Tilt angle sensor with anisotropic structure and tilt angle detection system

Abstract

The utility model relates to a tilt angle sensor with an anisotropic structure and a tilt angle detection system, the tilt angle sensor comprises an anisotropic cavity structure, an anisotropic capillary channel is formed in the cavity structure, liquid metal is injected into the anisotropic capillary channel, and conductive silver paste electrodes are coated at two ends of the anisotropic cavity structure. The tilt angle sensor with the anisotropic structure has higher conductive efficiency and a highly sensitive angle sensing function, and the tilt angle sensor with the anisotropic structure can realize a 0.05-degree high-precision tilt angle sensing function.

Description

Technical Field

[0001] The utility model relates to the field of inclination sensors, in particular to an inclination sensor with an anisotropic structure and an inclination detection system. Background Art

[0002] Inclination sensors have broad application prospects in the industrial field, such as equipment stability, aircraft flight attitude, vehicle pitch angle, medical robots, and working stability detection of high-precision balances. Currently, inclination sensors mainly include capacitive, inductive, and optical angle sensors. These devices have high environmental requirements and are also expensive. Liquid-based inclination sensors have poor stability and low accuracy, which limits their further development.

[0003] Currently, the most studied method is to inject gallium-based liquid metal into an isotropic structure to form an inclination sensor. However, due to the defects of the isotropic structure itself, the structure size is small, the flow resistance of the liquid metal is not large enough, the distance required to form a gradient segment is long, and there is more liquid metal in the channel, resulting in low sensitivity of the sensor device and inability to meet high-precision inclination detection.

[0004] The bionic inclination sensor previously developed by the inventor mainly relies on isotropic structures (such as hollow fibers and bamboo), and its maximum resistance change rate is less than 1%, and the detection accuracy is about 5°. Therefore, in the face of high detection requirements, it is still necessary to further improve the detection range, accuracy, stability and other performance. The utility model obtains an inclination sensor with an anisotropic structure by injecting liquid metal into a capillary channel with an anisotropic structure, and uses its oxide film and pressure drop to form an unstable gradient segment in the pipeline. When tilting occurs, the roughness of the liquid metal surface will change under the action of gravity, thereby affecting its resistance, obtaining a resistance-tilt correspondence, and realizing the inclination detection function, which can achieve a high-precision and high-sensitivity angle detection function. Utility Model Content

[0005] In a first aspect, the present application provides a tilt sensor with an anisotropic structure, comprising: an anisotropic cavity structure, an anisotropic capillary channel is formed inside the cavity structure, liquid metal is injected into the anisotropic capillary channel, and conductive silver paste electrodes are coated on both ends of the anisotropic cavity structure.

[0006] The outer walls at both ends of the anisotropic cavity structure are used to fix the wires; the surface of the wires is coated with conductive silver paste.

[0007] Furthermore, the anisotropic cavity is formed by solidifying the flexible polymer material.

[0008] The flexible polymer material is selected from any one of PDMS, TPU, PVP or PVA, preferably PDMS.

[0009] The axial length of the outer wall of the anisotropic cavity structure is 0.5-30 cm, preferably 1-20 cm; the radial width (diameter) is 0.05-10 mm.

[0010] The anisotropic cavity structure has at least one obtuse angle and one acute angle relative to the central axis of the outer wall.

[0011] The acute angle ranges from 5 to 70°; the obtuse angle is generally consistent with the angle of anisotropic structure samples and can range from 110 to 175°.

[0012] The anisotropic cavity structure also includes a plurality of cylindrical or angular columnar particle group structures outside.

[0013] The cylindrical or angular columnar particle group structure is formed between acute angles and obtuse angles.

[0014] The liquid metal is reversely injected into the anisotropic capillary channel, the capillary channel has a microstructure, and the liquid metal forms a gradient distribution state under the action of the microstructure.

[0015] The microstructure is in the shape of protrusions or pits.

[0016] Furthermore, the liquid metal surface presents a periodic raised or depressed microstructure.

[0017] Specifically, there will be microstructures on the side walls of the anisotropic capillary channel. There will be flow resistance when the liquid metal is injected into the channel. The farther the liquid metal is from the inlet end, the smaller the pressure it is subjected to. Under the action of pressure, the liquid metal will overcome the surface tension and be squeezed into the microstructure. Therefore, the liquid metal will show a gradient distribution state.

