Boat support
By setting a milky quartz reflector on the side plate of the boat support and using fine-tuning components, the problem of positioning detection of high-temperature underboat support is solved, and accurate position detection and transportation accuracy are achieved in high-temperature environments.
Patent Information
- Application Number
- CN202420084645.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-12
- Publication Date
- 2025-01-14
- Estimated Expiration
- 2034-01-12
AI Technical Summary
The existing boat holder becomes transparent in high temperature environments, resulting in the light sensor being unable to detect its position and affecting the positioning accuracy.
The reflective sheet made of milky quartz material is provided on the side plate of the boat support, and the position adjustment of the reflective sheet is achieved through the fine-tuning component to ensure that the light sensor can normally receive reflected light for position detection.
Ensure the position detection accuracy of the boat support in a high temperature environment, avoid mispositioning of the boat support and improve the accuracy of the transportation mechanism.
Smart Images
Figure CN222355092U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor and solar photovoltaic manufacturing, in particular to a boat support. Background Art
[0002] During the production process of semiconductors or photovoltaic materials, they need to be placed on a boat, and then the boat is placed on a boat support, and the boat support is placed on a boat support transportation mechanism, and the semiconductor or photovoltaic materials are transported through the boat support transportation mechanism. At present, the reaction furnaces used in the production process of semiconductors or photovoltaic materials are divided into different temperature zones, and the temperature settings of different temperature zones are different. Therefore, the position of the boat support when it is transported to the hot furnace will affect the processing performance of the semiconductor or photovoltaic materials. If you want to obtain semiconductors or photovoltaic materials with good processing performance, you need to accurately locate the position of the boat support on the boat support transportation mechanism and the transportation distance of the boat support transportation mechanism.
[0003] The existing boat support is positioned on the boat support transport mechanism by emitting light from a light sensor onto the boat support, and the light sensor receives the reflected light from the boat support to detect the position of the boat support, thereby achieving the positioning of the boat support. The current manufacturing process of semiconductor or photovoltaic materials requires a very high temperature, and the boat support will become transparent under the action of high temperature, resulting in the light sensor not receiving the reflected light and being unable to detect the position of the boat support, which in turn affects the positioning of the boat support. Utility Model Content
[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a boat support that can reduce the influence of high temperature on its positioning.
[0005] The boat support according to some embodiments of the utility model includes a boat support body and a reflective sheet; the boat support body has two side panels arranged at intervals along the width direction of the boat support body; the reflective sheet is arranged on the outer side of at least one of the side panels, wherein the reflective sheet is made of milky quartz material.
[0006] The boat support according to the embodiment of the utility model has at least the following beneficial effects:
[0007] In the boat support of the utility model, by arranging a reflective sheet on the side panel of the boat support body, it can be ensured that the boat support can still normally reflect light under a high-temperature ring, and that the optical sensor can normally receive the reflected light, thereby realizing the detection of the boat support position.
[0008] According to some embodiments of the present invention, the reflective sheet is disposed on both of the side panels.
[0009] According to some embodiments of the present invention, the side panel includes a first end and a second end arranged along the length direction thereof, and the reflective sheet is disposed on both the first end of the side panel and the second end of the side panel.
[0010] According to some embodiments of the present invention, the reflective sheet is welded to the side plate.
[0011] According to some embodiments of the present invention, an outer side wall of the side plate is provided with a mounting groove, and the reflective sheet is arranged in the mounting groove.
[0012] According to some embodiments of the present utility model, the reflective sheet is configured to be movable in the mounting groove along the length direction of the side plate;
[0013] The boat support also includes a fine-tuning component, which is transmission-connected to the reflective sheet. The fine-tuning component can operably drive the reflective sheet to move along the length direction of the side plate.
