Chip testing device

Abstract

The utility model relates to the technical field of chip testing equipment, and discloses a chip testing device, which comprises a case, an objective table is movably mounted in the case, a display is fixedly mounted on the case, a probe mechanism is further arranged on the case, the probe mechanism comprises a mounting seat, an X / Y-direction adjusting platform is movably mounted on the mounting seat, and the X / Y-direction adjusting platform is fixedly mounted on the X / Y-direction adjusting platform. A Z-direction adjusting platform is movably installed on one side of the X / Y-direction adjusting platform, and a fixing rod, an adjusting rod and an adjusting seat are arranged on one side of the Z-direction adjusting platform. A fixing rod, an adjusting rod and an adjusting seat are arranged on one side of a Z-direction adjusting platform, the fixing rod, the adjusting rod and the adjusting seat are connected through corresponding connecting hollow balls, the position of the tail end of a probe can be rapidly adjusted in a large progress, and an air bag, an adjusting screw rod, an expansion balloon, a first connecting pipe, a second connecting pipe and a T-shaped through groove are matched; angles of the adjusting rod and the adjusting seat are rapidly fixed, operation convenience is improved, and therefore convenience of large-process position adjustment of the probe is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip testing equipment, in particular to a chip testing device. Background Art

[0002] During the chip manufacturing process, tiny defects or performance deviations may cause the entire chip to fail. The probe station can accurately contact the test points of the chip through one or more sets of probes to ensure accurate transmission of test signals, thereby identifying potential problems in the chip.

[0003] The probe station is multifunctional and can meet the needs of different chip tests, such as the Chinese utility model patent disclosed by publication number CN221782319U: a chip testing device, which is provided with a loading mechanism, which is provided with a spring buffer rod and a bearing seat. When the test pin contacts the chip pin, the spring buffer rod on the lower side of the bearing seat will be squeezed, thereby changing the rigid contact into a flexible contact and reducing the damage to the chip pin. However, when the chip is contacted by the test pin, that is, the probe of the existing probe station, the pin or contact position of the chip of different models is different. Therefore, it is necessary to adjust the use position of the probe to ensure that it can contact the pin or contact of the chip normally. The existing probe installation and adjustment mechanism is provided with a multi-directional adjustment platform, so that the position of the probe end can be adjusted by rotating the corresponding adjustment bolt. Therefore, the use position adjustment process of the probe becomes time-consuming. Utility Model Content

[0004] The purpose of the utility model is to provide a chip testing device, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A chip testing device comprises a chassis, in which a stage is movably mounted, a display is fixedly mounted on the chassis, a probe mechanism is also arranged on the chassis, the probe mechanism comprises a mounting seat, an X / Y adjustment platform is movably mounted on the mounting seat, a Z adjustment platform is movably mounted on one side of the X / Y adjustment platform, a fixing rod, an adjusting rod and an adjusting seat are arranged on one side of the Z adjustment platform, a supporting plate is fixedly mounted on the lower end of the fixing rod, and a side of the supporting plate away from the fixing rod is fixedly mounted on one side of the Z adjustment platform, a connecting hollow ball is movably connected between the fixing rod and the adjusting rod, a connecting hollow ball is also movably connected between the adjusting rod and the adjusting seat, a needle plate is fixedly mounted on one side of the adjusting seat, and a probe is fixedly mounted in the needle plate.

[0007] As a further preferred embodiment of the present invention, a first slide groove and a second slide groove are respectively provided on the outer side of the connecting hollow ball, and the first slide groove and the second slide groove are provided crosswise, two T-shaped through grooves are provided on the inner side of the first slide groove, and two T-shaped through grooves are also provided on the inner side of the second slide groove, that is, the first slide groove and the second slide groove are respectively connected to the inner cavity of the connecting hollow ball through the inner T-shaped through grooves.

[0008] As a further preferred solution of the present invention, the connecting hollow balls located at the two intersections of the first chute and the second chute are provided with cross tube grooves;

[0009] Based on this, by setting the connecting hollow ball, conditions can be provided for the multi-directional rotation connection between the fixed rod and the adjusting rod, and between the adjusting rod and the adjusting seat.

[0010] As a further preferred embodiment of the present invention, a T-shaped block is inserted and installed in the T-shaped through groove, and a rubber layer is coated on the outer side of the T-shaped block.

