Low-cost silicon carbide composite seed crystal

By designing a low-cost silicon carbide composite seed crystal, including a seed crystal mechanism, a measuring mechanism, and an installation mechanism, the existing problems of easy falling of the seed crystal, long time-consuming growth of the crystal, and inability to monitor the crystal weight in real time are solved, achieving efficient installation and separation. And the effect of real-time monitoring of crystal weight improves work efficiency and equipment safety.

CN222349186UActive Publication Date: 2025-01-14HARBIN KY SEMICON INC
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Patent Information

Application Number
CN202420696503.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-07
Publication Date
2025-01-14
Estimated Expiration
2034-04-07

AI Technical Summary

Technical Problem

Existing seed crystals are easy to fall off and are inconvenient to separate when used. The crystal growth process takes a long time and it is impossible to accurately determine the weight of the crystal on the seed crystal, and it is impossible to determine whether the crystal growth is completed.

Method used

A low-cost silicon carbide composite seed crystal is designed, including a seed crystal mechanism, a measuring mechanism and an installation mechanism. The mounting block is inserted into the slot, the connecting pin passes through the slot to fix the limit plate, and the return spring pushes the fixing pin into the fixing hole to fix the limit plate. The measuring mechanism detects the weight of the crystal in real time through the pressure spring and rotating rod, and transmits it to the control terminal through wireless signals.

Benefits of technology

It improves the installation and separation efficiency of seed crystals, monitors the crystal weight in real time, avoids falling off caused by excessive crystal weight, and enhances the safety and work efficiency of the equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of composite seed crystals, and discloses a low-cost silicon carbide composite seed crystal, which comprises a seed crystal mechanism, a measuring mechanism and a mounting mechanism, the side surface of the seed crystal mechanism is movably connected with the inner wall of the side surface of the mounting mechanism, and the inner wall of the side surface of the measuring mechanism is fixedly connected with the side surface of the mounting mechanism. The seed crystal mechanism comprises a seed crystal main body, the top end of the seed crystal main body is fixedly connected with a connecting pin, and the top end of the connecting pin is fixedly connected with a mounting block; the mounting block is clamped into the clamping groove, the connecting pin penetrates through the through groove, the limiting plate covers the side face of the clamping groove, the reset spring pushes the fixing pin upwards to enable the fixing pin to be inserted into the fixing hole, the limiting plate is fixed, and during disassembly, the electromagnet is powered on to generate magnetism to generate attraction force on the iron sheet, and the limiting rod drives the fixing pin to move out of the fixing hole. And then the mounting block is taken out, so that the working efficiency is improved, and meanwhile, the seed crystal mechanism is prevented from falling off.
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Description

Technical Field

[0001] The utility model relates to the technical field of composite seed crystals, and more specifically to a low-cost silicon carbide composite seed crystal. Background Art

[0002] Semiconductor is a material with electrical conductivity between that of insulator and conductor. Its electrical conductivity is easily controlled and can be used as a component material for information processing. The core units of many electronic products, such as computers, mobile phones, and digital recorders, use changes in the electrical conductivity of semiconductors to process information. In the semiconductor production process, semiconductors are activated through crystal growth technology. It promotes crystal growth by adding a certain amount of seed crystals during the crystal growth process. Seed crystals are small crystals with the same crystal orientation as the required crystals. They are the seeds for growing single crystals, also called seed crystals. Using seed crystals with different crystal orientations as seeds will obtain single crystals with different crystal orientations.

[0003] Deficiencies of existing technology: seed crystals need to be installed in a heating furnace when in use so that raw materials can grow on the seed crystals. Existing seed crystals are mostly installed and fixed by adhesion, which makes them easy to fall during growth and inconvenient to separate. At the same time, the growth process takes a long time, and the weight of the crystal on the seed crystal cannot be accurately determined, and it is impossible to determine whether the growth is completed. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the utility model provides a low-cost silicon carbide composite seed crystal to solve the problems existing in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a low-cost silicon carbide composite seed crystal, including a seed crystal mechanism, and also including: a measuring mechanism and a mounting mechanism, the side surface of the seed crystal mechanism is movably connected to the inner wall of the side surface of the mounting mechanism, the inner wall of the side surface of the measuring mechanism is fixedly connected to the side surface of the mounting mechanism, the seed crystal mechanism includes a seed crystal body, the top of the seed crystal body is fixedly connected to a connecting pin, the top of the connecting pin is fixedly connected to a mounting block, the mounting mechanism includes a mounting rod, a slot is provided on the side surface of the mounting rod, the side surface of the slot is movably connected to the side surface of the mounting block, a through slot is provided at the bottom end of the mounting rod, the side surface of the slot is movably connected to a limit plate, and the side surface of the limit plate is movably connected to a pull ring through a pin.

