Three-axis mobile magnetic field device and magnetron sputtering coating equipment

Abstract

The utility model discloses a three-axis moving magnetic field device and magnetron sputtering coating equipment, which comprises a first support plate, a second support plate, a third support plate, a vertical mounting bracket, a longitudinal mounting bracket, a transverse mounting bracket, a vertical moving mechanism, a longitudinal moving mechanism, a transverse moving mechanism and a magnetic boot component, under the driving of the vertical moving mechanism, the longitudinal moving mechanism and the transverse moving mechanism, the vertical, transverse and longitudinal movement of the magnetic shoe assembly is realized, so that the action range of a magnetic field can be changed, all areas on a target material can be bombarded by ions, the utilization rate of the target material is improved, and the sputtering efficiency is higher. And meanwhile, the positions of the first supporting plate, the second supporting plate, the third supporting plate, the vertical mounting bracket, the longitudinal mounting bracket, the transverse mounting bracket, the vertical moving mechanism, the longitudinal moving mechanism and the transverse moving mechanism are reasonably arranged, so that the size of the three-axis moving magnetic field device is reduced, the three-axis moving magnetic field device is more miniaturized, and the occupied space during mounting is small.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a three-axis moving magnetic field device and magnetron sputtering coating equipment. Background Art

[0002] Magnetron sputtering is a type of physical vapor deposition. Magnetron sputtering technology can be used to prepare a variety of materials such as metals, semiconductors and insulators. It has the advantages of simple equipment, easy control, large coating area and strong adhesion.

[0003] The working principle of magnetron sputtering is that electrons collide with argon atoms in the process of flying to the substrate under the action of the electric field, ionizing them to produce Ar positive ions and new electrons. The new electrons fly to the substrate, and the Ar ions are accelerated to fly to the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to sputter. In magnetron sputtering, a magnetic field is usually introduced on the cathode surface of the target, and the neutral target atoms or molecules in the sputtered particles are deposited on the substrate to form a thin film, and the secondary electrons generated will be bound in the plasma region close to the target surface under the action of the electric and magnetic fields, and a large number of argon ions are ionized in this region to bombard the target material, thereby increasing the deposition rate.

[0004] However, in the existing magnetron cathode device, the magnetic circuit assembly is generally arranged on the back of the target material, and the relative position of the magnetic circuit assembly and the target material is fixed, that is, the range of action of the magnetic field remains unchanged, resulting in some areas on the target material cannot be bombarded by ions, which greatly reduces the utilization rate of the target material and the sputtering efficiency is low. Utility Model Content

[0005] The main technical problem solved by the utility model is to provide a three-axis moving magnetic field device and a magnetron sputtering coating device, so as to solve the problems that the action range of the magnetic field in the existing magnetron cathode device is unchanged, the utilization rate of the target material is low, and the sputtering efficiency is low.

[0006] In order to solve the above technical problems, a technical solution adopted by the utility model is to provide a three-axis moving magnetic field device, including a first support plate, a second support plate, a third support plate, a vertical mounting bracket, a longitudinal mounting bracket, a transverse mounting bracket, a vertical moving mechanism, a longitudinal moving mechanism, a transverse moving mechanism and a magnetic shoe assembly.

[0007] The vertical mounting bracket is arranged on the lower side of the first support plate, the vertical moving mechanism is arranged on the vertical mounting bracket, an opening is arranged in the middle of the first support plate for the second support plate to extend out, the vertical moving mechanism extends upward to connect the longitudinal mounting bracket, and the vertical moving mechanism is used to drive the longitudinal mounting bracket to move vertically.

[0008] The longitudinal mounting bracket is arranged on the lower side of the second support plate, the longitudinal driving member of the longitudinal moving mechanism is arranged on the longitudinal mounting bracket, the longitudinal transmission assembly of the longitudinal moving mechanism is arranged on the upper side of the second support plate, the longitudinal driving member is connected to the longitudinal transmission assembly, and the longitudinal transmission assembly is connected to the third support plate located on the upper side for driving the third support plate to move longitudinally.

[0009] The transverse mounting bracket is arranged on the side end of the third support plate, the transverse driving member of the transverse moving mechanism is arranged on the transverse mounting bracket, the transverse transmission assembly of the transverse moving mechanism is arranged on the third support plate, the transverse driving member is connected to the transverse transmission assembly, and the transverse transmission assembly is connected to the magnetic shoe assembly located on the upper side for driving the magnetic shoe assembly to move laterally.

[0010] In some embodiments, the vertical mounting bracket includes a first vertical connecting portion, a second vertical connecting portion and a vertical mounting portion, the first vertical connecting portion and the second vertical connecting portion are vertically symmetrically arranged and are respectively connected to both sides of the opening, the vertical mounting portion is laterally arranged at the lower side of the first vertical connecting portion and the second vertical connecting portion, and the vertical mounting portion is used to set a vertical moving mechanism.

