Water film vacuum treatment system

Abstract

The utility model provides a water film vacuum treatment system, which is characterized in that a dust extraction output end of each crystal bar device is connected with an input end of a water film vacuum treatment device through a pipeline, and the water film vacuum treatment device is used for spraying water to a dust extraction mixture of the crystal bar devices to separate gas and solid; the gas output end of the water film vacuum treatment device is connected with the input end of the vacuum pump set through a pipeline, the vacuum pump set is used for outputting gas separated by the water film vacuum treatment device to the outside, an existing bag type dust collector is replaced with the water film vacuum treatment device, the dust collection precision is high, only the collecting box needs to be disassembled and cleaned, shutdown is not needed, and the cost is low. The dust collection efficiency is greatly improved, the production cost is reduced, and meanwhile the requirements for high efficiency and high precision are met.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum dust treatment, and more specifically to a water film vacuum treatment system. Background Art

[0002] Single crystal rods are used to manufacture semiconductor devices. Single crystal silicon rods are shaped or pulled in the furnace of a single crystal furnace by zone melting or Czochralski process. They are silicon single crystal rods in which silicon atoms are rearranged according to the lattice arrangement direction of the seed crystal. A single crystal furnace is a device that melts polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment using a graphite heater, and then uses the Czochralski method to grow a crystal rod. Small particles of silicon oxide (SiO) will form during the growth of the crystal rod and deposit in the bellows, so a vacuum cleaner is needed to remove all dust.

[0003] In the traditional dust collection process, a bag dust collector is set at the input end of the vacuum cleaner to filter the dust. However, when the cleanliness requirement is high and the filterable particle size is required to be low, the bag dust collector is more likely to be blocked, which increases the replacement frequency and reduces the dust collection efficiency.

[0004] In view of this, the utility model provides a water film vacuum processing system with high cleanliness and high dust collection efficiency. Utility Model Content

[0005] The utility model aims to provide a water film vacuum processing system with low energy consumption and low cost.

[0006] A water film vacuum treatment system, comprising a water film vacuum treatment device 1, a vacuum pump group 2, and a crystal rod device 3, characterized in that: there are multiple crystal rod devices 3, and the dust extraction output end of each crystal rod device 3 is connected to the input end of the water film vacuum treatment device 1 through a pipeline, the water film vacuum treatment device 1 is used to spray water on the dust extraction mixture of the crystal rod device 3 to separate gas and solid, the gas output end of the water film vacuum treatment device 1 is connected to the input end of the vacuum pump group 2 through a pipeline, the vacuum pump group 2 is used to output the gas separated by the water film vacuum treatment device 1 to the outside, the vacuum pump group 2 is connected to the outside through a pipeline, and the water film vacuum treatment device 1 includes a gas-solid separation part 4 , water mist nozzle 5, water supply pump 6, collecting hopper 7, and material receiving box 8. The dust extraction output end of the crystal rod equipment 3 is connected to the top of the gas-solid separation part 4 through a pipeline. A collecting hopper 7 is provided below the gas-solid separation part 4, and a receiving box 8 is provided below the collecting hopper 7. The receiving box 8 and the collecting hopper 7 are detachably connected. A water supply pump 6 is provided on the side of the receiving box 8. An air suction port 9 is provided on the side between the bottom of the gas-solid separation part 4 and the collecting hopper 7. The air suction port 9 is connected to the input end of the vacuum pump group 2 through a pipeline. A plurality of water mist nozzles 5 are arranged around the gas-solid separation part 4 near the input end of the water film vacuum treatment device 1, and the output end of the water supply pump 6 is respectively connected to the input end of each water mist nozzle 5.

[0007] Furthermore, six water mist nozzles 5 are arranged around the gas-solid separation part 4 near the input end of the water film vacuum treatment device 1 , and each water mist nozzle 5 is adjustably connected to the outer side of the gas-solid separation part 4 .

[0008] Furthermore, the output end of each water mist nozzle 5 and the gas-solid separation part 4 also form an inclined angle, and the formed inclination angle is 0-30°, and preferably 18°.

[0009] In some embodiments, the upper end of the air suction port 9 is vertically connected to the side of the gas-solid separation part 4, and the lower end of the air suction port 9 is obliquely connected to the side of the collecting hopper 7. The oblique connection is used to assist the solids to enter the collecting hopper 7 and play a guiding role.

[0010] Furthermore, the angle formed by the lower end of the air suction port 9 and the side of the collecting hopper 7 being obliquely connected is 10°-20°, preferably 15°.

