arranged in the finger body 10, and the stainless steel sheet 13 is arranged on the surface of the finger body 10 corresponding to the suction cup fixing groove 12 to form the airway 11.

[0024] The size of the suction cup fixing groove 12 is consistent with or slightly larger than the size of the suction cup lower body 21 and the column part 222. The column part 222 is pasted into the suction cup fixing groove 12, and then the stainless steel sheet 13 is fixed on the finger body 10, and then the disk part 221 and the column part 222 are screwed into the through hole through the hollow screw 23 to fix the suction cup upper body 22 to the suction cup lower body 21, completing the installation of the suction cup. In the process of replacing the suction cup, it is generally necessary to replace the disk part 221 and / or the column part 222, and it is only necessary to unscrew the hollow screw 23 to replace the disk part 221 and / or the column part 222.

[0025] The finger body 10 of the utility model can be formed in one piece of ceramic. The finger body 10 includes a finger portion 14 formed by two fingers and a connecting portion 15; the mechanical finger suction cup 20 is arranged at the finger tip and finger opening of the finger portion 14, and the finger opening is the intersection area of ​​the two fingers. The tail of the connecting portion 14 has a connecting through hole 16 for connecting to a mobile device. The suction cup lower body 21 and the stainless steel sheet 13 are connected to the finger body 10 by bonding.

[0026] The embodiments of the present invention disclose preferred embodiments, but are not limited thereto. A person skilled in the art can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. However, as long as they do not deviate from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims

1. A mechanical finger suction cup, characterized in that: It includes a suction cup lower body, a suction cup upper body and a hollow screw. The suction cup upper body is composed of a cup portion and a column portion. The suction cup lower body and the suction cup upper body are provided with through holes at the centers. The hollow screw is screwed into the through hole to fix the suction cup upper body to the suction cup lower body. The diameter of the suction cup lower body is larger than the diameter of the column portion.

2. The mechanical finger suction cup according to claim 1, characterized in that: The hollow screw is a slotted screw or a cross screw.

3. The mechanical finger suction cup according to claim 1, characterized in that: The disc portion is a silicone suction cup.

4. The mechanical finger suction cup according to claim 3, characterized in that: The center height of the disk portion is lower than the extension of the disk portion.

5. A mechanical finger, characterized in that: It comprises the mechanical finger suction cup and finger body as described in any one of claims 1-4; an airway, a suction cup fixing groove connected to the airway and a stainless steel sheet are arranged in the finger body, and the stainless steel sheet is arranged on the surface of the finger body corresponding to the suction cup fixing groove to form the airway.

6. The mechanical finger according to claim 5, characterized in that: The size of the suction cup fixing groove matches the size of the suction cup lower body and the column part.

7. The mechanical finger according to claim 5, characterized in that: The finger body is integrally formed of ceramic.

8. The mechanical finger according to claim 5, characterized in that: The finger body comprises a finger portion formed by two fingers and a connecting portion; the mechanical finger suction cup is arranged at the finger tip and finger opening of the finger portion.

9. The mechanical finger according to claim 8, characterized in that: The tail of the connecting part is provided with a connecting through hole for connecting with a mobile device.

10. The mechanical finger according to claim 5, characterized in that: The suction cup lower body and the stainless steel sheet are connected to the finger body by bonding.

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