Surface defect detection device
By designing a surface defect detection device including a first detector and a second detector, the double-sided simultaneous detection of wafer surface defects in the semiconductor manufacturing process is achieved, which solves the problems of low detection efficiency and secondary pollution, and improves efficiency. detection efficiency and reduces the risk of contamination.
Patent Information
- Application Number
- CN202420898413.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-26
- Publication Date
- 2025-01-24
- Estimated Expiration
- 2034-04-26
AI Technical Summary
In the prior art, wafer surface defect detection efficiency is low during semiconductor manufacturing, and secondary contamination of wafer surface is easily caused when detecting the second surface.
Design a surface defect detection device, including a mounting platform, a placing platform, a first detector and a second detector. The first detector is used to detect surface defects on the first surface of the product to be inspected, and the second detector is used to detect surface defects on the second surface of the product to be inspected that is opposite to the first surface. This device improves detection efficiency and reduces the risk of secondary contamination through simultaneous detection on both sides.
The double -sided detection of the products to be detected, improved the detection efficiency, and avoided the steps that have been tested on the first surface and remove the glue film layer when detecting the second surface, thereby reducing the secondary time Pollution problem.
Smart Images
Figure CN222394771U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a surface defect detection device. Background Art
[0002] During the semiconductor manufacturing process, the wafer undergoes a series of semiconductor manufacturing processes to form a tiny circuit structure, and then is cut, packaged, and tested to form a chip. Usually, the wafer will go through multiple processes such as photolithography, etching, deposition, ion implantation, diffusion, and polishing.
[0003] After each process, it is inevitable that defects such as foreign matter, scratches, and missing parts may be introduced into the corresponding layer of the wafer surface. In the manufacturing process, the wafer surface is inspected to detect the above defects in time and identify the types of defects, which is of great significance for finding the causes of defects and controlling the quality of finished products. The commonly used method for wafer surface defect detection is to place the wafer on an electron microscope stage, scan the surface defects on one surface of the wafer with an electron microscope, flip the wafer, and scan the surface defects on the other side of the wafer again (when scanning the other side of the wafer, the film layer needs to be used to protect the surface of the wafer that has been scanned). However, this defect detection method has problems such as low scanning efficiency and easy secondary contamination of the wafer surface when the film layer on the wafer surface is subsequently removed. Utility Model Content
[0004] The purpose of the utility model is to provide a surface defect detection device, which can improve the detection efficiency and improve the secondary contamination problem that may exist in the surface defect detection of wafers in the prior art.
[0005] The embodiment of the utility model is achieved as follows:
[0006] In one aspect of the utility model, a surface defect detection device is provided, which includes a mounting table, a placement table connected to the mounting table, a first detector, and a second detector arranged between the mounting table and the placement table; the placement table is used to place the product to be detected, the first detector is used to detect surface defects on the first surface of the product to be detected, and the second detector is used to detect surface defects on the second surface of the product to be detected opposite to the first surface. The surface defect detection device can improve the detection efficiency and can improve the secondary contamination problem that may exist in the wafer during surface defect detection in the prior art.
[0007] Optionally, the first detector and the second detector are respectively arranged on two opposite sides of the product to be detected, the first surface of the product to be detected is located in the detection area of the first detector, and the second surface of the product to be detected is located in the detection area of the second detector.
[0008] Optionally, the first surface and the second surface of the product to be detected both include a first area and a second area, the first area of the first surface corresponds to the first area of the second surface, and the second area of the first surface corresponds to the second area of the second surface; the product to be detected is driven to rotate so that the first area of the first surface corresponds to the detection area of the first detector, and the first area of the second surface corresponds to the second detector; or the second area of the first surface corresponds to the detection area of the first detector, and the second area of the second surface corresponds to the second detector.
[0009] Optionally, the first detector is disposed on one side of the placement table, and the first detector and the second detector are vertically disposed.
[0010] Optionally, the surface defect detection device further includes a detection platform, and the first detector and the second detector are respectively connected to the detection platform.
