Graphite boat

Abstract

The utility model provides a graphite boat which comprises first graphite blocks, the multiple first graphite blocks are arranged at intervals, graphite boat pieces are arranged between the adjacent first graphite blocks, the side walls, used for facing the graphite boat pieces, of the first graphite blocks serve as first outer side walls, and first guide grooves are formed in the first outer side walls; at least one end of the first guide groove extends to the edge of the first outer side wall. According to the graphite boat, the first guide groove is formed in the first outer side wall of the first graphite block, so that residual liquid between the attached first graphite block and the graphite boat piece can be removed, and the period of cleaning and drying the graphite boat piece is shortened.

Description

Technical Field

[0001] The present application relates to the photovoltaic field, and in particular to a graphite boat. Background Art

[0002] In the photovoltaic industry, graphite boats, as carriers of photovoltaic cells, play an important role in the coating process. The structural design of graphite boats directly affects the yield rate of photovoltaic cells and has become an indispensable part of the photovoltaic coating process. In a graphite boat, a graphite block is placed between two graphite boat sheets. During the cleaning process, how to remove the cleaning liquid between the bonded graphite boat sheets and graphite blocks to improve the yield rate of the graphite boat sheets is a problem that needs to be solved urgently. Utility Model Content

[0003] In view of this, the present application provides a graphite boat to solve the problem in the prior art that the cleaning liquid between the bonded graphite boat sheet and the graphite block cannot be removed.

[0004] In order to solve the above technical problems, a technical solution adopted in the present application is: to provide a graphite boat, which includes a first graphite block, a plurality of first graphite blocks are arranged at intervals, and adjacent first graphite blocks are used to carry graphite boat sheets, and the side wall of the first graphite block facing the graphite boat sheet is the first outer wall, and the first outer wall is provided with a first guide groove, and at least one end of the first guide groove extends to the edge of the first outer wall.

[0005] According to one embodiment of the present application, a plurality of first guide grooves are cross-connected with each other to form a network-like connection structure.

[0006] According to one embodiment of the present application, the graphite boat also includes a second graphite block, the second graphite block includes a fixing portion and a supporting portion, the supporting portion is arranged on the fixing portion, and forms a boat foot structure with the fixing portion; the fixing portion is arranged between multiple first graphite blocks, and is spaced apart from the first graphite blocks, and a graphite boat sheet is arranged between the fixing portion and the first graphite block, and the side wall of the fixing portion facing the graphite boat sheet is the second outer side wall, and a second guide groove is opened on the second outer side wall, and at least one end of the second guide groove extends to the edge of the second outer side wall to connect to the external space in the extension direction.

[0007] According to one embodiment of the present application, a plurality of second guide grooves are cross-connected with each other to form a network-like connection structure.

[0008] According to one embodiment of the present application, the fixing portion is provided with an embedding groove for setting the graphite boat sheet; the embedding groove has a first wall surface and a second wall surface which are relatively arranged toward the graphite boat sheet, and the first wall surface and the second wall surface are both provided with a third guide groove, and at least one end of the third guide groove extends to the edge of the surface to connect to the external space in the extension direction.

[0009] According to an embodiment of the present application, the graphite boat piece embedded in the groove is arranged at equal intervals from other graphite boat pieces.

[0010] According to one embodiment of the present application, a plurality of third guide grooves are cross-connected with each other to form a network-like connection structure.

[0011] According to one embodiment of the present application, the cross-sectional areas of the first guide groove, the second guide groove and the third guide groove are 4 square millimeters to 81 square millimeters.

[0012] According to one embodiment of the present application, a cross-sectional shape of the first guide groove is semicircular and / or triangular and / or rectangular.

[0013] According to one embodiment of the present application, the cross-sectional shape of the second guide groove is semicircular and / or triangular and / or rectangular.

[0014] According to one embodiment of the present application, a cross-sectional shape of the third guide groove is semicircular.

