Machining tool for microgroove

Abstract

The utility model provides a microgroove machining cutter which comprises a cutter handle and a cutter head arranged at one end of the cutter handle, the cutter head comprises a first boss and a second boss, one side of the first boss is connected with one side of the second boss, and the other side of the first boss is connected with the other side of the second boss. One end of the first boss and one end of the second boss are fixedly connected to one end of the cutter handle; the height of the first boss is larger than that of the second boss, and the cross section, in the direction perpendicular to the axial direction of the cutter handle, of the first boss is triangular. According to the machining tool, through the specific structural design and parameter design of the first boss and the second boss on the machining tool, the machining precision of the microgroove in the gas distribution disc is higher, the microgroove meeting the use requirement can be stably produced, the defect rate of products is reduced, the machining efficiency is improved, and the machining tool is simple in structure and suitable for popularization.

Description

Technical Field

[0001] The utility model belongs to the technical field of micro-groove processing, and relates to a micro-groove processing tool, in particular to a processing tool for micro-grooves with uniformly deep and narrow end surfaces of a gas distribution plate of a semiconductor machine component. Background Art

[0002] Chemical vapor deposition technology is often used in semiconductor manufacturing, that is, one or more gaseous compounds or single substances containing thin film elements react chemically on the substrate surface to form a thin film. This process is a type of chemical vapor deposition (CVD), and its principle is to use various energy sources such as heating, plasma excitation or light radiation to make gaseous or vaporous chemicals in the reactor react chemically in the gas phase or on the gas-solid interface to form solid deposits.

[0003] During the CVD coating process, the wafer is under the gas distribution plate. During the CVD chemical vapor deposition process, the gas distribution plate must ensure good pressure distribution to ensure the stability of the deposition process. If the size processing is inaccurate, it will lead to uneven coating and affect the use of the chip.

[0004] The prior art solution discloses a tool for processing stepped holes, including a tool head frame and a fixing frame, and also includes two tool heads A, two tool heads B and four tool heads C. The tool heads A, B and C are all fixed on four fixed surfaces perpendicular to the end face of the tool head fixing body along the generatrix direction of the tool head fixing body.

[0005] The prior art solution also discloses a combined tool, including a main tool rod, two auxiliary tool rods, and two blades. Two threaded holes with axes perpendicular to the axis of the main tool rod are arranged at the front of the main tool rod, and the front end faces of the two threaded holes are parallel to the axis of the main tool rod. One end of the auxiliary tool rod has an external thread, and the other end of the auxiliary tool rod is provided with an end face for mounting the blade. A threaded hole is provided on the end face of the auxiliary tool rod for mounting the blade. The two auxiliary tool rods are respectively mounted on the two threaded holes at the front of the main tool rod using external threads and fastened with nuts, and the two blades are respectively locked on the blade mounting end faces of the two auxiliary tool rods with screws; the front end faces of the two threaded holes can be stepped.

[0006] The prior art solution also discloses a cutting tool with a chip breaker groove, comprising a tool body, a positioning hole being opened in the middle of the tool body, and a blade. A step-shaped blade groove is provided at the front end of the top surface of the tool body, and the two sides of the blade are curved edges. The blade is embedded in the blade groove, and the outer edges of the curved edges on both sides of the blade are respectively opposite to a side edge of the blade groove, and a chip breaker groove is formed between the outer edges of the curved edges of the blade and the side edges of the blade groove, the bottom edge of the blade and the bottom edge of the blade groove are fitted together, and the top surface of the blade is flush with the top surface of the tool body.

[0007] At present, the existing technology involves few structural designs of micro-groove machining tools for gas distribution plates, and there is also a technical defect that the micro-groove cannot be fine-machined. Therefore, it is urgent to design and develop a micro-groove machining tool to overcome the defects of the existing technology and meet practical application needs. Utility Model Content

[0008] In view of the shortcomings of the prior art, the purpose of the utility model is to provide a micro-groove processing tool. In the utility model, through the specific structural design and parameter design of the first boss and the second boss on the processing tool, the processing accuracy of the micro-grooves on the gas distribution plate is higher, and micro-grooves that meet the use requirements can be stably produced, the defective rate of the product is reduced, the processing efficiency is improved, the structure is simple, and it is suitable for promotion.