[0011] As a further preferred embodiment of the present invention, a slider is fixedly mounted on one side of the fixed rod relative to the adjusting rod, and a communicating straight-through groove is formed between the fixed rod and the slider on one side of the fixed rod, sliders are fixedly mounted on both sides of the adjusting rod, and a slider is fixedly mounted on one side of the adjusting seat, the slider on one side of the fixed rod is rotatably mounted in one of the first slide grooves connected to the hollow ball, the sliders on both sides of the adjusting rod are rotatably mounted in two second slide grooves connected to the hollow ball, and the slider on one side of the adjusting seat is also rotatably mounted in one of the first slide grooves connected to the hollow ball;

[0012] Based on this, the fixing rod, the adjusting rod and the adjusting seat are rotatably connected to each other through the connecting hollow ball, so that the adjusting seat can drive the needle plate and the probe to adjust the use position in multiple directions and quickly.

[0013] As a further preferred solution of the utility model, an airbag is inserted and installed in the fixing rod, and an adjusting screw is threadedly connected in the fixing rod near the airbag.

[0014] As a further preferred embodiment of the present invention, expansion balloons are respectively inserted into the two connected hollow balls, a first connecting tube is fixedly connected between the two expansion balloons, the first connecting tube passes through the through hole in the adjusting rod, and one of the expansion balloons is also connected to the airbag through a second connecting tube;

[0015] Based on this, the cavities of the two expansion balloons are connected through a first connecting tube, and the airbag is connected to the two expansion balloon cavities through a second connecting tube, so that the two expansion balloons can be inflated synchronously in conjunction with the adjusting screw, thereby causing the T-shaped block to displace and squeeze the inner side of the slider to fix the angles of the fixing rod, the adjusting rod and the adjusting seat.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] In the utility model, a fixing rod, an adjusting rod and an adjusting seat are arranged on one side of the Z-axis adjustment platform, and the fixing rod, the adjusting rod and the adjusting seat are connected to each other through corresponding connecting hollow balls, so that the position of the probe end can be quickly adjusted in a large process, and the airbag, the adjusting screw, the expansion balloon, the first connecting tube and the second connecting tube and the T-shaped through groove can be used to quickly fix the angle of the adjusting rod and the adjusting seat, thereby improving the convenience of operation and thus improving the convenience of adjusting the position of the probe in a large process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the main structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the probe mechanism structure of the utility model;

[0020] Figure 3 This is a cross-sectional view of the fixed rod, the adjusting rod, the adjusting seat, and the connecting hollow ball of the utility model;

[0021] Figure 4 It is a schematic diagram of the connection structure of the fixed rod, the adjusting rod, the adjusting seat and the connecting hollow ball of the utility model;

[0022] Figure 5 This is a schematic diagram of the structure of the connected hollow balls of the utility model;

[0023] Figure 6 for Figure 3 Enlarged view of point A in the middle.

[0024] In the figure: 1. chassis; 2. stage; 3. display; 4. probe mechanism; 5. mounting seat; 6. X / Y adjustment platform; 7. Z adjustment platform; 8. fixing rod; 9. adjustment rod; 10. adjustment seat; 11. connecting hollow ball; 12. needle plate; 13. probe; 14. support plate; 15. first slide groove; 16. second slide groove; 17. T-shaped through groove; 18. cross tube groove; 19. T-shaped block; 20. slider; 21. airbag; 22. adjusting screw; 23. expansion balloon; 24. first connecting tube; 25. second connecting tube. DETAILED DESCRIPTION

[0025] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0026] like Figure 1-Figure 6As shown, a chip testing device provided by the utility model includes a chassis 1, a stage 2 is movably installed in the chassis 1, a display 3 is fixedly installed on the chassis 1, a probe mechanism 4 is also arranged on the chassis 1, the probe mechanism 4 includes a mounting seat 5, an X / Y adjustment platform 6 is movably installed on the mounting seat 5, a Z adjustment platform 7 is movably installed on one side of the X / Y adjustment platform 6, a fixing rod 8, an adjusting rod 9 and an adjusting seat 10 are arranged on one side of the Z adjustment platform 7, a support plate 14 is fixedly installed on the lower end of the fixing rod 8, and the side of the support plate 14 away from the fixing rod 8 is fixedly installed on one side of the Z adjustment platform 7, a connecting hollow ball 11 is movably connected between the fixing rod 8 and the adjusting rod 9, and a connecting hollow ball 11 is also movably connected between the adjusting rod 9 and the adjusting seat 10, a needle plate 12 is fixedly installed on one side of the adjusting seat 10, and a probe 13 is fixedly installed in the needle plate 12.

