Compatible structure and wafer box with same

Abstract

A compatible structure and a wafer box with the same comprise three positioning parts, and are characterized in that each positioning part comprises a fixing part and an assembling part; the fixing piece is integrally formed and convexly arranged outwards from the bottom wall of the wafer box, and the fixing piece is provided with a section V-shaped groove formed by at least two symmetrical inclined planes; the assembling part is provided with two walls which are oppositely arranged in a V shape, the two V-shaped walls are embedded into the section V-shaped groove and abut against the two inclined faces of the section V-shaped groove of the fixing part, and the inner side faces of the two V-shaped walls serve as positioning acting faces; the assembling part abuts against the two inclined faces of the section V-shaped groove of the fixing part through the two V-shaped walls, and the clamping hook of the assembling part is matched with the hooking face of the fixing part to be hooked and assembled on the fixing part. When the wafer box is used for positioning, under the action of the overall gravity of the wafer box, the assembly part abuts against the fixing part, and the two V-shaped walls of the assembly part are in sliding fit with the two inclined surfaces of the groove with the V-shaped cross section, so that the position accuracy is corrected.

Description

Technical Field

[0001] The utility model relates to a container for storing, conveying, transporting or keeping wafer silicon slices and a compatible positioning structure thereon. Background Art

[0002] A wafer box, that is, a front-opening wafer storage container, abbreviated as FOSB; the wafer box mainly includes a container body and a cover plate; the outer top wall of the container body is provided with a robot grasping protrusion, the outer bottom wall is provided with a positioning structure, and the left and right outer walls are provided with handles; the left and right inner walls of the container body are provided with a supporting mechanism, and the rear inner wall is provided with a rear positioning mechanism; the inner wall of the cover plate is provided with a front elastic positioning mechanism; and a sealing gasket and a filter are provided on the cover plate.

[0003] The positioning structure on the outer bottom wall of the wafer box is three positioning components according to the standard. Each positioning component has a V-shaped groove in cross section. When in use, the positioning pin on the processing device is guided by the inclined surface of the V-shaped groove in cross section to correctly position the wafer box in a predetermined position. Please refer to the invention patent specification of CN100521139C. The positioning components are integrally fixed to the outer bottom wall of the wafer box. There are the following shortcomings: First, since the positioning components are integrally fixed to the entire wafer box, the size and position accuracy of the positioning components need to be guaranteed by process, and the production difficulty is relatively high; second, the compatibility is poor. When the positioning position of the supporting automation equipment is slightly adjusted, the mold needs to be re-opened for production. Summary of the invention

[0004] The invention object of the utility model is to provide a compatible structure and a wafer box having the structure, so that the positioning position can be adjusted, the production difficulty is reduced and the compatibility is improved.

[0005] In order to achieve the above-mentioned purpose, the compatible structural technical solution adopted by the utility model is: a compatible structure, including three positioning components, the positioning components including a fixing component and an assembly component; the fixing component is integrally formed and protruded outward from the bottom wall of the wafer box, and the fixing component has a cross-sectional V-shaped groove composed of at least two symmetrical inclined surfaces; the assembly component has two walls arranged opposite to each other in a V-shape, the two V-shaped walls are embedded in the cross-sectional V-shaped groove and lean against the two inclined surfaces of the cross-sectional V-shaped groove of the fixing component, and the inner side surfaces of the two V-shaped walls serve as positioning surfaces; the assembly component is extended toward the fixing component There is at least one pair of hooks, the hook parts of which are symmetrically arranged outward with respect to the center of the assembly part, and the fixing part is provided with a hook surface facing the bottom wall of the wafer box corresponding to the hook; the assembly part is assembled on the fixing part by the two V-shaped walls being against the two inclined surfaces of the V-shaped groove of the cross section of the fixing part, and the hooks are matched with the hook surfaces of the fixing part for hooking; when playing a positioning role in use, under the action of the overall gravity of the wafer box, the assembly part and the fixing part are pressed against each other, and the two V-shaped walls of the assembly part are slidably matched with the two inclined surfaces of the V-shaped groove of the cross section to complete the positioning accuracy correction.

