Polycrystalline silicon block material cleaning device

Abstract

The utility model discloses a polycrystalline silicon block material cleaning device, relates to the technical field of polycrystalline silicon production, and mainly aims to improve the cleaning efficiency of mixed acid and impurities on the surface of a polycrystalline silicon block material after the polycrystalline silicon block material is subjected to acid pickling. According to the main technical scheme, the polycrystalline silicon block material cleaning device is characterized in that overflow weirs are arranged on the opposite inner side faces of a groove body respectively and used for forming a drainage channel between the side wall of the groove body and the overflow weirs, and drainage openings are formed in the two ends of the drainage channel; the driving gear is rotationally connected to the inner side wall of one end of the groove body, the barrel is rotationally arranged in the groove body, the end of the barrel is fixedly connected to the driven gear, the driven gear is meshed with the driving gear, and a plurality of through holes are evenly distributed in the shaft side of the barrel; the spraying pipe extends along the upper side edge of the overflow weir, a plurality of nozzles are sequentially arranged on the axial side of the spraying pipe, the water spraying direction of the nozzles faces the side wall of the barrel, and the water injection pipe extends below the liquid level of the tank body; the filter plate is installed on the bottom wall of the tank body and used for filtering impurities.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon production, in particular to a polysilicon block material cleaning device. Background Art

[0002] In the production of polysilicon raw materials, a part of polysilicon blocks are produced. The size of these blocks is 50-120mm. Because other impurities are introduced during the material crushing process, the surface metal content of the blocks is relatively high, which cannot meet the quality requirements of silicon wafer manufacturers. Therefore, polysilicon raw material manufacturers will clean these special blocks to reduce the metal content on the surface of the silicon materials to meet the quality grade requirements of downstream silicon wafer manufacturers.

[0003] At present, there are many disadvantages in the polysilicon block cleaning process: although the use of automated silicon cleaning equipment has increased the cleaning quality and production capacity of silicon materials, the cleaning quality and product stability cannot meet the requirements of silicon wafer manufacturers. In order to solve the problem of product uniformity, simply increasing the number of cleaning times cannot meet the continuous production needs.

[0004] Therefore, it is necessary to improve the cleaning efficiency of the mixed acid and impurity reactants on the surface of the polysilicon material after the polysilicon block material is pickled. Utility Model Content

[0005] In view of this, the utility model provides a polysilicon block cleaning device, the main purpose of which is to improve the efficiency of cleaning the surface of the polysilicon block with mixed acid and impurities after the polysilicon block is pickled.

[0006] In order to achieve the above purpose, the utility model mainly provides the following technical solutions:

[0007] The utility model provides a polysilicon block cleaning device, which comprises: a tank body, a leaching part, a rotating part and a filter plate;

[0008] The opposite inner sides of the trough body are respectively provided with overflow weirs for forming a drainage channel between the side wall of the trough body and the overflow weir, and drainage ports are provided at both ends of the drainage channel;

[0009] The rotating part includes a driving gear and a cylinder, wherein the driving gear is rotatably connected to the inner side wall of one end of the slot body, the cylinder is rotatably arranged in the slot body, the end of the cylinder is fixedly connected to the driven gear, the driven gear is meshed with the driving gear, and a plurality of through holes are evenly distributed on the axial side of the cylinder;

[0010] The rinsing part includes a spray pipe and a water injection pipe, the spray pipe extends along the upper side of the overflow weir, a plurality of nozzles are sequentially arranged on the axial side of the spray pipe, the water spraying direction of the nozzles is toward the side wall of the cylinder, and the water injection pipe extends below the liquid level of the tank body;

[0011] The filter plate is installed on the bottom wall of the tank body and is used for filtering impurities.

[0012] The purpose of the utility model and the solution to its technical problems can also be further achieved by adopting the following technical measures.

[0013] Optionally, the inner side walls of the opposite ends of the groove body are respectively fixedly connected to the arc-shaped groove, the notch of the arc-shaped groove faces upward, and the central axis of the cylinder body coincides with the arc-shaped groove.

[0014] Optionally, a cover body is further included, and an opening is provided on the axial side of the cylinder body, and the cover body is detachably connected to the opening.

[0015] Optionally, the number of the driven gears is two, and the two driven gears are respectively fixedly connected to opposite ends of the cylinder.

[0016] Optionally, it also includes an air injection pipe, which is arranged at the bottom of the trough body, and the tube wall of the air injection pipe is evenly distributed with a plurality of air injection holes.

[0017] Optionally, triangular groove-shaped overflow outlets are arranged in sequence on the upper side of the overflow weir.