[0011] In some embodiments, the first vertical connecting portion and the second vertical connecting portion both include a connecting sub-portion, an inner folding portion and an extension sub-portion. The connecting sub-portion is vertically arranged, the connecting sub-portion is used to connect the first support plate, the inner folding portion is laterally connected to the lower end of the connecting sub-portion, and the extension sub-portion is vertically connected to the inner end of the inner folding portion.

[0012] In some embodiments, the vertical moving mechanism includes a vertical driving member, a gear, a rack and a guide assembly. The vertical driving member is arranged on the vertical mounting portion, the gear is sleeved on the output shaft of the vertical driving member, the gear is meshed with the rack, the rack is vertically arranged, the upper part of the rack is fixedly connected to the longitudinal mounting bracket, and the longitudinal mounting bracket is connected to the second support plate; the guide assembly includes a guide slider and a guide rail, the guide slider is arranged on the side of the second support plate, the guide rail is arranged on the inner side of the first support plate, and the guide slider can slide vertically along the guide rail.

[0013] In some embodiments, the longitudinal mounting bracket includes a longitudinal connecting portion and a longitudinal mounting portion, the longitudinal connecting portion is arranged on the lower side of the second support plate, the longitudinal mounting portion is vertically connected to the end of the longitudinal connecting portion, and the longitudinal mounting portion is used to set the longitudinal driving member.

[0014] In some embodiments, a through hole is provided in the middle of the longitudinal mounting portion, a fixing plate is provided on the outer side of the longitudinal mounting portion, the size of the fixing plate is larger than the through hole, a height adjustment hole is provided on the fixing plate, a screw hole is provided at a corresponding position of the longitudinal mounting portion, the vertical length of the height adjustment hole is larger than the screw hole, the longitudinal mounting portion is connected to the fixing plate by bolts, a bottom support plate is provided at the lower end of the longitudinal mounting portion, a support nut is provided on the bottom support plate, and the support nut is used to support the bottom of the fixing plate.

[0015] In some embodiments, the longitudinal moving mechanism includes a longitudinal driving member, a longitudinal transmission assembly and an auxiliary moving assembly. The longitudinal driving member is arranged on a longitudinal mounting bracket. The longitudinal transmission assembly includes a longitudinal screw fixing seat, a longitudinal screw, and a longitudinal moving seat. The longitudinal screw fixing seat is arranged on a second support plate. The longitudinal screw is installed on the longitudinal screw fixing seats on both sides. One end of the longitudinal screw extends out of the longitudinal screw fixing seat and is connected to the output shaft of the longitudinal driving member. The longitudinal moving seat sleeve is arranged on the longitudinal screw. The longitudinal moving seat is connected to the longitudinal screw in a spiral transmission manner. The upper end of the longitudinal moving seat is connected to the third support plate.

[0016] The auxiliary moving components are respectively arranged on both sides of the longitudinal transmission components, and the auxiliary moving components include an auxiliary fixed seat, a longitudinal sliding shaft and an auxiliary slider. The auxiliary fixed seat is arranged on the second support plate, the longitudinal sliding shaft is installed on the auxiliary fixed seat, the auxiliary slider is sleeved on the longitudinal sliding shaft, and the upper end of the auxiliary slider is connected to the third support plate.

[0017] In some embodiments, the transverse mounting bracket includes a transverse connecting portion and a transverse mounting portion. The transverse connecting portion is horizontally arranged, the transverse connecting portion is arranged at the lower end of the side of the third support plate, the transverse mounting portion extends upward along the outer end of the transverse connecting portion, and the transverse mounting portion is used to set the transverse driving member.

[0018] In some embodiments, the transverse transmission assembly includes a transverse fixed seat, a transverse screw rod, a transverse sliding shaft and a transverse movable seat. The transverse screw rod and two transverse sliding shafts are arranged on the transverse fixed seats on both sides. The transverse screw rod is installed in the middle of the transverse fixed seat. One end of the transverse screw rod extends out of the transverse fixed seat and is connected to the transverse driving member. The transverse sliding shafts are respectively installed on both sides of the upper part of the transverse fixed seat.

[0019] The transverse moving seat includes a sliding part and a transmission part. The upper end of the sliding part is connected to the magnetic shoe assembly. The transmission part is arranged on the lower middle side of the sliding part. Both sides of the sliding part are provided with axial holes adapted to the transverse sliding shaft. The transverse sliding shaft is passed through the axial holes. The transmission part is provided with a screw rod mounting hole adapted to the transverse screw rod. The transverse screw rod is passed through the screw rod mounting hole.

