Material taking device and die bonder
By designing a material collection device that houses the connecting line in the gas-electric transmitter, the stability and safety problems caused by the line wrapping of the solid crystal machine are solved, and higher operating stability and safety are achieved, and the The line takes up space.
Patent Information
- Application Number
- CN202420075785.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-12
- Publication Date
- 2025-01-14
- Estimated Expiration
- 2034-01-12
AI Technical Summary
During the rotation process, the rotary dial and other equipment cannot operate normally due to the winding of the connection line, which affects stability and safety.
A material collection device is designed. By accommodating the connecting line in a gas-electric transmitter and rotating it synchronously with the material collection device, the conductive parts and line design are used to avoid wire entanglement, ensuring that the line does not entangle when it rotates, and improving stability. Sex and safety.
It effectively reduces the possibility of connecting lines wrapping, improves the operating stability and safety of the material collection device, and reduces the line space.
Smart Images
Figure CN222355107U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of crystal bonding machines, in particular to a material taking device and a crystal bonding machine. Background Art
[0002] At present, when a die bonder is bonding a die, a suction nozzle is used to pick up the wafer, and then a turntable moves the wafer to a processing position. Devices such as the turntable and the suction nozzle usually need to be connected with a large number of connection lines. Since these connection lines are arranged around the turntable and the suction nozzle, the turntable is disturbed by these lines and may be entangled by these connection lines during rotation, thereby causing the turntable and other devices to fail to operate normally. Utility Model Content
[0003] The main purpose of the utility model is to provide a material taking device, which aims to accommodate the connection line connecting the material taking device in the gas-electric transmitter and can rotate synchronously with the material taking device, thereby reducing the possibility of the connection line winding around the material taking device.
[0004] In order to achieve the above-mentioned purpose, the material taking device proposed by the utility model comprises:
[0005] Mounting seat;
[0006] A driving member is arranged on the mounting seat, wherein the driving member has an output shaft, and the output shaft has a channel for the circuit to pass through.
[0007] A material taking mechanism, comprising a material taking member drivingly connected to the output shaft;
[0008] A first conductive member drivingly connected to the output shaft;
[0009] A second conductive member is fixed to the mounting seat, and the second conductive member is rotatably connected to the first conductive member;
[0010] A first circuit, one end of which is connected to the first conductive member, and the other end of which is passed through the channel and connected to the material taking member; and
[0011] The second circuit has one end connected to the power source and the other end connected to the second conductive member.
[0012] Optionally, the material picking device further comprises a first connection port provided on the outer peripheral surface of the first conductive member, a first pipe is connected between the first connection port and the material picking member, and the first pipe passes through the output shaft.
[0013] Optionally, the material picking member includes a lifting mechanism disposed on the material picking mechanism, and a suction nozzle slidably disposed on the lifting mechanism, and the suction nozzle has a suction air channel connected to the first pipeline.
[0014] Optionally, the material taking device further comprises a plurality of second connection ports arranged on the outer peripheral surface of the second conductive member for connecting a second pipeline, and the first pipeline is connected to the second pipeline for allowing gas to flow between the second pipeline and the first pipeline.
[0015] Optionally, a plurality of the material picking members are provided, and a plurality of the second connecting ports are provided corresponding to the plurality of the material picking members, and each of the material picking members is connected to a second pipe corresponding to each of the second connecting ports.
[0016] Optionally, the mounting seat further includes a shielding member, and the second conductive member is fixed to the shielding member.
[0017] Optionally, the material picking device further comprises a controller connected to the material picking member, and a rotating member drivingly connected to the output shaft, the material picking member is arranged on the rotating member, the material picking member and the rotating member are restricted by a receiving cavity, and the controller is received in the receiving cavity.
[0018] Optionally, the receiving cavity is communicated with the channel.
[0019] Optionally, the rotating member is provided with a plurality of weight-reducing holes.
