Novel rotating shaft for extension machine table

Abstract

The utility model belongs to the technical field of rotating shafts, and particularly relates to a novel rotating shaft for an extension machine table, which comprises a tripod, a mounting hole is arranged at the center in the tripod, the lower part in the mounting hole is communicated with the outside, a limiting component is arranged in the mounting hole, a rotating shaft is inserted in the limiting component, and the rotating shaft is connected with the tripod. The rotating shaft is rotationally connected with the tripod through the limiting assembly, and a vertically-through limiting groove is formed in the right side of the upper surface in the mounting hole. The top end of the rotating shaft and the interior of the mounting hole are mounted through the limiting assembly, then the rotating shaft is completely attached to the interior of the mounting hole in cooperation with the limiting groove, the rotating stability is improved, and therefore the rotating stability of the rotating shaft is good when the rotating shaft rotates, meanwhile, the rotating shaft is tightly attached to the tripod, and high-speed rotation is free of shaking; the stability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of rotating shafts, in particular to a novel rotating shaft used in an epitaxial machine. Background Art

[0002] Epitaxy is a process in chip manufacturing, and epitaxy machines are needed in the chip manufacturing process.

[0003] However, after the existing 12-inch epitaxial machine rotating shaft and the rotating frame are installed, the loose fit affects the rotation stability and causes product defects. Therefore, a new type of rotating shaft for epitaxial machine is proposed to address the above problem. Utility Model Content

[0004] In order to make up for the shortcomings of the prior art and solve the problem that the existing 12-inch epitaxial machine rotating shaft and rotating frame are not tightly fitted after installation, which affects the rotation stability and causes product defects, the utility model proposes a new rotating shaft for the epitaxial machine.

[0005] The technical solution adopted by the utility model to solve the technical problem is: the utility model discloses a novel rotating shaft used in an epitaxial machine, including a tripod;

[0006] A mounting hole is provided at the center of the tripod, and the lower part of the mounting hole is communicated with the outside. A limiting component is provided inside the mounting hole, a rotating shaft is inserted into the limiting component, and the rotating shaft is rotatably connected to the tripod through the limiting component. A limiting groove that penetrates up and down is provided on the right side of the upper surface of the mounting hole.

[0007] Preferably, the limiting groove is arranged in a semi-circular shape.

[0008] Preferably, the top end of the rotating shaft fits with the inner upper surface of the mounting hole.

[0009] Preferably, three evenly distributed connecting rods are fixedly connected to the top of the tripod, and two grooves are formed on the outer surface of the connecting rods, and the two grooves are opposite to each other.

[0010] Preferably, the limit assembly includes an inner groove opened above and below the inner side wall of the mounting hole, a plurality of evenly distributed limit blocks are rotatably connected inside the inner groove, a sleeve is fixedly connected to one side of the limit block close to the inner center of the mounting hole, and the sleeve is rotatably connected to the mounting hole, a limit ring is fixedly connected to the inner side wall of the sleeve, the top end of the rotating shaft is inserted into the sleeve, and the limit ring is sleeved above the outer surface of the rotating shaft.

[0011] Preferably, the side of the limiting block away from the inner center of the mounting hole is arranged in an arc shape.

[0012] Preferably, the limiting ring is made of sponge material.

[0013] The utility model is beneficial in that:

[0014] The utility model uses a limiting component to enable the top end of the rotating shaft to be installed inside the mounting hole, and then cooperates with the limiting groove to make the rotating shaft fit completely inside the mounting hole, and improves the stability of rotation, so that the stability of the rotating shaft during rotation is better. At the same time, the rotating shaft is closely fitted with the tripod, and high-speed rotation is without shaking, thereby improving stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure in the first embodiment;

[0017] Figure 2 It is a schematic diagram of a partial top-sectional structure in Embodiment 1;

[0018] Figure 3 It is a schematic diagram of a partial front cross-section structure in the first embodiment;

[0019] Figure 4 For Example 1 Figure 3 The enlarged structural diagram at B in the middle;

[0020] Figure 5 For Example 2 Figure 2 Enlarged structural diagram at A in the middle.

[0021] In the figure: 1, rotating shaft; 2, tripod; 3, limiting groove; 4, connecting rod; 5, groove; 6, mounting hole; 7, limiting assembly; 701, inner groove; 702, limiting block; 703, sleeve; 704, limiting ring. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Embodiment 1

[0024] See also Figure 1-4 As shown, a novel rotating shaft used in an epitaxial machine includes a tripod 2;

[0025] A mounting hole 6 is provided at the center of the tripod 2, and the lower part of the mounting hole 6 is communicated with the outside, a limiting component 7 is provided inside the mounting hole 6, a rotating shaft 1 is inserted inside the limiting component 7, and the rotating shaft 1 is rotatably connected to the tripod 2 through the limiting component 7, and a vertically penetrating limiting groove 3 is provided on the right side of the upper surface of the mounting hole 6; when working, the top end of the rotating shaft 1 is first inserted into the mounting hole 6, and the limiting component 7 is used to install the top end of the rotating shaft 1 and the inside of the mounting hole 6 during the plug-in installation, and then the limiting groove 3 is used to make the rotating shaft 1 fit completely inside the mounting hole 6, and the rotation stability is improved, so that the rotating shaft 1 has better stability during rotation.