[0006] In the above solution, the assembly part is provided with two pairs of hooks extending toward the fixing part, and the two pairs of hooks are arranged front to back in the length direction of the V-shaped groove in cross section.

[0007] In the above solution, the hook is integrally extended from the outer surfaces of the two V-shaped walls of the assembly part.

[0008] Furthermore, an avoidance groove is provided on the cross-sectional V-shaped groove of the fixing piece corresponding to the hook.

[0009] In the above solution, the assembly part further has an arc wall, which is connected between the ends of the two V-shaped walls.

[0010] Furthermore, arc segments are also extended from the two inclined end portions of the V-shaped groove of the fixing member in correspondence with the arc walls of the assembly member.

[0011] In the above scheme, the cross section of the fixing member is composed of a V-shaped groove at the head and a root connected to the outer surface of the bottom wall of the wafer box, and is in a Y shape with a wide head and a narrow root.

[0012] The utility model adopts the technical solution of the wafer box as follows: a wafer box, including a compatible structure, the compatible structure includes three positioning components, the positioning components include a fixing component and an assembly component; the fixing component is formed and protruded outward from the bottom wall of the wafer box, and the fixing component has a cross-sectional V-shaped groove composed of at least two symmetrical inclined surfaces; the assembly component has two walls arranged opposite to each other in a V-shape, the two V-shaped walls are embedded in the cross-sectional V-shaped groove and abut against the two inclined surfaces of the cross-sectional V-shaped groove of the fixing component, and the inner side surfaces of the two V-shaped walls serve as positioning action surfaces; the assembly component extends toward the fixing component At least one pair of hooks is provided, and the hook parts of the pair of hooks are symmetrically arranged outward with respect to the center of the assembly part, and the fixing part is provided with a hook surface facing the bottom wall of the wafer box corresponding to the hook; the assembly part is assembled on the fixing part by the two V-shaped walls being against the two inclined surfaces of the V-shaped groove of the cross section of the fixing part, and the hooks are matched with the hook surfaces of the fixing part for hooking; when playing a positioning role in use, under the action of the overall gravity of the wafer box, the assembly part and the fixing part are pressed against each other, and the two V-shaped walls of the assembly part are slidably matched with the two inclined surfaces of the V-shaped groove of the cross section to complete the positioning accuracy correction.

[0013] The design point of the utility model is: the utility model breaks through the positioning component into two parts, the fixing component and the assembly component. The fixing component is integrally formed on the bottom surface of the wafer box, and the assembly component is assembled on the fixing component as a post-assembly component. When the positioning position size required on the matching automation equipment is fine-tuned, only the assembly component needs to be replaced, and the compatibility is strong; and the assembly component is guided by the V-shaped two walls and the V-shaped groove of the cross section of the fixing component. When it plays a positioning role in use, under the action of the overall gravity of the wafer box, the assembly component and the fixing component are pressed against each other, and the two V-shaped walls of the assembly component slide and cooperate with the two inclined surfaces of the V-shaped groove of the cross section, which can automatically complete the positioning accuracy correction and ensure the positioning accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional schematic diagram of the utility model, which shows the bottom surface of the wafer box facing forward;

[0015] Figure 2 for Figure 1 A is an enlarged schematic diagram;

[0016] Figure 3 It is a schematic diagram of the assembly cross section of the positioning component of the utility model;

[0017] Figure 4 It is a schematic diagram of the main view of the assembly part of the utility model;

[0018] Figure 5 for Figure 4 A top view schematic diagram of

[0019] Figure 6 for Figure 4 Schematic diagram of the right side.

[0020] In the above attached figure:

[0021] 1. Positioning components;

[0022] 11. fixing piece; 111. cross-sectional V-shaped groove; 1111. inclined surface; 1112. arc segment; 112. hook surface; 113. root; 114. wall groove;

[0023] 12. Assembly part; 121. Two V-shaped walls; 122. Hook; 1221. Hook portion; 123. Arc wall;

[0024] 2. Wafer box;

[0025] 3. Locating pin. DETAILED DESCRIPTION

[0026] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0027] The present invention will be clearly described below with drawings and detailed descriptions. After understanding the embodiments of the present invention, any person skilled in the art can make changes and modifications based on the techniques taught by the present invention without departing from the spirit and scope of the present invention.