[0020] The utility model also provides a crystal bonding machine, comprising the above-mentioned material taking device.
[0021] In the technical solution of the utility model, the material picking device includes a mounting seat, a driving member, a material picking mechanism, a first conductive member, a second conductive member, a first circuit, and a second circuit. The driving member is arranged on the mounting seat, and the driving member has an output shaft, and the output shaft is provided with a channel for the circuit to pass through; the material picking device includes a material picking member drivingly connected to the output shaft; the first conductive member is drivingly connected to the output shaft; the second conductive member is fixed to the mounting seat and rotatably connected to the first conductive member; one end of the first circuit is connected to the first conductive member, and the other end is passed through the channel and connected to the material picking member; one end of the second circuit is used to be connected to a power source, and the other end is connected to the second conductive member. In this way, when the driving member drives the material picking member to rotate, the second conductive member is connected to the second circuit for connecting the power supply, and the first conductive member is connected to the second conductive member to conduct electrical energy to the first circuit to provide electrical energy for the material picking mechanism, so that the second connection circuit does not need to be passed through the channel to be connected to the material picking member. The first conductive member is driven and connected to the output shaft, so that the first conductive member can rotate synchronously with the material picking member. The first circuit is passed through the channel and connected to the material picking member, so that the first connection circuit will not be entangled due to the rotation of the first conductive member and the material picking member. The second conductive member is fixed to the mounting seat to limit the movement of the second conductive member. The first conductive member is rotatably connected to the second conductive member, so that the second connection circuit will not be entangled due to the rotation of the first conductive member. In this way, the possibility of the first circuit and the second circuit being entangled due to the rotation of the material picking mechanism is reduced, the stability and safety of the operation of the material picking device are improved, and the space occupied by the first connection circuit and the second connection circuit is reduced. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.
[0023] Figure 1 It is a structural schematic diagram of an embodiment of the material taking device of the utility model.
[0024] Description of Figure Numbers:
[0025]
[0026] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION
[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0028] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.
[0029] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or abutment, and it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0030] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.
[0031] At present, when a crystal bonding machine is bonding a crystal, a suction nozzle is used to pick up the wafer, and then a turntable moves the wafer to a processing position. The turntable and the suction nozzle usually need to be connected to more connecting lines. Since these connecting lines are arranged around the turntable and the suction nozzle, the turntable is disturbed by these lines and may be entangled by these connecting lines during rotation, thereby causing the turntable and other equipment to fail to operate normally. For this reason, the utility model proposes a material picking device, which aims to accommodate the connecting lines connected to the material picking device in a gas-electric transmitter and can rotate synchronously with the material picking device to reduce the possibility of the connecting lines entangled in the material picking device.
[0032] Reference Figure 1 In one embodiment of the utility model, the material picking device includes a mounting seat 100, a driving member 200, a material picking mechanism 300, a first conductive member 410, a second conductive member 420, a first circuit 610, and a second circuit 620. The driving member 200 is arranged on the mounting seat 100, and the driving member 200 has an output shaft 210, and the output shaft 210 is provided with a channel 211 for the circuit to pass through; the material picking device includes a material picking member 310 drivingly connected to the output shaft 210; the first conductive member 410 is drivingly connected to the output shaft 210; the second conductive member 420 is fixed to the mounting seat 100 and is rotatably connected to the first conductive member 410; one end of the first circuit 610 is connected to the first conductive member 410, and the other end is penetrated through the channel 211 and connected to the material picking member 310; one end of the second circuit 620 is used to connect to a power source, and the other end is connected to the second conductive member 420. In this way, when the driving member 200 drives the material picking member 310 to rotate, the second conductive member 420 is connected to the second line 620 for connecting the power supply, and the first conductive member 410 is connected to the second conductive member 420 to conduct the electric energy to the first line 610, so as to provide the electric energy for the material picking mechanism 300, so that the second connecting line does not need to be connected to the material picking member 310 through the channel 211, and the first conductive member 410 is connected to the output shaft 210 to drive the first conductive member 410 to rotate synchronously with the material picking member 310, and the first line 610 is connected to the material picking member 310 through the channel 211. The connecting line will not be entangled due to the rotation of the first conductive member 410 and the material picking member 310. The second conductive member 420 is fixed to the mounting base 100 to limit the movement of the second conductive member 420. The first conductive member 410 is rotatably connected to the second conductive member 420, so that the second connecting line will not be entangled due to the rotation of the first conductive member 410. In this way, the possibility of the first line 610 and the second line 620 being entangled due to the rotation of the material picking mechanism 300 during operation is reduced, the stability and safety of the operation of the material picking device are improved, and at the same time, the space occupied by the first connecting line and the second connecting line is reduced.
