Opening and closing furnace body

Abstract

The utility model discloses an opening and closing furnace body, which relates to the field of heating furnaces and comprises a left heating body shell, an upper cooling flange is mounted at the top of the left heating body shell, a quartz tube reaction cavity is mounted at the bottom of the upper cooling flange, and a lower cooling flange is mounted at the bottom of the quartz tube reaction cavity. A hinge is installed on the outer wall of the left heating body shell, a right heating body shell is installed on the outer wall of the hinge, a left heating furnace lining is fixedly connected to the interior of the left heating body shell, a right heating furnace lining is installed in the right heating body shell, and a heating wire is installed in the left heating furnace lining; the outer wall of the right heating body shell is fixedly connected with a positioning block, and the left heating body shell can be rotationally opened along the right heating body shell through a hinge by pulling a bolt lock catch to release the limiting of the bolt lock catch on a buckling block and pulling a heating body handle, so that a quartz tube reaction cavity is exposed; and the replacement and installation of the quartz tube reaction cavity are not influenced by height space.

Description

Technical Field

[0001] The utility model relates to the field of heating furnaces, in particular to an opening and closing furnace body. Background Art

[0002] The HVPE system is a hydride vapor deposition system, which is mainly used for the growth of crystals and thick film processes of compound semiconductors such as GaN, Ga2O3, etc. in semiconductor power devices, LED and other industries. The material process using the HVPE system is mostly above 1000°C, and a quartz tube is used as the reaction chamber. However, due to the particularity of the process, more by-products will be produced during the reaction and will be deposited on the inner wall of the quartz tube. After several processes, the quartz tube is easily broken due to stress changes during the heating and cooling process, so the quartz tube reaction chamber needs to be replaced frequently. Conventional HVPE uses a vertical tubular heating body. When replacing the quartz tube, the quartz tube needs to be pulled out from the top of the heating body, which is very difficult for workshops with high space, so an open and close furnace body is required.

[0003] The existing open and close furnace body is inconvenient to disassemble and replace the quartz tube during use, resulting in the replacement and installation of the quartz tube being affected by the height space, and it is inconvenient to provide heat insulation protection for the handle of the open and close furnace, resulting in the handle heating up due to the temperature rise in the furnace, thereby causing safety hazards. Therefore, an open and close furnace body is urgently needed. Utility Model Content

[0004] Based on this, the purpose of the utility model is to provide an open and close furnace body to solve the problem that the existing open and close furnace body is inconvenient to disassemble and replace the quartz tube and to provide heat insulation protection for the handle of the open and close furnace.

[0005] To achieve the above-mentioned objectives, the utility model provides the following technical solutions: an opening and closing furnace body, comprising a left heating body shell, an upper cooling flange is installed on the top of the left heating body shell, a quartz tube reaction chamber is installed on the bottom of the upper cooling flange, a lower cooling flange is installed on the bottom of the quartz tube reaction chamber, a hinge is installed on the outer wall of the left heating body shell, a right heating body shell is installed on the outer wall of the hinge, a left heating furnace lining is fixedly connected to the interior of the left heating body shell, a right heating furnace lining is installed to the interior of the right heating body shell, a heating wire is installed to the interior of the left heating furnace lining, a positioning block is fixedly connected to the outer wall of the right heating body shell, a bolt buckle is connected to the outer wall of the right heating body shell, and a buckle block is fixedly connected to the outer wall of the left heating body shell.

[0006] A heater handle is fixedly connected to the outer wall of the left heater shell, and a protective mechanism is installed on the outer wall of the heater handle.

[0007] Preferably, the left heating body shell forms a rotating structure with the right heating body shell through a hinge, and the left heating furnace lining and the right heating furnace lining have the same shape.

[0008] Preferably, the number of the positioning blocks is set to two, and the positioning blocks are symmetrically arranged with respect to the central axis of the right heating body shell.

[0009] Preferably, the latch buckle is snap-connected with the left heating body shell through a buckle block, and the latch buckle is symmetrically arranged with respect to the central axis of the right heating body shell.

[0010] Preferably, the protective mechanism comprises a protective sleeve, a heat-insulating layer and a wear-resistant layer, the interior of the protective sleeve is fixedly connected with the heat-insulating layer, and the outer wall of the heat-insulating layer is fixedly connected with the wear-resistant layer.

[0011] Preferably, the material of the heat insulation layer is carbon fiber heat insulation material, and the material of the wear-resistant layer is silica gel.