[0011] Optionally, the surface defect detection device further includes a base, the mounting platform is connected to the base, and the detection platform is rotatably connected to the base.
[0012] Optionally, a first matching structure is provided on a side of the placement table close to the mounting table, and a second matching structure is provided on a side of the mounting table close to the placement table, and the first matching structure and the second matching structure are plug-in connected.
[0013] Optionally, the mounting platform is rotatably connected to the base.
[0014] Optionally, a reflection cavity is provided on the mounting platform, and the reflection cavity is located on a side of the mounting platform close to the placement platform, and the reflection cavity is used to reflect a reflected light beam reflected by the product to be detected to the mounting platform.
[0015] Optionally, a placement groove is provided on a side of the placement table facing away from the installation table, and the placement groove is used to place the product to be tested.
[0016] The beneficial effects of the utility model include:
[0017] The surface defect detection device provided by the present application includes a mounting table, a placement table connected to the mounting table, a first detector, and a second detector arranged between the mounting table and the placement table; the placement table is used to place the product to be detected, the first detector is used to detect the surface defects of the first surface of the product to be detected, and the second detector is used to detect the surface defects of the second surface of the product to be detected opposite to the first surface. The present application sets the first detector and the second detector, so that the first detector can perform surface defect detection on the first surface of the product to be detected, and the second detector can perform surface defect detection on the second surface of the product to be detected, that is, the present application can realize the simultaneous detection of both sides of the product to be detected, so that, on the one hand, the present application can improve the detection efficiency of the product to be detected; on the other hand, the present application does not need to paste a film layer on the first surface that has been detected when detecting the second surface of the product to be detected, and remove the film layer on the first surface after the second surface detection is completed. Therefore, compared with the prior art, the present application can improve the secondary contamination problem that may exist in the prior art when the product to be detected is detected. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0019] Figure 1 One of the structural schematic diagrams of the surface defect detection device provided by the embodiment of the utility model;
[0020] Figure 2 A second structural schematic diagram of a surface defect detection device provided by an embodiment of the utility model;
[0021] Figure 3 A schematic diagram of the structure of a base provided in an embodiment of the utility model;
[0022] Figure 4 A schematic diagram of the structure of the mounting platform provided by the embodiment of the utility model;
[0023] Figure 5 A schematic diagram of the structure of a first detector, a second detector and a detection platform provided in an embodiment of the utility model;
[0024] Figure 6 A schematic structural diagram of a placement table provided in an embodiment of the utility model.
[0025] Icons: 10-mounting table; 11-second matching structure; 12-reflection cavity; 13-third groove; 20-placing table; 21-first matching structure; 22-placing groove; 23-through groove; 30-first detector; 40-second detector; 50-product to be detected; 60-detection table; 70-base; 71-first groove; 72-connecting shaft; 73-second groove. DETAILED DESCRIPTION
[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0028] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0029] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0030] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0031] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0032] Please refer to Figure 1 and Figure 2 The present embodiment provides a surface defect detection device, which includes a mounting table 10, a placement table 20 connected to the mounting table 10, a first detector 30, and a second detector 40 disposed between the mounting table 10 and the placement table 20; the placement table 20 is used to place a product 50 to be detected, the first detector 30 is used to detect surface defects on a first surface of the product 50 to be detected, and the second detector 40 is used to detect surface defects on a second surface of the product 50 to be detected that is opposite to the first surface. The surface defect detection device can improve detection efficiency and improve the secondary contamination problem that may exist in wafer surface defect detection in the prior art.
[0033] The mounting table 10 is used to mount the placement table 20 , and the placement table 20 is used to place and fix the product to be inspected 50 . In the present embodiment, the product to be inspected 50 may be a wafer.
[0034] In addition, the present application further includes a first detector 30 and a second detector 40, wherein the first detector 30 is used to detect surface defects on the first surface of the product to be detected 50, and the second detector 40 is used to detect surface defects on the second surface of the product to be detected 50. The first surface and the second surface are two opposite surfaces of the product to be detected 50, that is, if the first surface is the front side of the product to be detected 50, the second surface is the back side of the product to be detected 50; if the first surface is the back side of the product to be detected 50, the second surface is the front side of the product to be detected 50.