[0014] According to some embodiments of the utility model, the fine-tuning assembly includes a guide shaft, an elastic member and a locking member, the guide shaft is arranged in the mounting groove and fixedly connected to the side plate, the length direction of the guide shaft is parallel to the length direction of the side plate, the reflective sheet is provided with a guide hole for the guide shaft to pass through, the locking member can be screwed in or out and sleeved on the outside of the guide shaft and abutted against the reflective sheet, and the elastic member is arranged on the side of the reflective sheet away from the locking member and abuts against the reflective sheet.
[0015] According to some embodiments of the utility model, the fine-tuning assembly includes a guide shaft and two locking members, the guide shaft is arranged in the mounting groove and fixedly connected to the side plate, the length direction of the guide shaft is parallel to the length direction of the side plate, the reflective sheet is provided with a guide hole for the guide shaft to pass through, the two locking members can be screwed in or out and sleeved on the outside of the guide shaft, and the two locking members are respectively against the two sides of the reflective sheet.
[0016] According to some embodiments of the utility model, the mounting groove has a limiting wall, the limiting wall and the reflecting sheet are arranged along the length direction of the side plate, the limiting wall is located on the moving path of the reflecting sheet, the limiting wall is provided with an avoidance groove, the guide shaft is passed through the avoidance groove, and the locking piece close to the limiting wall is arranged opposite to the avoidance groove.
[0017] According to some embodiments of the present invention, the top surface of the reflective sheet is slidably matched with the top wall of the mounting groove, and the bottom surface of the reflective sheet is slidably matched with the bottom wall of the mounting groove.
[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:
[0020] Figure 1 This is a schematic diagram of the structure of the boat support according to the first embodiment of the utility model;
[0021] Figure 2 This is a schematic diagram of the structure of the boat support according to the second embodiment of the utility model;
[0022] Figure 3 It is a partial structural schematic diagram of a boat support according to Embodiment 3 of the present utility model;
[0023] Figure 4 It is a structural schematic diagram of a boat-supported transportation mechanism according to an embodiment of the utility model.
[0024] Figure Number:
[0025] 100, boat support; 110, boat support body; 111, side plate; 1111, mounting groove; 1112, limiting wall; 1113, avoidance groove; 120, reflective sheet; 130, fine-tuning assembly; 131, guide shaft; 132, elastic member; 133, locking member;
[0026] 200, boat-supporting transport mechanism; 210, mounting frame; 211, baffle; 2111, light-transmitting hole; 220, boat-moving unit; 230, optical sensor. DETAILED DESCRIPTION
[0027] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0028] In the description of the present utility model, it is necessary to understand that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.
[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0030] like Figure 1 As shown, the present application involves a boat support 100 , which includes a boat support body 110 and a reflective sheet 120 .
[0031] Combination Figure 1 and Figure 4 The boat support body 110 is mainly used to carry semiconductor or photovoltaic materials. When the boat support 100 is placed on the boat support transportation mechanism 200, the transportation direction of the boat support transportation mechanism 200 is parallel to the length direction of the boat support 100. Among them, the boat support transportation mechanism 200 is provided with a light sensor 230, which can emit light to the boat support 100 and receive reflected light, thereby realizing the detection of the position of the boat support 100.
[0032] like Figure 1 As shown, the boat support body 110 has two side panels 111 spaced apart along the width direction of the boat support body 110 ; a reflective sheet 120 is disposed on at least one of the side panels 111 , and the reflective sheet 120 is located on the outer side of the side panel 111 .
[0033] It should be noted that when placing the boat support 100 on the boat support transport mechanism 200, it should be ensured that the side panel 111 equipped with the reflective sheet 120 is close to the light sensor 230. In this way, the light emitted by the light sensor 230 can be directed onto the reflective sheet 120. The light sensor 230 receives the light reflected back by the reflective sheet 120, thereby realizing the detection of the position of the boat support body 110.
[0034] Furthermore, in order to avoid the boat support 100 being placed upside down on the boat support transportation mechanism 200 due to mistake, reflective sheets 120 are provided on both side panels 111 .
[0035] Furthermore, the side plate 111 includes a first end and a second end arranged along the length direction thereof, and the first end of the side plate 111 and the second end of the side plate 111 are both provided with a reflective sheet 120 .
