Film forming device and vacuum evaporator
By using positioning members and driving mechanisms in the film forming device to position the substrate in a preset position, the problem of substrate position offset during the transmission of the robot arm is solved, and the yield of OLED products is improved.
Patent Information
- Application Number
- CN202421176122.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-27
- Publication Date
- 2025-01-14
- Estimated Expiration
- 2034-05-27
AI Technical Summary
When the robotic arm transmits the substrate, the position of the substrate on the substrate holder may be offset from the preset position, resulting in a decrease in the alignment accuracy of the substrate and the mask plate, which reduces the product yield of OLED.
Design a film forming device, including an evaporation cavity, a substrate, a first bracket, a robot arm, a positioning member and a driving mechanism, and drives the substrate to contact the positioning member through the driving mechanism to ensure that the substrate is preset on the first bracket. position.
The alignment accuracy of the substrate and mask plate is improved, and the yield of OLED products is improved.
Smart Images
Figure CN222349100U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum evaporation, in particular to a film forming device and a vacuum evaporation machine. Background Art
[0002] The application of flat panel displays in various products requires flat panel displays to be larger, higher in image quality, and lower in power consumption. Organic EL display devices, which have organic EL elements that utilize electroluminescence (EL) of organic materials, have received a great deal of attention as flat panel displays that are excellent in all-solid-state, low-voltage drive, high-speed responsiveness, and self-luminous properties. In the manufacture of organic EL display devices, when forming the organic light-emitting element (OLED) constituting the organic EL display device, the evaporation material evaporated from the evaporation source of the film forming device is evaporated onto the substrate through a mask plate formed with a pixel pattern, thereby forming an organic layer and a metal layer.
[0003] In the prior art, a substrate is moved from the outside of a deposition chamber of a film forming device to the inside of the deposition chamber by a robotic arm, and is placed on a substrate holder by a robotic arm, so that the area on the substrate where a pattern needs to be formed is aligned with the pattern of the mask below. The deposition source heats the deposition material, causing the atoms or molecules of the deposition material to vaporize and escape from its surface to form a vapor flow, which passes through the pattern on the mask and finally condenses on the substrate to be deposited.
[0004] However, when the robotic arm transfers the substrate, the position of the substrate on the substrate holder may be offset from the preset position, resulting in reduced alignment accuracy between the substrate and the mask, thereby reducing the product yield of the OLED. Utility Model Content
[0005] The embodiments of the utility model provide a film forming device and a vacuum evaporator to solve the problem that when a robot arm transfers the substrate, the position of the substrate on the substrate support may be offset from the preset position, resulting in reduced alignment accuracy between the substrate and the mask, thereby reducing the product yield of OLED.
[0006] On the one hand, an embodiment of the utility model provides a film forming device, including an evaporation chamber, a substrate, a first bracket, a mechanical arm, a positioning member and a driving mechanism;
[0007] The first bracket is installed in the evaporation chamber, and the mechanical arm is installed outside the evaporation chamber, and the mechanical arm can transfer the substrate to the first bracket;
[0008] The positioning member is installed on the first bracket, the driving mechanism is installed in the evaporation chamber, and the driving mechanism is configured to drive the substrate to abut against the positioning member to position the substrate at a preset position on the first bracket.
[0009] In a possible implementation manner, the positioning member is respectively in contact with one side of the substrate in the length direction of the film forming device and one side of the substrate in the width direction of the film forming device.
[0010] In a possible embodiment, the positioning member includes a plurality of positioning posts, the substrate abuts against at least one of the positioning posts on one side of the length direction of the film forming device, and the substrate abuts against at least one of the positioning posts on one side of the width direction of the film forming device.
[0011] In a possible implementation, the positioning member includes a plurality of first positioning posts and a plurality of second positioning posts, wherein the plurality of first positioning posts are arranged at intervals along the width direction of the film forming device, and the plurality of second positioning posts are arranged at intervals along the length direction of the film forming device;
[0012] The substrate abuts against the plurality of first positioning pins on one side in the length direction of the film forming device, and the substrate abuts against the plurality of second positioning pins on one side in the width direction of the film forming device.
