Molybdenum boat for film coating

Abstract

The utility model provides a molybdenum boat for film coating, and relates to the technical field of vacuum film coating. The molybdenum boat for film coating specifically comprises the molybdenum boat upper cover, the molybdenum boat middle cover, the molybdenum boat isolation plate and the molybdenum boat main body, through the design of the molybdenum boat main body, the molybdenum boat isolation plate, the molybdenum boat middle cover and the molybdenum boat upper cover and the distribution of the holes in the molybdenum boat, the film material evaporation and filtration path is effectively prolonged, and in the film material evaporation and rising process, the film material evaporation and filtration efficiency is improved. The large-particle film material can sink under the action of the gravity of the large-particle film material, and is filtered for multiple times through the holes which are integrally distributed in the molybdenum boat, so that the purpose of fine filtering is achieved, the product coating quality is improved, and meanwhile, the coating efficiency of the molybdenum boat is not influenced.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating, and in particular to a molybdenum boat for coating. Background Art

[0002] In vacuum coating, molybdenum boat is a conventional device, and its function is to evaporate the film material. After evaporation, the film material is plated on the surface of the workpiece to be plated. The coating is used to achieve the optical properties of the product. The traditional molybdenum boat usually consists of two parts, namely the molybdenum boat body and the molybdenum boat cover, and several holes are punched in the molybdenum boat cover. When the film material is placed inside the molybdenum boat body and covered with the cover, the evaporated film material is filtered through the holes in the molybdenum boat cover, and finally the evaporated film material filtered out of the holes is plated on the workpiece surface. However, the filtering effect is very limited if it is only filtered by the holes in the molybdenum boat cover, so for coatings with relatively high surface accuracy requirements, this molybdenum boat cannot meet the quality requirements.

[0003] Based on this, a new molybdenum boat technical solution is needed. Utility Model Content

[0004] In view of this, an embodiment of the present specification provides a molybdenum boat for coating, which forms a film material evaporation and filtration path through holes arranged on the molybdenum boat upper cover, the molybdenum boat middle cover and the molybdenum boat isolation plate. Through this path, the purpose of fine filtration can be achieved, and high-quality product coating can be realized.

[0005] The embodiments of this specification provide the following technical solutions:

[0006] The embodiment of this specification provides a molybdenum boat for coating, which is characterized by comprising:

[0007] The main body of the molybdenum boat is used to store the film material to be evaporated;

[0008] A molybdenum boat isolation plate is vertically placed inside the molybdenum boat body to divide the inside of the molybdenum boat body into a membrane material placement chamber and a first filter path chamber, wherein a plurality of first through holes are provided at one end of the isolation plate vertically away from the membrane material placement position, so that evaporated microparticles generated from the membrane material rise in the membrane material placement chamber and then pass through the first through holes into the first filter path chamber to complete the first stage of filtration;

[0009] The molybdenum boat middle cover covers the first filter path chamber formed by the molybdenum boat isolation plate inside the molybdenum boat body, wherein the molybdenum boat middle cover covers a plurality of second through holes at designated positions on the first filter path chamber, so that the evaporated micro-particles continue to rise in the first filter path chamber and then pass through the second through holes for second stage filtration;

[0010] The upper cover of the molybdenum boat covers the middle cover of the molybdenum boat, and after covering, a second filter path chamber is formed between the upper cover of the molybdenum boat and the middle cover of the molybdenum boat, and the middle cover of the molybdenum boat is staggered with a plurality of third through holes at designated positions of the second through holes, so that the evaporated micro-particles continue to rise in the second filter path chamber and then pass through the third through holes for final filtration and output.

[0011] In some embodiments, the molybdenum boat isolation plate includes a first horizontal plate section, a first vertical plate section and a second vertical plate section, wherein the first through hole is arranged on the first vertical plate, and the first horizontal plate section is respectively connected to the first end of the first vertical plate and the first end of the second vertical plate, so that the first filter path chamber forms a descending section chamber between the first vertical plate section and the second vertical plate section, and forms an ascending section chamber outside the second vertical plate section, and the evaporated microparticles passing through the first through hole first flow downward in the descending section chamber and then enter the ascending section chamber to complete the second stage of filtration.