[0006] Furthermore, a fixing hole is provided at the bottom end of the slot, a second mounting hole is provided at the top end of the limiting plate, a reset spring is fixedly connected to the bottom end of the second mounting hole, a fixing pin is fixedly connected to the top end of the reset spring, and a side of the fixing pin is movably connected to the side of the fixing hole.

[0007] Furthermore, a first mounting hole is formed at the bottom end of the second mounting hole, an electromagnet is fixedly connected to the side of the first mounting hole, a limiting rod is fixedly connected to the bottom end of the fixing pin, and an iron sheet is fixedly connected to the bottom end of the limiting rod.

[0008] Further, the measuring mechanism includes a mounting cylinder, the inner wall of the bottom end of the mounting cylinder is fixedly connected to a pressure spring, the top of the pressure spring is fixedly connected to a fixing block, the side inner wall of the fixing block is fixedly connected to the side of the mounting rod, the top of the mounting rod is fixedly connected to a second connecting rod, the top of the mounting cylinder is fixedly connected to a mounting bracket, the top of the mounting bracket is movably connected to a rotating rod through a pin, the side of the rotating rod is movably connected to the top of the second connecting rod, the side of the mounting cylinder is fixedly connected to a mounting box, the side inner wall of the mounting box is fixedly connected to a sliding resistor, the sliding contact of the sliding resistor is fixedly connected to a current detection device through a wire, the bottom end of the current detection device is fixedly connected to a power supply through a wire, the side of the power supply is fixedly connected to the bottom end of the sliding resistor through a wire, the sliding contact of the sliding resistor is fixedly connected to the first connecting rod, the side of the first connecting rod is movably connected to the top of the mounting box, and the top of the first connecting rod is movably connected to the side of the rotating rod.

[0009] Furthermore, a first movable groove is provided on the side of the rotating rod, and the side of the first movable groove is movably connected to the top of the first connecting rod. A second movable groove is provided on the side of the rotating rod, and the side of the second movable groove is movably connected to the top of the second connecting rod.

[0010] Furthermore, a pressing block is fixedly connected to the bottom end of the rotating rod, and a touch switch is fixedly connected to the top end of the mounting tube.

[0011] Technical effects and advantages of the utility model:

[0012] 1. The utility model inserts the installation block into the slot, and the connecting pin passes through the through slot, and the limit plate covers the side of the slot. The reset spring pushes the fixing pin upward to insert the fixing pin into the fixing hole to fix the limit plate. When disassembly, the electromagnet is energized to generate magnetism to generate suction on the iron sheet, and the limit rod drives the fixing pin to move out of the fixing hole, removes the limit plate, and then removes the installation block, which is beneficial to improve work efficiency and prevent the seed crystal mechanism from falling off.

[0013] 2. The utility model increases the pressure of the fixed block on the pressure spring as the weight of the crystal increases during crystal growth, and the mounting rod moves downward to drive the rotating rod to rotate along the pin on the top of the mounting frame, thereby driving the first connecting rod to move upward, driving the sliding contact of the sliding resistor to move, and changing the resistance of the connected circuit. The current detection device detects the current in the circuit in real time and converts it into the weight of the crystal on the seed crystal mechanism, and transmits it to the control terminal through a wireless signal, which is conducive to real-time monitoring of the weight change of the crystal.

