Explosion-proof single crystal furnace

Abstract

The utility model discloses an explosion-proof single crystal furnace which comprises a bottom plate, the upper end face of the bottom plate is detachably and fixedly connected with a furnace body, the lower end face of the furnace body is fixedly connected with a communicating pipe penetrating through the bottom plate, airflow can be introduced into the communicating pipe for heating, the outer side wall of the furnace body is fixedly connected with a threaded strip, and the threaded strip can be in threaded connection with a hoop ring. According to the technical scheme, through threaded connection of the shroud rings and the threaded strips on the furnace body, connection and installation of the multiple shroud rings and the bottom plate are achieved, then the bottom plate is protected under different machining conditions, and the protection strength can be adjusted; a protective cover is arranged on the upper side of the furnace body, a mounting groove with an opening in the lower side and in threaded connection with the threaded strip is formed in the protective cover, the protective cover and the furnace body can be fixedly connected through the mounting groove, and then the furnace body is protected.

Description

Technical Field

[0001] The utility model relates to the field of single crystal furnaces, in particular to an explosion-proof single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment and uses the Czochralski method to grow single crystals without dislocation. During the process of pulling crystals in a single crystal furnace, the crucible will be damaged by the high temperature and corrosion in the furnace, and the molten silicon liquid in the crucible will leak. The high-temperature silicon liquid will burn through the inside of the single crystal furnace body, causing the cooling water in the single crystal furnace to flow into the furnace. Water will instantly vaporize and expand under high temperature conditions, and because the furnace is in a closed environment, the pressure in the furnace will instantly increase, causing the material to spray out from the top or even the furnace body to explode, which can easily cause harm to the operators at the top. Utility Model Content

[0003] The purpose of the utility model is to provide an explosion-proof single crystal furnace to solve the problems raised in the above background technology.

[0004] To achieve the above object, the utility model provides the following technical solutions: an explosion-proof single crystal furnace, comprising a bottom plate, the upper end surface of the bottom plate is detachably fixedly connected to a furnace body, the lower end surface of the furnace body is fixedly connected to a connecting pipe that penetrates the bottom plate, the connecting pipe can be heated by passing airflow, the outer side wall of the furnace body is fixedly connected to a threaded bar, the threaded bar can be threadedly connected to a hoop, and the hoop can protect the furnace body to limit its explosion;

[0005] A protective cover is provided on the upper side of the furnace body, and a mounting groove with a lower opening threadedly connected to the threaded strip is provided in the protective cover. The protective cover can be fixedly connected to the furnace body through the mounting groove, thereby protecting the furnace body.

[0006] The bottom plate is provided with a plurality of mounting holes penetrating the bottom plate, and the mounting holes are used for fixing and limiting the bottom plate.

[0007] The bottom plate is provided with a first thread groove and a second thread groove with upper side openings.

[0008] The axes of the second thread groove coincide with those of the first thread groove, and the diameter of the second thread groove is greater than the diameter of the first thread groove.

[0009] The first thread groove can be threadedly connected to an inner protective tube, and an inner protective cavity with upper and lower openings is provided in the inner protective tube. After the inner protective tube is threadedly fixed to the first thread groove, the inner protective cavity shields the bottom plate to avoid safety hazards when the bottom plate is damaged.

[0010] The second thread groove can be threadedly connected to an outer protective tube, and an outer protective cavity with upper and lower openings is provided in the outer protective tube. After the outer protective tube is threadedly fixed to the second thread groove, the outer protective cavity shields the inner protective tube and the bottom plate, thereby increasing safety.

[0011] The outer end wall of the inner protective tube is fixedly connected with a connecting ring, and the connecting ring can be threadedly connected to the outer protective cavity, thereby forming a cavity with an upper opening through the inner protective tube, the connecting ring and the outer protective cavity, and the cavity can be injected with coolant to cool the bottom plate when it is broken.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model can realize the connection and installation of multiple hoops and the bottom plate through the threaded connection of the hoops and the threaded strip on the furnace body, thereby protecting the bottom plate under different processing conditions and adjusting the protection strength;

[0014] By setting up the inner protective tube and the outer protective tube, the bottom plate and the items leaking from the bottom plate can be shielded when the bottom plate is broken, and the space formed between the connecting ring fixed by the inner protective tube and the outer protective cavity can be injected with coolant, so as to cool it when it leaks between the outer protective cavity and the inner protective tube, thereby improving safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 An overall three-dimensional schematic diagram of an explosion-proof single crystal furnace proposed for the utility model;

[0016] Figure 2 A three-dimensional schematic diagram of a right-side explosion-proof single crystal furnace proposed in the utility model;

[0017] Figure 3 This is a schematic diagram of the structure of an explosion-proof single crystal furnace proposed in the utility model after removing the inner protection tube and the outer protection tube;

[0018] Figure 4 for Figure 3 Right view of;

[0019] Figure 5 for Figure 3 A top view of

[0020] Figure 6 This is a schematic diagram of the structure of the inner protective tube part of an explosion-proof single crystal furnace proposed in the utility model;

[0021] Figure 7 This is a schematic diagram of the structure of the outer protection tube part of an explosion-proof single crystal furnace proposed in the utility model;

[0022] In the figure: 101, bottom plate; 102, furnace body; 103, threaded strip; 104, hoop; 105, connecting pipe; 106, mounting hole; 107, protective cover; 108, mounting groove; 109, first thread groove; 111, second thread groove; 112, inner protective tube; 113, inner protective cavity; 114, connecting ring; 115, outer protective tube; 116, outer protective cavity. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Embodiment 1:

[0025] See also Figure 1-7 The utility model provides a technical solution: an explosion-proof single crystal furnace, comprising a bottom plate 101, the upper end surface of the bottom plate 101 is detachably fixedly connected with a furnace body 102, the lower end surface of the furnace body 102 is fixedly connected with a connecting pipe 105 that penetrates the bottom plate 101, the connecting pipe 105 can be heated by passing airflow, the outer side wall of the furnace body 102 is fixedly connected with a threaded bar 103, the threaded bar 103 can be threadedly connected with a hoop 104, and the hoop 104 can protect the furnace body 102 to limit its explosion;

[0026] A protective cover 107 is disposed on the upper side of the furnace body 102 , and a mounting groove 108 having a lower opening and threadedly connected to the threaded strip 103 is disposed in the protective cover 107 . The protective cover 107 can be fixedly connected to the furnace body 102 through the mounting groove 108 , thereby protecting the furnace body 102 .