[0013] In a possible implementation, the driving mechanism includes a first cylinder, a second cylinder, a first driving block, and a second driving block, the first cylinder and the second cylinder are respectively mounted on the first bracket, the first driving block is fixedly connected to the piston rod of the first cylinder, and the second driving block is fixedly connected to the piston rod of the second cylinder;
[0014] The first cylinder may drive the substrate to move along the length direction of the film forming device through the first driving block, and the second cylinder may drive the substrate to move along the width direction of the film forming device through the second driving block.
[0015] In a possible embodiment, the first cylinder and the first driving block are located on the side of the substrate away from the first positioning column in the length direction of the film forming device, and the second cylinder and the second driving block are located on the side of the substrate away from the second positioning column in the width direction of the film forming device.
[0016] In a possible implementation manner, the driving mechanism further includes a control module, and the control module is communicatively connected with the first cylinder and the second cylinder respectively.
[0017] In a possible implementation, it further includes a mask and a second bracket;
[0018] The first bracket is installed in the evaporation chamber, the mask is placed on the second bracket, and the mask is arranged opposite to the film forming surface of the substrate in the height direction of the film forming device.
[0019] In a possible implementation manner, an evaporation source is further included, and the evaporation source is installed at the bottom of the evaporation chamber. The mask is located between the substrate and the evaporation source.
[0020] On the other hand, an embodiment of the present invention provides a vacuum evaporation machine, comprising the film forming device as described above.
[0021] The embodiment of the utility model provides a film forming device and a vacuum evaporation machine, including an evaporation chamber, a substrate, a first bracket, a mechanical arm, a positioning member and a driving mechanism; the first bracket is installed in the evaporation chamber, the mechanical arm is installed outside the evaporation chamber, and the mechanical arm can transfer the substrate to the first bracket; the positioning member is installed on the first bracket, and the driving mechanism is installed in the evaporation chamber, and the driving mechanism is configured to drive the substrate to abut against the positioning member to position the substrate at a preset position on the first bracket. When the mechanical arm transfers the substrate to the first bracket, the driving mechanism drives the substrate to abut against the positioning member, so that the substrate can be positioned at a preset position on the first bracket, thereby improving the alignment accuracy of the substrate and the mask, and further improving the product yield of OLED. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
[0023] Figure 1 A schematic structural diagram of a film forming device provided in an embodiment of the utility model;
[0024] Figure 2 A schematic diagram of a driving mechanism provided in an embodiment of the utility model when the driving substrate is not in contact with the positioning member;
[0025] Figure 3 This is a schematic diagram of the driving mechanism provided in an embodiment of the utility model when the driving substrate abuts against the positioning member.
[0026] Description of reference numerals:
[0027] 10-evaporation chamber; 20-substrate;
[0028] 201-film forming surface; 30-first bracket;
[0029] 31-first connecting rod; 32-first supporting plate;
[0030] 321-first through hole; 40-mechanical arm;
[0031] 50-positioning member; 51-first positioning column;
[0032] 52-second positioning column; 61-first cylinder;
[0033] 62-second cylinder; 63-first driving block;
[0034] 64-a second driving block; 65-a control module;
[0035] 70-evaporation source; 80-mask;
[0036] 90 - second bracket; 91 - second connecting rod;
[0037] 92- Second support plate. DETAILED DESCRIPTION
[0038] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0039] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0040] In the present invention, unless otherwise clearly specified and limited, the terms "installation", "connection", "fixation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0041] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0042] In the above description, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.
[0043] As described in the background technology, when the robot arm transfers the substrate, the position of the substrate on the substrate support may be offset from the preset position, resulting in reduced alignment accuracy between the substrate and the mask, and reducing the product yield of the OLED. The inventors have found that the reason for this problem is that the substrate is placed on the substrate support by the robot arm, and due to the transmission accuracy of the robot arm or the friction between the robot arm and the substrate when the robot arm is separated from the substrate, the position of the substrate on the substrate support may be offset from the preset position, thereby reducing the alignment accuracy between the substrate and the mask, and reducing the product yield of the OLED.
