PVD (Physical Vapor Deposition) vacuum coating equipment

Abstract

The utility model provides PVD (Physical Vapor Deposition) vacuum coating equipment, and relates to the field of PVD vacuum coating, the inner sides of two groups of clamping push rods are output ends, the output ends are fixedly connected with clamping plates, and each group of clamping push rods are of a synchronous control structure. In order to solve the problems that in the prior art, a workpiece needs to be subjected to secondary film coating after being adjusted according to a clamped part, and film coating equipment needs to be repeatedly started, two sets of clamping push rods are arranged in a film coating kettle, so that when the workpiece is subjected to film coating, the clamping push rods are clamped; when coating processing is finished, any group of clamping push rods can be firstly started to push the clamping plate towards one side of the workpiece and clamp and position the workpiece, and after coating processing is finished, the other group of clamping assemblies can be started to clamp and position the other end of the workpiece by utilizing the clamping plate; and the original group of clamping push rods are synchronously withdrawn for use.

Description

Technical Field

[0001] The utility model belongs to the field of PVD vacuum coating, in particular to a PVD vacuum coating device. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense them on the surface of the coated object (metal, semiconductor or insulator) to form a thin film. PVD is one of the coating materials. When using existing coating equipment, it is necessary to clamp the workpiece to be coated. After clamping and coating, the clamped part needs to be adjusted and then coated again. The coating equipment needs to be opened and closed repeatedly, which has limitations.

[0003] Therefore, in view of the deficiencies of the above-mentioned scheme in actual production and implementation, it has been revised and improved. At the same time, in the spirit and concept of seeking excellence, with the assistance of professional knowledge and experience, and after many ingenuity and experiments, the present utility model was created. A PVD vacuum coating equipment is provided to solve the existing problem that it is necessary to clamp the workpiece to be coated, so that after clamping and coating, the clamped part needs to be adjusted and then coated for the second time, and the coating equipment needs to be opened repeatedly, which has limitations. Utility Model Content

[0004] The utility model proposes a PVD vacuum coating equipment, which solves the problem in the prior art that it is necessary to clamp the workpiece to be coated, so that after clamping and coating, the clamped part needs to be adjusted and then a second coating is performed, and the coating equipment needs to be opened repeatedly, which solves the problem of limitations.

[0005] The technical solution of the utility model is implemented as follows: a PVD vacuum coating device includes a coating kettle, the main body of the coating kettle is a top unidirectional opening structure, and a clamping push rod is fixedly connected to the inner side of the coating kettle, and the clamping push rod is provided at four places, wherein every two longitudinally adjacent clamping push rods form a group, and the two groups of clamping push rods are fixedly connected to the left and right sides of the inner wall of the coating kettle in a linear array, and the inner sides of the two groups of clamping push rods are output ends, and a clamping plate is fixedly connected to the output end, each group of clamping push rods is a synchronous control structure, and the clamping push rods and the clamping plate together constitute a clamping limit structure:

[0006] As a preferred embodiment, a support leg is fixedly connected to the bottom end surface of the coating kettle, the main body of the support leg is a cylindrical structure, and there are three support legs in total, and the three support legs are fixedly connected to the bottom end surface of the coating kettle in a circular array.

[0007] As a preferred embodiment, a pad is fixedly connected to the bottom end surface of the leg, and the main body of the pad is a cylindrical structure, and the diameter of the pad is larger than the diameter of the leg, and the leg and the pad together form a support structure for the coating kettle.

[0008] As a preferred embodiment, a control screen is fixedly connected to the front end of the outer circumference of the coating kettle. The control screen is a touch structure, and a longitudinal groove is opened on the outer circumference of the coating kettle. An adsorption push rod is fixedly connected to the inside of the longitudinal groove. There are two adsorption push rods in total.

[0009] As a preferred embodiment, a heating wire is fixedly connected to the inner bottom end surface of the coating kettle, and the heating wire is electrically connected to a control panel fixedly connected to the front end surface of the coating kettle, and two adsorption push rods are fixedly connected to the left and right sides of the coating kettle in opposite directions.

[0010] As a preferred embodiment, a moving frame is installed on the top surface of the two adsorption push rods, and the main body of the moving frame is an L-shaped structure, and a slider is fixedly connected to the outer side of the moving frame. There are four sliders in total, wherein every two longitudinally adjacent sliders form a group, and the two groups of sliders are fixedly connected to the front and rear side positions of the moving frame in opposite directions, an electromagnetic ring is fixedly connected to the top surface of the longitudinal component in the moving frame, and a cover plate is installed on the top of the coating kettle, and a mounting plate is fixedly connected to the outer side of the cover plate, the mounting plate is a metal structure, and a sealing plug is fixedly connected to the bottom end surface of the cover plate, and the main body of the sealing plug is a cylindrical structure, and a vacuum pump is fixedly connected to the top surface of the cover plate, an exhaust pipe is fixedly connected to the bottom end surface of the vacuum pump, and two hanging rings are fixedly connected to the top surface of the cover plate in a linear array.