[0028] The terms used herein are only for describing specific embodiments and are not intended to be limiting of the present invention. Singular forms such as "a", "this", "here", "this" and "the" as used herein also include plural forms.

[0029] As used herein, “connected” or “positioned” may refer to two or more components or devices being in direct physical contact with each other, or being in indirect physical contact with each other, or may refer to two or more components or devices operating or moving with each other.

[0030] The terms “include,” “including,” “have,” etc. used in this document are open-ended terms, meaning including but not limited to.

[0031] The terms used in this document generally have the ordinary meaning of each term used in this field, in the context of the case and in the specific context, unless otherwise noted. Certain terms used to describe the present invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the present invention.

[0032] The terms "front", "back", "upper" and "lower" used in this article are directional terms. In this case, they are only used to illustrate the positional relationship between the structures and are not used to limit the protection plan of this case and the specific direction during actual implementation.

[0033] Embodiment 1: A compatible structure, see Figure 1-6 As shown:

[0034] See also Figure 1 As shown, the compatible structure includes three positioning components 1 , which are arranged on the outer bottom wall of the wafer box 2 with central rotation symmetry.

[0035] See also Figure 2 and Figure 3 As shown, each positioning component 1 includes a fixing part 11 and an assembly part 12 .

[0036] See also Figure 2 and Figure 3 As shown, the fixing member 11 is integrally formed and protruded outward from the bottom wall of the wafer box 2 , and the fixing member 11 has a cross-sectional V-shaped groove 111 formed by at least two symmetrical inclined surfaces 1111 .

[0037] See also Figures 2 to 6As shown, the assembly part 12 has two V-shaped walls 121 arranged opposite to each other. The two V-shaped walls 121 are embedded in the cross-sectional V-shaped groove 111 and lean against the two inclined surfaces 1111 of the cross-sectional V-shaped groove 111 of the fixing part 11, and the inner side surfaces of the two V-shaped walls 121 serve as positioning surfaces.

[0038] See also Figures 2 to 6 As shown, the assembly part 12 is provided with at least one pair of hooks 122 extending toward the fixing part 11, and the hook portions 1221 of the pair of hooks 122 are symmetrically arranged outward with respect to the center of the assembly part 12, and the fixing part 11 is provided with a hook surface 112 facing the bottom wall of the wafer box 2 corresponding to the hook 122; the assembly part 12 is assembled on the fixing part 11 by abutting against the two inclined surfaces 1111 of the cross-sectional V-shaped groove 111 of the fixing part 11 through the two V-shaped walls 121, and the hook 122 cooperates with the hook surface 112 of the fixing part 11 to hook and be assembled on the fixing part 11.

[0039] When used for positioning, the wafer box 2 is placed on the automation line as a whole with the wafers inside, aligned with the positioning pins 3 on the automation line. Under the overall gravity of the wafer box 2 and the wafers inside, the assembly part 12 is pushed up and pressed against the fixing part 11. The two V-shaped walls 121 of the assembly part 12 slide with the two inclined surfaces 1111 of the V-shaped groove 111, achieving the position accuracy correction. Therefore, although there is an assembly gap between the assembly part 12 and the fixing part 11, during the positioning, the position accuracy can be automatically corrected due to the guiding effect of the inclined surface 1111, ensuring the positioning accuracy.

[0040] Specifically, Figures 4 to 6 As shown, the assembly part 12 is provided with two pairs of hooks 122 extending toward the fixing part 11 , and the two pairs of hooks 122 are arranged front and back in the length direction of the cross-section V-shaped groove 111 to increase the firmness of the assembly.

[0041] See also Figures 4 to 6 As shown, the hook 122 is directly and integrally extended from the outer side surfaces of the two V-shaped walls 121 of the assembly part 12 , and the hook 122 needs to have a certain length and a certain elastic deformation amount.