[0027] like Figure 2-Figure 6As shown, the outer side of the connecting hollow ball 11 is respectively provided with a first slide groove 15 and a second slide groove 16, and the first slide groove 15 and the second slide groove 16 are cross-opened, the inner side of the first slide groove 15 is provided with two T-shaped through grooves 17, and the inner side of the second slide groove 16 is also provided with two T-shaped through grooves 17, that is, the first slide groove 15 and the second slide groove 16 are respectively connected to the inner cavity of the connecting hollow ball 11 through the inner T-shaped through grooves 17, and the connecting hollow ball 11 located at the two intersections of the first slide groove 15 and the second slide groove 16 is provided with a cross pipe groove 18. Through the setting of the connecting hollow ball 11, the fixing rod 8 and the adjusting rod 8 can be provided. Rod 9, the multi-directional rotation connection between the adjusting rod 9 and the adjusting seat 10 provides conditions, a T-shaped block 19 is inserted and installed in the T-shaped through groove 17, and the outer side of the T-shaped block 19 is coated with a rubber layer. The fixed rod 8 is fixedly installed with a slider 20 on one side relative to the adjusting rod 9, and the fixed rod 8 and the slider 20 on one side thereof are provided with a communicating straight-through groove, the sliders 20 are also fixedly installed on both sides of the adjusting rod 9, and the slider 20 is also fixedly installed on one side of the adjusting seat 10. The slider 20 on one side of the fixed rod 8 is rotatably installed in one of the first slide grooves 15 connected to the hollow ball 11, and the sliders 20 on both sides of the adjusting rod 9 are respectively rotated The slide block 20 on one side of the adjusting seat 10 is also rotatably installed in the first slide groove 15 of one of the hollow balls 11. The fixing rod 8, the adjusting rod 9, and the adjusting seat 10 are rotatably connected to each other through the hollow balls 11, so that the adjusting seat 10 can drive the needle plate 12 and the probe 13 to adjust the position in multiple directions and quickly. The airbag 21 is inserted in the fixing rod 8, and the adjusting screw 22 is also threadedly connected near the airbag 21 in the fixing rod 8. The expansion balloons 23 are respectively inserted in the two connected hollow balls 11. The two expansion balloons A first connecting tube 24 is fixedly connected between 23, and the first connecting tube 24 passes through the through hole in the adjusting rod 9. One of the expansion balloons 23 is also connected to the airbag 21 through a second connecting tube 25, so that the cavities of the two expansion balloons 23 are connected through the first connecting tube 24, and the airbag 21 is connected to the cavities of the two expansion balloons 23 through the second connecting tube 25, so that the two expansion balloons 23 can be inflated synchronously with the adjusting screw 22, so that the T-shaped block 19 is displaced and squeezed on the inner side of the slider 20 to fix the angle of the fixed rod 8, the adjusting rod 9 and the adjusting seat 10.

[0028] It should be noted that the utility model is a chip testing device. When the end position of the probe 13 is adjusted over a long process, the adjustment seat 10 can be clamped manually or with tools such as tweezers, and then the position of the end of the probe 13 can be adjusted by dragging the adjustment seat 10. That is, when dragging the probe 13, the slider 20 on one side of the adjustment seat 10 rotates in the first slide groove 15 corresponding to the connected hollow ball 11 to adjust the X-axis angle. At the same time, the adjustment seat 10 cooperates with the hollow ball 11 connected to the adjustment rod 9 to drive the slider 20 on the other side of the adjustment rod 9 to rotate in the second slide groove 16 corresponding to the connected hollow ball 11, thereby adjusting the Y-axis angle adjustment of the adjustment seat 10, so that the adjustment seat 10, the adjustment rod 9 and the fixed rod 8 cooperate with each other to connect the hollow ball 11 to achieve multi-directional angle adjustment, and with the help of the friction between the slider 20 and the first slide groove 15 or the second slide groove 16 The friction force realizes the real-time limiting of the angle. When the end of the needle plate 12 is adjusted to the desired position, the adjusting screw 22 can be rotated, so that the adjusting screw 22 rotates in the fixed rod 8 toward the airbag 21, and then the adjusting screw 22 compresses the airbag 21. Then, the gas in the airbag 21 is injected into one of the expansion balloons 23 through the second connecting tube 25, so that the expansion balloon 23 can transport the gas to the other expansion balloon 23 with the help of the first connecting tube 24, and then the two expansion balloons 23 expand and respectively support the multiple T-shaped blocks 19 in one of the hollow balls 11, so that the T-shaped through groove 17 is squeezed on the slider 20 relative to one side of the slider 20, and the angle fixation of the adjusting rod 9 and the adjusting seat 10 can be completed. Then, the end position of the probe 13 can be fine-tuned again through the X / Y adjustment platform 6 and the Z adjustment platform 7.