[0044] In order to solve the above problems, the embodiments of the utility model provide a film forming device and a vacuum evaporator. By setting a positioning piece and a driving mechanism, when the robot arm transfers the substrate to the bracket, the driving mechanism drives the substrate to abut against the positioning piece, so that the substrate can be positioned at a preset position on the first bracket, thereby improving the alignment accuracy of the substrate and the mask, and further improving the product yield of the OLED.
[0045] The film forming device and vacuum evaporation machine provided by the utility model are described in detail below in conjunction with specific embodiments.
[0046] like Figure 1As shown, an embodiment of the utility model provides a film forming device, including a vapor deposition chamber 10, a substrate 20, a first bracket 30, a robot arm 40, a positioning member 50 and a driving mechanism; the first bracket 30 is installed in the vapor deposition chamber 10, and the robot arm 40 is installed on the outside of the vapor deposition chamber 10, and the robot arm 40 can transfer the substrate 20 to the first bracket 30; the positioning member 50 is installed on the first bracket 30, and the driving mechanism is installed in the vapor deposition chamber 10, and the driving mechanism is constructed to drive the substrate 20 to abut against the positioning member 50 to position the substrate 20 at a preset position on the first bracket 30.
[0047] The length direction of the film forming device is the X-axis direction, and the width direction of the film forming device is the Y-axis direction (see Figure 2 and Figure 3 As shown), the height direction of the film forming device is the Z-axis direction, and the X-axis, Y-axis and Z-axis are perpendicular to each other.
[0048] The evaporation chamber 10 can maintain a vacuum environment. The substrate 20 is in a square shape.
[0049] The first bracket 30 can be fixed in the evaporation chamber 10, or can be movably installed in the evaporation chamber 10, and no specific setting is made here. Exemplarily, the first bracket 30 includes a first connecting rod 31 and a first support plate 32, the first connecting rod 31 is fixedly connected to the evaporation chamber 10, and the first support plate 32 is fixedly connected to the first connecting rod 31.
[0050] The robot arm 40 is a mechanism that can move the substrate 20. The robot arm 40 can drag the substrate 20 to move, or can absorb the substrate 20 to move, and no specific settings are given here. The robot arm 40 can move the substrate 20 from the outside of the evaporation chamber 10 to the inside of the evaporation chamber 10, and the robot arm 40 can move the substrate 20 to the first support plate 32 of the first bracket 30. It should be noted that the evaporation chamber 10 is provided with an opening for the robot arm 40 to enter and exit, and the opening is opened or closed.
[0051] The positioning member 50 is a component that can position the substrate 20. The positioning member 50 is mounted on the first support plate 32 of the first bracket 30. It should be noted that the position of the substrate 20 after the positioning member 50 positions the substrate 20 on the first support plate 32 is a preset position of the substrate 20 on the first bracket 30.
[0052] The first support plate 32 is provided with a first through hole 321 . When the substrate 20 is at a preset position on the first bracket 30 , the film forming surface 201 of the substrate 20 is exposed through the first through hole 321 .
[0053] The driving mechanism can be installed on the evaporation chamber 10 or on the first bracket 30, and no specific setting is made here. When the robot arm 40 moves the substrate 20 to the first support plate 32 of the first bracket 30, the driving mechanism drives the substrate 20 to abut against the positioning member 50, and the substrate 20 can be positioned at a preset position on the first bracket 30.
[0054] The film forming device also includes an evaporation source 70, a mask plate 80 and a second bracket 90. The evaporation source 70 is installed at the bottom of the evaporation chamber 10, and the mask plate 80 is placed on the second bracket 90. The mask plate 80 is arranged opposite to the film forming surface 201 of the substrate 20 in the height direction of the film forming device. The mask plate 80 is located between the substrate 20 and the evaporation source 70.
[0055] The evaporation source 70 is provided with an evaporation material. After the evaporation material is heated, the material is vaporized and passes through the mask 80 and is evaporated on the film forming surface 201 of the substrate 20 .
[0056] The mask plate 80 has an opening pattern corresponding to the thin film pattern formed on the substrate 20. In some examples, the mask plate 80 is a metal mask plate having an opening pattern formed therein.