[0020] Based on the same inventive concept, the utility model also provides a magnetron sputtering coating device, including the above-mentioned three-axis moving magnetic field device.

[0021] The beneficial effects of the utility model are as follows: first, by setting the vertical mounting bracket on the lower side of the first support plate, the vertical moving mechanism is set on the vertical mounting bracket and extends upward through the opening, and is connected to the longitudinal mounting bracket set on the lower side of the second support plate, thereby driving the longitudinal mounting bracket to move vertically; the longitudinal driving member is set on the longitudinal mounting bracket, and the longitudinal driving member is connected to the longitudinal transmission assembly set on the upper side of the second support plate, and the longitudinal transmission assembly is connected to the third support plate, thereby driving the third support plate to move longitudinally; the transverse mounting bracket is set on the side end of the third support plate, and the transverse driving member is set on the transverse mounting bracket and connected to the transverse transmission assembly, and the transverse transmission assembly is connected to the magnetic shoe assembly, thereby driving the magnetic shoe assembly to move horizontally. Thus, driven by the vertical moving mechanism, the longitudinal moving mechanism and the transverse moving mechanism, the vertical, transverse and longitudinal movement of the magnetic shoe assembly is realized, thereby changing the range of action of the magnetic field, so that all areas on the target material can be bombarded by ions, improving the utilization rate of the target material, and the sputtering efficiency is higher. At the same time, the positions of the first support plate, the second support plate, the third support plate, the vertical mounting bracket, the longitudinal mounting bracket, the transverse mounting bracket, the vertical moving mechanism, the longitudinal moving mechanism and the transverse moving mechanism are reasonably arranged, which reduces the volume of the three-axis moving magnetic field device, makes it more miniaturized, and occupies less space during installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of an embodiment of the utility model;

[0023] Figure 2 It is a structural schematic diagram of a vertical moving mechanism of an embodiment of the utility model;

[0024] Figure 3 It is a structural schematic diagram of a vertical mounting bracket according to an embodiment of the utility model;

[0025] Figure 4 It is a structural schematic diagram of a longitudinal moving mechanism of an embodiment of the utility model;

[0026] Figure 5 It is a structural schematic diagram of a longitudinal transmission assembly of an embodiment of the utility model;

[0027] Figure 6 This is a schematic structural diagram of a longitudinal mounting bracket according to an embodiment of the utility model;

[0028] Figure 7 This is a structural schematic diagram of a longitudinal mounting bracket of an embodiment of the utility model from another perspective;

[0029] Figure 8 This is a schematic structural diagram of a lateral moving mechanism according to an embodiment of the utility model;

[0030] Fig. 9It is a structural schematic diagram of a transverse moving seat in one embodiment of the utility model. DETAILED DESCRIPTION

[0031] In order to facilitate the understanding of the present invention, the present invention is described in more detail below in conjunction with the accompanying drawings and specific embodiments. The accompanying drawings provide preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described in this specification. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0032] It should be noted that, unless otherwise defined, all technical and scientific terms used in this specification have the same meanings as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0033] For the description of the utility model, non-limiting Figure 1 The marks "front", "rear", "up", "down", "left" and "right" shown in the figure are used to facilitate the understanding of the embodiment and are not intended to limit the present invention. Among them, the front-to-back direction represents the longitudinal direction, the left-to-right direction represents the transverse direction, and the up-down direction represents the vertical direction.

[0034] Figure 1-Figure 9 An embodiment of the three-axis moving magnetic field device of the utility model is shown, including a first support plate 1, a second support plate 2, a third support plate 3, a vertical mounting bracket 4, a longitudinal mounting bracket 5, a transverse mounting bracket 6, a vertical moving mechanism 7, a longitudinal moving mechanism 8, a transverse moving mechanism 9 and a magnetic shoe assembly 10.

[0035] The areas of the first support plate 1, the second support plate 2 and the third support plate 3 decrease in sequence, and they are spaced a certain distance apart from each other and are all arranged horizontally, with the first support plate 1 being located at the bottom and the third support plate 3 being located at the top. The second support plate 2 is located between the first support plate 1 and the third support plate 3.

[0036] The vertical mounting bracket 4 is arranged on the lower side of the first support plate 1, and the vertical moving mechanism 7 is arranged on the vertical mounting bracket 4. An opening 11 for the second support plate 2 to extend out is arranged in the middle of the first support plate 1, and the vertical moving mechanism 7 extends upward to connect the longitudinal mounting bracket 5. The vertical moving mechanism 7 is used to drive the longitudinal mounting bracket 5 to move vertically.