[0036] The reflector 120 is made of opal quartz, which can withstand temperatures above 1000°C and will not become transparent in high temperature environments. Therefore, using opal quartz to manufacture the reflector 120 can meet the requirements for normal use of the reflector 120 in high temperature environments.
[0037] In the boat support 100 of the utility model, by setting a reflective sheet 120 on the side plate 111 of the boat support body 110, it can be ensured that the boat support 100 can still normally reflect light under a high-temperature ring, and that the optical sensor 230 can normally receive the reflected light, thereby realizing the detection of the position of the boat support 100.
[0038] like Figure 1 As shown, in the first embodiment, the reflective sheet 120 is welded to the side plate 111 .
[0039] like Figure 2 As shown, in the second embodiment, the outer side wall of the side plate 111 is provided with a mounting groove 1111, and the reflective sheet 120 is arranged in the mounting groove 1111. It can be understood that after the reflective sheet 120 is arranged in the mounting groove 1111, it can be avoided to protrude from the outer surface of the side plate 111. In this way, during the process of carrying the boat support 100, if the boat support 100 encounters scratches, the reflective sheet 120 will not be seriously damaged due to protruding from the outer surface of the side plate 111.
[0040] Furthermore, the reflective sheet 120 is configured to be able to move in the installation groove 1111 along the length direction of the side panel 111; the boat support 100 also includes a fine-tuning component 130, which is transmission-connected to the reflective sheet 120, and the fine-tuning component 130 can operably drive the reflective sheet 120 to move along the length direction of the side panel 111.
[0041] Specifically, the operator can adjust the position of the reflective sheet 120 by adjusting the fine-tuning component 130 , which is helpful to improve the accuracy of positioning.
[0042] It is understandable that due to the error in installation precision, there may be a certain error in the installation position of the optical sensor 230. Therefore, by fine-tuning the position of the reflector 120 through the fine-tuning component, the error in the installation position of the optical sensor 230 can be compensated, so that the position of the boat support 100 can be detected more accurately.
[0043] Specifically, the fine-tuning assembly 130 includes a guide shaft 131, an elastic member 132 and a locking member 133. The guide shaft 131 is arranged in the installation groove 1111 and is fixedly connected to the side plate 111. The length direction of the guide shaft 131 is parallel to the length direction of the side plate 111. The reflective sheet 120 is provided with a guide hole for the guide shaft 131 to pass through. The locking member 133 can be screwed in or out and sleeved on the outside of the guide shaft 131 and abutted against the reflective sheet 120. The elastic member 132 is arranged on the side of the reflective sheet 120 away from the locking member 133 and abuts against the reflective sheet 120.
[0044] It can be understood that the locking piece 133 can be screwed in or out by rotating it, and because the elastic piece 132 is arranged on the side of the reflective sheet 120 away from the locking piece 133 and abuts against the reflective sheet 120, when the locking piece 133 is screwed in or out, the locking piece 133 can move along the length direction of the side panel 111 with the reflective sheet 120, thereby achieving fine adjustment of the position.
[0045] Specifically, the mounting groove 1111 has a limiting wall 1112, and the limiting wall 1112 and the reflective sheet 120 are arranged along the length direction of the side plate 111, the limiting wall 1112 is located on the moving path of the reflective sheet 120, the guide shaft 131 is fixedly connected to the limiting wall 1112, the elastic member 132 is supported between the limiting wall 1112 and the reflective sheet 120, and the locking member 133 is located on the side of the reflective sheet 120 away from the elastic member 132.
[0046] The guide shaft 131 is a screw, the locking member 133 is a nut, and the elastic member 132 is a spring, which is sleeved outside the guide shaft 131 .
[0047] It should be noted that the guide shaft 131 , the locking member 133 and the elastic member 132 may all be made of high temperature resistant materials to avoid failure in a high temperature environment.