[0057] The second bracket 90 can be fixed in the evaporation chamber 10, or can be movably installed in the evaporation chamber 10, and no specific setting is made here. Exemplarily, the second bracket 90 includes a second connecting rod 91 and a second support plate 92, the second connecting rod 91 is fixedly connected to the evaporation chamber 10, the second support plate 92 is fixedly connected to the second connecting rod 91, and the mask 80 is placed on the second support plate 92.
[0058] The second support plate 92 is provided with a second through hole, and the mask 80 can be exposed through the second through hole.
[0059] The film forming device provided by the embodiment of the utility model can position the substrate 20 at a preset position on the first bracket 30 by driving the substrate 20 to abut against the positioning member 50 through the driving mechanism when the robot arm 40 transfers the substrate to the first bracket 30, thereby improving the alignment accuracy of the substrate 20 and the mask 80, and further improving the product yield of the OLED.
[0060] In a possible implementation, the positioning member 50 abuts against one side of the substrate 20 in the length direction of the film forming device and one side of the substrate 20 in the width direction of the film forming device, respectively. In this way, the substrate 20 can be positioned on one side of the length direction of the film forming device and one side of the width direction of the film forming device, so that the substrate 20 is positioned at a preset position on the first bracket 30.
[0061] The positioning member 50 may include a plurality of positioning posts, the substrate 20 abuts against at least one positioning post on one side of the length direction of the film forming device, and the substrate 20 abuts against at least one positioning post on one side of the width direction of the film forming device.
[0062] The positioning column can be a plastic column or a rubber column.
[0063] For example, Figure 2 and Figure 3 As shown, the positioning member 50 includes a plurality of first positioning posts 51 and a plurality of second positioning posts 52. The plurality of first positioning posts 51 are arranged at intervals along the width direction of the film forming device, and the plurality of second positioning posts 52 are arranged at intervals along the length direction of the film forming device. When the driving mechanism drives the substrate 20 to abut against the positioning member 50, the substrate 20 abuts against the plurality of first positioning posts 51 on one side of the length direction of the film forming device, and the substrate 20 abuts against the plurality of second positioning posts 52 on one side of the width direction of the film forming device, so that the substrate 20 can be positioned at a preset position on the first bracket 30.
[0064] In a possible implementation, Figure 2 and Figure 3 As shown, the driving mechanism may include a first cylinder 61, a second cylinder 62, a first driving block 63 and a second driving block 64. The first cylinder 61 and the second cylinder 62 are respectively mounted on the first bracket 30. The first driving block 63 is fixedly connected to the piston rod of the first cylinder 61, and the second driving block 64 is fixedly connected to the piston rod of the second cylinder 62.
[0065] The driving mechanism further includes a control module 65, which is a control part of the vacuum evaporation machine. The control module 65 is respectively connected to the first cylinder 61 and the second cylinder 62 for communication, and the control module 65 can control the first cylinder 61 and the second cylinder 62.
[0066] The control module 65 may be installed on the evaporation chamber 10 . In other implementations, the control module 65 may also be installed on the first bracket 30 .
[0067] The first cylinder 61 and the first driving block 63 are located on the side of the substrate 20 away from the first positioning column 51 in the length direction of the film forming device. It can be understood that the substrate 20 is located between the first driving block 63 and the first positioning column 51; the second cylinder 62 and the second driving block 64 are located on the side of the substrate 20 away from the second positioning column 52 in the width direction of the film forming device. It can be understood that the substrate 20 is located between the second driving block 64 and the second positioning column 52.
[0068] The first driving block 63 may be a plastic block or a rubber block. The second driving block 64 may be a plastic block or a rubber block.