[0015] The beneficial effects of the present application are: providing a graphite boat, comprising a plurality of first graphite blocks, graphite boat sheets are arranged between adjacent first graphite blocks, a first guide groove is provided on the first outer side wall of the first graphite block, and at least one end of the first guide groove extends to the edge of the first outer side wall. The cleaning liquid or reaction liquid remaining on the first outer side wall can flow out along the first guide groove, shortening the cleaning and drying cycle of the graphite boat, while improving the performance of the graphite boat sheet carried in the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:

[0017] Figure 1 It is a structural schematic diagram of an embodiment of a graphite boat of the present application;

[0018] Figure 2 It is a partial structural schematic diagram of an embodiment of a graphite boat of the present application;

[0019] Figure 3 It is a structural schematic diagram of an embodiment of the first graphite block of the present application;

[0020] Figure 4 It is a schematic diagram of the cross-sectional structure of an embodiment of the first graphite block of the present application;

[0021] Figure 5 It is a structural schematic diagram of an embodiment of the second graphite block of the present application. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. It is to be understood that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some structures related to the present application are shown in the accompanying drawings, rather than all structures. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0023] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0024] The present application provides a graphite boat 10, referring to Figure 1 , Figure 2 and Figure 3 The graphite boat 10 includes a first graphite block 111, a plurality of first graphite blocks 111 are arranged at intervals, and a graphite boat sheet 101 is arranged between adjacent first graphite blocks 111, and the side wall of the first graphite block 111 facing the graphite boat sheet 101 is a first outer side wall a, and a first guide groove 113 is opened on the first outer side wall a, and at least one end of the first guide groove 113 extends to the edge of the first outer side wall a.

[0025] Specifically, the graphite boat 10 is used to carry substrates such as silicon wafers, and the substrates are clamped between the graphite boat sheets 101 through the clamping point structure on the graphite boat sheets 101. The thickness of the graphite boat sheets 101 is 2mm-3mm. Every two graphite boat sheets 101 are separated by an insulating ceramic ring, and the number of graphite boat sheets 101 is an odd number or an even number. The graphite boat 100 includes a first graphite block 111. The graphite boat sheets 101 are arranged between adjacent first graphite blocks 111, that is, a first graphite block 111 is arranged on each side of the graphite boat sheet 101 to form a clamping fit for the graphite boat sheet 101. The side wall of the first graphite block 111 facing the graphite boat sheet 101 is the first outer side wall a, and the first outer side wall a is provided with a first guide groove 113, and at least one end of the first guide groove 113 extends to the edge of the first outer side wall a.

[0026] The first graphite blocks in the prior art are all solid blocks, which are bonded to the adjacent graphite boat sheets. After cleaning, the residual cleaning liquid enters the side wall where the two are bonded, such as the first side wall a. Since the first graphite block and the graphite boat sheet are well bonded, the residual cleaning liquid is difficult to be removed during the subsequent rinsing and drying process, especially in the central area of ​​the contact surface between the graphite boat sheet and the first graphite block, such as the central area of ​​the first side wall a, the residual cleaning liquid is difficult to flow out. As production proceeds, impurity films such as SiNx (silicon nitride) will also be deposited on the surface of the graphite boat sheet and the first graphite block, further exacerbating the difficulty of the cleaning liquid flowing out, resulting in residual cleaning liquid, which affects the performance of the graphite boat sheet. Therefore, in the embodiment of the present application, a first guide groove 113 is set on the first outer wall a of the graphite block 111 toward the graphite boat 101, and at least one end of the first guide groove 113 extends to the edge of the first outer wall a, so that the cleaning liquid impregnated on the surface of the first outer wall a can flow out along the first guide groove 113. After the cleaning liquid is drained, the subsequent cleaning and drying cycle of the graphite boat can be shortened.

[0027] According to one embodiment of the present application, referring to Figure 3 The first guide grooves 113 are cross-connected to each other to form a mesh-like connection structure. The cross-design of the first guide grooves 113 forms a mesh-like connection structure, which can more evenly and comprehensively cover the surface of the first outer side wall a. Both ends of the first guide grooves 113 extend to the edge of the first outer side wall a to discharge the cleaning liquid faster and more thoroughly.