[0018] The structural schematic diagram of the tilt sensor with anisotropic structure is as follows: Figure 1 As shown, its horizontal partial cross-sectional view is as follows Figure 2 shown.

[0019] Compared with the isotropic structure that is always perpendicular to the outer wall structure, the anisotropic structure of the present invention always has an obtuse angle and an acute angle relative to the outer wall. When the liquid metal is injected into the channel and passes through a microstructure, if the microstructure is convex, it is reverse injection when it first passes through the acute angle area; if the microstructure is concave, it is reverse injection when it first passes through the obtuse angle area.

[0020] The microstructure may also be graphene micro-nano sheets or spheres added to the interior of the cavity.

[0021] Generally speaking, reverse injection will form a greater flow resistance, which can make it easier for the liquid metal to form a gradient distribution in the microstructure, which is more conducive to improving the performance of the sensor device. If the flow resistance is small, the distance required to form the gradient segment will be longer, and the more liquid metal in the channel, the more unfavorable it will be to the sensitivity of the sensor device.

[0022] The liquid metal is a gallium-based alloy, preferably any one of gallium metal, indium gallium alloy, indium tin alloy, gallium tin alloy and indium gallium tin alloy.

[0023] Gallium-based liquid metals perform well not only in terms of conductivity, but also in terms of mobility. Therefore, the liquid metal is enclosed in a closed solid space containing an air gap, the liquid metal can move inside the solid, and it will deform in response to external vibrations and pressure changes, resulting in changes in electrical signals.

[0024] A liquid metal oxide layer is formed between the liquid metal and the inner wall of the cavity, wherein the thickness of the oxide layer is 0.1-10 nm, preferably 0.5-5 nm.

[0025] Furthermore, the anisotropic cavity structure comprises a front end, a middle end and a rear end; the anisotropic capillary channel formed thereby is also divided into a front end, a middle end and a rear end.

[0026] As liquid metal is injected into the anisotropic capillary channel, due to the pressure drop, the oxide layer in the front end area of ​​the capillary channel is in close contact with the microstructure of the inner wall of the capillary channel; as the liquid metal pressure decreases, the oxide layer in the middle end area of ​​the capillary channel adheres to the microstructure of the local area of ​​the inner wall; as the liquid metal pressure further decreases, the oxide layer in the rear end area of ​​the capillary channel only adheres to the inner wall of the microchannel.

[0027] The liquid metal filling ratio at the front end is greater than 80%, the liquid metal filling ratio at the middle end is 20-80%, and the liquid metal filling ratio at the rear end is less than 20%.

[0028] The anisotropic cavity is the epidermis of biological tissues such as the stem of Setaria viridis, wheat awn, fine-leaved awn, animal hair, and insect leg-like structure.

[0029] The inclination sensor with anisotropic structure of the utility model forms liquid metal with gradient distribution by reversely injecting liquid metal into the anisotropic cavity.

[0030] In the second aspect, the utility model provides a tilt detection system, which includes electrodes led out from the two ends of the tilt detector with an anisotropic structure of the first aspect, wherein the electrode at one end can form a current path with the liquid metal, and the electrode at the other end can be connected to an external electrochemical workstation to obtain the tilt detection system.

[0031] The liquid metal in the inclination sensor with an anisotropic structure can flow freely under the action of gravity. When the inclination angle of the inclination sensor changes, the liquid metal will flow along the inner wall of the anisotropic structure and its shape will change, thereby changing the internal resistance value of the anisotropic structure. The electrochemical workstation obtains the change in resistance value and obtains an electrical signal output proportional to the inclination angle, thereby realizing real-time inclination monitoring.

[0032] The beneficial effects of the utility model are:

[0033] 1. The utility model obtains an anisotropic pipe by replicating the anisotropic fiber structure in nature, fills it with liquid metal conductive fluid, and makes full use of the specificity and microstructure of the anisotropic structure to increase the flow resistance of the liquid metal in the pipe. The liquid metal presents a gradient distribution, so that the detection electrode has a higher conductivity efficiency and can greatly improve the sensitivity of the signal. When the anisotropic structure tilt sensor electrode is tilted, the liquid metal produces obvious electrical signal changes under the action of gravity, thereby having a highly sensitive angle sensing function. The tilt sensor with anisotropic structure described in the utility model can achieve a high-precision tilt sensing function of 0.5°, and can be applied to various fields with high requirements for tilt detection accuracy.