[0011] In some embodiments, a pneumatic valve 10 is further provided between the gas output end of the water film vacuum treatment device 1 and the input end of the vacuum pump group 2 through a pipeline, for controlling the flow rate in the pipeline and the opening and closing of the pipeline.

[0012] In some embodiments, the vacuum pump group 2 includes a vacuum pump 11, a muffler 12, and a flexible joint 13. The gas output end of the water film vacuum treatment device 1 is connected to the input end of the vacuum pump 11 through a pipeline in sequence, and the output end of the vacuum pump 11 is connected to the outdoors through a pipeline. The muffler 12 and the flexible joint 13 are arranged on the pipeline connecting the output end of the vacuum pump 11 to the outdoors from right to left. The muffler 12 is used to reduce the noise of the vacuum pump 11, and the flexible joint 13 is used to reduce vibration and reduce structural damage.

[0013] In some embodiments, a vacuum tank 14 is further provided between the gas output end of the water film vacuum treatment device 1 and the vacuum pump group 2. The vacuum tank 14 serves as a pressure buffer to ensure pressure balance in the system.

[0014] In some embodiments, an automatic drainer 15 is further provided at the bottom of the vacuum tank 14, and an output end of the automatic drainer 15 is connected to a drainage ditch through a pipeline.

[0015] In some embodiments, reinforcing support columns 16 are further provided on both sides of the water film vacuum processing device 1 to enhance the structural strength of the water film vacuum processing device 1 .

[0016] The working principle of the utility model is as follows: when the vacuum pump group 2 sucks out the dust-requiring material in the crystal rod device 3, the dust-requiring material first enters the gas-solid separation part 4, at which time the water mist nozzle 5 sprays water thereon, so that the solid matter is separated from the gas and falls into the collecting hopper 7, and the gas enters the vacuum tank 14 for buffering through the pipeline, and then is output to the outdoors through the vacuum pump group 2.

[0017] Beneficial effects of the utility model: the utility model proposes a water film vacuum processing system, the dust extraction output end of each crystal rod equipment 3 is connected to the input end of the water film vacuum processing device 1 through a pipeline, the water film vacuum processing device 1 is used to spray water on the dust extraction mixture of the crystal rod equipment 3 to separate gas and solid, the gas output end of the water film vacuum processing device 1 is connected to the input end of the vacuum pump group 2 through a pipeline, the vacuum pump group 2 is used to output the gas separated by the water film vacuum processing device 1 to the outside, and the water film vacuum processing device 1 replaces the existing bag dust collector, with high dust removal accuracy, and only needs to disassemble and clean the receiving box without stopping, which greatly improves the dust removal efficiency and reduces production costs while meeting the requirements of high efficiency and high precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the structure of a water film vacuum treatment system of the present application.

[0019] Figure 2 This is a schematic structural diagram of a water film vacuum processing device of a water film vacuum processing system of the present application.

[0020] Main component symbols

[0021] Water film vacuum treatment device 1, vacuum pump group 2, crystal rod equipment 3, gas-solid separation part 4, water mist nozzle 5, water supply pump 6, collecting hopper 7, receiving box 8, air extraction port 9, pneumatic valve 10, vacuum pump 11, muffler 12, flexible joint 13, vacuum tank 14, automatic drainer 15, and reinforced support column 16.

[0022] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0023] The following examples are described to assist the understanding of the present application, and the examples are not and should not be interpreted in any way as limiting the scope of protection of the present application.

[0024] In the following description, those skilled in the art will recognize that throughout this discussion, components may be described as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including within a single system or component).

[0025] At the same time, the connections between components or systems are not intended to be limited to direct connections, rather, the data between these components may be modified, reformatted, or otherwise changed by intermediate components. In addition, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" should be understood to include direct connections, indirect connections through one or more intermediate devices, and wireless connections. Embodiment 1:

[0026] like Figure 1 As shown, it is a structural schematic diagram of a water film vacuum treatment system of the present application; Figure 2 Shown is a schematic structural diagram of a water film vacuum processing device of a water film vacuum processing system of the present application.