[0012] In some embodiments, the molybdenum boat isolation plate includes a first horizontal plate section, a second horizontal plate section, a third horizontal plate section, a first vertical plate section, a second vertical plate section, a third vertical plate section and a fourth vertical plate section, wherein the first through hole is arranged on the fourth vertical plate, the fourth through hole is arranged on the third horizontal plate section, the second horizontal plate section is respectively connected to the first end of the third vertical plate section and the first end of the fourth vertical plate section, and the two ends of the third horizontal plate section are respectively connected to the second end of the second vertical plate section and the second end of the third vertical plate section, so that the molybdenum boat isolation plate is concave, the second vertical plate section and the third vertical plate section form an ascending section chamber, and the evaporated microparticles passing through the first through hole first flow downward in the descending section chamber, and then are filtered once through the fourth through hole, and then filtered again when entering the ascending section chamber.

[0013] In some embodiments, the side edges and bottom edges of the first vertical plate of the molybdenum boat isolation plate are provided with flanges.

[0014] In some embodiments, the molybdenum boat middle cover is provided with a concave cavity, and the second through hole is arranged at the bottom of the concave cavity.

[0015] In some embodiments, a vertical plate is provided on the bottom surface of the concave cavity of the molybdenum boat middle cover to form a filtering path chamber with the molybdenum boat isolation plate.

[0016] In some embodiments, two ends of the molybdenum boat middle cover are provided with extension surfaces.

[0017] In some embodiments, the third holes on the surface of the molybdenum boat upper cover are distributed on both sides of the molybdenum boat upper cover.

[0018] In some embodiments, flanges are provided on both sides of the molybdenum boat upper cover.

[0019] In some embodiments, the molybdenum boat body is a rectangular open container.

[0020] In some embodiments, an extension surface is provided on the side of the molybdenum boat body.

[0021] Compared with the prior art, at least one of the above-mentioned technical solutions adopted in the embodiments of the present specification can achieve at least the following beneficial effects: through the design of the molybdenum boat body, the molybdenum boat isolation plate, the molybdenum boat middle cover and the molybdenum boat upper cover, and the distribution of the holes on the molybdenum boat, the evaporation and filtration path of the film material is effectively extended. In the process of evaporation and rising of the film material, large particles of the film material can sink under the action of their own gravity, and then be filtered multiple times through the holes distributed throughout the molybdenum boat, so as to achieve the purpose of fine filtration, improve the quality of product coating, and at the same time do not affect the coating efficiency of the molybdenum boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is an exploded view of the components of a molybdenum boat in the prior art;

[0024] Figure 2 It is a schematic diagram of the assembly cross section and evaporation path of a molybdenum boat in the prior art;

[0025] Figure 3 This is an exploded view of the components of a molybdenum boat for coating;

[0026] Figure 4 It is a schematic diagram of the assembly cross section and evaporation path of the molybdenum boat for coating;

[0027] Figure 3 Middle: 11-molybdenum boat upper cover, 12-molybdenum boat middle cover, 13-molybdenum boat isolation plate, 14-molybdenum boat body. DETAILED DESCRIPTION

[0028] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0029] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0030] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0031] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0032] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the examples can be practiced without these specific details.

[0033] like Figure 1 As shown in the figure, the existing molybdenum boat usually includes two parts: an upper cover 10 and a main body 20, wherein the main body 20 is used to place the film material to be evaporated, and the upper cover 10 is provided with a plurality of small holes, which are used to filter the evaporated film material particles, that is, only the evaporated particles smaller than the aperture can pass through these small holes to be coated on the workpiece surface.

[0034] refer to Figure 2 As shown in FIG. 2 , when the molybdenum boat is used for vacuum coating, in the filtering path formed in the evaporation direction, the evaporated film material particles can only be filtered by the small holes on the upper cover 20 .

[0035] Therefore, in the existing molybdenum boat solution, although the overall structure of the molybdenum boat is simple, only small holes on the filtration path can play a filtering effect, and the filtration path is very simple, so the effect of filtering the evaporated film material microparticles is very limited.

[0036] In addition, even if the small holes in the upper cover 20 are made to have a very small aperture to filter out very small membrane material particles, if the aperture is too small, not only will the membrane material particles easily clog the small holes, but the number of particles that pass through the small holes will be greatly restricted, resulting in very low overall efficiency of vacuum coating.

[0037] In summary, the existing molybdenum boat is not suitable for vacuum coating.

[0038] In view of this, during the analysis and improvement exploration of the molybdenum boat and the filtration path formed inside it, it was found that: although part of the internal space of the molybdenum boat has been used as the placement space for the membrane material, there is still a lot of free space. Therefore, if these free spaces can be used to extend the entire filtration path, so that the evaporated membrane material particles can be filtered once under the action of their own gravity, even larger particles that meet the aperture requirements can be filtered out in advance, so that the membrane material particles that exit from the filtration holes are basically very small. Moreover, since the aperture does not need to be made very small, the holes are not easy to be blocked, and the number of particles used for coating after filtration will not be significantly limited, which can ensure the overall efficiency of coating.