[0035] In this embodiment, the second detector 40 is disposed between the placement table 20 and the mounting table 10 , so that the side of the product 50 to be inspected close to the mounting table 10 can be inspected.
[0036] It should be understood that the placement table 20 should be provided with a through groove 23, such as Figure 2 and Figure 6 As shown, when the product 50 to be inspected is placed on the placement table 20, a side of the product 50 to be inspected close to the mounting table 10 can be exposed from the through groove 23, thereby facilitating the second detector 40 to perform surface defect detection thereon.
[0037] In addition, it should be noted that, in this embodiment, the first detector 30 and the second detector 40 can be configured to emit a detection beam to the surface of the product to be detected 50 corresponding to the surface thereof, and receive a reflected beam emitted by the surface of the product to be detected 50, thereby obtaining surface defect information of the corresponding surface by analyzing the reflected beam. In other words, the first detector 30 can emit a detection beam to the first surface of the product to be detected 50, and receive a reflected beam reflected by the first surface of the product to be detected 50, thereby obtaining surface defect information of the first surface by analyzing the reflected beam; the detection method of the second detector 40 is similar, and will not be described in detail here.
[0038] In summary, the surface defect detection device provided in the present application includes a mounting table 10, a placement table 20 connected to the mounting table 10, a first detector 30, and a second detector 40 arranged between the mounting table 10 and the placement table 20; the placement table 20 is used to place the product to be inspected 50, the first detector 30 is used to detect surface defects on the first surface of the product to be inspected 50, and the second detector 40 is used to detect surface defects on the second surface of the product to be inspected 50 opposite to the first surface. The present application sets up a first detector 30 and a second detector 40, so that the first detector 30 can perform surface defect detection on the first surface of the product 50 to be detected, and the second detector 40 can perform surface defect detection on the second surface of the product 50 to be detected, that is, the present application can realize simultaneous double-sided detection of the product 50 to be detected. In this way, on the one hand, the present application can improve the detection efficiency of the product 50 to be detected; on the other hand, the present application does not need to affix a film layer to the first surface that has been detected when detecting the second surface of the product 50 to be detected, and then remove the film layer on the first surface after the second surface detection is completed. Therefore, compared with the prior art, the present application can improve the secondary contamination problem that may exist in the prior art when detecting the surface defects of the product 50 to be detected.
[0039] It should be noted that the present application does not limit the detection method of the first detector 30 and the second detector 40. For example, in a first feasible implementation method, the first detector 30 and the second detector 40 are respectively arranged on two opposite sides of the product to be detected 50 (not shown in the figure), and the first surface of the product to be detected 50 is located in the detection area of the first detector 30, and the second surface of the product to be detected 50 is located in the detection area of the second detector 40.
[0040] The first surface of the product to be detected 50 is located in the detection area of the first detector 30. Thus, in this implementation, the first detector 30 can perform front detection on the first surface of the product to be detected 50.
[0041] The second surface of the product 50 to be detected is located in the detection area of the second detector 40 , so that the second detector 40 can perform front detection on the second surface of the product 50 to be detected.
[0042] The present application adopts this implementation method to perform double-sided inspection on the product 50 to be inspected at one time, which has higher inspection efficiency.
[0043] In the second possible implementation, Figure 1 and Figure 2 The first surface and the second surface of the product 50 to be detected both include a first area and a second area, the first area of the first surface corresponds to the first area of the second surface, and the second area of the first surface corresponds to the second area of the second surface; the product 50 to be detected is driven to rotate so that the first area of the first surface corresponds to the detection area of the first detector 30, and the first area of the second surface corresponds to the second detector 40; or the second area of the first surface corresponds to the detection area of the first detector 30, and the second area of the second surface corresponds to the second detector 40.