[0027] A water film vacuum treatment system, comprising a water film vacuum treatment device 1, a vacuum pump group 2, and a crystal rod device 3, characterized in that: there are multiple crystal rod devices 3, and the dust extraction output end of each crystal rod device 3 is connected to the input end of the water film vacuum treatment device 1 through a pipeline, the water film vacuum treatment device 1 is used to spray water on the dust extraction mixture of the crystal rod device 3 to separate gas and solid, the gas output end of the water film vacuum treatment device 1 is connected to the input end of the vacuum pump group 2 through a pipeline, the vacuum pump group 2 is used to output the gas separated by the water film vacuum treatment device 1 to the outside, the vacuum pump group 2 is connected to the outside through a pipeline, and the water film vacuum treatment device 1 includes a gas-solid separation part 4 , water mist nozzle 5, water supply pump 6, collecting hopper 7, and material receiving box 8. The dust extraction output end of the crystal rod equipment 3 is connected to the top of the gas-solid separation part 4 through a pipeline. A collecting hopper 7 is provided below the gas-solid separation part 4, and a receiving box 8 is provided below the collecting hopper 7. The receiving box 8 and the collecting hopper 7 are detachably connected. A water supply pump 6 is provided on the side of the receiving box 8. An air suction port 9 is provided on the side between the bottom of the gas-solid separation part 4 and the collecting hopper 7. The air suction port 9 is connected to the input end of the vacuum pump group 2 through a pipeline. A plurality of water mist nozzles 5 are arranged around the gas-solid separation part 4 near the input end of the water film vacuum treatment device 1, and the output end of the water supply pump 6 is respectively connected to the input end of each water mist nozzle 5.

[0028] Six water mist nozzles 5 are arranged around the gas-solid separation part 4 near the input end of the water film vacuum treatment device 1 , and each water mist nozzle 5 is adjustably connected to the outer side of the gas-solid separation part 4 .

[0029] The output end of each water mist nozzle 5 and the gas-solid separation part 4 also form an inclined angle, and the formed inclination angle is 0-30°, and preferably 18°.

[0030] The upper end of the air suction port 9 is vertically connected to the side of the gas-solid separation part 4, and the lower end of the air suction port 9 is obliquely connected to the side of the collecting hopper 7. The oblique connection is used to assist the solid to enter the collecting hopper 7 and play a guiding role.

[0031] The angle formed by the lower end of the air suction port 9 and the side of the collecting hopper 7 being obliquely connected is 10°-20°, preferably 15°.

[0032] A pneumatic valve 10 is also provided between the gas output end of the water film vacuum treatment device 1 and the input end of the vacuum pump group 2 through a pipeline, which is used to control the flow rate in the pipeline and the opening and closing of the pipeline.

[0033] The vacuum pump group 2 includes a vacuum pump 11, a muffler 12, and a flexible joint 13. The gas output end of the water film vacuum treatment device 1 is connected to the input end of the vacuum pump 11 through a pipeline in sequence, and the output end of the vacuum pump 11 is connected to the outdoors through a pipeline. The muffler 12 and the flexible joint 13 are arranged on the pipeline connecting the output end of the vacuum pump 11 and the outdoors from right to left in sequence. The muffler 12 is used to reduce the noise of the vacuum pump 11, and the flexible joint 13 is used to reduce vibration and reduce structural damage.

[0034] A vacuum tank 14 is further provided between the gas output end of the water film vacuum treatment device 1 and the vacuum pump group 2. The vacuum tank 14 plays a role of buffering pressure to ensure pressure balance in the system.

[0035] An automatic drainer 15 is also provided at the bottom of the vacuum tank 14, and an output end of the automatic drainer 15 is connected to a drainage ditch through a pipeline.

[0036] Reinforced support columns 16 are also provided on both sides of the water film vacuum processing device 1 to enhance the structural strength of the water film vacuum processing device 1 .

[0037] The working principle of the utility model is as follows: when the vacuum pump group 2 sucks out the dust-requiring material in the crystal rod device 3, the dust-requiring material first enters the gas-solid separation part 4, at which time the water mist nozzle 5 sprays water thereon, so that the solid matter is separated from the gas and falls into the collecting hopper 7, and the gas enters the vacuum tank 14 for buffering through the pipeline, and then is output to the outdoors through the vacuum pump group 2.

[0038] Beneficial effects of the utility model: the utility model proposes a water film vacuum processing system, the dust extraction output end of each crystal rod equipment 3 is connected to the input end of the water film vacuum processing device 1 through a pipeline, the water film vacuum processing device 1 is used to spray water on the dust extraction mixture of the crystal rod equipment 3 to separate gas and solid, the gas output end of the water film vacuum processing device 1 is connected to the input end of the vacuum pump group 2 through a pipeline, the vacuum pump group 2 is used to output the gas separated by the water film vacuum processing device 1 to the outside, and the water film vacuum processing device 1 replaces the existing bag dust collector, with high dust removal accuracy, and only needs to disassemble and clean the receiving box without stopping, which greatly improves the dust removal efficiency and reduces production costs while meeting the requirements of high efficiency and high precision.