[0034] 2. The angle sensor provided by the utility model has an ingenious structural design and a simple manufacturing process. The prepared angle sensor is small in size and suitable for industrial production. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 The utility model has an anisotropic tilt sensor structure schematic diagram, wherein 1-anisotropic cavity structure (flexible polymer material), 2-air, 3-liquid metal.

[0036] Figure 2 This is a horizontal cross-sectional view of the anisotropic tilt sensor of the utility model, wherein 1 is anisotropic cavity structure (flexible polymer material), 2 is air, and 3 is liquid metal.

[0037] Figure 3 This is a diagram of the internal structure of the tilt sensor and its capillary channel that replicates the foxtail grass stem structure in Example 1;

[0038] Among them, a) is the SEM image of the structure inside the capillary channel; b) is the SEM image of the red area in a) magnified 25 times; c)-f) are morphological images of the anisotropic structure on the surface of Setaria viridis at different magnifications.

[0039] Figure 4 This is a diagram showing the effect of detecting the inclination signal of the inclination sensor of the foxtail grass stem structure replicated in Example 1; specifically, it is a diagram showing the effect of detecting the inclination signal during the clockwise rotation process.

[0040] Figure 5 This is the SEM image of the anisotropic structure of the Miscanthus angustifolia replicated in Example 2.

[0041] Figure 6 This is a diagram showing the effect of replicating the fine-leaf awn structure inclination sensor detecting the inclination signal of Example 2.

[0042] Figure 7 The diagram is a structural diagram of the inclination sensor that replicates the spruce branch hair structure in Example 3; a) is a SEM electron microscope image; b) and c) are local electron microscope images of different parts magnified 25 times.

[0043] Figure 8 This is a diagram showing the effect of detecting the inclination signal of the inclination sensor with the spruce branch hair structure replicated in Example 3, wherein a) is the rotation interval segment, b) is the detection situation near 0°, and c) is a signal diagram for monitoring the change in water surface state.

[0044] Fig. 9 This is a diagram showing the effect of detecting the inclination signal using the hollow fiber-based inclination sensor in comparative example 1. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. The components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0046] Example 1

[0047] A tilt sensor with an anisotropic (setophaga stalk) structure comprises: an anisotropic cavity structure, an anisotropic capillary channel is formed inside the cavity structure, liquid metal is injected into the anisotropic capillary channel, and conductive silver paste electrodes are coated on both ends of the anisotropic cavity structure.

[0048] The outer walls at both ends of the anisotropic cavity structure are used to fix the wires; the surface of the wires is coated with conductive silver paste.

[0049] The liquid metal is a gallium-indium alloy.

[0050] The outer wall length of the anisotropic cavity structure is about 20 cm, and the radial diameter is about 5 mm.

[0051] The anisotropic cavity structure has at least one obtuse angle and one acute angle relative to the outer wall.

[0052] The acute angle is in the range of 10° to 70°, while the obtuse angle is limited by the specific structure of the foxtail grass stem.

[0053] A liquid metal oxide layer is formed between the liquid metal and the inner wall of the cavity.

[0054] The oxide layer has a thickness of about 2 nm.

[0055] The capillary channel has a microstructure, and the liquid metal forms a gradient distribution state under the action of the microstructure.

[0056] The anisotropic capillary channel is divided into the front end, the middle end and the back end. As the liquid metal is injected into the anisotropic capillary channel, due to the pressure drop, the oxide layer in the front end area of ​​the capillary channel is in close contact with the microstructure of the inner wall of the capillary channel; as the liquid metal pressure decreases, the oxide layer in the middle end area of ​​the capillary channel adheres to the microstructure of the local area of ​​the inner wall; as the liquid metal pressure further decreases, the oxide layer in the back end area of ​​the capillary channel only adheres to the inner wall of the microchannel.

[0057] The liquid metal filling ratio at the front end is greater than 80%, the liquid metal filling ratio at the middle end is 20-80%, and the liquid metal filling ratio at the rear end is less than 20%.

[0058] The tilt sensor with an anisotropic (setophaga stalk) structure is prepared by the following method:

[0059] (1) Polydimethylsiloxane (PDMS) and a curing agent (components are prepolymers with vinyl side chains and crosslinking agents, purchased from Dow Corning 184) are mixed in a mass ratio of 10:1, and internal bubbles are removed by vacuuming. A Setaria plant stem is inserted into the mixture and the bubbles are removed by vacuuming. The mixture is kept at 80°C for 2 hours to allow the PDMS to cure.