[0029] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A chip testing device, characterized in that: The invention comprises a chassis (1), wherein a stage (2) is movably mounted in the chassis (1), a display (3) is fixedly mounted on the chassis (1), and a probe mechanism (4) is also arranged on the chassis (1), wherein the probe mechanism (4) comprises a mounting seat (5), an X / Y-axis adjustment platform (6) is movably mounted on the mounting seat (5), a Z-axis adjustment platform (7) is movably mounted on one side of the X / Y-axis adjustment platform (6), and a fixing rod (8), an adjustment rod (9) and an adjustment seat are arranged on one side of the Z-axis adjustment platform (7). (10), a support plate (14) is fixedly mounted on the lower end of the fixed rod (8), and the side of the support plate (14) away from the fixed rod (8) is fixedly mounted on the side of the Z-axis adjustment platform (7), a hollow ball (11) is movably connected between the fixed rod (8) and the adjustment rod (9), and a hollow ball (11) is also movably connected between the adjustment rod (9) and the adjustment seat (10), a needle plate (12) is fixedly mounted on one side of the adjustment seat (10), and a probe (13) is fixedly mounted inside the needle plate (12).

2. A chip testing device according to claim 1, characterized in that: The connecting hollow ball (11) is provided with a first slide groove (15) and a second slide groove (16) on the outside, and the first slide groove (15) and the second slide groove (16) are arranged crosswise, the first slide groove (15) is provided with two T-shaped through grooves (17) on the inside, and the second slide groove (16) is also provided with two T-shaped through grooves (17), that is, the first slide groove (15) and the second slide groove (16) are connected to the inner cavity of the connecting hollow ball (11) through the inner T-shaped through grooves (17).

3. A chip testing device according to claim 2, characterized in that: The connecting hollow balls (11) located at the two intersections of the first slide groove (15) and the second slide groove (16) are each provided with a cross tube groove (18).

4. A chip testing device according to claim 3, characterized in that: A T-shaped block (19) is inserted and installed in the T-shaped through groove (17), and a rubber layer is coated on the outer side of the T-shaped block (19).

5. A chip testing device according to claim 4, characterized in that: A slider (20) is fixedly mounted on one side of the fixed rod (8) relative to the adjusting rod (9), and a communicating straight-through groove is formed between the fixed rod (8) and the slider (20) on one side thereof. Slide blocks (20) are also fixedly mounted on both sides of the adjusting rod (9), and a slider (20) is also fixedly mounted on one side of the adjusting seat (10). The slider (20) on one side of the fixed rod (8) is rotatably mounted in one of the first slide grooves (15) connected to the hollow ball (11), and the sliders (20) on both sides of the adjusting rod (9) are respectively rotatably mounted in two second slide grooves (16) connected to the hollow balls (11). The slider (20) on one side of the adjusting seat (10) is also rotatably mounted in one of the first slide grooves (15) connected to the hollow balls (11).

6. A chip testing device according to claim 1, characterized in that: An air bag (21) is inserted into the fixing rod (8), and an adjusting screw (22) is threadedly connected to the fixing rod (8) near the air bag (21).

7. A chip testing device according to claim 6, characterized in that: An expansion balloon (23) is inserted into each of the two connected hollow balls (11), and a first connection tube (24) is fixedly connected between the two expansion balloons (23). The first connection tube (24) passes through a through hole in the adjustment rod (9), and one of the expansion balloons (23) is also connected to the airbag (21) via a second connection tube (25).

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