[0014] 3. The utility model detects that the weight of the crystal on the seed crystal mechanism is too large, and the pressing block moves downward with the rotation of the rotating rod and contacts the touch switch. The touch switch sends a signal to the control terminal to remind the operator that the weight of the crystal on the seed crystal mechanism is too large and needs to be dealt with in time to avoid it falling off due to excessive weight, which is beneficial to improving the safety of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the installation mechanism structure of the utility model;

[0017] Figure 3 It is a schematic diagram of the cross-sectional structure of the fixing pin of the utility model;

[0018] Figure 4 This is a schematic diagram of the structure of the measuring mechanism of the utility model;

[0019] Figure 5 This is a schematic diagram of the cross-sectional structure of the installation tube of the utility model;

[0020] Figure 6 It is a schematic diagram of the internal structure of the installation box of the utility model.

[0021] The reference numerals are: 1, seed crystal mechanism; 101, seed crystal body; 102, mounting block; 103, connecting pin; 2, measuring mechanism; 201, mounting cylinder; 202, mounting box; 203, rotating rod; 204, first connecting rod; 205, mounting frame; 206, first movable groove; 207, second movable groove; 208, pressing block; 209, touch switch; 210, second connecting rod; 211, fixing block; 212 , pressure spring; 213, sliding resistor; 214, current detection device; 215, power supply; 3, installation mechanism; 301, installation rod; 302, slot; 303, fixing hole; 304, fixing pin; 305, limit plate; 306, pull ring; 307, through slot; 308, limit rod; 309, first installation hole; 310, second installation hole; 311, reset spring; 312, iron sheet; 313, electromagnet. DETAILED DESCRIPTION

[0022] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are merely illustrative. The low-cost silicon carbide composite seed crystal involved in the present invention is not limited to the various structures recorded in the following embodiments. All other implementations obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0023] Reference Figures 1 to 6 The utility model provides a low-cost silicon carbide composite seed crystal, including a seed crystal mechanism 1, and also including: a measuring mechanism 2 and a mounting mechanism 3. The side of the seed crystal mechanism 1 is movably connected to the inner wall of the side of the mounting mechanism 3, and the inner wall of the side of the measuring mechanism 2 is fixedly connected to the side of the mounting mechanism 3. The seed crystal mechanism 1 includes a seed crystal body 101, and the top of the seed crystal body 101 is fixedly connected with a connecting pin 103, and the top of the connecting pin 103 is fixedly connected with a mounting block 102. The mounting mechanism 3 includes a mounting rod 301. A slot 302 is provided on the side of the mounting rod 301, and the side of the slot 302 is movably connected to the side of the mounting block 102. A through slot 307 is provided at the bottom of the mounting rod 301. The side of the slot 302 is movably connected to a limit plate 305, and the side of the limit plate 305 is movably connected to a pull ring 306 through a pin. The mounting block 102 is inserted into the slot 302, and the connecting pin 103 passes through the through slot 307. The limit plate 305 is covered on the side of the slot 302 and fixed, thereby completing the installation of the seed crystal mechanism 1.

[0024] Among them, a fixing hole 303 is opened at the bottom end of the slot 302, and a second mounting hole 310 is opened at the top end of the limiting plate 305. The bottom end of the second mounting hole 310 is fixedly connected with a return spring 311, and the top end of the return spring 311 is fixedly connected with a fixing pin 304. The side of the fixing pin 304 is movably connected to the side of the fixing hole 303. When the limiting plate 305 covers the side of the slot 302, the return spring 311 pushes the fixing pin 304 upward so that the fixing pin 304 is inserted into the fixing hole 303 to fix the limiting plate 305.

[0025] Among them, a first mounting hole 309 is opened at the bottom end of the second mounting hole 310, and an electromagnet 313 is fixedly connected to the side of the first mounting hole 309. The bottom end of the fixing pin 304 is fixedly connected to the limiting rod 308, and the bottom end of the limiting rod 308 is fixedly connected to an iron sheet 312. When disassembly is required, the electromagnet 313 is energized to generate magnetism and generate suction to the iron sheet 312, and the limiting rod 308 drives the fixing pin 304 to move out of the fixing hole 303, and the limiting plate 305 can be removed.