[0060] (2) After solidification is completed, the Setaria plant stem is taken out in the forward direction to obtain an anisotropic capillary channel.

[0061] (3) Liquid metal gallium-indium alloy is reversely injected at a rate of 2 mL / min. As the liquid metal is gradually injected, a pressure drop is generated, so that the oxide layer contacts the inner wall of the cavity structure and presents a gradient distribution.

[0062] (4) The two ends of the anisotropic structure cavity are encapsulated with conductive silver paste and maintained at a temperature of 90° C. for 2 hours to solidify the conductive silver paste, thereby obtaining the tilt sensor.

[0063] The capillary channel structure inside the inclination sensor is as follows: Figure 3 The structure of the circular frame part magnified 25 times is shown in 3b); the local SEM images of the capillary channel at different magnifications are shown in 3c)- Figure 3 f); the cross section is sea urchin-like and has an anisotropic structure.

[0064] The inclination sensor is rotated to different angles to detect the change of the corresponding resistance signal. The inclination sensor can be divided into one state every 90° rotation. It can be divided into 4 different states within one rotation cycle, and constitutes a complete cycle.

[0065] The prepared inclination sensor with anisotropic structure is connected to the electric turntable and Agilent 34420A. The inclination signal can be obtained during the process of tilting the sample to be tested (rotating along the time). Figure 4 As shown, it can be seen that the inclination sensor in this embodiment has a complete and continuous waveform, and the range of the detection resistance change rate is about -1 to 2.4%. As the rotation speed gradually increases, the peak value does not change significantly, indicating that the response speed is relatively fast, the signal stability is good, and it is not easy to be lost.

[0066] Example 2

[0067] A tilt sensor with an anisotropic (silver leaf awn) structure comprises: an anisotropic cavity structure, an anisotropic capillary channel is formed inside the cavity structure, liquid metal is injected into the anisotropic capillary channel, and conductive silver paste electrodes are coated on both ends of the anisotropic cavity structure.

[0068] The outer walls at both ends of the anisotropic cavity structure are used to fix the wires; the surface of the wires is coated with conductive silver paste.

[0069] The liquid metal is a gallium-indium alloy.

[0070] The outer wall length of the anisotropic cavity structure is about 15 cm, and the radial diameter is about 4 mm.

[0071] The anisotropic cavity structure has at least one obtuse angle and one acute angle relative to the outer wall.

[0072] The acute angle ranges from 5° to 45°, while the obtuse angle is limited by the specific structure of Miscanthus annuus.

[0073] A liquid metal oxide layer is formed between the liquid metal and the inner wall of the cavity.

[0074] The oxide layer has a thickness of about 4 nm.

[0075] The capillary channel has a microstructure, and the liquid metal forms a gradient distribution state under the action of the microstructure.

[0076] The anisotropic capillary channel is divided into a front end, a middle end and a rear end. As liquid metal is injected into the anisotropic capillary channel, due to the pressure drop, the oxide layer in the front end area of ​​the capillary channel is in close contact with the microstructure of the inner wall of the capillary channel; as the pressure of the liquid metal decreases, the oxide layer in the middle end area of ​​the capillary channel adheres to the microstructure of the local area of ​​the inner wall; as the pressure of the liquid metal further decreases, the oxide layer in the rear end area of ​​the capillary channel only adheres to the inner wall of the microchannel.

[0077] The liquid metal filling ratio at the front end is greater than 80%, the liquid metal filling ratio at the middle end is 20-80%, and the liquid metal filling ratio at the rear end is less than 20%.

[0078] The tilt sensor with an anisotropic (fine leaf awn) structure is prepared by the following method:

[0079] (1) Mix polydimethylsiloxane (PDMS) and a curing agent (components are prepolymers with vinyl side chains and crosslinking agents, purchased from Dow Corning 184) at a mass ratio of 10:1, and vacuum remove internal bubbles. Then insert the Miscanthus plant stem into the mixture and vacuum remove the bubbles. Keep the mixture at 100°C for 1 hour to allow the PDMS to cure.

[0080] (2) After the solidification is completed, the Miscanthus sinensis plant stem is taken out in the forward direction to obtain anisotropic capillary channels.

[0081] (3) The liquid metal is injected reversely at a rate of 2 mL / min. As the liquid metal is gradually injected, a pressure drop is generated, causing the oxide layer to contact the inner wall of the cavity structure and present a gradient distribution.