[0033] It can be understood that there are many ways to connect the first conductive member 410 and the first circuit 610, and the second conductive member 420 and the second circuit 620 mentioned here. In another embodiment, a connector can be set between the first circuit 610 and the second circuit 620, and the connector has an input device that is relatively stationary with the second circuit 620, and an output device that is rotatably connected to the input device, and the output device is connected to the first circuit 610. The output device has a conductive metal spring. When the output device rotates, the metal spring always keeps in contact with the second circuit 620 to conduct electricity in the second circuit 620 to the first circuit 610.
[0034] Optionally, in one embodiment, the material picking device further includes a first connection port 810 disposed on the outer peripheral surface of the first conductive member 410 , a first pipe 910 is connected between the first connection port 810 and the material picking member 310 , and the first pipe 910 passes through the output shaft 210 . In this way, generally, when the crystal bonding machine is working, the material picking part 310 absorbs the wafer by evacuating the air in the material picking part 310 to form a vacuum air passage, and uses the atmospheric pressure to adsorb the wafer on the material picking part 310. When the wafer is to be unloaded, air is sent into the material picking part 310 to increase the air pressure in the material picking part 310 to make the wafer fall off; therefore, the material picking part 310 is connected to the first connection port 810 for ventilation, and there is a first pipe 910 for gas circulation. The first pipe 910 is connected to the material picking part 310 after passing through the channel 211. The first pipe 910 can rotate synchronously with the first conductive part 410 and the material picking part 310, so that the first pipe 910 will not be entangled with the material picking part 310 due to the rotation of the first conductive part 410 and the material picking part 310, thereby reducing the possibility of the first pipe 910 entangled with the material picking part 310 and ensuring the normal operation of the material picking mechanism 300. It is worth mentioning that the first pipe 910 is accommodated in the channel 211, so that the first pipe 910 will not be entangled with the driving member 200 due to being externally arranged outside the driving member 200, further ensuring the stability of the operation of the material taking device and also reducing the space occupied by the first pipe 910.
[0035] In another embodiment, there are many ways to set the first pipe 910. The first pipe 910 can also be set outside the driving member 200, a plate is fixed on the outer peripheral surface of the driving member 200, and an annular hole is opened on the plate around the periphery of the driving member 200 for the first pipe 910 to pass through. In this way, the first pipe 910 can still rotate synchronously with the material picking member 310 without getting entangled.
[0036] Optionally, in one embodiment, the material taking member 310 includes a lifting mechanism 311 disposed on the material taking mechanism 300, and a suction nozzle 312 slidably disposed on the lifting mechanism 311, and the suction nozzle 312 has an adsorption air channel connected to the first pipe 910. In this way, when the material taking member 310 is working, the suction nozzle 312 is adjusted horizontally by rotation, and then the suction nozzle 312 is adjusted vertically by the lifting mechanism 311, so that the suction nozzle 312 is accurately positioned above the wafer for suction, and the suction nozzle 312 has an adsorption air channel connected to the first pipe 910. When the wafer is to be sucked, the air pump on the crystal bonding machine draws the air in the adsorption air channel through the first pipe 910 to reduce the air pressure in the adsorption air channel, so that the suction nozzle 312 can suck the wafer. When the wafer needs to be unloaded, the air pump sends gas into the adsorption air channel through the first pipe 910 to increase the air pressure in the adsorption air channel, so that the wafer can fall off from the suction nozzle 312.