[0042] See also Figure 3 As shown, an avoidance groove 114 is provided on the cross-sectional V-shaped groove 111 of the fixing member 11 corresponding to the hook.

[0043] See also Figures 1 to 6 As shown, the assembly part 12 also has an arc wall 123 connected between the ends of the two V-shaped walls 121. The ends of the two inclined surfaces 1111 of the cross-sectional V-shaped groove 111 of the fixing member 11 also extend with arc segments 1112 corresponding to the arc wall 121 of the assembly part 12.

[0044] See also Figure 3 As shown, the cross section of the fixing member 11 is composed of a V-shaped groove 111 at the head and a root 113 connected to the outer surface of the bottom wall of the wafer box, and is in a Y shape with a wide head and a narrow root.

[0045] The positioning accuracy of this embodiment meets the requirements and has strong compatibility. When the required positioning position size on the matching automation equipment needs to be fine-tuned, it is only necessary to replace the assembly part 12, which is convenient and flexible.

[0046] Embodiment 2: A wafer box, see Figure 1-6 As shown:

[0047] The wafer box 2 includes a container body and a cover plate. The outer top wall of the container body is provided with a robot grasping protrusion, the outer bottom wall is provided with a positioning structure, and the left and right outer walls are provided with handles; the left and right inner walls of the container body are provided with a supporting mechanism, and the rear inner wall is provided with a rear positioning mechanism; the inner wall of the cover plate is provided with a front elastic positioning mechanism; a sealing gasket and a filter are provided on the cover plate. Specifically, the positioning structure is compatible with the structure described in Example 1, and the details will not be repeated here.

[0048] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A compatible structure, comprising three positioning components, characterized in that: The positioning component includes a fixing part and an assembly part; The fixing piece is formed integrally and protrudes outward from the bottom wall of the wafer box, and the fixing piece has a cross-sectional V-shaped groove formed by at least two symmetrical inclined surfaces; The assembly part has two walls arranged opposite to each other in a V shape, the two walls in the V shape are embedded in the cross-sectional V-shaped groove and abut against the two inclined surfaces of the cross-sectional V-shaped groove of the fixing part, and the inner side surfaces of the two walls in the V shape serve as positioning surfaces; The assembly part is provided with at least one pair of hooks extending toward the fixing part, and the hook parts of the pair of hooks are arranged symmetrically outward with respect to the center of the assembly part, and the fixing part is provided with a hook hanging surface facing the bottom wall of the wafer box corresponding to the hook; the assembly part is assembled on the fixing part by the two inclined surfaces of the V-shaped groove of the cross section of the fixing part being abutted by the two V-shaped walls, and the hooks are matched with the hook hanging surface of the fixing part to be hooked; When it plays a positioning role in use, under the action of the overall gravity of the wafer box, the assembly part and the fixing part are close to each other, and the two V-shaped walls of the assembly part slide with the two inclined surfaces of the V-shaped groove in the cross section to complete the positioning accuracy correction.

2. The compatible structure according to claim 1, characterized in that: The assembly part is provided with two pairs of hooks extending toward the fixing part, and the two pairs of hooks are arranged front and back in the length direction of the V-shaped groove in cross section.

3. The compatible structure according to claim 1 or 2, characterized in that: The hook is integrally extended from the outer sides of the two V-shaped walls of the assembly part.

4. The compatible structure according to claim 3, characterized in that: An avoidance groove is provided on the cross-sectional V-shaped groove of the fixing piece corresponding to the hook.

5. The compatible structure according to claim 1 or 2, characterized in that: The assembly also has an arc wall connected between the ends of the two V-shaped walls.

6. The compatible structure according to claim 5, characterized in that: The two inclined surface ends of the V-shaped groove of the fixing part also extend to be provided with arc segments corresponding to the arc walls of the assembly part.

7. The compatible structure according to claim 1, characterized in that: The cross section of the fixing piece is composed of a V-shaped groove at the head and a root connected to the outer surface of the bottom wall of the wafer box, and is in a Y shape with a wide head and a narrow root.

8. A wafer box, characterized in that: Including a compatible structure as described in one of claims 1-8.

Images