Automatic opening and closing device for wafer box

What is AI technical title?
AI technical title is built by Patsnap AI team. It summarizes the technical point description of the patent document.
By designing an automatic opening and closing device, the problem of the wafer box loading and opening mechanism in the prior art is solved, and the problem of slow manual operation speed is achieved, efficient wafer transmission and precise box lid operation are achieved, and the wafer processing quality is improved .

CN222355102UActive Publication Date: 2025-01-14SHANGHAI FORTREND TECH CO LTD

View PDF 0 Cites 0 Cited by

Patent Information

Application Number: CN202421077017.2
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2024-05-17
Publication Date: 2025-01-14
Estimated Expiration: 2034-05-17

AI Technical Summary

Technical Problem

The existing wafer box loading and opening mechanism occupy space, resulting in a decrease in storage stations, and manual picking and loading of the box cover leads to slow wafer transmission speed, affecting accuracy and processing quality.

Method used

Design a wafer box automatic opening and closing device, including a mounting frame and opening and closing mechanism, automatically clamp the box cover through the opening and closing driving mechanism, free up operating space, improve space utilization, and achieve high quality through clamping components and adsorption channels. Accurate lid adsorption and movement.

Benefits of technology

Effectively free up operating space, improve the storage station of wafer boxes, improve wafer transmission accuracy and efficiency, and improve wafer processing quality.

✦ Generated by Eureka AI based on patent content.

Smart Images

Figure CN222355102U_ABST

Patent Text Reader

Abstract

The utility model relates to the technical field of wafer transmission, in particular to an automatic opening and closing device for a wafer box, which comprises a mounting rack, an opening and closing mechanism and an opening and closing driving mechanism, the opening and closing mechanism comprises an opening and closing plate and a clamping part, the opening and closing plate is connected with the output end of the opening and closing driving mechanism, the clamping part is mounted on the opening and closing plate, and the opening and closing plate is connected with the output end of the opening and closing driving mechanism. And the opening and closing driving mechanism drives the opening and closing plate to move back and forth and up and down, so that the clamping part is close to or far away from the opening end of the wafer box. According to the utility model, the operation space of other processing devices for wafers in the wafer box can be vacated, the opening and closing driving mechanism is prevented from extruding the placing space of the wafer box, the storage station of the wafer box is increased, the space utilization rate is improved, the box cover is automatically clamped, the wafer transmission precision and efficiency are improved, and the wafer processing quality is improved.

Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of wafer transmission, in particular to an automatic opening and closing device for a wafer box. Background Art

[0002] Wafer boxes are storage devices used to temporarily store wafers during the wafer transportation process and maintain their closed state. Wafer boxes usually include a box body with a side opening and a box cover that can cover the side opening in a sealed manner, and the box cover can be completely detached from the box body.

[0003] Currently, the most commonly used type is the front-opening wafer box. Usually, a wafer box loading and opening mechanism is set in front of the wafer processing equipment, and then the wafer is taken and placed through subsequent processes.

[0004] In existing equipment, a storage station is usually set on one side of the loading and opening mechanism for storing the wafer boxes to be processed. However, the power structure of the conventional loading and opening mechanism is placed on one side of the storage station, which takes up space and causes a reduction in storage stations. In addition, some devices use manual methods to take and place the box cover, which leads to slow wafer transmission speed, affects the wafer loading accuracy, and reduces the wafer processing quality. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides an automatic opening and closing device for a wafer box, which frees up space for other processing devices to operate wafers in the wafer box, prevents the opening and closing drive mechanism from squeezing the placement space of the wafer box, and improves space utilization; it automatically clamps the box cover, improves the accuracy and efficiency of wafer transmission, and improves the wafer processing quality.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] The utility model provides an automatic opening and closing device for a wafer box, comprising a mounting frame and an opening and closing mechanism, wherein the opening and closing mechanism is used to clamp a box cover at an opening of the wafer box, the mounting frame is connected to an opening and closing driving mechanism for driving the opening and closing mechanism to move, and the opening and closing driving mechanism is drivingly connected to the opening and closing mechanism and drives the opening and closing mechanism to approach or move away from the opening end of the wafer box;

[0008] The opening and closing mechanism includes an opening and closing plate and a clamping component. The opening and closing plate is connected to the output end of the opening and closing drive mechanism. The clamping component is installed on the opening and closing plate. The opening and closing drive mechanism drives the opening and closing plate to move forward and backward and up and down so that the clamping component is close to or away from the opening end of the wafer box.