[0011] After using the above technical solution, the beneficial effects of the utility model are:

[0012] 1. In the utility model, two groups of clamping push rods are arranged inside the coating kettle, so that when the workpiece is coated, any group of clamping push rods can be started first to push the clamping plate toward one side of the workpiece and clamp the workpiece in place. After the coating process is completed, the other group of clamping components can be started to clamp the other end of the workpiece in place using the clamping plate, and the original group of clamping push rods can be withdrawn for use simultaneously.

[0013] 2. In the utility model, an electromagnetic ring is fixedly connected to the top surface of the movable frame, so that when the cover plate is assembled to the top of the coating kettle, the electromagnetic ring fixedly connected to the top surface of the movable frame can be energized, and the magnetism generated by the electromagnetic ring after energization can be used to achieve the adsorption and positioning of the cover plate and the mounting plate, so that the cover plate can be firmly limited to the top of the coating kettle, thereby achieving the purpose of tight connection. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0015] Figure 1 It is a schematic diagram of the front and side views of the coating equipment of the utility model after partial structure cut-away;

[0016] Figure 2 It is a schematic diagram of the combined structure of the coating equipment of the utility model;

[0017] Figure 3 This is a schematic diagram of the combined structure of the cover plate and the mounting plate of the coating equipment of the utility model;

[0018] Figure 4 It is a schematic diagram of the front view of the coating equipment of the utility model after partial structure cut-away;

[0019] Figure 5 It is a left-side structural schematic diagram of the coating equipment of the utility model;

[0020] Figure 6 It is a schematic diagram of the top view of the coating equipment of the utility model;

[0021] In the figure, 1. coating kettle; 101. supporting legs; 102. cushion blocks; 103. control panel; 104. heating wire; 2. clamping push rod; 201. clamping plate; 202. adsorption push rod; 203. moving frame; 204. slider; 205. electromagnetic ring; 3. cover plate; 301. mounting plate; 302. sealing plug; 303. vacuum pump; 304. exhaust pipe; 305. hanging ring. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] like Figure 1-Figure 6As shown, a PVD vacuum coating equipment includes: a coating kettle 1, the main body of the coating kettle 1 is a top one-way opening structure, and the inner side of the coating kettle 1 is fixedly connected with a clamping push rod 2, and the clamping push rod 2 is provided at four places, wherein every two longitudinally adjacent clamping push rods 2 form a group, and the two groups of clamping push rods 2 are fixedly connected to the left and right sides of the inner wall of the coating kettle 1 in a linear array, and the inner sides of the two groups of clamping push rods 2 are both output ends, and a clamping plate 201 is fixedly connected to the output end, each group of clamping push rods 2 is a synchronous control structure, and the clamping push rod 2 and the clamping plate 201 together constitute a clamping limiting structure, and a moving frame 203 is installed on the top surface of the two adsorption push rods 2, and the main body of the moving frame 203 is an L-shaped structure, and the outer side of the moving frame 203 is fixedly connected with a sliding Block 204, sliders 204 are provided at four places, wherein every two longitudinally adjacent sliders 204 form a group, and the two groups of sliders 204 are fixedly connected to the front and rear side positions of the moving frame 203 in opposite directions, an electromagnetic ring 205 is fixedly connected to the top end surface of the longitudinal component in the moving frame 203, and a cover plate 3 is installed on the top end of the coating kettle 1, and a mounting plate 301 is fixedly connected to the outer side of the cover plate 3, the mounting plate 301 is a metal structure, and a sealing plug 302 is fixedly connected to the bottom end surface of the cover plate 3, and the main body of the sealing plug 302 is a cylindrical structure, and a vacuum pump 303 is fixedly connected to the top end surface of the cover plate 3, an exhaust pipe 304 is fixedly connected to the bottom end surface of the vacuum pump 303, and two hanging rings 305 are fixedly connected to the top end surface of the cover plate 3 in a linear array.

[0024] Among them, the bottom end surface of the coating kettle 1 is fixedly connected with a support leg 101, the main body of the support leg 101 is a cylindrical structure, and there are three support legs 101 in total, and the three support legs 101 are fixedly connected to the bottom end surface of the coating kettle 1 in a circular array, and the bottom end surface of the support leg 101 is fixedly connected with a cushion block 102, and the main body of the cushion block 102 is a cylindrical structure, and the diameter of the cushion block 102 is greater than the diameter of the support leg 101, and the support leg 101 and the cushion block 102 together constitute a support structure for the coating kettle 1.