[0044] It should be noted that the first surface of the product to be detected 50 is divided into a first area and a second area, and the second surface of the product to be detected 50 is also divided into a first area and a second area. The first area of the first surface of the product to be detected 50 and the first area of the second surface of the product to be detected 50 are arranged correspondingly, and the second area of the first surface of the product to be detected 50 and the second area of the second surface of the product to be detected 50 are arranged symmetrically.
[0045] The areas of the first region and the second region may be the same or different, and this application does not impose any limitation on this.
[0046] The product to be inspected 50 of the present application can be driven so that the first area of the first surface corresponds to the detection area of the first detector 30, and the first area of the second surface corresponds to the second detector 40; or, the second area of the first surface corresponds to the detection area of the first detector 30, and the second area of the second surface corresponds to the second detector 40. That is to say, in this embodiment, the product to be inspected 50 is driven to rotate so that the first areas of the first surface and the second surface corresponding to each other correspond to the detection areas of the first detector 30 and the second detector 40, respectively, so that each time the product to be inspected 50 is driven to rotate once, a part of the area of the product to be inspected 50 can be inspected for surface defects.
[0047] In this way, after the surface defect detection of the first surface and the first area of the second surface of the product 50 to be detected is completed, the first surface and the second area of the second surface of the product 50 to be detected are driven to correspond to the first detector 30 and the second detector 40 respectively, and the surface defect detection of the second area of the product 50 to be detected can be performed again. In short, in the second feasible implementation method, the product 50 to be detected is divided into the first area and the second area for surface defect detection. In this way, compared with the method of sticking the adhesive film layer in the prior art, the detection efficiency can still be improved and the secondary pollution problem can be improved.
[0048] In addition, it should be noted that in the second feasible implementation method, the driving of the product to be inspected 50 can be achieved by driving the placement table 20 to rotate relative to the mounting table 10, or by driving the mounting table 10 to rotate along its central axis, or by driving the product to be inspected 50 to rotate relative to the placement table 20. This application does not impose any specific restrictions on this.
[0049] In a second possible implementation, optionally, as Figure 1 and Figure 2 As shown, the first detector 30 is disposed on one side of the placement table 20, and the first detector 30 and the second detector 40 are disposed vertically. In this way, the height of the surface defect detection device can be reduced and the volume can be miniaturized.
[0050] To facilitate the fixing of the first detector 30 and the second detector 40, optionally, please refer to Figure 2 and Figure 5 The surface defect detection device also includes a detection platform 60, and the first detector 30 and the second detector 40 are respectively connected to the detection platform 60.
[0051] Please refer to Figure 2 and Figure 3 Optionally, the surface defect detection device further includes a base 70, the mounting table 10 is connected to the base 70, and the detection table 60 is rotatably connected to the base 70. In this way, the detection table 60 can be driven to rotate relative to the base 70, so that the second detector 40 extends from between the placement table 20 and the mounting table 10, or moves out from between the placement table 20 and the mounting table 10.
[0052] It should be noted that a corresponding second groove 73 may be provided on the base 70, and one end of the detection platform 60 close to the base 70 is rotatably connected to the second groove 73, so that the detection platform 60 can be driven to rotate in the second groove 73 to realize the position movement of the second detector 40.
[0053] In order to enable the placement table 20 to be relatively fixed on the mounting table 10, optionally, a first matching structure 21 is provided on a side of the placement table 20 close to the mounting table 10, and a second matching structure 11 is provided on a side of the mounting table 10 close to the placement table 20, and the first matching structure 21 and the second matching structure 11 are pluggably connected.
[0054] It should be noted that the first matching structure 21 may be a protruding structure, and the second matching structure 11 may be a correspondingly grooved structure. Figure 2 As shown; or, the first matching structure 21 is a groove structure, and the second matching structure 11 is a convex structure accordingly.
[0055] To facilitate driving the product 50 to be detected to rotate, optionally, the mounting platform 10 is rotatably connected to the base 70. In this way, when it is necessary to drive the product 50 to be detected to rotate, it can be achieved by driving the mounting platform 10 to rotate on the base 70.