[0026] The measuring mechanism 2 comprises a mounting cylinder 201, a pressure spring 212 is fixedly connected to the inner wall of the bottom end of the mounting cylinder 201, a fixing block 211 is fixedly connected to the top end of the pressure spring 212, a side inner wall of the fixing block 211 is fixedly connected to the side of the mounting rod 301, a second connecting rod 210 is fixedly connected to the top end of the mounting rod 301, a mounting frame 205 is fixedly connected to the top end of the mounting frame 205, a rotating rod 203 is movably connected to the top end of the second connecting rod 210 via a pin, a mounting box 202 is fixedly connected to the side of the mounting cylinder 201, a sliding resistor 213 is fixedly connected to the inner wall of the side of the mounting box 202, a sliding contact of the sliding resistor 213 is fixedly connected to a current detection device 214 via a wire, and a power source 215 is fixedly connected to the bottom end of the current detection device 214 via a wire. The side of the power supply 215 is fixedly connected to the bottom of the sliding resistor 213 through a wire, and the sliding contact of the sliding resistor 213 is fixedly connected to the first connecting rod 204. The side of the first connecting rod 204 is movably connected to the top of the mounting box 202, and the top of the first connecting rod 204 is movably connected to the side of the rotating rod 203. When the seed crystal mechanism 1 is installed at the bottom of the mounting mechanism 3, as the crystal growth progresses, the weight of the crystal increases, which increases the pressure of the fixed block 211 on the pressure spring 212. The mounting rod 301 moves downward to drive the rotating rod 203 to rotate along the pin at the top of the mounting frame 205, thereby driving the first connecting rod 204 to move upward, driving the sliding contact of the sliding resistor 213 to move, and changing the resistance of the connected circuit. The current detection device 214 detects the current in the circuit in real time, and converts it into the crystal weight on the seed crystal mechanism 1, and transmits it to the control terminal through a wireless signal.

[0027] Among them, a first movable groove 206 is opened on the side of the rotating rod 203, and the side of the first movable groove 206 is movably connected to the top of the first connecting rod 204. A second movable groove 207 is opened on the side of the rotating rod 203, and the side of the second movable groove 207 is movably connected to the top of the second connecting rod 210. When the rotating rod 203 rotates along the pin at the top of the mounting frame 205, the second connecting rod 210 and the first connecting rod 204 move up and down, and the top of the second connecting rod 210 and the top of the first connecting rod 204 slide along the sides of the second movable groove 207 and the first movable groove 206 respectively.

[0028] Among them, the bottom end of the rotating rod 203 is fixedly connected with a pressure block 208, and the top end of the mounting tube 201 is fixedly connected with a touch switch 209. When the weight of the crystal on the seed crystal mechanism 1 is too heavy, the pressure block 208 moves downward with the rotation of the rotating rod 203 and contacts the touch switch 209. The touch switch 209 sends a signal to the control terminal to remind the operator that the weight of the crystal on the seed crystal mechanism 1 is too heavy and needs to be dealt with in time.

[0029] The working principle of the utility model is as follows: the mounting block 102 is inserted into the slot 302, the connecting pin 103 passes through the through slot 307, the limit plate 305 is covered on the side of the slot 302, the reset spring 311 pushes the fixing pin 304 upward to insert the fixing pin 304 into the fixing hole 303, and the limit plate 305 is fixed. As the crystal growth progresses in the heating furnace, the weight of the crystal on the seed crystal body 101 increases, so that the pressure of the fixing block 211 on the pressure spring 212 increases, and the mounting rod 301 moves downward to drive the rotating rod 203 to rotate along the pin at the top of the mounting frame 205, thereby driving the first connecting rod 204 to move upward, driving the sliding contact of the sliding resistor 213 to move, and changing the connection The resistance of the input circuit is measured, and the current detection device 214 detects the current size in the circuit in real time and converts it into the weight of the crystal on the seed crystal body 101, and sends it to the control terminal through a wireless signal. When the weight of the crystal on the seed crystal body 101 is too large, the pressing block 208 moves downward with the rotation of the rotating rod 203 and contacts the touch switch 209. The touch switch 209 sends a signal to the control terminal to remind the operator that the weight of the crystal on the seed crystal body 101 is too large and needs to be dealt with in time. When the crystal needs to be removed, the electromagnet 313 is energized to generate magnetism to generate suction on the iron sheet 312. The limit rod 308 drives the fixing pin 304 to move out of the fixing hole 303, removes the limit plate 305, and then removes the mounting block 102.