[0037] The longitudinal mounting bracket 5 is arranged on the lower side of the second support plate 2, the longitudinal driving member 81 of the longitudinal moving mechanism 8 is arranged on the longitudinal mounting bracket 5, the longitudinal transmission assembly 82 of the longitudinal moving mechanism 8 is arranged on the upper side of the second support plate 2, the longitudinal driving member 81 is connected to the longitudinal transmission assembly 82, and the longitudinal transmission assembly 82 is connected to the third support plate 3 located on the upper side, for driving the third support plate 3 to move longitudinally.

[0038] The transverse mounting bracket 6 is arranged at the side end of the third support plate 3, the transverse driving member 91 of the transverse moving mechanism 9 is arranged on the transverse mounting bracket 6, the transverse transmission assembly 92 of the transverse moving mechanism 9 is arranged on the third support plate 3, the transverse driving member 91 is connected to the transverse transmission assembly 92, and the transverse transmission assembly 92 is connected to the magnetic shoe assembly 10 located on the upper side, and is used to drive the magnetic shoe assembly 10 to move laterally.

[0039] In the utility model, firstly, the vertical mounting bracket 4 is arranged on the lower side of the first support plate 1, the vertical moving mechanism 7 is arranged on the vertical mounting bracket 4 and extends upward through the opening 11, and is connected to the longitudinal mounting bracket 5 arranged on the lower side of the second support plate 2, thereby driving the longitudinal mounting bracket 5 to move vertically; the longitudinal driving member 81 is arranged on the longitudinal mounting bracket 5, and the longitudinal driving member 81 is connected to the longitudinal transmission assembly 82 arranged on the upper side of the second support plate 2, and the longitudinal transmission assembly 82 is connected to the third support plate 3, thereby driving the third support plate 3 to move longitudinally; the transverse mounting bracket 6 is arranged on the side end of the third support plate 3, and the transverse driving member 91 is arranged on the transverse mounting bracket 6 and connected to the transverse transmission assembly 92, and the transverse transmission assembly 92 is connected to the magnetic shoe assembly 10, thereby driving the magnetic shoe assembly 10 to move horizontally. Thus, under the drive of the vertical moving mechanism 7, the longitudinal moving mechanism 8 and the transverse moving mechanism 9, the vertical, transverse and longitudinal movement of the magnetic shoe assembly 10 is realized, so that the scope of action of the magnetic field can be changed, so that all areas on the target material can be bombarded by ions, the utilization rate of the target material is improved, and the sputtering efficiency is higher. At the same time, the positions of the first support plate 1, the second support plate 2, the third support plate 3, the vertical mounting bracket 4, the longitudinal mounting bracket 5, the transverse mounting bracket 6, the vertical moving mechanism 7, the longitudinal moving mechanism 8 and the transverse moving mechanism 9 are reasonably arranged, which reduces the volume of the three-axis moving magnetic field device, makes it more miniaturized, and occupies less space during installation.

[0040] In some embodiments, Figure 1-Figure 3As shown, the vertical mounting bracket 4 includes a first vertical connection portion 41, a second vertical connection portion 42 and a vertical mounting portion 43. The first vertical connection portion 41 and the second vertical connection portion 42 have the same structure and are vertically symmetrically arranged, respectively connected to the two sides of the opening 11. The upper ends of the first vertical connection portion 41 and the second vertical connection portion 42 are fixedly connected to the first support plate 1. The vertical mounting portion 43 is transversely arranged at the lower side of the first vertical connection portion 41 and the second vertical connection portion 42. The vertical mounting portion 43 is used to set the vertical moving mechanism 7. By arranging the vertical moving mechanism 7 on the vertical mounting portion 43, the upper half of the space between the first vertical connection portion 41 and the second vertical connection portion 42 can be reserved, so that the longitudinal driving member 81 can be accommodated between the first vertical connection portion 41 and the second vertical connection portion 42 when moving vertically, and the structure is more compact and occupies a smaller volume.

[0041] In some embodiments, Figure 3 As shown, the first vertical connection part 41 and the second vertical connection part 42 both include a connection sub-part 411, an inner folding part 412 and an extension sub-part 413. The connection sub-part 411 is vertically arranged, and the connection sub-part 411 is used to connect the first support plate 1. The inner folding part 412 is laterally connected to the lower end of the connection sub-part 411, and the extension sub-part 413 is vertically connected to the inner end of the inner folding part 412. By providing the inner folding part 412, the structure of the lower side of the vertical mounting bracket 4 is more compact, the occupied volume is smaller, and it is more miniaturized.