[0056] Please note that, please refer to Figure 3 and Figure 4 A first groove 71 and a connecting shaft 72 located in the first groove 71 may be provided on one side of the base 70 close to the mounting platform 10, and a third groove 13 may be provided on one side of the mounting platform 10 close to the base 70. The mounting platform 10 is at least partially accommodated in the first groove 71, and the connecting shaft 72 on the base 70 is located in the third groove 13 of the mounting platform 10.
[0057] Optionally, in this embodiment, a reflection cavity 12 may be further provided on the mounting platform 10, and the reflection cavity 12 is located on a side of the mounting platform 10 close to the placement platform 20, and the reflection cavity 12 is used to reflect the reflected light beam reflected by the product to be detected 50 to the mounting platform 10. In this way, the receiving rate of the second detector for the reflected light beam can be improved, and the detection accuracy of the second detector 40 can be improved.
[0058] To facilitate placing the product 50 to be tested on the placement table 20, optionally, please refer to Figure 6 A placement groove 22 is provided on a side of the placement table 20 facing away from the mounting table 10 , and the placement groove 22 is used to place the product 50 to be inspected.
[0059] In addition, the placement table 20 is also provided with a through groove 23 connected to the placement groove 22. The provision of the through groove 23 enables the second surface of the product 50 to be inspected to be exposed from the placement table 20, thereby facilitating surface defect detection by the second detector 40.
[0060] The above description is only an optional embodiment of the utility model and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
[0061] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present utility model will not further describe various possible combinations.
Claims
1. A surface defect detection device, characterized in that: The device comprises a mounting platform, a placing platform connected to the mounting platform, a first detector, and a second detector arranged between the mounting platform and the placing platform; the placing platform is used to place the product to be inspected, the first detector is used to detect surface defects on a first surface of the product to be inspected, and the second detector is used to detect surface defects on a second surface of the product to be inspected opposite to the first surface; The first surface and the second surface of the product to be detected both include a first area and a second area, the first area of the first surface corresponds to the first area of the second surface, and the second area of the first surface corresponds to the second area of the second surface; The product to be detected is driven to rotate so that the first area of the first surface corresponds to the detection area of the first detector, and the first area of the second surface corresponds to the second detector; or the second area of the first surface corresponds to the detection area of the first detector, and the second area of the second surface corresponds to the second detector.
2. The surface defect detection device according to claim 1, characterized in that: The first detector and the second detector are respectively arranged on two opposite sides of the product to be detected, the first surface of the product to be detected is located in the detection area of the first detector, and the second surface of the product to be detected is located in the detection area of the second detector.
3. The surface defect detection device according to claim 1, characterized in that: The first detector is disposed on one side of the placement table, and the first detector and the second detector are vertically disposed.
4. The surface defect detection device according to claim 1 or 3, characterized in that: The surface defect detection device also includes a detection platform, and the first detector and the second detector are respectively connected to the detection platform.
5. The surface defect detection device according to claim 4, characterized in that: The surface defect detection device also includes a base, the mounting platform is connected to the base, and the detection platform is rotatably connected to the base.
6. The surface defect detection device according to claim 5, characterized in that: A first matching structure is provided on a side of the placement platform close to the mounting platform, and a second matching structure is provided on a side of the mounting platform close to the placement platform. The first matching structure and the second matching structure are plug-in connected.
7. The surface defect detection device according to claim 6, characterized in that: The mounting platform is rotatably connected to the base.
8. The surface defect detection device according to claim 1, characterized in that: A reflection cavity is provided on the mounting platform, and the reflection cavity is located on a side of the mounting platform close to the placement platform. The reflection cavity is used to reflect a reflected light beam reflected by the product to be detected to the mounting platform.
9. The surface defect detection device according to claim 1, characterized in that: A placement groove is provided on a side of the placement platform facing away from the mounting platform, and the placement groove is used for placing the product to be detected.