[0039] In addition, if these empty spaces can be used to set up some components that can have a filtering effect, the overall filtering effect of membrane material evaporation will inevitably be significantly improved.

[0040] For example, a separation plate with filter holes is provided inside the molybdenum boat, and filtering is performed on the separation plate. For example, when the evaporated microparticles of the membrane material rise to the filter holes at the upper end of the separation plate, the heavier microparticles settle down before reaching the filter holes, and only the smaller particles can smoothly reach the filter holes, and then enter the other side of the separation plate after passing through the filter holes and continue to move along the filter path;

[0041] For example, in the inner space of the molybdenum boat, a horizontal plate with filtering holes is arranged on the other side of the isolation plate, so as to utilize the upward path of the microparticles to achieve filtering again, and utilize the small holes to filter the evaporated microparticles again;

[0042] For example, the filter holes on the upper cover are arranged at both ends of the upper cover, so that the filter holes of the upper cover are no longer directly opposite the filter holes below, thereby further extending the filter path and also achieving the filtering purpose.

[0043] In summary, the embodiments of this specification propose a new molybdenum boat structure: Figure 3As shown, the molybdenum boat in the new scheme may include: a molybdenum boat upper cover 11, a molybdenum boat middle cover 12, a molybdenum boat isolation plate 13 and a molybdenum boat body 14; wherein, the molybdenum boat isolation plate 13 is erected inside the molybdenum boat body 14, and the end of the molybdenum boat isolation plate 13 away from the bottom of the molybdenum boat body 14 is provided with filtering holes, so that the evaporated microparticles of the film material must first undergo an ascending stage before reaching and passing through the holes on the isolation plate to enter the space on the other side of the isolation plate; the molybdenum boat middle cover 12 is also provided with filtering holes, and at this time, the evaporated microparticles of the film material entering the other side of the isolation plate also need to undergo an ascending stage before passing through the holes of the middle cover, thereby utilizing the ascending stage and the holes of the middle cover to achieve further filtering effect; the holes of the molybdenum boat upper cover 11 and the holes of the molybdenum boat middle cover 12 are staggered, and at this time, the evaporated microparticles of the film material after passing through the middle cover also need to undergo an ascending stage before passing through the holes of the upper cover, thereby utilizing the ascending stage and the holes of the upper cover again to achieve further filtering effect.

[0044] Therefore, by utilizing the extra space inside the molybdenum boat body to implement a longer filtration path, and setting some components that can serve the filtering purpose on the filtration path in conjunction with these extra spaces (such as the aforementioned isolation plate, middle cover, upper cover, etc.), the evaporated microparticles of the film material can be filtered multiple times, and the filtration effect is very good and significant. In addition, the film material microparticles finally evaporated from the upper cover are all very fine particles, which can meet the needs of high-precision coating applications.

[0045] Furthermore, the number of evaporated film material particles is not easily limited by the filtering path, which can ensure the overall coating efficiency of the vacuum coating.

[0046] In some embodiments, the molybdenum boat isolation plate includes a first horizontal plate section, a first vertical plate section and a second vertical plate section, wherein the first through hole is arranged on the first vertical plate, and the first horizontal plate section is respectively connected to the first end of the first vertical plate and the first end of the second vertical plate, so that the first filter path chamber forms a descending section chamber between the first vertical plate section and the second vertical plate section, and forms an ascending section chamber outside the second vertical plate section, and the evaporated microparticles passing through the first through hole first flow downward in the descending section chamber and then enter the ascending section chamber to complete the second stage of filtration.

[0047] In some embodiments, the molybdenum boat isolation plate includes a first horizontal plate section, a second horizontal plate section, a third horizontal plate section, a first vertical plate section, a second vertical plate section, a third vertical plate section and a fourth vertical plate section, wherein the fourth vertical plate is provided with the first through hole, the third horizontal plate section is provided with the fourth through hole, the second horizontal plate section is respectively connected to the first end of the third vertical plate section and the first end of the fourth vertical plate section, and the two ends of the third horizontal plate section are respectively connected to the second end of the second vertical plate section and the second end of the third vertical plate section, so that the molybdenum boat isolation plate is concave, the second vertical plate section and the third vertical plate section form an ascending section chamber, and the evaporated microparticles passing through the first through hole first flow downward in the descending section chamber, and then are filtered once through the fourth through hole, and then filtered again before entering the ascending section chamber.