[0009] Among them, the opening and closing drive mechanism includes a longitudinal module and a horizontal module, the longitudinal module is installed on the mounting frame, the horizontal module is installed at the output end of the longitudinal module, the opening and closing plate is connected to the output end of the horizontal module, the horizontal module is used to drive the opening and closing mechanism to move forward and backward to approach or move away from the wafer box, the longitudinal module is arranged below or above the opening and closing mechanism, and the longitudinal module is used to drive the opening and closing plate to move upward or downward to free up operating space for the wafer box.

[0010] Among them, the clamping component includes a clamping body and an adsorption channel. There are multiple clamping bodies. The clamping body is installed on the opening and closing plate. One end of the clamping body corresponds to the opening end of the wafer box. The adsorption channel is arranged on one side of the opening and closing plate close to the opening end of the wafer box.

[0011] Wherein, a suction cup is installed in the adsorption channel.

[0012] Wherein, the clamping body is rotatably connected to the opening and closing plate, and the clamping body is connected to a moving frame, and the moving frame drives the clamping body to rotate when it moves.

[0013] Among them, the movable frame is provided with a guide groove, and the clamping body includes a positioning rod and a rocker rod, the positioning rod is connected to the rocker rod, one end of the positioning rod corresponds to the opening end of the wafer box, the rocker rod is rotatably connected to the opening and closing plate, and the outer end of the rocker rod cooperates with the guide groove. When the movable frame moves, the outer end of the rocker rod is driven to slide in the guide groove to rotate the positioning rod.

[0014] Among them, an accommodating space is set between the movable frame and the opening and closing plate, and the opening and closing plate is equipped with a driving cylinder connected to the movable frame. The driving cylinder is located in the accommodating space, and the driving cylinder drives the movable frame to move and thus drives the positioning rod to rotate.

[0015] Beneficial effects of the utility model:

[0016] The utility model drives the opening and closing mechanism and the box cover away from the wafer box and moves the opening and closing mechanism downward through the opening and closing driving mechanism, thereby effectively freeing up the operating space for other processing devices to operate the wafers in the wafer box, preventing the opening and closing driving mechanism from squeezing the placement space of the wafer box, increasing the storage position of the wafer box, and improving space utilization; the box cover is automatically clamped, the accuracy and efficiency of wafer transmission are improved, and the wafer processing quality is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram of the separation state of the wafer box and the box cover.

[0018] Figure 2 This is a front view of the structure of the automatic opening and closing device for the wafer box.

[0019] Figure 3 It is a structural schematic diagram of the opening and closing plate.

[0020] Figure 4 It is a schematic diagram of the partial structure of the opening and closing drive mechanism.

[0021] Figure 5 It is a top view of the structure of the opening and closing mechanism.

[0022] 01. Wafer box; 02. Box cover;

[0023] 1. Mounting frame; 2. Opening and closing mechanism;

[0024] 21. opening and closing plate; 22. clamping component; 23. moving frame; 231. guide groove; 24. accommodating space; 25. driving cylinder;

[0025] 221, clamping body; 222, adsorption channel; 2221, suction cup;

[0026] 2211, positioning rod; 2212, swing rod;

[0027] 3. Opening and closing driving mechanism; 31. Longitudinal module; 32. Horizontal module. DETAILED DESCRIPTION

[0028] In order to facilitate the understanding of those skilled in the art, the present invention is further described below in conjunction with the examples and drawings. The specific implementation methods of the present invention will be described below. It should be noted that in the specific description of these implementation methods, in order to provide a concise description, this specification cannot provide a detailed description of all the features of the actual implementation methods. It should be understood that in the actual implementation of any one of the implementation methods, it should be understood that for those of ordinary skill in the art related to the content disclosed in the present invention, some changes such as design, manufacturing or production based on the technical content disclosed in the present invention are only conventional technical means, and should not be understood as the content of the present disclosure being insufficient. The present utility model is described in detail below in conjunction with the drawings.

[0029] refer to Figures 1 to 3 As shown, the utility model provides an automatic opening and closing device for a wafer box, comprising a mounting frame 1 and an opening and closing mechanism 2, wherein the opening and closing mechanism 2 is used to clamp a box cover 02 at the opening of a wafer box 01, and the mounting frame 1 is connected to an opening and closing driving mechanism 3 for driving the opening and closing mechanism 2 to move, and the opening and closing driving mechanism 3 is drivingly connected to the opening and closing mechanism 2 and drives the opening and closing mechanism 2 to approach or move away from the opening end of the wafer box 01;

[0030] The opening and closing mechanism 2 includes an opening and closing plate 21 and a clamping component 22. The opening and closing plate 21 is connected to the output end of the opening and closing drive mechanism 3. The clamping component 22 is installed on the opening and closing plate 21. The opening and closing drive mechanism 3 drives the opening and closing plate 21 to move forward and backward and up and down so that the clamping component 22 is close to or away from the opening end of the wafer box 01.