[0037] In another embodiment, there are many ways to adjust the suction nozzle 312 in the up and down directions. The material picking mechanism 300 can also be configured to be able to be raised and lowered in the up and down directions. The first conductive member 410 can follow the material picking mechanism 300 to be raised and lowered and enter and exit the channel 211. In this way, the suction nozzle 312 can be adjusted in the up and down directions without affecting the functions of other equipment.
[0038] Optionally, in one embodiment, the material taking device further includes a plurality of second connection ports 820 disposed on the outer peripheral surface of the second conductive member 420, for connecting the second pipe 920, and the first pipe 910 is connected to the second pipe 920, so as to allow gas to flow between the second pipe 920 and the first pipe 910. In this way, the second connection ports 820 are arranged to connect the second pipe 920 and the first pipe 910, and when it is necessary to transport gas into the first pipe 910, the second pipe 920 transports the gas into the first pipe 910 to reach the adsorption gas channel, so that the gas pressure in the adsorption gas channel is increased, so as to facilitate the suction nozzle 312 to unload the wafer.
[0039] In another embodiment, there are many ways to dispose the second connection port 820 . Alternatively, only one second connection port 820 may be disposed on the second conductive member 420 , and the second pipe 920 connects the second connection port 820 and communicates with the first pipe 910 .
[0040] Optionally, in one embodiment, the pick-up member 310 is provided in plurality, and the second connection port 820 is provided in plurality corresponding to the plurality of pick-up members 310, and each pick-up member 310 is connected to a second pipe 920 corresponding to each second connection port 820. In this way, by providing a plurality of pick-up members 310, the pick-up member 310 can absorb a plurality of wafers at a time, thereby improving the material retrieval efficiency of the pick-up member 310, and further improving the processing efficiency of the pick-up device, and the first pipe 910 is provided in plurality corresponding to the pick-up member 310, so that the second pipe 920 can perform a separate air supply and air extraction operation for each pick-up member 310, so that each pick-up member 310 can independently absorb and unload wafers.
[0041] In another embodiment, there are many different ways to set the number of material picking members 310. It is also possible to set only one material picking member 310, which rotates quickly under the drive of the output shaft 210, so that the material picking member 310 can quickly absorb the wafer to complete subsequent operations.
[0042] Optionally, in one embodiment, the mounting base 100 further includes a shielding member 110, and the second conductive member 420 is fixed to the shielding member 110. The second conductive member 420 is fixed to the shielding member 110, which limits the movement of the second conductive member 420, and prevents the second conductive member 420 from rotating with the first conductive member 410. The shielding member 110 can also provide support for the second conductive member 420, reduce the possibility of the second conductive member 420 shifting sideways or collapsing, and improve the stability of the installation of the second conductive member 420.
[0043] In another embodiment, there are many ways to fix the second conductive member 420. The second conductive member 420 can also be detachably connected to the die bonder to limit the movement of the second conductive member 420. The present invention is not limited thereto, as long as the above functions can be achieved.
[0044] Optionally, in one embodiment, the material picking device further includes a controller 320 connected to the material picking member 310, and a rotating member 330 drivingly connected to the output shaft 210, the material picking member 310 is arranged on the rotating member 330, the material picking member 310 and the rotating member 330 limit a receiving cavity 340, and the controller 320 is received in the receiving cavity 340. In this way, the controller 320 is used to control the material picking member 310, the material picking member 310 and the rotating member 330 limit the receiving cavity 340, and the controller 320 is received in the receiving cavity 340, which reduces the space occupied by the controller 320, improves the utilization rate of the bottom space of the material picking mechanism 300, and can effectively reduce the influence of the controller 320 on the installation of the material picking mechanism 300 and other equipment of the crystal bonding machine.