[0028] According to one embodiment of the present application, the cross-sectional shape of the first guide groove 113 is semicircular and / or triangular and / or rectangular. Figure 4 The cross-sectional shape of the first guide groove 113 milled by the center milling cutter is a rectangle. In other embodiments, the relative cutting angle of the side milling cutter head can be changed as needed to process other cross-sectional shapes such as semicircular and / or triangular, and the cross-sectional shape of the first guide groove 113 can be semicircular or triangular. It should be noted that the embodiment of the present application does not limit the shape of the first guide groove 113, and it can also be other shapes. In addition, the first guide groove 113 is not limited to milling, and can also be other processing methods such as wire cutting.

[0029] According to one embodiment of the present application, referring to Figure 2 and Figure 5The graphite boat 10 also includes a second graphite block 112, and the second graphite block 112 includes a fixing portion 1121 and a supporting portion 1122. The fixing portion 1121 is disposed between the plurality of first graphite blocks 111 and is spaced apart from the first graphite blocks 111. The graphite boat sheet 101 is disposed between the fixing portion 1121 and the first graphite block 111. The supporting portion 1122 is disposed on the fixing portion 1121 and forms a boat foot structure with the fixing portion 1121. The side wall of the fixing portion 1121 facing the graphite boat sheet 101 is the second outer side wall b, and the second outer side wall b is provided with a second guide groove 114. At least one end of the second guide groove 114 extends to the edge of the second outer side wall b to connect to the external space in the extension direction.

[0030] Specifically, the graphite boat 10 also includes a second graphite block 112 spaced apart from the first graphite block 111. The fixing portion 1121 of the second graphite block 112 is disposed between the first graphite block 111, and the graphite boat sheet 101 is disposed between the fixing portion 1121 and the first graphite block 111. The side wall of the fixing portion 1121 facing the graphite boat sheet 101 is the second outer side wall b, and the second outer side wall b is provided with a second guide groove 114, and at least one end of the second guide groove 114 extends to the edge of the second outer side wall b. In order to allow the cleaning liquid impregnated on the surface of the first outer side wall a and the surface of the second outer side wall b to flow out along the first guide groove 113 and the second guide groove 114, and at the same time, after the cleaning liquid is discharged, the subsequent cleaning and drying cycle of the graphite boat sheet can be shortened.

[0031] One end of the supporting portion 1122 of the second graphite block 112 is connected to the fixing portion 1121 , and the other end of the supporting portion 1122 is protrudingly arranged to support the graphite boat 10 .

[0032] According to an embodiment of the present application, a plurality of second guide grooves 114 are intersectingly connected to form a mesh-like connecting structure. The second guide grooves 114 are intersectingly designed to form a mesh-like connecting structure, and both ends of the second guide grooves 114 extend to the edge of the second outer side wall b to further discharge the cleaning liquid.

[0033] According to one embodiment of the present application, the cross-sectional shape of the second guide groove 114 is semicircular and / or triangular and / or rectangular. The relative cutting angle of the side milling cutter head can be changed as needed to process various cross-sectional shapes such as rectangular and / or semicircular and / or triangular, and the milled cross-sectional shape of the second guide groove 114 can be rectangular and / or semicircular and / or triangular. It should be noted that the embodiment of the present application does not limit the shape of the second guide groove 114, and it can also be other shapes. In addition, the second guide groove 114 is not limited to milling processing, and can also be other processing methods such as wire cutting.

[0034] According to an implementation method of the present application, continue to refer to Figure 2 and Figure 5The fixing portion 1121 is provided with an embedding groove 1123 for setting the graphite boat 101; the embedding groove 1123 has a first wall surface c and a second wall surface d which are relatively arranged toward the graphite boat 101, and the first wall surface c and the second wall surface d are both provided with a third guide groove 115, and at least one end of the third guide groove 115 extends to the edge of the surface so as to connect to the external space in the extension direction.