[0082] (4) The two ends of the anisotropic structure cavity are encapsulated with conductive silver paste and maintained at a temperature of 90° C. for 3 hours to solidify the conductive silver paste, thereby obtaining the tilt sensor.

[0083] The structure of the inclination sensor with anisotropic structure is as follows Figure 5 As shown; the square frame area represents the morphology of the microstructure on the biological tissue.

[0084] The inclination sensor with anisotropic structure is connected to the electric turntable and Agilent 34420A, and the inclination signal can be obtained during the tilting of the sample to be tested. Figure 6 As shown. It can be seen that the detection signal has a large variation range. Figure 6 The square frame area represents the maximum range of electrical signal detection, and its maximum resistance change rate can reach 16%, which is conducive to achieving higher precision (such as 0.5°) detection, further verifying the feasibility of the solution of the utility model.

[0085] Example 3

[0086] A tilt sensor with an anisotropic (spruce branch hair) structure comprises: an anisotropic cavity structure, an anisotropic capillary channel is formed inside the cavity structure, liquid metal is injected into the anisotropic capillary channel, and conductive silver paste electrodes are coated on both ends of the anisotropic cavity structure.

[0087] The outer walls at both ends of the anisotropic cavity structure are used to fix the wires; the surface of the wires is coated with conductive silver paste.

[0088] The liquid metal is a gallium-indium alloy.

[0089] The outer wall length of the anisotropic cavity structure is about 2 cm, and the radial diameter is about 1 mm.

[0090] The anisotropic cavity structure has at least one obtuse angle and one acute angle relative to the outer wall.

[0091] The acute angles range from 5° to 45°; the obtuse angles are limited by the specific structure of the hairs on the surface of the spruce branches.

[0092] A liquid metal oxide layer is formed between the liquid metal and the inner wall of the cavity.

[0093] The oxide layer has a thickness of about 4 nm.

[0094] The capillary channel has a microstructure, and the liquid metal forms a gradient distribution state under the action of the microstructure.

[0095] The anisotropic capillary channel is divided into a front end, a middle end and a rear end. As liquid metal is injected into the anisotropic capillary channel, due to the pressure drop, the oxide layer in the front end area of ​​the capillary channel is in close contact with the microstructure of the inner wall of the capillary channel; as the pressure of the liquid metal decreases, the oxide layer in the middle end area of ​​the capillary channel adheres to the microstructure of the local area of ​​the inner wall; as the pressure of the liquid metal further decreases, the oxide layer in the rear end area of ​​the capillary channel only adheres to the inner wall of the microchannel.

[0096] The liquid metal filling ratio at the front end is greater than 80%, the liquid metal filling ratio at the middle end is 20-80%, and the liquid metal filling ratio at the rear end is less than 20%.

[0097] The tilt sensor with an anisotropic (spruce branch hair) structure is prepared by the following method:

[0098] (1) Mix polydimethylsiloxane (PDMS) and a curing agent (components are prepolymers with vinyl side chains and crosslinking agents, purchased from Dow Corning 184) at a mass ratio of 10:1, and vacuum remove internal bubbles. Then insert spruce branches into the mixture and vacuum remove bubbles. Keep the mixture at 100°C for 1 hour to allow PDMS to cure.

[0099] (2) After solidification is completed, the spruce branch hair is taken out in the forward direction to obtain anisotropic capillary channels.

[0100] (3) The liquid metal is injected reversely at a rate of 1 mL / min. As the liquid metal is gradually injected, a pressure drop is generated, causing the oxide layer to contact the inner wall of the cavity structure and present a gradient distribution.

[0101] (4) The two ends of the anisotropic structure cavity are encapsulated with conductive silver paste and maintained at a temperature of 90° C. for 3 hours to solidify the conductive silver paste, thereby obtaining the tilt sensor.

[0102] SEM image of the tilt sensor Figure 7 As shown in a), the structure diagram of different parts magnified 25 times is shown in b) of 7- Figure 7 As shown in c).