[0042] In some embodiments, Figure 1-Figure 4 As shown, the vertical moving mechanism 7 includes a vertical driving member 71, a gear 72, a rack 73 and a guide assembly 74. The vertical driving member 71 is arranged on the vertical mounting portion 43. The vertical driving member 71 can be a motor. The output shaft of the vertical driving member 71 extends out of the vertical mounting portion 43. The gear 72 is sleeved on the output shaft of the vertical driving member 71. The gear 72 is meshed with the rack 73. The rack 73 is vertically arranged. The upper part of the rack 73 is fixedly connected to the longitudinal mounting bracket 5. The longitudinal mounting bracket 5 is connected to the second support plate 2. The gear 72 is driven to rotate by the vertical driving member 71. Since the gear 72 is meshed with the gear 72, the rotational movement of the gear 72 is converted into the vertical movement of the rack 73. The rack 73 is connected to the longitudinal mounting bracket 5, thereby further driving the longitudinal mounting bracket 5 to move longitudinally. The longitudinal mounting bracket 5 is connected to the second support plate 2, and the second support plate 2 also moves longitudinally accordingly. The transmission mode of the gear 72 and the rack 73 not only saves space, but also makes the transmission more reliable and more stable during the vertical movement.

[0043] The guide assembly 74 includes a guide slider 741 and a guide rail 742. There are four guide assemblies 74. The guide slider 741 is arranged on the side of the second support plate 2. The side of the second support plate 2 is provided with a groove matched with the guide slider 741. The guide slider 741 is stuck in the groove to make the structure more compact. The guide slider 741 is fixedly connected to the second support plate 2. The guide rail 742 is arranged on the inner side of the first support plate 1. The guide slider 741 is provided with a dovetail groove. The guide rail 742 is matched with the guide slider 741. The guide slider 741 can slide vertically along the guide rail 742. By setting the guide assembly 74, the four guide sliders 741 also slide vertically along the corresponding guide rails 742 during the vertical movement of the second support plate 2. The guide assembly 74 plays a guiding and supporting role, and enhances the stability during the vertical movement.

[0044] In some embodiments, Figure 5-Figure 7 As shown, the longitudinal mounting bracket 5 includes a longitudinal connecting portion 51 and a longitudinal mounting portion 52. The longitudinal connecting portion 51 is horizontally arranged at the lower side of the second support plate 2, and the longitudinal connecting portion 51 is fixedly connected to the second support plate 2. The longitudinal mounting portion 52 is vertically connected to the end of the longitudinal connecting portion 51. The longitudinal mounting portion 52 is used to set a longitudinal driving member 81, and the position of the longitudinal driving member 81 corresponds to the vertical mounting bracket 4. By setting the longitudinal driving member 81 on the longitudinal mounting bracket 5, the space at the lower part of the second support plate 2 is fully utilized. When the second support plate 2 moves downward, the longitudinal driving member 81 can be accommodated in the gap position of the vertical mounting bracket 4, and the structure is more compact, realizing full utilization of the space.

[0045] In some embodiments, Figure 6 and Figure 7 As shown, a through hole 521 is provided in the middle of the longitudinal mounting portion 52, and the through hole 521 is square. A fixing plate 53 is provided on the outer side of the longitudinal mounting portion 52, and the size of the fixing plate 53 is larger than the through hole 521. A height adjustment hole 531 is provided on the fixing plate 53, and the height adjustment hole 531 is elliptical. A screw hole 522 is provided at the corresponding position of the longitudinal mounting portion 52, and the vertical length of the height adjustment hole 531 is larger than the screw hole 522. The longitudinal mounting portion 52 is connected to the fixing plate 53 by bolts, and a bottom support plate 54 is provided at the lower end of the longitudinal mounting portion 52, and a support nut 55 is provided on the bottom support plate 54, and the support nut 55 is used to support the bottom of the fixing plate 53.

[0046] Figure 6The height adjustment hole 531 is fixedly connected to the screw hole 522 at the upper end, and the fixed plate 53 is at the lowest position at this time; when the height needs to be fine-tuned, the fixed plate 53 is moved upward so that the height adjustment hole 531 is fixedly connected to the screw hole 522 at the lower side, and the support nut 55 is supported at the lower end of the fixed plate 53, and the fixed plate 53 will not move downward. By setting the height adjustment hole 531 and the support nut 55, the height of the fixed plate 53 is adjusted, that is, the installation height of the longitudinal drive member 81 is changed, the adaptability is stronger, and the installation is more convenient.