[0035] Specifically, the fixing portion 1121 is provided with an embedding groove 1123. Figure 5 The embedding groove 1123 in the Figure 1 The graphite boat sheet 101 in the embedded groove 1123 has a first wall surface c and a second wall surface d which are arranged opposite to each other and are used to face the graphite boat sheet 101. A third guide groove 115 is provided on both the first wall surface c and the second wall surface d. The third guide groove 115 extends to the edge of the first wall surface c, and the third guide groove 115 extends to the edge of the second wall surface d. It should be noted that since one end of the fixing portion 1121 is connected to the supporting portion 1122, the residual cleaning liquid cannot flow out from the side where the supporting portion 1122 is located. Therefore, if one end of the third guide groove 115 intersects with the supporting portion 1122 after extension, it cannot be connected to the external space. Therefore, any end of the third guide groove 115 does not intersect with the supporting portion 1122 after extension.

[0036] According to an embodiment of the present application, a plurality of third guide grooves 115 are cross-connected to form a mesh-like connection structure. The third guide grooves 115 are cross-connected to form a mesh-like connection structure, and both ends of the third guide grooves 115 extend to the edge of the second wall surface d to further discharge the cleaning liquid.

[0037] According to an embodiment of the present application, the graphite boat 101 embedded in the groove 1123 is arranged at equal intervals from other graphite boats 101 to ensure that the substrates in the graphite boat maintain process consistency.

[0038] According to an embodiment of the present application, at least one embedding groove 1123 is provided on a single second graphite block 112. Figure 5 , the number of the embedding grooves 1123 on a single second graphite block 112 is 1, and the portion of the fixing portion 1121 separated by the embedding grooves 1123 is divided into two sub-fixing portions 1121a, and the thickness of the sub-fixing portion 1121a in the arrangement direction of the graphite boat sheet 101 is the same as the thickness of the first graphite block 111, so that the graphite boat sheet 101 in the embedding grooves 1123, the graphite boat sheet 101 between the first graphite block 111 and the second graphite block 112, and the graphite boat sheet 101 between adjacent first graphite blocks 111 can be arranged at equal intervals. Specifically, the embedding grooves 1123 are located in the middle of the fixing portion 1121, and the embedding grooves 1123 divide the fixing portion 1121 into Figure 5The left and right sub-fixing parts 1121 a in the figure have the same size and shape as those of the first graphite block 111 .

[0039] According to an embodiment of the present application, the cross-section of the third guide groove 115 is semicircular. The embedding groove 1123 provided in the fixing portion 1121 is used to embed the graphite boat sheet 101, and the embedding groove 1123 is located inside the fixing portion 1121. The third guide groove 115 is processed by drilling to process the third guide groove 115, so the shape of the third guide groove 115 is semicircular.

[0040] According to one embodiment of the present application, referring to Figure 1 and Figure 3 The first graphite block 111 is provided with a first connecting through hole 116 along the arrangement direction of the first graphite blocks 111, and the second graphite block 112 is provided with a second connecting through hole (not shown in the figure) along the arrangement direction of the first graphite blocks 111; the first connecting hole 116 is connected to the second connecting hole.

[0041] According to one embodiment of the present application, referring to Figure 1 and Figure 2 The graphite boat 10 further includes a connecting rod 118 , which penetrates the first connecting through hole 116 and the second connecting through hole to connect the plurality of first graphite blocks 111 and the second graphite blocks 112 in series.

[0042] Specifically, the first graphite block 111 is provided with a first connecting through hole 116 in a direction penetrating the side walls on both sides, that is, penetrating the first outer side walls a on both sides, and the second graphite block 112 is provided with a second connecting through hole in a direction penetrating the second outer side walls b on both sides. The connecting rod 118 passes through the first connecting through hole 116 and the second connecting through hole to connect the first graphite block 111 and the second graphite block in series.