[0103] The obtained inclination sensor with anisotropic structure is fixed to the electric turntable and connected to the signal acquisition device. The rotation range of -90 to 90° can be divided into 26 sections in equal proportion, corresponding to 26 English letters ( Figure 8 a), can be used to transmit information covertly in the form of inclination signals. In addition, based on the excellent resolution of the angle sensor near the 0° range ( Figure 8 b), a lightweight anisotropic tilt sensor can be floated on the water surface. When ripples appear on the water surface, the tilt sensor can collect regular electrical signal changes with the same frequency as the water waves to monitor the state of the water surface in real time ( Figure 8 c), the detection results are efficient, sensitive and stable.

[0104] Comparative Example 1

[0105] (1) A hollow fiber shell with an inner diameter of 5 mm was selected and cut into small cylinders with a length of 20 cm after air drying.

[0106] (2) Gallium-indium alloy liquid metal is used as the filler inside the sensor. The liquid metal is slowly injected from one end of the fiber at 2 mL / min through a syringe. The air inside the fiber will cause the surface of the injected liquid metal to oxidize, and the oxide layer will contact the inner wall of the fiber and form a gradient.

[0107] (3) The two ends of the fiber are encapsulated with conductive silver paste to ensure that the liquid metal does not flow out, and then placed on a heating table for heating. The temperature is controlled at 90°C and maintained for 2 hours. The conductive silver paste is solidified to obtain a tilt sensor.

[0108] The inclination sensor is connected to the electric turntable and Agilent 34420A. The inclination signal can be obtained during the tilting of the sample to be tested. The test results are as follows: Fig. 9As shown. It can be seen that the maximum resistance change rate of the inclination sensor based on hollow fiber in Comparative Example 1 is only 0.7% ( Fig. 9 a), which exhibits a sinusoidal signal with obvious fluctuations during rotation ( Fig. 9 b), there will be obvious fluctuations in the cycle test, and the stability is poor ( Fig. 9 c), and it can only play the role of angle sensing in the range of -15° to 15°, and can only detect changes in tilt angles above 5°, with low detection accuracy ( Fig. 9 d).

[0109] It can be seen from the embodiments and comparative examples that the design of the inclination sensor with an anisotropic structure of the utility model has a more sensitive inclination sensing function and can meet the use requirements of related fields that require higher inclination detection accuracy.

[0110] The above-described embodiments are only specific implementation methods of the present invention, which are used to illustrate the technical solutions of the present invention, rather than to limit them. The protection scope of the present invention is not limited thereto. Although the present invention is described in detail with reference to the above-described embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-described embodiments within the technical scope disclosed by the present invention, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A tilt sensor with an anisotropic structure, characterized in that: The sensor comprises an anisotropic cavity structure, an anisotropic capillary channel is formed inside the cavity structure, liquid metal is injected into the anisotropic capillary channel, and conductive silver paste electrodes are coated at both ends of the anisotropic cavity structure.

2. The inclination sensor according to claim 1, characterized in that: The outer walls at both ends of the anisotropic cavity structure are used to fix the wires; the surface of the wires is coated with conductive silver paste.

3. The inclination sensor according to claim 1 or 2, characterized in that: A liquid metal oxide layer is formed between the liquid metal and the inner wall of the cavity, and the thickness of the liquid metal oxide layer is 0.1-10 nm.

4. The inclination sensor according to claim 1 or 2, characterized in that: The outer wall length of the anisotropic cavity structure is 0.5-30 cm, and the radial width is 0.05-10 mm.

5. The inclination sensor according to claim 1, characterized in that: The capillary channel has a microstructure, and the liquid metal forms a gradient distribution under the action of the microstructure.

6. The inclination sensor according to claim 1, characterized in that: The anisotropic cavity structure has at least one obtuse angle and one acute angle relative to the central axis of the outer wall; the acute angle ranges from 5 to 70 degrees, and the obtuse angle ranges from 110 to 175 degrees.

7. The inclination sensor according to claim 1, characterized in that: The anisotropic capillary channel is divided into a front end, a middle end and a rear end; the liquid metal filling ratio of the front end is greater than 80%, the liquid metal filling ratio of the middle end is 20-80%, and the liquid metal filling ratio of the rear end is less than 20%.

8. The inclination sensor according to claim 1, characterized in that: The anisotropic cavity is a stem of Setaria viridis, wheat awn, fine-leaved awn, animal hair or an insect leg-like structure.

9. A tilt detection system, characterized in that: The two ends of the inclination detector with an anisotropic structure as described in any one of claims 1 to 8 are lead-out electrodes, wherein one end electrode forms a current path with the liquid metal, and the other end electrode is connected to an external electrochemical workstation.

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