[0069] The first cylinder 61 can drive the substrate 20 to move along the length direction of the film forming device through the first driving block 63, and the second cylinder 62 can drive the substrate 20 to move along the width direction of the film forming device through the second driving block 64. Figure 2 and Figure 3 As shown, when the robot arm 40 moves the substrate 20 to the first support plate 32 of the first bracket 30, the control module 65 controls the first cylinder 61, and the first cylinder 61 drives the substrate 20 to move along the length direction of the film forming device (that is, moves along the +X axis direction) through the first driving block 63, so that the substrate 20 abuts against the multiple first positioning columns 51 of the positioning member 50. Afterwards, the control module 65 controls the second cylinder 62, and the second cylinder 62 drives the substrate 20 to move along the width direction of the film forming device through the second driving block 64, so that the substrate 20 abuts against the multiple second positioning columns 52 of the positioning member 50, so that the substrate 20 can be positioned at a preset position on the first bracket 30, thereby improving the alignment accuracy of the substrate 20 and the mask 80, thereby improving the product yield of the OLED.
[0070] It should be noted that Figure 3 The position of the middle substrate 20 on the first support plate 32 is a preset position of the substrate 20 on the first bracket 30 .
[0071] An embodiment of the utility model provides a vacuum evaporation machine, comprising a film forming device.
[0072] Among them, the film forming device in this embodiment has the same structure as the film forming device provided in any of the above embodiments, and can bring the same or similar technical effects, which will not be described one by one here, and the details can be referred to the description of the above embodiments.
[0073] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.
Claims
1. A film forming device, characterized in that: It includes a vapor deposition chamber, a substrate, a first bracket, a mechanical arm, a positioning member and a driving mechanism; The first bracket is installed in the evaporation chamber, and the mechanical arm is installed outside the evaporation chamber, and the mechanical arm can transfer the substrate to the first bracket; The positioning member is installed on the first bracket, the driving mechanism is installed in the evaporation chamber, and the driving mechanism is configured to drive the substrate to abut against the positioning member to position the substrate at a preset position on the first bracket.
2. The film forming device according to claim 1, characterized in that: The positioning member is in contact with one side of the substrate in the length direction of the film forming device and one side of the substrate in the width direction of the film forming device, respectively.
3. The film forming device according to claim 2, characterized in that: The positioning member includes a plurality of positioning posts. The substrate abuts against at least one of the positioning posts on one side in the length direction of the film forming device, and the substrate abuts against at least one of the positioning posts on one side in the width direction of the film forming device.
4. The film forming device according to claim 3, characterized in that: The positioning member includes a plurality of first positioning posts and a plurality of second positioning posts, wherein the plurality of first positioning posts are arranged at intervals along the width direction of the film forming device, and the plurality of second positioning posts are arranged at intervals along the length direction of the film forming device; The substrate abuts against the plurality of first positioning pins on one side in the length direction of the film forming device, and the substrate abuts against the plurality of second positioning pins on one side in the width direction of the film forming device.
5. The film forming device according to claim 4, characterized in that: The driving mechanism comprises a first cylinder, a second cylinder, a first driving block and a second driving block, the first cylinder and the second cylinder are respectively mounted on the first bracket, the first driving block is fixedly connected to the piston rod of the first cylinder, and the second driving block is fixedly connected to the piston rod of the second cylinder; The first cylinder may drive the substrate to move along the length direction of the film forming device through the first driving block, and the second cylinder may drive the substrate to move along the width direction of the film forming device through the second driving block.
6. The film forming device according to claim 5, characterized in that: The first cylinder and the first driving block are located on the side of the substrate away from the first positioning column in the length direction of the film forming device, and the second cylinder and the second driving block are located on the side of the substrate away from the second positioning column in the width direction of the film forming device.
7. The film forming device according to claim 5, characterized in that: The driving mechanism further includes a control module, and the control module is communicatively connected with the first cylinder and the second cylinder respectively.
8. The film forming device according to any one of claims 1 to 7, characterized in that: Also includes a mask and a second bracket; The first bracket is installed in the evaporation chamber, the mask is placed on the second bracket, and the mask is arranged opposite to the film forming surface of the substrate in the height direction of the film forming device.
9. The film forming device according to claim 8, characterized in that: It also includes an evaporation source, which is installed at the bottom of the evaporation chamber, and the mask is located between the substrate and the evaporation source.
10. A vacuum evaporation machine, characterized in that: It comprises a film forming device as described in any one of claims 1 to 9.