[0043] According to an embodiment of the present application, the projection area of ​​the first guide groove 113, the second guide groove 114 and the third guide groove 115 is 4 square millimeters to 81 square millimeters. In the cross-sectional area within the above range, the residual liquid infiltrated into the side wall of the first graphite block 111 or the second graphite block 112 will be removed during the cleaning and drying process, thereby improving the yield rate of the graphite boat sheet 101 and meeting the process requirements. The projection area of ​​the cross section of the first guide groove 113, the second guide groove 114 and the third guide groove 115 should not be too large, otherwise it will affect the structural strength of the first graphite block 111 or the second graphite block 112; if the projection area of ​​the cross section of the first guide groove 113, the second guide groove 114 and the third guide groove 115 is too small, the residual liquid inside will not be able to flow out during the immersion process due to factors such as the surface tension of the cleaning liquid. The projection areas of the first guide groove 113, the second guide groove 114 and the third guide groove 115 can be 4 square millimeters, 8.5 square millimeters, 15 square millimeters, 23 square millimeters, 33.5 square millimeters, 45 square millimeters, 67 square millimeters, 72 square millimeters, 81 square millimeters, etc., or a range consisting of any two of the above values, such as 4 square millimeters-15 square millimeters, 15 square millimeters-67 square millimeters, 67 square millimeters-81 square millimeters, etc.

[0044] In summary, the present application provides a graphite boat 10, comprising a plurality of first graphite blocks 111 arranged at intervals, a first guide groove 113 is provided on the first outer side wall a of the first graphite block, and at least one end of the first guide groove 113 extends to the edge of the first outer side wall a, so that the cleaning liquid impregnated on the surface of the first outer side wall a flows out along the first guide groove 113. The second graphite block 112 comprises a fixing portion 1121 and a supporting portion 1122, and the fixing portion 1121 is provided with a second guide groove 114 extending to the edge of the second outer side wall b on the second outer side wall b. The cleaning liquid impregnated on the surface of the first outer side wall a and the surface of the second outer side wall b flows out along the first guide groove 113 and the second guide groove 114, and after the cleaning liquid is discharged, the subsequent cleaning and drying cycle of the graphite boat sheet can be shortened.

[0045] The above are only implementation methods of the present application, and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A graphite boat, characterized in that: include: A first graphite block, a plurality of the first graphite blocks are arranged in an interval arrangement, a graphite boat sheet is arranged between adjacent first graphite blocks, a side wall of the first graphite block facing the graphite boat sheet is a first outer wall, a first guide groove is provided on the first outer wall, and at least one end of the first guide groove extends to an edge of the first outer wall.

2. The graphite boat according to claim 1, characterized in that: The plurality of first guide grooves are cross-connected with each other to form a network-like connection structure.

3. The graphite boat according to claim 1, characterized in that: It also includes a second graphite block, which includes a fixing portion and a supporting portion, wherein the supporting portion is arranged on the fixing portion and forms a boat foot structure with the fixing portion; the fixing portion is arranged between multiple first graphite blocks and is spaced apart from the first graphite blocks, and the graphite boat sheet is arranged between the fixing portion and the first graphite block, and the side wall of the fixing portion facing the graphite boat sheet is the second outer side wall, and the second outer side wall is provided with a second guide groove, and at least one end of the second guide groove extends to the edge of the second outer side wall to connect to the external space in the extension direction.

4. The graphite boat according to claim 3, characterized in that: The plurality of second guide grooves are cross-connected with each other to form a network-like connection structure.

5. The graphite boat according to claim 3, characterized in that: The fixing portion is provided with an embedding groove for arranging the graphite boat sheet; The embedding groove has a first wall surface and a second wall surface which are arranged opposite to each other and face the graphite boat sheet. The first wall surface and the second wall surface are both provided with a third guide groove. At least one end of the third guide groove extends to the edge of the surface so as to connect to the external space in the extension direction.

6. The graphite boat according to claim 5, characterized in that: The graphite boat pieces in the embedded grooves are arranged at equal intervals from other graphite boat pieces.

7. The graphite boat according to claim 5, characterized in that: The plurality of third guide grooves are cross-connected with each other to form a network-like connection structure.

8. The graphite boat according to claim 5, characterized in that: The cross-sectional areas of the first guide groove, the second guide groove and the third guide groove are 4 square millimeters to 81 square millimeters.

9. The graphite boat according to claim 1, characterized in that: The cross-sectional shape of the first guide groove is semicircular and / or triangular and / or rectangular.

10. The graphite boat according to claim 3, characterized in that: The cross-sectional shape of the second guide groove is semicircular and / or triangular and / or rectangular.

11. The graphite boat according to claim 5, characterized in that: The cross-sectional shape of the third guide groove is semicircular.

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