[0012] Preferably, the protective sleeve is in contact with the outer wall of the heater handle, and the heat insulating layer and the wear-resistant layer are in contact with each other.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The utility model is provided with a left heating body shell, a right heating body shell, a hinge, a heating body handle, a quartz tube reaction chamber, an upper cooling flange, a lower cooling flange, a bolt lock and a buckle block. By pulling the bolt lock, the bolt lock releases the limit of the buckle block, and by pulling the heating body handle, the left heating body shell can be rotated and opened along the right heating body shell through the hinge to expose the quartz tube reaction chamber. By disassembling the connection between the upper cooling flange and the quartz tube reaction chamber, and then disassembling the connection between the quartz tube reaction chamber and the lower cooling flange, the quartz tube reaction chamber can be easily disassembled, which has the effect of facilitating the disassembly and replacement of the quartz tube reaction chamber, so that the replacement and installation of the quartz tube reaction chamber is not affected by the height space.

[0015] 2. The utility model has a protective mechanism, a heat insulating layer is fixedly connected to the inside of the protective cover, and the material of the heat insulating layer is carbon fiber heat insulating material, which can improve the heat insulating property of the protective cover. A wear-resistant layer is fixedly connected to the outer wall of the heat insulating layer, and the material of the wear-resistant layer is silicone, which can improve the wear resistance of the protective cover, and can facilitate heat insulation protection of the heating body handle, thereby improving the safety of opening and closing the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a front view of the left heating body shell of the utility model;

[0017] Figure 2 This is a three-dimensional diagram of the outer shell of the right heating body of the utility model;

[0018] Figure 3 This is a top view of the bolt lock buckle of the utility model;

[0019] Figure 4 It is a three-dimensional cross-sectional view of the protective cover of the utility model.

[0020] In the figure: 1. left heating body shell; 2. right heating body shell; 3. left heating furnace lining; 4. right heating furnace lining; 5. heating wire; 6. positioning block; 7. hinge; 8. heating body handle; 9. protection mechanism; 901. protection cover; 902. heat insulation layer; 903. wear-resistant layer; 10. quartz tube reaction chamber; 11. upper cooling flange; 12. lower cooling flange; 13. bolt lock buckle; 14. buckle block. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model.

[0022] The following describes an embodiment of the utility model based on its overall structure.

[0023] See also Figure 1-4 A kind of opening and closing furnace body comprises a left heating body shell 1, an upper cooling flange 11 is installed on the top of the left heating body shell 1, a quartz tube reaction chamber 10 is installed on the bottom of the upper cooling flange 11, a lower cooling flange 12 is installed on the bottom of the quartz tube reaction chamber 10, a hinge 7 is installed on the outer wall of the left heating body shell 1, a right heating body shell 2 is installed on the outer wall of the hinge 7, a left heating furnace lining 3 is fixedly connected to the inside of the left heating body shell 1, a right heating furnace lining 4 is installed to the inside of the right heating body shell 2, a heating wire 5 is installed to the inside of the left heating furnace lining 3, a positioning block 6 is fixedly connected to the outer wall of the right heating body shell 2, and the outer wall of the right heating body shell 2 is connected There is a latch lock 13, and a buckle block 14 is fixedly connected to the outer wall of the left heating body shell 1. The left heating body shell 1 forms a rotating structure with the right heating body shell 2 through a hinge 7, and the left heating furnace lining 3 and the right heating furnace lining 4 have the same shape. The number of positioning blocks 6 is set to two, and the positioning blocks 6 are symmetrically arranged with the central axis of the right heating body shell 2. The latch lock 13 is snap-connected with the left heating body shell 1 through the buckle block 14, and the latch lock 13 is symmetrically arranged with the central axis of the right heating body shell 2, so that the left heating body shell 1 and the right heating body shell 2 can be rotated open by the hinge 7, which facilitates the disassembly and replacement of the quartz tube reaction chamber 10.

[0024] See also Figure 1-4A kind of opening and closing furnace body, the outer wall of the left heating body shell 1 is fixedly connected with a heating body handle 8, the outer wall of the heating body handle 8 is installed with a protective mechanism 9, the protective mechanism 9 includes a protective sleeve 901, a heat insulation layer 902 and a wear-resistant layer 903, the interior of the protective sleeve 901 is fixedly connected with the heat insulation layer 902, the outer wall of the heat insulation layer 902 is fixedly connected with the wear-resistant layer 903, the heat insulation layer 902 is made of carbon fiber heat insulation material, and the wear-resistant layer 903 is made of silica gel, the protective sleeve 901 is in contact with the outer wall of the heating body handle 8, and the heat insulation layer 902 and the wear-resistant layer 903 are in contact with each other, which can facilitate the heat insulation protection of the heating body handle 8 and improve the safety of the opening and closing furnace body.