[0047] In some embodiments, Figure 4 and Figure 5 As shown, the longitudinal movement mechanism 8 includes a longitudinal drive member 81, a longitudinal transmission assembly 82 and an auxiliary movement assembly 83. The longitudinal drive member 81 is arranged on the longitudinal mounting bracket 5. The longitudinal drive member 81 can be an electric motor or a hydraulic motor, etc. The longitudinal transmission assembly 82 includes a longitudinal screw rod fixing seat 821, a longitudinal screw rod 822, and a longitudinal movement seat 823. The longitudinal screw rod fixing seat 821 is arranged on the second support plate 2, and the longitudinal screw rod 822 is installed on the longitudinal screw rod fixing seats 821 on both sides. One end of the longitudinal screw rod 822 extends out of the longitudinal screw rod fixing seat 821 and is connected to the output shaft of the longitudinal drive member 81 in a transmission manner. Specifically, in this example, the gear 72 and the rack 73 cooperate in a transmission mode. The longitudinal movement seat 823 is sleeved on the longitudinal screw rod 822, and the longitudinal movement seat 823 is connected to the longitudinal screw rod 822 in a spiral transmission manner. The upper end of the longitudinal movement seat 823 is connected to the third support plate 3.

[0048] The auxiliary moving assembly 83 is respectively arranged on both sides of the longitudinal transmission assembly 82, and the auxiliary moving assembly 83 includes an auxiliary fixing seat 831, a longitudinal sliding shaft 832 and an auxiliary sliding block 833. The auxiliary fixing seat 831 is arranged on the second support plate 2, the longitudinal sliding shaft 832 is installed on the auxiliary fixing seat 831, the auxiliary sliding block 833 is sleeved on the longitudinal sliding shaft 832, and the upper end of the auxiliary sliding block 833 is connected to the third support plate 3. By respectively arranging the auxiliary moving assembly 83 on both sides of the longitudinal transmission assembly 82, the auxiliary moving assembly 83 can play the role of supporting the third support plate 3, the stability of the longitudinal movement process, and prevent the third support plate 3 from tilting during the longitudinal movement.

[0049] Through the transmission connection between the longitudinal driving member 81 and the longitudinal screw rod 822, the longitudinal screw rod 822 is driven to rotate. The longitudinal screw rod 822 rotates and is spirally connected to the longitudinal moving seat 823. Therefore, the longitudinal moving seat 823 also moves relatively longitudinally. When the longitudinal moving seat 823 drives the third support plate 3 to move longitudinally, the auxiliary sliding blocks 833 on both sides also slide along the longitudinal sliding shaft 832, thereby increasing the stability of the longitudinal movement.

[0050] In some embodiments, Figure 8As shown, the transverse mounting bracket 6 is L-shaped, and the transverse mounting bracket 6 includes a transverse connecting portion 61 and a transverse mounting portion 62. The transverse connecting portion 61 is horizontally arranged, and the transverse connecting portion 61 is arranged at the lower end of the side of the third support plate 3. The transverse mounting portion 62 extends upward along the outer end of the transverse connecting portion 61, and the transverse mounting portion 62 is used to set the transverse driving member 91. By connecting the transverse connecting portion 61 to the lower end of the side of the third support plate 3, and setting the transverse driving member 91 at the transverse mounting portion 62, the installation of the transverse driving member 91 does not occupy the space of the third support plate 3, and the use of a screw drive method can reduce the area of ​​the third support plate 3, so that the structure of the entire device is more compact and more miniaturized.

[0051] In some embodiments, Figure 7-Figure 9 As shown, the transverse transmission assembly 92 includes a transverse fixed seat 921, a transverse screw rod 922, a transverse sliding shaft 923 and a transverse moving seat 924. The transverse screw rod 922 and two transverse sliding shafts 923 are arranged on the transverse fixed seats 921 on both sides. The transverse screw rod 922 is installed in the middle of the transverse fixed seat 921. One end of the transverse screw rod 922 extends out of the transverse fixed seat 921 and is connected to the output shaft of the transverse driving member 91 through a coupling. The transverse driving member 91 can be a motor or a hydraulic motor, etc. The transverse sliding shafts 923 are respectively installed on both sides of the upper part of the transverse fixed seat 921. By arranging the transverse screw rod 922 in the middle and the two transverse sliding shafts 923 are respectively arranged on both sides of the upper part of the transverse screw rod 922, the axis connecting line of the two transverse sliding shafts 923 and the transverse screw rod 922 is a triangle, which improves the stability of the transverse movement process.

[0052] The transverse moving seat 924 includes a sliding part 9241 and a transmission part 9242. The upper end of the sliding part 9241 is connected to the magnetic shoe assembly 10. The transmission part 9242 is arranged on the lower middle side of the sliding part 9241. The width of the sliding part 9241 is greater than the transmission part 9242, so that the magnetic shoe assembly 10 is more stable during the movement. Shaft holes 9243 adapted to the transverse sliding shaft 923 are arranged on both sides of the sliding part 9241. The transverse sliding shaft 923 is penetrated through the shaft holes 9243. The transmission part 9242 is provided with a screw mounting hole 9244 adapted to the transverse screw rod 922. The transverse screw rod 922 is penetrated through the screw mounting hole 9244. The transverse screw rod 922 is driven to rotate by the transverse driving member 91, and the rotational movement of the transverse screw rod 922 is converted into the horizontal movement of the transverse moving seat 924. The transverse moving seat 924 moves laterally along the transverse screw rod 922 and the two transverse sliding shafts 923. The transverse moving seat 924 is connected to the magnetic shoe assembly 10, and the magnetic shoe assembly 10 also moves laterally, and the movement process is more stable.