[0030] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A low-cost silicon carbide composite seed crystal, comprising a seed crystal mechanism (1), characterized in that: Also includes: A measuring mechanism (2) and a mounting mechanism (3), wherein the side surface of the seed crystal mechanism (1) is movably connected to the inner wall of the side surface of the mounting mechanism (3), and the inner wall of the side surface of the measuring mechanism (2) is fixedly connected to the side surface of the mounting mechanism (3). The seed crystal mechanism (1) comprises a seed crystal body (101), the top of the seed crystal body (101) is fixedly connected to a connecting pin (103), the top of the connecting pin (103) is fixedly connected to a mounting block (102), and the mounting mechanism (3) comprises a mounting rod (301), a slot (302) is provided on the side surface of the mounting rod (301), the side surface of the slot (302) is movably connected to the side surface of the mounting block (102), a through slot (307) is provided on the bottom end of the mounting rod (301), the side surface of the slot (302) is movably connected to a limiting plate (305), and the side surface of the limiting plate (305) is movably connected to a pull ring (306) via a pin.

2. A low-cost silicon carbide composite seed crystal according to claim 1, characterized in that: A fixing hole (303) is provided at the bottom end of the slot (302), a second mounting hole (310) is provided at the top end of the limiting plate (305), a reset spring (311) is fixedly connected to the bottom end of the second mounting hole (310), a fixing pin (304) is fixedly connected to the top end of the reset spring (311), and a side surface of the fixing pin (304) is movably connected to a side surface of the fixing hole (303).

3. A low-cost silicon carbide composite seed crystal according to claim 2, characterized in that: A first mounting hole (309) is formed at the bottom end of the second mounting hole (310), an electromagnet (313) is fixedly connected to the side of the first mounting hole (309), a limiting rod (308) is fixedly connected to the bottom end of the fixing pin (304), and an iron sheet (312) is fixedly connected to the bottom end of the limiting rod (308).

4. The low-cost silicon carbide composite seed crystal according to claim 1, characterized in that: The measuring mechanism (2) comprises a mounting tube (201), the inner wall of the bottom end of the mounting tube (201) is fixedly connected to a pressure spring (212), the top end of the pressure spring (212) is fixedly connected to a fixing block (211), the inner wall of the side surface of the fixing block (211) is fixedly connected to the side surface of a mounting rod (301), the top end of the mounting rod (301) is fixedly connected to a second connecting rod (210), the top end of the mounting tube (201) is fixedly connected to a mounting frame (205), the top end of the mounting frame (205) is movably connected to a rotating rod (203) via a pin, the side surface of the rotating rod (203) is movably connected to the top end of the second connecting rod (210), and the side surface of the mounting tube (201) is fixedly connected to the inner wall of the side surface of the fixing block (211) and the side surface of the fixing block (211) are fixedly connected to the side surface of a mounting rod (301). A mounting box (202) is fixedly connected, a sliding resistor (213) is fixedly connected to the inner wall of the side of the mounting box (202), a sliding contact of the sliding resistor (213) is fixedly connected to a current detection device (214) via a wire, a bottom end of the current detection device (214) is fixedly connected to a power source (215) via a wire, a side of the power source (215) is fixedly connected to the bottom end of the sliding resistor (213) via a wire, a sliding contact of the sliding resistor (213) is fixedly connected to a first connecting rod (204), a side of the first connecting rod (204) is movably connected to the top of the mounting box (202), and a top of the first connecting rod (204) is movably connected to the side of the rotating rod (203).

5. A low-cost silicon carbide composite seed crystal according to claim 4, characterized in that: A first movable groove (206) is provided on the side of the rotating rod (203), and the side of the first movable groove (206) is movably connected to the top of the first connecting rod (204). A second movable groove (207) is provided on the side of the rotating rod (203), and the side of the second movable groove (207) is movably connected to the top of the second connecting rod (210).

6. A low-cost silicon carbide composite seed crystal according to claim 4, characterized in that: The bottom end of the rotating rod (203) is fixedly connected to a pressing block (208), and the top end of the mounting cylinder (201) is fixedly connected to a touch switch (209).