[0031] In actual use, the wafer box 01 is first loaded so that the open side of the wafer box 01 corresponds to the opening and closing mechanism 2, and the opening and closing drive mechanism 3 drives the opening and closing plate 21 to move forward and backward and up and down, so that the clamping component 22 is close to or away from the open end of the wafer box 01. After the clamping component 22 clamps the box cover 02 on the wafer box 01, the opening and closing drive mechanism 3 drives the opening and closing mechanism 2 and the box cover 02 away from the wafer box 01 and moves the opening and closing mechanism 2 downward, effectively freeing up operating space for other processing equipment to operate the wafers in the wafer box, and providing a placement space for the wafer box 01 through the opening and closing drive mechanism 3, increasing the storage station of the wafer box 01 and improving space utilization; the box cover 02 is automatically clamped by the set opening and closing drive mechanism 3 and the opening and closing mechanism 2, thereby improving the accuracy and efficiency of wafer transmission and the wafer processing quality.

[0032] In this embodiment, the opening and closing driving mechanism 3 includes a longitudinal module 31 and a horizontal module 32, the longitudinal module 31 is installed on the mounting frame 1, the horizontal module 32 is installed at the output end of the longitudinal module 31, the opening and closing plate 21 is connected to the output end of the horizontal module 32, the horizontal module 32 is used to drive the opening and closing mechanism 2 to move forward and backward to approach or move away from the wafer box 01, the longitudinal module 31 is arranged below or above the opening and closing mechanism 2, and the longitudinal module 31 is used to drive the opening and closing plate 21 to move upward or downward to free up the operating space for the wafer box 01; in actual use, the longitudinal module 31 is used to drive the opening and closing mechanism 2 to move longitudinally, and the horizontal module 32 is used to drive the opening and closing mechanism 2 to approach or move away from the wafer box 01, and the longitudinal module 31 and the horizontal module 32 are cleverly arranged in the space corresponding to the opening side of the wafer box 01 to provide a storage station for the wafer box 01; specifically, a placement space can be set at the output end of the longitudinal module 31, and the horizontal module 32 can be hidden in the placement space, and the structural arrangement is clever.

[0033] In this embodiment, the clamping component 22 includes a clamping body 221 and an adsorption channel 222. The number of the clamping bodies 221 is two. The clamping body 221 is installed on the opening and closing plate 21. One end of the clamping body 221 corresponds to the opening end of the wafer box 01, and the adsorption channel 222 is arranged on the side of the opening and closing plate 21 close to the opening end of the wafer box 01. In actual use, the clamping body 221 is adapted to the concave cavity on the wafer box 01 to effectively position the wafer box 01. By setting up multiple clamping bodies 221, the positioning effect of the wafer box 01 is improved. When the end face of the adsorption channel 222 is in contact with the side of the box cover 02, the adsorption channel 222 can smoothly adsorb the box cover 02 by external negative pressure, and can quickly clamp the box cover 02.

[0034] In this embodiment, a suction cup 2221 is installed in the adsorption channel 222 , and the box cover 02 is adsorbed by the suction cup 2221 , thereby enhancing the adsorption effect on the box cover 02 .

[0035] In this embodiment, the clamping body 221 is rotatably connected to the opening and closing plate 21 , and the clamping body 221 is connected to a moving frame 23 . When the moving frame 23 moves, it drives the clamping body 221 to rotate.

[0036] In this embodiment, the movable frame 23 is provided with a guide groove 231, and the clamping body 221 includes a positioning rod 2211 and a rocker rod 2212. The positioning rod 2211 is connected to the rocker rod 2212, one end of the positioning rod 2211 corresponds to the opening end of the wafer box 01, and the rocker rod 2212 is rotatably connected to the opening and closing plate 21, and the outer end of the rocker rod 2212 cooperates with the guide groove 231. When the movable frame 23 moves, the outer end of the rocker rod 2212 is driven to slide in the guide groove 231, thereby causing the positioning rod 2211 to rotate. During the movement of the movable frame 23, the outer end of the rocker rod 2212 is driven to slide synchronously in the guide groove 231, and the rocker rod 2212 drives the positioning rod 2211 to rotate synchronously, thereby satisfying the positioning cavities of wafer boxes 01 of different shapes and improving the positioning versatility.