[0045] In another embodiment, there are many ways to set the controller 320. The controller 320 can also be set on the rotating member 330, as long as it does not affect the control function of the material picking member 310 and interfere with other structures.
[0046] Optionally, in one embodiment, the receiving cavity 340 is connected to the second cavity. In this way, the first pipe 910 and the first line 610 can be received in the receiving cavity 340, which improves the utilization rate of the bottom space of the material taking mechanism 300, reduces the space occupied by the first pipe 910 and the first line 610, and makes the appearance of the driving member 200 and the material taking mechanism 300 more concise.
[0047] In another embodiment, the receiving cavity 340 may not be connected to the channel 211 and is only configured to receive the controller 320 .
[0048] Optionally, in one embodiment, the rotating member 330 is provided with a plurality of weight-reducing holes 331. Thus, the rotating member 330 is provided with a plurality of weight-reducing holes 331 to reduce the weight of the rotating member 330, which is beneficial to reduce the power used to drive the rotating member 330, saving energy and development costs.
[0049] In another embodiment, there are many ways to reduce the weight of the rotating member 330 . The rotating member 330 may be made of a material with a smaller mass, or only one weight-reducing hole 331 may be provided to reduce the weight of the rotating member 330 .
[0050] The utility model also proposes a crystal bonding machine, which includes a material taking device. The specific structure of the material taking device refers to the above embodiment. Since the crystal bonding machine adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.
[0051] The above description is only an optional embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A material taking device, characterized in that: include: Mounting seat; A driving member is arranged on the mounting seat, wherein the driving member has an output shaft, and the output shaft has a channel for the circuit to pass through. A material taking mechanism, comprising a material taking member drivingly connected to the output shaft; A first conductive member drivingly connected to the output shaft; A second conductive member, fixed to the mounting seat, the second conductive member being rotatably connected to the first conductive member; A first circuit, one end of which is connected to the first conductive member, and the other end of which is passed through the channel and connected to the material taking member; as well as The second circuit has one end connected to the power source and the other end connected to the second conductive member.
2. The material taking device according to claim 1, characterized in that: The material taking device further comprises a first connection port arranged on the outer peripheral surface of the first conductive member, a first pipeline is connected between the first connection port and the material taking member, and the first pipeline passes through the output shaft.
3. The material taking device according to claim 2, characterized in that: The material picking component comprises a lifting mechanism arranged on the material picking mechanism, and a suction nozzle slidably arranged on the lifting mechanism, and the suction nozzle has a suction air channel connected to the first pipeline.
4. The material taking device according to claim 2, characterized in that: The material taking device also includes a plurality of second connection ports arranged on the outer peripheral surface of the second conductive member for connecting a second pipeline. The first pipeline is connected to the second pipeline so that gas can flow between the second pipeline and the first pipeline.
5. The material taking device according to claim 4, characterized in that: There are multiple material taking parts, and the second connecting ports are arranged corresponding to the multiple material taking parts. Each of the material taking parts is connected to a second pipeline corresponding to each of the second connecting ports.
6. The material taking device according to claim 1, characterized in that: The mounting seat also includes a shielding member, and the second conductive member is fixed to the shielding member.
7. The material taking device according to claim 1, characterized in that: The material picking device also includes a controller connected to the material picking member, and a rotating member drivingly connected to the output shaft. The material picking member is arranged on the rotating member. The material picking member and the rotating member are restricted by a receiving cavity, and the controller is received in the receiving cavity.
8. The material taking device according to claim 7, characterized in that: The receiving cavity is communicated with the channel.
9. The material taking device according to claim 1, characterized in that: The rotating member is provided with a plurality of weight-reducing holes.
10. A die bonding machine, characterized in that: It comprises a material taking device as claimed in any one of claims 1 to 9.