[0053] Based on the same inventive concept, the utility model also provides a magnetron sputtering coating device, including the above-mentioned three-axis moving magnetic field device.

[0054] It can be seen that the utility model discloses a three-axis moving magnetic field device and a magnetron sputtering coating device. First, by setting the vertical mounting bracket on the lower side of the first support plate, the vertical moving mechanism is set on the vertical mounting bracket and extends upward through the opening, and is connected to the longitudinal mounting bracket set on the lower side of the second support plate, thereby driving the longitudinal mounting bracket to move vertically; the longitudinal driving member is set on the longitudinal mounting bracket, and the longitudinal driving member is connected to the longitudinal transmission assembly set on the upper side of the second support plate, and the longitudinal transmission assembly is connected to the third support plate, thereby driving the third support plate to move longitudinally; the transverse mounting bracket is set at the side end of the third support plate, and the transverse driving member is set on the transverse mounting bracket and connected to the transverse transmission assembly, and the transverse transmission assembly is connected to the magnetic shoe assembly, thereby driving the magnetic shoe assembly to move horizontally. Thus, under the drive of the vertical moving mechanism, the longitudinal moving mechanism and the transverse moving mechanism, the vertical, transverse and longitudinal movement of the magnetic shoe assembly is realized, so that the range of action of the magnetic field can be changed, so that all areas on the target material can be bombarded by ions, the utilization rate of the target material is improved, and the sputtering efficiency is higher. At the same time, the positions of the first support plate, the second support plate, the third support plate, the vertical mounting bracket, the longitudinal mounting bracket, the transverse mounting bracket, the vertical moving mechanism, the longitudinal moving mechanism and the transverse moving mechanism are reasonably arranged, which reduces the volume of the three-axis moving magnetic field device, makes it more miniaturized, and occupies less space during installation.

[0055] The above are only embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A three-axis moving magnetic field device, characterized in that: It includes a first support plate, a second support plate, a third support plate, a vertical mounting bracket, a longitudinal mounting bracket, a transverse mounting bracket, a vertical moving mechanism, a longitudinal moving mechanism, a transverse moving mechanism and a magnetic shoe assembly; The vertical mounting bracket is arranged at the lower side of the first supporting plate, the vertical moving mechanism is arranged on the vertical mounting bracket, an opening is arranged in the middle of the first supporting plate for the second supporting plate to extend out, the vertical moving mechanism extends upward to connect the longitudinal mounting bracket, and the vertical moving mechanism is used to drive the longitudinal mounting bracket to move vertically; The longitudinal mounting bracket is arranged at the lower side of the second supporting plate, the longitudinal driving member of the longitudinal moving mechanism is arranged on the longitudinal mounting bracket, the longitudinal transmission assembly of the longitudinal moving mechanism is arranged at the upper side of the second supporting plate, the longitudinal driving member is connected to the longitudinal transmission assembly, and the longitudinal transmission assembly is connected to the third supporting plate located at the upper side, so as to drive the third supporting plate to move longitudinally; The transverse mounting bracket is arranged on the side end of the third support plate, the transverse driving member of the transverse moving mechanism is arranged on the transverse mounting bracket, the transverse transmission assembly of the transverse moving mechanism is arranged on the third support plate, the transverse driving member is connected to the transverse transmission assembly, and the transverse transmission assembly is connected to the magnetic shoe assembly located on the upper side for driving the magnetic shoe assembly to move laterally.

2. The three-axis moving magnetic field device according to claim 1, characterized in that: The vertical mounting bracket includes a first vertical connecting portion, a second vertical connecting portion and a vertical mounting portion, wherein the first vertical connecting portion and the second vertical connecting portion are vertically symmetrically arranged and are respectively connected to both sides of the opening, and the vertical mounting portion is laterally arranged at the lower side of the first vertical connecting portion and the second vertical connecting portion, and the vertical mounting portion is used to set the vertical moving mechanism.

3. The three-axis moving magnetic field device according to claim 2, characterized in that: The first vertical connection part and the second vertical connection part each include a connection sub-part, an inner folding part and an extension sub-part, the connection sub-part is vertically arranged, the connection sub-part is used to connect the first support plate, the inner folding part is laterally connected to the lower end of the connection sub-part, and the extension sub-part is vertically connected to the inner end of the inner folding part.