[0039] Although the present application has disclosed multiple aspects and embodiments, other aspects and embodiments will be obvious to those skilled in the art, and several modifications and improvements may be made without departing from the concept of the present application, all of which belong to the protection scope of the present application. The multiple aspects and embodiments disclosed in the present application are only for illustration and are not intended to limit the present application. The actual protection scope of the present application shall be subject to the claims.

Claims

1. A water film vacuum processing system, comprising a water film vacuum processing device (1), a vacuum pump group (2), and a crystal rod device (3), characterized in that: There are multiple crystal rod devices (3), and the dust extraction output end of each crystal rod device (3) is connected to the input end of a water film vacuum processing device (1) through a pipeline. The water film vacuum processing device (1) is used to spray water on the dust extraction mixture of the crystal rod device (3) to separate gas and solid. The gas output end of the water film vacuum processing device (1) is connected to the input end of a vacuum pump group (2) through a pipeline. The vacuum pump group (2) is used to output the gas separated by the water film vacuum processing device (1) to the outside. The vacuum pump group (2) is connected to the outside through a pipeline. The water film vacuum processing device (1) includes a gas-solid separation part (4), a water mist nozzle (5), a water supply pump (6), a collecting hopper (7), and a collecting box (8). The dust extraction output end of the equipment (3) is connected to the upper part of the gas-solid separation part (4) through a pipeline. A collecting hopper (7) is provided below the gas-solid separation part (4). A collecting box (8) is provided below the collecting hopper (7). The collecting box (8) and the collecting hopper (7) are detachably connected. A water supply pump (6) is provided on the side of the collecting box (8). An air suction port (9) is provided on the side between the lower part of the gas-solid separation part (4) and the collecting hopper (7). The air suction port (9) is connected to the input end of the vacuum pump group (2) through a pipeline. A plurality of water mist nozzles (5) are arranged around the gas-solid separation part (4) near the input end of the water film vacuum treatment device (1). The output end of the water supply pump (6) is respectively connected to the input end of each water mist nozzle (5).

2. The water film vacuum treatment system according to claim 1, characterized in that: Six water mist nozzles (5) are arranged around the gas-solid separation part (4) near the input end of the water film vacuum treatment device (1), and each water mist nozzle (5) is adjustably connected to the outside of the gas-solid separation part (4).

3. The water film vacuum treatment system according to claim 2, characterized in that: The output end of each water mist nozzle (5) and the gas-solid separation part (4) also form an inclined angle, and the formed inclination angle is 0-30°.

4. The water film vacuum treatment system according to claim 1, characterized in that: The upper end of the air extraction port (9) is vertically connected to the side of the gas-solid separation portion (4), and the lower end of the air extraction port (9) is obliquely connected to the side of the collecting hopper (7). The oblique connection is used to assist solids to enter the collecting hopper (7) and plays a guiding role.

5. The water film vacuum treatment system according to claim 4, characterized in that: The lower end of the air extraction port (9) is connected to the side of the collecting hopper (7) at an angle of 10° to 20°.

6. The water film vacuum treatment system according to claim 1, characterized in that: A pneumatic valve (10) is also provided between the gas output end of the water film vacuum treatment device (1) and the input end of the vacuum pump group (2) through a pipeline, and is used to control the flow rate in the pipeline and the opening and closing of the pipeline.

7. The water film vacuum treatment system according to claim 1, characterized in that: The vacuum pump group (2) comprises a vacuum pump (11), a muffler (12), and a flexible joint (13); the gas output end of the water film vacuum treatment device (1) is connected to the input end of the vacuum pump (11) in sequence through a pipeline; the output end of the vacuum pump (11) is connected to the outdoors through a pipeline; the muffler (12) and the flexible joint (13) are arranged on the pipeline connecting the output end of the vacuum pump (11) and the outdoors in sequence from right to left; the muffler (12) is used to reduce the noise of the vacuum pump (11); and the flexible joint (13) is used to reduce vibration and reduce structural damage.

8. The water film vacuum treatment system according to claim 1, characterized in that: A vacuum tank (14) is also provided between the gas output end of the water film vacuum treatment device (1) and the vacuum pump group (2); the vacuum tank (14) serves to buffer the pressure and ensure pressure balance in the system.

9. The water film vacuum treatment system according to claim 8, characterized in that: An automatic drainer (15) is also provided at the bottom of the vacuum tank (14), and an output end of the automatic drainer (15) is connected to a drainage ditch through a pipeline.

10. The water film vacuum treatment system according to claim 1, characterized in that: Reinforced support columns (16) are also provided on both sides of the water film vacuum processing device (1) to enhance the structural strength of the water film vacuum processing device (1).

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