[0048] like Figure 3As shown, in the third embodiment, the outer wall of the side plate 111 is provided with a mounting groove 1111, the reflective sheet 120 is arranged in the mounting groove 1111, and the reflective sheet 120 is configured to be able to move in the mounting groove 1111 along the length direction of the side plate 111; the boat support 100 also includes a fine-tuning assembly 130, the fine-tuning assembly 130 is transmission-connected with the reflective sheet 120, and the fine-tuning assembly 130 can operably drive the reflective sheet 120 to move along the length direction of the side plate 111. The fine-tuning assembly includes a guide shaft 131 and two locking members 133, the guide shaft 131 is arranged in the mounting groove 1111 and is fixedly connected to the side plate 111, the length direction of the guide shaft 131 is parallel to the length direction of the side plate 111, the reflective sheet 120 is provided with a guide hole for the guide shaft 131 to pass through, and the two locking members 133 can be screwed or unscrewed and sleeved outside the guide shaft 131, and the two locking members 133 are respectively against the two sides of the reflective sheet 120.
[0049] Specifically, by rotating the two locking members 133 in the same direction, the reflective sheet 120 can be moved along the length direction of the side plate 111 driven by the two locking members 133 , thereby achieving fine adjustment of the position.
[0050] Specifically, the mounting groove 1111 has a limiting wall 1112, and the limiting wall 1112 and the reflective sheet 120 are arranged along the length direction of the side plate 111, and the limiting wall 1112 is located on the moving path of the reflective sheet 120. The limiting wall 1112 is provided with an avoidance groove 1113, and the guide shaft 131 is passed through the avoidance groove 1113, and the locking piece 133 close to the limiting wall 1112 is arranged opposite to the avoidance groove 1113.
[0051] It is understandable that the avoidance groove 1113 allows the locking member 133 to enter, so that the locking member 133 can be prevented from interfering with the reflection sheet 120 and affecting the movement of the reflection sheet 120 toward the limiting wall 1112 .
[0052] The guide shaft 131 is a screw rod, and the locking member 133 is a nut.
[0053] It should be noted that the guide shaft 131 and the locking member 133 may be made of high temperature resistant materials to avoid failure in a high temperature environment.
[0054] As a further improvement of the above-mentioned second and third embodiments, the top surface of the reflective sheet 120 is slidably matched with the top wall of the mounting groove 1111 , and the bottom surface of the reflective sheet 120 is slidably matched with the bottom wall of the mounting groove 1111 .
[0055] Specifically, the top surface of the reflective sheet 120 fits with the top wall of the mounting groove 1111, and the bottom surface of the reflective sheet 120 fits with the bottom wall of the mounting groove 1111. In this way, the mounting groove 1111 can guide the movement of the reflective sheet 120. In addition, the top wall and the bottom wall of the mounting groove 1111 can also limit the movement of the reflective sheet 120 around the axis of the guide shaft 131 to prevent the reflective sheet 120 from tilting.
[0056] like Figure 4 As shown, the present application also provides a boat support transport mechanism 200, including a mounting frame 210 and a boat moving unit 220 movably disposed on the mounting frame 210, the boat moving unit 220 can be moved under the drive of a related power unit, and the boat support 100 is used to be disposed on the boat moving unit 220.
[0057] The mounting frame 210 has a baffle 211, the boat support 100 is used to be placed on one side of the baffle 211, the light sensor 230 is arranged on the other side of the baffle 211, and the baffle 211 is provided with a light-transmitting hole 2111, and the light sensor 230 is arranged opposite to the light-transmitting hole 2111. Since the boat support 100 just coming out of the reactor will bring out a lot of heat, in order to prevent the light sensor 230 from being affected by heat radiation and its transmission and receiving performance, the light sensor 230 is installed on the side of the baffle 211 away from the boat support 100, and the light-transmitting hole 2111 is opened on the mounting frame 210, and the light of the light sensor 230 is irradiated onto the reflective sheet 120 of the boat support 100 through the light-transmitting hole 2111, and the reflected light is also transmitted to the receiving end of the light sensor 230 through the light-transmitting hole 2111.