[0018] Optionally, the edge of the opening is fixedly connected to a plurality of inverted L-shaped clamping rods, and a plurality of clamping sockets are arranged in sequence on the edge of the cover body. Each of the inverted L-shaped clamping rods is correspondingly clamped in one of the clamping sockets, and the inverted L-shaped clamping rods are provided with screw holes for threadedly connecting bolts so that the bolts are pressed against the cover body.

[0019] By means of the above technical solution, the utility model has at least the following advantages:

[0020] The pickled polysilicon block is placed in the cylinder, and the driving gear is started, which drives the driven gear and the cylinder to rotate synchronously; at the same time, water is injected into the tank through the water injection pipe so that most of the cylinder is immersed in the tank, and the cleaning water is sprayed toward the side wall of the cylinder through multiple nozzles on the spray pipe, and enters the cylinder through multiple through holes.

[0021] In the above process, along with the rotation of the cylinder, the polysilicon blocks in the cylinder roll inside the cylinder, and the surface of the polysilicon blocks and the cleaning water in the tank body move relative to each other. The cleaning water takes away the mixed acid and impurities on the surface of the silicon material. At the same time, the water sprayed from the nozzle flushes to the surface of the cylinder, peeling off the mixed acid and impurity components on the surface of the cylinder, and accelerating the process of the mixed acid and impurities being free and settled to the filter plate with the cleaning water.

[0022] At the same time, with the continuous water supply from the spray pipe and the main water pipe, the liquid level in the tank body continues to rise, and the excess cleaning water overflows the upper edge of the overflow weir, enters the drainage channel, and is discharged through the drain outlet. In this way, the cleaning water in the tank body can maintain a faster flow speed, which speeds up the movement speed of the cleaning water relative to the surface of the silicon material, increases the speed at which the cleaning water strips off the mixed acid and impurities on the surface of the polysilicon block, and improves the efficiency of cleaning the mixed acid and impurities on the surface of the polysilicon block. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 An exploded perspective view of a polysilicon block cleaning device provided in an embodiment of the utility model;

[0024] Figure 2 It is a top view of the tank body;

[0025] Figure 3 is a three-dimensional diagram of the tank body;

[0026] Figure 4 for Figure 1 A magnified view of part A;

[0027] Figure 5 An exploded side view of a polysilicon block cleaning device provided in an embodiment of the utility model.

[0028] The figure marks in the drawings of the specification include: trough body 1, overflow weir 2, drain outlet 3, driving gear 4, cylinder 5, driven gear 6, through hole 7, spray pipe 8, water injection pipe 9, nozzle 10, filter plate 11, servo motor 12, arc groove 13, cover body 14, air injection pipe 15, groove-shaped overflow port 16, inverted L-shaped clamp rod 17, clamp 18, screw hole 19. DETAILED DESCRIPTION

[0029] In order to further explain the technical means and effects adopted by the utility model to achieve the predetermined utility model purpose, the specific implementation methods, structures, features and effects of the utility model application are described in detail below in conjunction with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures, or characteristics in one or more embodiments may be combined in any suitable form.

[0030] The utility model is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0031] like Figure 1 , Figure 2 , Figure 3 and Figure 5 As shown, an embodiment of the utility model provides a polysilicon block cleaning device, which includes: a tank body 1, a rinsing part, a rotating part and a filter plate 11;

[0032] Overflow weirs 2 are respectively provided on opposite inner sides of the tank body 1, for forming a drainage channel between the side wall of the tank body 1 and the overflow weir 2, and drainage ports 3 are provided at both ends of the drainage channel;

[0033] The rotating part includes a driving gear 4 and a cylinder 5, wherein the driving gear 4 is rotatably connected to the inner side wall of one end of the slot body 1, and the cylinder 5 is rotatably arranged in the slot body 1, and the end of the cylinder 5 is fixedly connected to the driven gear 6, and the driven gear 6 is meshed with the driving gear 4, and a plurality of through holes 7 are evenly distributed on the axial side of the cylinder 5;

[0034] The rinsing part includes a spray pipe 8 and a water injection pipe 9. The spray pipe 8 extends along the upper side of the overflow weir 2. A plurality of nozzles 10 are sequentially arranged on the axial side of the spray pipe 8. The water spraying direction of the nozzles 10 is toward the side wall of the cylinder 5. The water injection pipe 9 extends below the liquid level of the tank 1.

[0035] The filter plate 11 is installed on the bottom wall of the tank body 1 to filter impurities.