[0048] like Figure 2 As shown in the molybdenum boat isolation plate 12, large particles of membrane material will sink first under the action of their own gravity, and small particles of membrane material can rise, be filtered through the holes on the outside of the isolation plate, and enter the internal space of the molybdenum boat isolation plate. At this time, the membrane material flows into the bottom of the isolation plate through the guidance of the isolation plate, and the rising small particles are filtered again through the holes on the horizontal plate, which further improves the filtration accuracy. Due to the design of the molybdenum boat isolation plate, two filtrations can be achieved in a smaller space, so that the molybdenum boat body can still have enough space to store the membrane material, and fine filtration can be achieved without affecting the overall filtration efficiency, thereby improving the coating quality.

[0049] In some embodiments, the side and bottom edges of the vertical plate of the first plate of the molybdenum boat isolation plate are provided with flanges to ensure that after the molybdenum boat isolation plate is placed in the molybdenum boat body, it can be tightly attached to the inside of the molybdenum boat body without shaking, thereby ensuring the sealing of the connection and preventing the unfiltered membrane material from mixing with the filtered membrane material, resulting in poor coating effect.

[0050] In some embodiments, the molybdenum boat middle cover is provided with a concave cavity, and the second through hole is arranged at the bottom of the concave cavity. The concave cavity and the molybdenum boat upper cover form a membrane material filtering path, so that the filtering of the membrane material is more refined.

[0051] In some embodiments, a vertical plate is set on the lower bottom surface of the concave cavity of the molybdenum boat middle cover to form a filter path chamber with the molybdenum boat isolation plate. The filter path chamber can also be formed by adding a vertical plate on the bottom surface of the molybdenum boat middle cover and the vertical plate of the molybdenum boat isolation plate.

[0052] In some embodiments, the two ends of the molybdenum boat middle cover are provided with extended surfaces, which can strengthen the connection strength between the molybdenum boat middle cover and the molybdenum boat body, ensure the sealing of the connection, and prevent the unfiltered membrane material from mixing with the filtered membrane material, resulting in poor coating effect.

[0053] In some embodiments, the third holes on the surface of the molybdenum boat upper cover are distributed on both sides of the molybdenum boat upper cover. Compared with the solution designed directly above the holes in the molybdenum boat middle cover, the holes arranged on both sides can further extend the evaporation path, and the simultaneous output of film materials from the two holes can effectively improve the coating efficiency.

[0054] In some embodiments, flanges are provided on both sides of the molybdenum boat upper cover, which are arranged on the wider side. The flanges are connected to the molybdenum boat body, which can strengthen the connection strength between the molybdenum boat upper cover and the molybdenum boat body, ensure the sealing of the connection, and prevent the unfiltered membrane material from mixing with the filtered membrane material, resulting in poor coating effect.

[0055] In some embodiments, the molybdenum boat body is a rectangular open container, which is easier to produce and assemble, but can also be designed into other shapes depending on the specific usage scenario.

[0056] In some embodiments, an extension surface is provided on the side of the molybdenum boat body. The design of the extension surface facilitates the installation of the molybdenum boat middle cover and the molybdenum boat upper cover. Compared with traditional side welding, the design of the extension surface can make the connection between the parts more secure and more sealed.

[0057] like Figure 2 As shown, in some embodiments, the evaporation and filtration path of the film material is specifically as follows: the molybdenum boat isolation plate divides the internal space of the molybdenum boat body into two parts, and the film material is placed in the two parts. The film material is first transported into the interior of the molybdenum boat isolation plate through the holes on both sides of the molybdenum boat isolation plate, and then transported to the molybdenum boat middle cover through the holes on the concave plane of the molybdenum boat isolation plate, and then transported to the molybdenum boat middle cover through the holes on the surface of the molybdenum boat middle cover. It is transported to the space formed by the molybdenum boat middle cover and the molybdenum boat upper cover. Since holes are provided on both sides of the molybdenum boat upper cover, the film material will be transported to both sides after being output from the holes in the molybdenum boat middle cover, and finally output from the two holes in the molybdenum boat upper cover. During the evaporation and filtration process of the film material, it can sink due to its own weight and be filtered multiple times, which makes the filtration process more refined and improves the quality of product coating.

[0058] In this specification, the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the product embodiment described later, since it corresponds to the method, the description is relatively simple, and the relevant parts can be referred to the partial description of the system embodiment.

[0059] At the same time, this specification uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of this specification. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures or characteristics in one or more embodiments of this specification can be appropriately combined.