[0058] The optical sensor 230 is a laser sensor.
[0059] Furthermore, the optical sensor 230 on the boat support transport mechanism 200 can also be used to detect whether there is a boat support 100 on the boat moving unit 220. After the boat moving unit 220 transports the boat support 100 to the reactor, the boat moving unit 220 withdraws alone after the boat support 100 falls into the reactor. At this time, the optical sensor 230 cannot receive the light reflected by the reflective sheet 120, and it is in a no-boat state. After the boat moving unit 220 with the empty boat support 100 extends into the reactor to take out the boat support 100, the optical sensor 230 receives the light reflected by the reflective sheet 120, and it is in a boat-present state.
[0060] It should be noted that the boat moving unit 220 can carry two or more groups of boat supports 100 at the same time.
[0061] In some embodiments, a stopper is provided on the boat moving unit 220, and travel switches are provided at both ends of the mounting frame 210, and the travel is located on the moving path of the stopper.
[0062] In the boat support 100 of the utility model, by setting a reflective sheet 120 on the side plate 111 of the boat support body 110, it can be ensured that the boat support 100 can still normally reflect light under a high-temperature ring, and that the optical sensor 230 can normally receive the reflected light, thereby realizing the detection of the position of the boat support 100.
[0063] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0064] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.
Claims
1. A boat support, characterized in that: It includes a boat support body and a reflective sheet; The boat support body has two side plates spaced apart along the width direction of the boat support body; The reflector is disposed on the outer side of at least one of the side panels, wherein the reflector is made of milky quartz material.
2. The boat support according to claim 1, characterized in that: The reflective sheets are arranged on the two side plates.
3. The boat support according to claim 2, characterized in that: The side plate comprises a first end and a second end arranged along a length direction thereof, and the reflective sheet is disposed on both the first end of the side plate and the second end of the side plate.
4. The boat support according to claim 1, characterized in that: The reflective sheet is welded to the side plate.
5. The boat support according to claim 1, characterized in that: The outer side wall of the side plate is provided with a mounting groove, and the reflective sheet is arranged in the mounting groove.
6. The boat support according to claim 5, characterized in that: The reflective sheet is configured to be movable in the mounting groove along the length direction of the side plate; The boat support further comprises a fine-tuning assembly, which is transmission-connected to the reflective sheet and can operably drive the reflective sheet to move along the length direction of the side plate.
7. The boat support according to claim 6, characterized in that: The fine-tuning assembly includes a guide shaft, an elastic member and a locking member. The guide shaft is arranged in the installation groove and fixedly connected to the side plate. The length direction of the guide shaft is parallel to the length direction of the side plate. The reflective sheet is provided with a guide hole for the guide shaft to pass through. The locking member can be screwed in or out and sleeved outside the guide shaft and abut against the reflective sheet. The elastic member is arranged on a side of the reflective sheet away from the locking member and abuts against the reflective sheet.
8. The boat support according to claim 6, characterized in that: The fine-tuning assembly includes a guide shaft and two locking pieces. The guide shaft is arranged in the mounting groove and fixedly connected to the side plate. The length direction of the guide shaft is parallel to the length direction of the side plate. The reflective sheet is provided with a guide hole for the guide shaft to pass through. The two locking pieces can be screwed in or out and sleeved outside the guide shaft, and the two locking pieces are respectively against two sides of the reflective sheet.
9. The boat support according to claim 8, characterized in that: The mounting groove has a limiting wall, and the limiting wall and the reflective sheet are arranged along the length direction of the side plate. The limiting wall is located on the moving path of the reflective sheet. The limiting wall is provided with an avoidance groove, and the guide shaft is passed through the avoidance groove. The locking piece close to the limiting wall is arranged opposite to the avoidance groove.
10. The boat support according to claim 6, characterized in that: The top surface of the reflective sheet is slidably matched with the top wall of the mounting groove, and the bottom surface of the reflective sheet is slidably matched with the bottom wall of the mounting groove.