[0036] A polysilicon block cleaning device works as follows:

[0037] The pickled polysilicon block is placed in the cylinder 5, and the driving gear 4 is started, which drives the driven gear 6 and the cylinder 5 to rotate synchronously; at the same time, water is injected into the tank 1 through the water injection pipe 9, so that most of the cylinder 5 is immersed in the tank 1, and the cleaning water is sprayed toward the side wall of the cylinder 5 through the multiple nozzles 10 on the spray pipe 8, and enters the cylinder 5 through the multiple through holes 7.

[0038] In the above process, along with the rotation of the cylinder 5, the polysilicon blocks in the cylinder 5 roll in the cylinder 5, and the surface of the polysilicon blocks and the cleaning water in the tank 1 move relative to each other. The cleaning water takes away the mixed acid and impurities on the surface of the silicon material. At the same time, the water sprayed from the nozzle 10 flushes to the surface of the cylinder 5, peels off the mixed acid and impurity components on the surface of the cylinder 5, and accelerates the process of the mixed acid and impurities being free and settled to the filter plate 11 with the cleaning water.

[0039] At the same time, with the continuous water supply from the spray pipe 8 and the main water pipe, the liquid level in the tank body 1 continues to rise, and the excess cleaning water overflows the upper edge of the overflow weir 2, enters the drainage channel, and is discharged through the drain port 3. In this way, the cleaning water in the tank body 1 can maintain a faster flow speed, which accelerates the movement speed of the cleaning water relative to the surface of the silicon material, increases the speed of the cleaning water stripping the mixed acid and impurities on the surface of the polysilicon block, and improves the efficiency of cleaning the mixed acid and impurities on the surface of the polysilicon block.

[0040] Specifically, the spray pipe 8 and the water injection pipe 9 are connected to external ultrapure water supply equipment to supply ultrapure water to the tank body 1 .

[0041] Specifically, it also includes a servo motor 12 , which is fixedly installed on the outside of the tank body 1 , and the output shaft of the servo motor 12 passes through the tank wall of the tank body 1 and is coaxially connected to the driving gear 4 .

[0042] Specifically, there are two spray pipes 8, each of which is disposed on the upper side of one of the overflow weirs 2, and the spraying direction of the spray head 10 is inclined downward by 45 degrees.

[0043] Specifically, the cylinder 5 is made of plastic or resin.

[0044] Specifically, a mounting opening is provided on the bottom wall of the tank body 1 , and the edge of the filter plate 11 is fixedly welded to the mounting opening. The filter plate 11 has a plurality of filter holes with a diameter of 1 mm arranged in a matrix, which are used to intercept impurities in the tank body 1 .

[0045] like Figure 2 and Figure 3 As shown, in a specific embodiment, the inner side walls of the opposite ends of the groove body 1 are respectively fixedly connected to the arc groove 13 , the notch of the arc groove 13 faces upward, and the central axis of the cylinder body 5 coincides with the arc groove 13 .

[0046] In the present embodiment, specifically, during the whole process of cleaning the polysilicon blocks, after the cylinder 5 filled with the polysilicon blocks has completed mixed acid pickling in the pickling tank, the cylinder 5 is hoisted into the tank body 1, so that the central axes at both ends of the cylinder 5 are embedded in the arc groove 13, and then the driven gear 6 and the driving gear 4 contact and mesh with each other.

[0047] In this embodiment, specifically, for polysilicon blocks of different sizes, the diameters of the through holes 7 of the cylinder 5 used are different to prevent the polysilicon blocks from passing through the through holes 7. The matching relationship between the central axis of the cylinder 5 and the arc groove 13 enables the cylinders 5 with different through holes 7 diameters to be placed in the groove body 1.

[0048] Specifically, during the production process, the diameter of the through hole 7 is 3-10 mm, or less than 3 mm.

[0049] like Figure 1 and Figure 5 As shown, in a specific embodiment, a cover body 14 is further included, and an opening is provided on the axial side of the cylinder body 5, and the cover body 14 is detachably connected to the opening.

[0050] In this embodiment, specifically, the operator can place the polysilicon block into the cylinder 5 through the opening, and cover the opening with the cover 14 to prevent the polysilicon block from falling out of the rotating cylinder 5 .

[0051] like Figure 1 and Figure 5As shown, in a specific embodiment, the number of the driven gears 6 is two, and the two driven gears 6 are fixedly connected to the opposite ends of the cylinder 5 respectively.

[0052] In this embodiment, by adjusting the axial direction of the cylinder 5 , both of the two driven gears 6 can mesh with the driving gear 4 , so that the two driven gears 6 can replace each other.

[0053] like Figure 2 and Figure 3 As shown, in a specific embodiment, it also includes an air injection pipe 15, which is arranged at the bottom of the tank body 1, and the tube wall of the air injection pipe 15 is evenly distributed with a plurality of air injection holes.