[0060] In addition, unless explicitly stated in the claims, the order of the processing elements and sequences described in this specification, the use of alphanumeric characters, or the use of other names are not intended to limit the order of the processes and methods of this specification. Although the above disclosure discusses some currently considered useful utility model embodiments through various examples, it should be understood that such details are only for illustrative purposes, and the attached claims are not limited to the disclosed embodiments. On the contrary, the claims are intended to cover all modifications and equivalent combinations that are consistent with the essence and scope of the embodiments of this specification. For example, although the system components described above can be implemented by hardware devices, they can also be implemented only by software solutions, such as installing the described system on an existing processing device or mobile device.

[0061] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this specification. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A molybdenum boat for coating, characterized in that: include: The main body of the molybdenum boat is used to store the film material to be evaporated; A molybdenum boat isolation plate is vertically placed inside the molybdenum boat body to divide the inside of the molybdenum boat body into a membrane material placement chamber and a first filter path chamber, wherein a plurality of first through holes are provided at one end of the isolation plate vertically away from the membrane material placement position, so that evaporated microparticles generated from the membrane material rise in the membrane material placement chamber and then pass through the first through holes into the first filter path chamber to complete the first stage of filtration; The molybdenum boat middle cover covers the first filter path chamber formed by the molybdenum boat isolation plate inside the molybdenum boat body, wherein the molybdenum boat middle cover covers a plurality of second through holes at designated positions on the first filter path chamber, so that the evaporated micro-particles continue to rise in the first filter path chamber and then pass through the second through holes for second stage filtration; The upper cover of the molybdenum boat covers the middle cover of the molybdenum boat, and after covering, a second filter path chamber is formed between the upper cover of the molybdenum boat and the middle cover of the molybdenum boat, and the middle cover of the molybdenum boat is staggered with a plurality of third through holes at designated positions of the second through holes, so that the evaporated micro-particles continue to rise in the second filter path chamber and then pass through the third through holes for final filtration and output.

2. The molybdenum boat for coating according to claim 1, characterized in that: The molybdenum boat isolation plate includes a first horizontal plate section, a first vertical plate section and a second vertical plate section, wherein the first vertical plate section is provided with the first through hole, and the first horizontal plate section is respectively connected to the first end of the first vertical plate section and the first end of the second vertical plate section, so that the first filter path chamber forms a descending section chamber between the first vertical plate section and the second vertical plate section, and forms an ascending section chamber outside the second vertical plate section, and the evaporated microparticles passing through the first through hole first flow downward in the descending section chamber and then enter the ascending section chamber to complete the second stage of filtration.

3. The molybdenum boat for coating according to claim 2, characterized in that: The molybdenum boat isolation plate includes a first horizontal plate section, a second horizontal plate section, a third horizontal plate section, a first vertical plate section, a second vertical plate section, a third vertical plate section and a fourth vertical plate section, wherein the fourth vertical plate is provided with the first through hole, the third horizontal plate section is provided with the fourth through hole, the second horizontal plate section is respectively connected to the first end of the third vertical plate section and the first end of the fourth vertical plate section, and the two ends of the third horizontal plate section are respectively connected to the second end of the second vertical plate section and the second end of the third vertical plate section, so that the molybdenum boat isolation plate is concave, the second vertical plate section and the third vertical plate section form an ascending section chamber, and the evaporated microparticles passing through the first through hole first flow downward in the descending section chamber, and then are filtered once through the fourth through hole, and then filtered again when entering the ascending section chamber.

4. The molybdenum boat for coating according to claim 3, characterized in that: The side edges and bottom edges of the first vertical plate of the molybdenum boat isolation plate are provided with flanges.

5. The molybdenum boat for coating according to claim 1, characterized in that: The molybdenum boat middle cover is provided with a concave cavity, and the second through hole is arranged at the bottom of the concave cavity.

6. The molybdenum boat for coating according to claim 5, characterized in that: A vertical plate is arranged on the bottom surface of the concave cavity of the molybdenum boat middle cover, and forms a filtering path chamber with the molybdenum boat isolation plate.

7. The molybdenum boat for coating according to claim 5, characterized in that: The molybdenum boat middle cover has extension surfaces at both ends.

8. The molybdenum boat for coating according to claim 1, characterized in that: The third holes on the surface of the molybdenum boat upper cover are distributed on both sides of the molybdenum boat upper cover.

9. The molybdenum boat for coating according to claim 8, characterized in that: The upper cover of the molybdenum boat is provided with flanges on both sides.

10. The molybdenum boat for coating according to claim 1, characterized in that: The molybdenum boat body is a rectangular open container.

11. The molybdenum boat for coating according to claim 10, characterized in that: An extension surface is arranged on the side of the molybdenum boat body.

Images