[0025] Working principle: When in use, by pulling the bolt lock buckle 13, the bolt lock buckle 13 releases the limit of the buckle block 14, and pulling the heating body handle 8, the left heating body shell 1 can be rotated and opened along the right heating body shell 2 through the hinge 7, so that the quartz tube reaction chamber 10 is exposed, and the connection between the upper cooling flange 11 and the quartz tube reaction chamber 10 is removed, and then the connection between the quartz tube reaction chamber 10 and the lower cooling flange 12 is removed, the quartz tube reaction chamber 10 can be easily disassembled, and the quartz tube reaction chamber 10 to be replaced is installed, and the heating body handle 8 is pulled to rotate the left heating body shell 1, and the positioning block 6 is fixedly connected to the outer wall of the right heating body shell 2, so that the left The heating body shell 1 is precisely docked with the right heating body shell 2, and the bolt lock 13 is pulled and put on the buckle block 14 for limiting, which makes it easy to disassemble and replace the quartz tube reaction chamber 10. The insulation layer 902 is fixedly connected to the inside of the protective sleeve 901, and the material of the insulation layer 902 is carbon fiber insulation material, which can improve the insulation of the protective sleeve 901. The wear-resistant layer 903 is fixedly connected to the outer wall of the insulation layer 902, and the material of the wear-resistant layer 903 is silicone, which can improve the wear resistance of the protective sleeve 901. In this way, the use process of the device is completed. The contents not described in detail in this manual belong to the existing technology known to professional and technical personnel in this field.

[0026] The directions or positional relationships indicated by terms such as "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the directions or positional relationships shown in the accompanying drawings. They are merely simplified descriptions for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the protection content of the present invention.

[0027] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. An openable furnace body, comprising a left heating body shell (1), characterized in that: An upper cooling flange (11) is installed on the top of the left heating body shell (1), a quartz tube reaction chamber (10) is installed on the bottom of the upper cooling flange (11), a lower cooling flange (12) is installed on the bottom of the quartz tube reaction chamber (10), a hinge (7) is installed on the outer wall of the left heating body shell (1), a right heating body shell (2) is installed on the outer wall of the hinge (7), a left heating furnace lining (3) is fixedly connected to the inside of the left heating body shell (1), a right heating furnace lining (4) is installed to the inside of the right heating body shell (2), a heating wire (5) is installed to the inside of the left heating furnace lining (3), a positioning block (6) is fixedly connected to the outer wall of the right heating body shell (2), a latch buckle (13) is connected to the outer wall of the right heating body shell (2), and a buckle block (14) is fixedly connected to the outer wall of the left heating body shell (1); A heater handle (8) is fixedly connected to the outer wall of the left heater shell (1), and a protective mechanism (9) is installed on the outer wall of the heater handle (8).

2. The opening and closing furnace body according to claim 1, characterized in that: The left heating body shell (1) forms a rotating structure with the right heating body shell (2) via a hinge (7), and the left heating furnace lining (3) and the right heating furnace lining (4) have the same shape.

3. The opening and closing furnace body according to claim 1, characterized in that: The number of the positioning blocks (6) is set to two, and the positioning blocks (6) are symmetrically arranged with respect to the central axis of the right heating body shell (2).

4. The opening and closing furnace body according to claim 1, characterized in that: The latch buckle (13) is snap-connected to the left heating body shell (1) via a buckle block (14), and the latch buckle (13) is symmetrically arranged with respect to the central axis of the right heating body shell (2).

5. The opening and closing furnace body according to claim 1, characterized in that: The protective mechanism (9) comprises a protective sleeve (901), a heat insulating layer (902) and a wear-resistant layer (903); the interior of the protective sleeve (901) is fixedly connected to the heat insulating layer (902); and the outer wall of the heat insulating layer (902) is fixedly connected to the wear-resistant layer (903).

6. The opening and closing furnace body according to claim 5, characterized in that: The material of the heat insulation layer (902) is carbon fiber heat insulation material, and the material of the wear-resistant layer (903) is silica gel.

7. The retractable furnace body according to claim 5, characterized in that: The protective sleeve (901) is in contact with the outer wall of the heater handle (8), and the heat insulation layer (902) and the wear-resistant layer (903) are in contact with each other.

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