[0027] The bottom plate 101 is provided with a plurality of mounting holes 106 penetrating the bottom plate 101 , and the mounting holes 106 are used to fix and limit the bottom plate 101 .

[0028] The bottom plate 101 is provided with a first thread groove 109 and a second thread groove 111 which are open at the upper side.

[0029] The axes of the second thread groove 111 and the first thread groove 109 coincide with each other, and the diameter of the second thread groove 111 is greater than the diameter of the first thread groove 109 .

[0030] The first thread groove 109 can be threadedly connected to an inner protective tube 112, and an inner protective cavity 113 with upper and lower openings is provided in the inner protective tube 112. After the inner protective tube 112 is threadedly fixed to the first thread groove 109, the inner protective cavity 113 shields the bottom plate 101 to avoid safety hazards when the bottom plate 101 is damaged.

[0031] The second thread groove 111 can be threadedly connected to an outer protective tube 115, and an outer protective cavity 116 with upper and lower openings is provided in the outer protective tube 115. After the outer protective tube 115 is threadedly fixed to the second thread groove 111, the outer protective cavity 116 shields the inner protective tube 112 and the bottom plate 101, thereby increasing safety.

[0032] The outer end wall of the inner protective tube 112 is fixedly connected with a connecting ring 114, and the connecting ring 114 can be threadedly connected to the outer protective cavity 116, thereby forming a cavity with an upper opening through the inner protective tube 112, the connecting ring 114 and the outer protective cavity 116, and the cavity can be injected with coolant, thereby cooling the bottom plate 101 when it is broken.

[0033] Working principle:

[0034] When in use, the bottom plate 101 is installed on the heating device. If it is heated by gas, the gas is connected to the connecting pipe 105. At this time, the raw materials are placed in the furnace body 102, and the protective cover 107 is connected and fixed to the furnace body 102 through the installation groove 108 thread, and the heating process is carried out;

[0035] If the processing environment is bad, the temperature is high or the pressure is high, a plurality of hoops 104 are manually fixed to the outside of the furnace body 102 by threads before processing, and the hoops 104 can restrain the bottom plate 101, thereby preventing the bottom plate 101 from being damaged;

[0036] If damage is still likely to occur, the inner protective tube 112 is installed in the first thread groove 109 by means of threads, and the bottom plate 101 is protected by the inner protective cavity 113. The outer protective tube 115 can also be installed in the second thread groove 111 by means of threads, and the bottom plate 101 is protected by the outer protective cavity 116. Coolant is injected into the space between the connecting ring 114, the outer protective cavity 116 and the inner protective tube 112, so that when the bottom plate 101 is broken, the broken bottom plate 101 and the liquid leaking from the bottom plate 101 can be cooled.

[0037] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An explosion-proof single crystal furnace, comprising a bottom plate (101), characterized in that: The upper end surface of the bottom plate (101) is detachably fixedly connected to a furnace body (102); the lower end surface of the furnace body (102) is fixedly connected to a connecting pipe (105) penetrating the bottom plate (101); the outer side wall of the furnace body (102) is fixedly connected to a threaded strip (103); and the threaded strip (103) can be threadedly connected to a hoop (104); A protective cover (107) is provided on the upper side of the furnace body (102), and a mounting groove (108) is provided in the protective cover (107) with a lower opening and threadedly connected to the threaded strip (103), and the protective cover (107) can be fixedly connected to the furnace body (102) through the mounting groove (108).

2. The explosion-proof single crystal furnace according to claim 1, characterized in that: The bottom plate (101) is provided with a plurality of mounting holes (106) penetrating the bottom plate (101).

3. The explosion-proof single crystal furnace according to claim 2, characterized in that: The bottom plate (101) is provided with a first thread groove (109) and a second thread groove (111) with upper openings.

4. The explosion-proof single crystal furnace according to claim 3, characterized in that: The axes of the second thread groove (111) and the first thread groove (109) coincide, and the diameter of the second thread groove (111) is greater than the diameter of the first thread groove (109).

5. The explosion-proof single crystal furnace according to claim 4, characterized in that: The first thread groove (109) can be threadedly connected to an inner protection tube (112), and the inner protection tube (112) is provided with an inner protection cavity (113) with upper and lower openings.

6. The explosion-proof single crystal furnace according to claim 5, characterized in that: The second thread groove (111) can be threadedly connected to an outer protection tube (115), and an outer protection cavity (116) with upper and lower openings is provided inside the outer protection tube (115).

7. The explosion-proof single crystal furnace according to claim 6, characterized in that: A connecting ring (114) is fixedly connected to the outer end wall of the inner protective tube (112), and the connecting ring (114) can be threadedly connected to the outer protective cavity (116), thereby forming a cavity with an upper opening through the inner protective tube (112), the connecting ring (114) and the outer protective cavity (116), and a cooling liquid can be injected into the cavity.

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