[0037] In this embodiment, an accommodating space 24 is set between the movable frame 23 and the opening and closing plate 21. The opening and closing plate 21 is installed with a driving cylinder 25 that is drivingly connected to the movable frame 23. The driving cylinder 25 is located in the accommodating space 24. The driving cylinder 25 drives the movable frame 23 to move, thereby driving the positioning rod 2211 to rotate. The movable frame 23 is driven to move by the driving cylinder 25, and the movement of the movable frame 23 is automatically controlled. Through the set accommodating space 24, the driving cylinder 25 is cleverly hidden between the movable frame 23 and the opening and closing frame, without increasing the space occupancy, thereby improving the space utilization rate.

[0038] The above description is only a preferred embodiment of the utility model, and does not limit the utility model in any form. Although the utility model is disclosed as above in the preferred embodiment, when the technical content disclosed above is used to make some changes or modifications to equivalent embodiments of equivalent changes, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technology of the utility model are within the scope of the technical solution of the utility model as long as they do not deviate from the content of the technical solution of the utility model.

Claims

1. A wafer box automatic opening and closing device, characterized in that: The invention comprises a mounting frame (1) and an opening and closing mechanism (2), wherein the opening and closing mechanism (2) is used to clamp a box cover (02) at the opening of a wafer box (01), and the mounting frame (1) is connected to an opening and closing driving mechanism (3) for driving the opening and closing mechanism (2) to move, and the opening and closing driving mechanism (3) is drivingly connected to the opening and closing mechanism (2) and drives the opening and closing mechanism (2) to move closer to or away from the opening end of the wafer box (01); The opening and closing mechanism (2) comprises an opening and closing plate (21) and a clamping component (22); the opening and closing plate (21) is connected to the output end of the opening and closing drive mechanism (3); the clamping component (22) is mounted on the opening and closing plate (21); the opening and closing drive mechanism (3) drives the opening and closing plate (21) to move forward and backward and up and down, so that the clamping component (22) is close to or away from the opening end of the wafer box (01).

2. The wafer box automatic opening and closing device according to claim 1, characterized in that: The opening and closing driving mechanism (3) comprises a longitudinal module (31) and a horizontal module (32); the longitudinal module (31) is mounted on the mounting frame (1); the horizontal module (32) is mounted on the output end of the longitudinal module (31); the opening and closing plate (21) is connected to the output end of the horizontal module (32); the horizontal module (32) is used to drive the opening and closing plate (21) to move forward and backward to approach or move away from the wafer box (01); the longitudinal module (31) is arranged below or above the opening and closing mechanism (2); the longitudinal module (31) is used to drive the opening and closing plate (21) to move upward or downward to free up operating space for the wafer box (01).

3. The wafer box automatic opening and closing device according to claim 1, characterized in that: The clamping component (22) comprises a clamping body (221) and an adsorption channel (222), the number of the clamping bodies (221) is multiple, the clamping body (221) is installed on the opening and closing plate (21), one end of the clamping body (221) corresponds to the opening end of the wafer box (01), and the adsorption channel (222) is arranged on a side of the opening and closing plate (21) close to the opening end of the wafer box (01).

4. The automatic opening and closing device for wafer box according to claim 3, characterized in that: A suction cup (2221) is installed in the adsorption channel (222).

5. The automatic opening and closing device for wafer box according to claim 3, characterized in that: The clamping body (221) is rotatably connected to the opening and closing plate (21), and the clamping body (221) is connected to a moving frame (23). When the moving frame (23) moves, it drives the clamping body (221) to rotate.

6. The wafer box automatic opening and closing device according to claim 5, characterized in that: The movable frame (23) is provided with a guide groove (231), and the clamping body (221) comprises a positioning rod (2211) and a swing rod (2212), wherein the positioning rod (2211) is connected to the swing rod (2212), one end of the positioning rod (2211) corresponds to the opening end of the wafer box (01), and the swing rod (2212) is rotatably connected to the opening and closing plate (21), and the outer end of the swing rod (2212) cooperates with the guide groove (231), and when the movable frame (23) moves, the outer end of the swing rod (2212) is driven to slide in the guide groove (231), thereby causing the positioning rod (2211) to rotate.

7. The wafer box automatic opening and closing device according to claim 6, characterized in that: An accommodating space (24) is provided between the movable frame (23) and the opening and closing plate (21); the opening and closing plate (21) is provided with a driving cylinder (25) drivingly connected to the movable frame (23); the driving cylinder (25) is located in the accommodating space (24); the driving cylinder (25) drives the movable frame (23) to move, thereby driving the positioning rod (2211) to rotate.