4. The three-axis moving magnetic field device according to claim 2, characterized in that: The vertical moving mechanism comprises a vertical driving member, a gear, a rack and a guide assembly, wherein the vertical driving member is arranged on the vertical mounting portion, the gear is sleeved on the output shaft of the vertical driving member, the gear is meshed with the rack, the rack is arranged vertically, the upper part of the rack is fixedly connected to the longitudinal mounting bracket, and the longitudinal mounting bracket is connected to the second support plate; The guide assembly includes a guide slider and a guide rail. The guide slider is arranged on the side of the second support plate, and the guide rail is arranged on the inner side of the first support plate. The guide slider can slide vertically along the guide rail.

5. The three-axis moving magnetic field device according to claim 1, characterized in that: The longitudinal mounting bracket includes a longitudinal connecting portion and a longitudinal mounting portion, wherein the longitudinal connecting portion is arranged at the lower side of the second supporting plate, the longitudinal mounting portion is vertically connected to the end of the longitudinal connecting portion, and the longitudinal mounting portion is used to set the longitudinal driving member.

6. The three-axis moving magnetic field device according to claim 5, characterized in that: A through hole is provided in the middle of the longitudinal mounting portion, a fixing plate is provided on the outer side of the longitudinal mounting portion, the size of the fixing plate is larger than the through hole, a height adjustment hole is provided on the fixing plate, a screw hole is provided at the corresponding position of the longitudinal mounting portion, the vertical length of the height adjustment hole is larger than the screw hole, the longitudinal mounting portion is connected to the fixing plate by bolts, a bottom support plate is provided at the lower end of the longitudinal mounting portion, a support nut is provided on the bottom support plate, and the support nut is used to support the bottom of the fixing plate.

7. The three-axis moving magnetic field device according to claim 1, characterized in that: The longitudinal movement mechanism includes the longitudinal driving member, a longitudinal transmission assembly and an auxiliary movement assembly, the longitudinal driving member is arranged on the longitudinal mounting bracket, the longitudinal transmission assembly includes a longitudinal screw rod fixing seat, a longitudinal screw rod, and a longitudinal movement seat, the longitudinal screw rod fixing seat is arranged on the second support plate, the longitudinal screw rod is installed on the longitudinal screw rod fixing seats on both sides, one end of the longitudinal screw rod extends out of the longitudinal screw rod fixing seat and is drivingly connected with the output shaft of the longitudinal driving member, the longitudinal movement seat is sleeved on the longitudinal screw rod, the longitudinal movement seat is spirally connected with the longitudinal screw rod, and the upper end of the longitudinal movement seat is connected to the third support plate; The auxiliary moving components are respectively arranged on both sides of the longitudinal transmission components, and the auxiliary moving components include an auxiliary fixed seat, a longitudinal sliding shaft and an auxiliary slider. The auxiliary fixed seat is arranged on the second support plate, the longitudinal sliding shaft is installed on the auxiliary fixed seat, the auxiliary slider is sleeved on the longitudinal sliding shaft, and the upper end of the auxiliary slider is connected to the third support plate.

8. The three-axis moving magnetic field device according to claim 1, characterized in that: The transverse mounting bracket includes a transverse connecting portion and a transverse mounting portion, the transverse connecting portion is horizontally arranged, the transverse connecting portion is arranged at the lower end of the side of the third support plate, the transverse mounting portion extends upward along the outer end of the transverse connecting portion, and the transverse mounting portion is used to set the transverse driving member.

9. The three-axis moving magnetic field device according to claim 1, characterized in that: The transverse transmission assembly includes a transverse fixed seat, a transverse screw rod, a transverse sliding shaft and a transverse movable seat, the transverse screw rod and the two transverse sliding shafts are arranged on the transverse fixed seats on both sides, the transverse screw rod is installed in the middle of the transverse fixed seat, one end of the transverse screw rod extends out of the transverse fixed seat and is connected to the transverse driving member, and the transverse sliding shafts are respectively installed on both sides of the upper part of the transverse fixed seat; The transverse movable seat includes a sliding part and a transmission part, the upper end of the sliding part is connected to the magnetic shoe assembly, the transmission part is arranged on the lower middle side of the sliding part, both sides of the sliding part are provided with axial holes adapted to the transverse sliding shaft, the transverse sliding shaft is passed through the axial holes, the transmission part is provided with a screw rod mounting hole adapted to the transverse screw rod, and the transverse screw rod is passed through the screw rod mounting hole.

10. A magnetron sputtering coating device, characterized in that: A three-axis moving magnetic field device comprising any one of claims 1 to 9.

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