[0054] In the present embodiment, specifically, the gas injection pipe 15 is connected to an external nitrogen cylinder. During the process of cleaning the polysilicon blocks, nitrogen is sprayed from multiple gas injection holes into the water in the tank body 1, forming large bubbles in the water. The large bubbles rise to the surface of the polysilicon blocks and break into small bubbles. The gas impacts and peels off impurities on the surface of the polysilicon blocks, thereby promoting the cleaning efficiency of the polysilicon blocks.

[0055] like Figure 3 As shown, in a specific embodiment, a plurality of triangular groove-shaped overflow outlets 16 are arranged in sequence on the upper side of the overflow weir 2 .

[0056] In this embodiment, specifically, if the levelness of the upper side of the overflow weir 2 is not good, when the cleaning water overflows the upper side of the overflow weir 2, multiple triangular groove-shaped overflow ports 16 can evenly bear the overflow of the cleaning water, preventing the cleaning water from overflowing from only one end of the upper side of the overflow weir 2.

[0057] like Figure 1 , Figure 4 and Figure 5 As shown, in a specific embodiment, the edge of the opening is fixedly connected to a plurality of inverted L-shaped clamping rods, and a plurality of clamping sockets 18 are arranged in sequence on the edge of the cover body 14. Each of the inverted L-shaped clamping rods is correspondingly clamped in one of the clamping sockets 18. The inverted L-shaped clamping rods are provided with screw holes 19 for threadedly connecting bolts so that the bolts are pressed tightly against the cover body 14.

[0058] In this embodiment, specifically, when it is necessary to cover the cover body 14, each inverted L-shaped clamping rod passes through one of the clamping slots 18, and then the cover body 14 is slightly moved so that the solid part of the cover body 14 and the screw hole 19 are opposite to each other, and then the bolts are screwed into the screw holes 19 so that multiple bolts are synchronously pressed against the solid part of the cover body 14, thereby fixing the cover body 14 at the opening to prevent the polysilicon blocks from falling out.

[0059] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A polysilicon block cleaning device, characterized in that: include: A trough body, wherein the opposite inner sides of the trough body are respectively provided with overflow weirs for forming a drainage channel between the side wall of the trough body and the overflow weir, and drainage ports are provided at both ends of the drainage channel; A rinsing part, the rinsing part comprises a spray pipe and a water injection pipe, the spray pipe extends along the upper side of the overflow weir, a plurality of nozzles are sequentially arranged on the axial side of the spray pipe, the water spraying direction of the nozzles is toward the side wall of the cylinder, and the water injection pipe extends below the liquid level of the tank body; The rotating part includes a driving gear and a cylinder, wherein the driving gear is rotatably connected to an inner side wall of one end of the slot body, the cylinder is rotatably disposed in the slot body, an end of the cylinder is fixedly connected to a driven gear, the driven gear is meshed with the driving gear, and a plurality of through holes are evenly distributed on the axial side of the cylinder; A filter plate is installed on the bottom wall of the tank body and is used to filter impurities.

2. The polysilicon block cleaning device according to claim 1, characterized in that: The inner side walls of the opposite ends of the groove body are respectively fixedly connected to the arc-shaped groove, the notch of the arc-shaped groove faces upward, and the central axis of the cylinder body coincides with the arc-shaped groove.

3. The polysilicon block cleaning device according to claim 1, characterized in that: It also includes a cover body, an opening is provided on the axial side of the cylinder body, and the cover body is detachably connected to the opening.

4. The polysilicon block cleaning device according to claim 1, characterized in that: The number of the driven gears is two, and the two driven gears are fixedly connected to the opposite ends of the cylinder respectively.

5. The polysilicon block cleaning device according to claim 1, characterized in that: It also includes an air injection pipe, which is arranged at the bottom of the tank body, and a tube wall of the air injection pipe is evenly distributed with a plurality of air injection holes.

6. The polysilicon block cleaning device according to any one of claims 1 to 5, characterized in that: The upper side of the overflow weir is sequentially arranged with triangular groove-shaped overflow outlets.

7. The polysilicon block cleaning device according to claim 3, characterized in that: The edge of the opening is fixedly connected to a plurality of inverted L-shaped clamping rods, and a plurality of clamping slots are arranged in sequence at the edge of the cover body. Each of the inverted L-shaped clamping rods is correspondingly clamped in one of the clamping slots. The inverted L-shaped clamping rods are provided with screw holes for threadedly connecting bolts so that the bolts are pressed against the cover body.

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