[0026] The limiting groove 3 is configured to be a semicircular shape; during operation, the rotating shaft 1 is completely fitted inside the mounting hole 6, thereby improving the rotation stability.

[0027] The top end of the rotating shaft 1 fits with the inner upper surface of the mounting hole 6 ; during operation, the rotating shaft 1 can rotate inside the mounting hole 6 , and the end of the rotating shaft 1 can be moved out from the mounting hole 6 .

[0028] The top of the tripod 2 is fixedly connected with three evenly distributed connecting rods 4, and the outer surface of the connecting rod 4 is provided with two grooves 5, and the two grooves 5 are opposite to each other; when working, the tripod 2 is convenient to use through the connecting rods 4 and the grooves 5.

[0029] The limiting assembly 7 includes an inner groove 701 provided above and below the inner side wall of the mounting hole 6, a plurality of evenly distributed limiting blocks 702 are rotatably connected inside the inner groove 701, a sleeve 703 is fixedly connected to one side of the limiting block 702 close to the inner center of the mounting hole 6, and the sleeve 703 is rotatably connected to the mounting hole 6, a limiting ring 704 is fixedly connected to the inner side wall of the sleeve 703, the top end of the rotating shaft 1 is inserted into the sleeve 703, and the limiting ring 704 is sleeved above the outer surface of the rotating shaft 1; during operation, the sleeve 703 can be rotated inside the mounting hole 6 by rotating the limiting block 702 inside the inner groove 701, so the rotating shaft 1 sleeved inside the sleeve 703 through the limiting ring 704 can be inside the mounting hole 6, and the limiting ring 704 makes the rotating shaft 1 fit tightly with the collar, thereby making the rotation of the rotating shaft 1 more stable.

[0030] The side of the limiting block 702 away from the inner center of the mounting hole 6 is arranged in an arc shape; during operation, the limiting block 702 is convenient to rotate inside the inner groove 701 .

[0031] Embodiment 2

[0032] See also Figure 5 As shown, compared with Example 1, as another implementation of the present utility model, the limiting ring 704 is made of sponge material; when working, it is soft and easy to squeeze, and can fit tightly with the outer surface of the rotating shaft 1.

[0033] The working principle is as follows: first, the top end of the rotating shaft 1 is inserted into the mounting hole 6, and during the insertion and installation, the top end of the rotating shaft 1 is installed in the mounting hole 6 through the limiting component 7, and then the limiting groove 3 is used to make the rotating shaft 1 fit completely in the mounting hole 6, and the rotation stability is improved, so that the rotating shaft 1 has better stability during rotation.

[0034] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0035] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A novel rotating shaft used in an epitaxial machine, comprising a tripod (2); Features: A mounting hole (6) is provided at the center of the tripod (2), and the lower part of the mounting hole (6) is communicated with the outside. A limiting assembly (7) is provided inside the mounting hole (6), a rotating shaft (1) is inserted inside the limiting assembly (7), and the rotating shaft (1) is rotatably connected to the tripod (2) through the limiting assembly (7). A limiting groove (3) that penetrates from top to bottom is provided on the right side of the upper surface of the mounting hole (6).

2. The novel rotating shaft used in an epitaxial machine according to claim 1, characterized in that: The limiting groove (3) is arranged in a semi-circular shape.

3. The novel rotating shaft used in an epitaxial machine according to claim 2, characterized in that: The top end of the rotating shaft (1) fits into the inner upper surface of the mounting hole (6).

4. The novel rotating shaft used in an epitaxial machine according to claim 3 is characterized in that: The top of the tripod (2) is fixedly connected with three evenly distributed connecting rods (4), and the outer surface of the connecting rod (4) is provided with two grooves (5), and the two grooves (5) are opposite to each other.

5. The novel rotating shaft used in an epitaxial machine according to claim 4, characterized in that: The limiting assembly (7) comprises an inner groove (701) provided above and below the inner side wall of the mounting hole (6); a plurality of evenly distributed limiting blocks (702) are rotatably connected inside the inner groove (701); a sleeve (703) is fixedly connected to one side of the limiting block (702) close to the inner center of the mounting hole (6); the sleeve (703) is rotatably connected to the mounting hole (6); a limiting ring (704) is fixedly connected to the inner side wall of the sleeve (703); the top end of the rotating shaft (1) is inserted into the sleeve (703), and the limiting ring (704) is sleeved above the outer surface of the rotating shaft (1).

6. The novel rotating shaft used in an epitaxial machine according to claim 5, characterized in that: The side of the limiting block (702) away from the inner center of the mounting hole (6) is arranged in an arc shape.

7. The novel rotating shaft used in an epitaxial machine according to claim 6, characterized in that: The limiting ring (704) is made of sponge material.

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