[0025] Among them, a control screen 103 is fixedly connected to the front end of the outer periphery of the coating kettle 1, and the control screen 103 is a touch structure. A longitudinal groove is opened on the outer periphery of the coating kettle 1, and an adsorption push rod 202 is fixedly connected inside the longitudinal groove. There are two adsorption push rods 202. A heating wire 104 is fixedly connected to the bottom end surface of the coating kettle 1, and the heating wire 104 is electrically connected to the control screen 103 fixedly connected to the front end surface of the coating kettle 1, and the two adsorption push rods 202 are fixedly connected to the left and right sides of the coating kettle 1 in opposite directions.

[0026] During use, when the workpiece needs to undergo PVD coating, the workpiece can be hoisted into the coating kettle 1 by using a hoisting machine, and the two sets of clamping push rods 2 arranged in the coating kettle 1 are started to push the clamping plate 201 inward, and the clamping and positioning operation of the workpiece can be achieved by bringing the two clamping plates 201 close to each other. At this time, the cover plate 3 is installed on the coating kettle 1, and the moving frame 203 is pushed upward by the adsorption push rod 202 arranged in the coating kettle 1, and the moving frame 203 is moved upward, so that the electromagnetic ring 205 is close to the mounting plate 301 fixedly connected to the outer side of the cover plate 3 for adsorption and positioning operation.

[0027] When in use, the control operation of the current device can be realized by opening the control panel 103 fixedly connected to the front end surface of the coating kettle 1, and the heating operation can be carried out by opening the heating wire 104. When heating coating is performed, it is necessary to pre-start the vacuum pump 303 installed on the top end surface of the cover plate 3 to use the exhaust pipe 304 arranged on the bottom end surface of the cover plate 3 to perform a rapid vacuum operation, thereby achieving a more practical purpose.

Claims

1. A PVD vacuum coating device, characterized in that: The coating kettle (1) comprises a main body of the coating kettle (1) which is a top one-way opening structure, and a clamping push rod (2) is fixedly connected to the inner side of the coating kettle (1), and the clamping push rod (2) is provided at four locations, wherein every two longitudinally adjacent clamping push rods (2) form a group, and the two groups of clamping push rods (2) are fixedly connected to the left and right sides of the inner wall of the coating kettle (1) in a linear array, and the inner sides of the two groups of clamping push rods (2) are both output ends, and a clamping plate (201) is fixedly connected to the output end, and each group of clamping push rods (2) is a synchronous control structure, and the clamping push rods (2) and the clamping plate (201) together constitute a clamping limit structure.

2. The PVD vacuum coating equipment according to claim 1, characterized in that: A support leg (101) is fixedly connected to the bottom end surface of the coating kettle (1); the main body of the support leg (101) is a cylindrical structure, and there are three support legs (101) in total. The three support legs (101) are fixedly connected to the bottom end surface of the coating kettle (1) in a circular array.

3. The PVD vacuum coating equipment according to claim 2, characterized in that: A pad (102) is fixedly connected to the bottom end surface of the support leg (101), and the main body of the pad (102) is a cylindrical structure, and the diameter of the pad (102) is greater than the diameter of the support leg (101). The support leg (101) and the pad (102) together form a supporting structure for the coating kettle (1).

4. The PVD vacuum coating equipment according to claim 1, characterized in that: A control screen (103) is fixedly connected to the front end of the outer circumference of the coating kettle (1), and the control screen (103) is a touch structure. A longitudinal groove is opened on the outer circumference of the coating kettle (1), and an adsorption push rod (202) is fixedly connected inside the longitudinal groove. The adsorption push rod (202) is provided at two locations.

5. The PVD vacuum coating equipment according to claim 4, characterized in that: A heating wire (104) is fixedly connected to the inner bottom end surface of the coating kettle (1), and the heating wire (104) is electrically connected to a control panel (103) fixedly connected to the front end surface of the coating kettle (1), and two adsorption push rods (202) are fixedly connected to the left and right sides of the coating kettle (1) in opposite directions.

6. The PVD vacuum coating equipment according to claim 5, characterized in that: A moving frame (203) is installed on the top surface of the two adsorption push rods (202), and the main body of the moving frame (203) is an L-shaped structure. A slider (204) is fixedly connected to the outside of the moving frame (203). The slider (204) is provided at four locations, wherein every two longitudinally adjacent sliders (204) form a group, and the two groups of sliders (204) are fixedly connected to the front and rear side positions of the moving frame (203) in opposite directions. An electromagnetic ring (205) is fixedly connected to the top surface of the longitudinal component in the moving frame (203), and the coating kettle A cover plate (3) is installed at the top end of (1), and a mounting plate (301) is fixedly connected to the outer side of the cover plate (3), the mounting plate (301) is a metal structure, and a sealing plug (302) is fixedly connected to the bottom end surface of the cover plate (3), and the main body of the sealing plug (302) is a cylindrical structure, and a vacuum pump (303) is fixedly connected to the top end surface of the cover plate (3), and an exhaust pipe (304) is fixedly connected to the bottom end surface of the vacuum pump (303), and two hanging rings (305) are fixedly connected to the top end surface of the cover plate (3) in a linear array.

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