[0009] To achieve this purpose, the utility model adopts the following technical solutions:

[0010] The utility model provides a micro-groove processing tool, which comprises a tool handle and a tool head arranged at one end of the tool handle, wherein the tool head comprises a first boss and a second boss, one side of the first boss is connected to one side of the second boss, one end of the first boss and one end of the second boss are both fixedly connected to one end of the tool handle; and the height of the first boss is greater than the height of the second boss, and the cross section of the first boss along the direction perpendicular to the axial direction of the tool handle is a triangle.

[0011] In the utility model, through the specific structural design and parameter design of the first boss and the second boss on the processing tool, the processing accuracy of the microgrooves on the gas distribution plate is higher, the microgrooves that meet the use requirements can be stably produced, the defective rate of the product is reduced, the processing efficiency is improved, the structure is simple, and it is suitable for promotion.

[0012] As a preferred technical solution of the present invention, the width of the handle is 8 to 10 mm, for example, it can be 8 mm, 8.2 mm, 8.4 mm, 8.6 mm, 8.8 mm, 9 mm, 9.2 mm, 9.4 mm, 9.6 mm, 9.8 mm, 10 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0013] It should be noted that the width of the knife handle in the present invention refers to the width of the knife handle in a direction perpendicular to the knife head, that is, the radial width of the knife handle.

[0014] As a preferred technical solution of the utility model, the width of the blade is 4 to 5 mm, for example, it can be 4 mm, 4.1 mm, 4.2 mm, 4.3 mm, 4.4 mm, 4.5 mm, 4.6 mm, 4.7 mm, 4.8 mm, 4.9 mm, 5 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0015] It should be noted that the width of the cutter head in the present invention refers to the width of the cutter head in a direction perpendicular to the length of the handle, that is, the radial width of the cutter head.

[0016] The width of the cutter head in the utility model is 4-5 mm, because within this range the processing effect of the cutter is the best. If it is not within this range, the micro-groove opening will not meet the standard.

[0017] As a preferred technical solution of the present invention, the height of the first boss is 8 to 9 mm, for example, it can be 8 mm, 8.1 mm, 8.2 mm, 8.3 mm, 8.4 mm, 8.5 mm, 8.6 mm, 8.7 mm, 8.8 mm, 8.9 mm, 9 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0018] As a preferred technical solution of the present invention, the width of the first boss is 0.8-0.9 mm, for example, it can be 0.8 mm, 0.81 mm, 0.82 mm, 0.83 mm, 0.84 mm, 0.85 mm, 0.86 mm, 0.87 mm, 0.88 mm, 0.89 mm, 0.9 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0019] It should be noted that the height of the first boss in the present invention refers to the height along the direction parallel to the length of the handle, and the width refers to the width along the direction perpendicular to the length of the handle.

[0020] In the utility model, the height of the first boss is 8-9 mm and the width is 0.8-0.9 mm, because within this range the processing effect of the tool is the best. If it is not within this range, the micro-groove opening will not meet the standard.

[0021] As a preferred technical solution of the present invention, the height of the second boss is 2 to 3 mm, for example, it can be 2 mm, 2.1 mm, 2.2 mm, 2.3 mm, 2.4 mm, 2.5 mm, 2.6 mm, 2.7 mm, 2.8 mm, 2.9 mm, 3 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0022] As a preferred technical solution of the present invention, the width of the second boss is 3.1-4.2 mm, for example, it can be 3.1 mm, 3.2 mm, 3.3 mm, 3.4 mm, 3.5 mm, 3.6 mm, 3.7 mm, 3.8 mm, 3.9 mm, 4 mm, 4.1 mm, 4.2 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] It should be noted that the height of the second boss in the present invention refers to the height along the direction parallel to the length of the handle, and the width refers to the width along the direction perpendicular to the length of the handle.

[0024] In the utility model, the height of the second boss is 2-3 mm and the width is 3.1-4.2 mm, because within this range the processing effect of the tool is the best. If it is not within this range, the micro-groove opening will not meet the standard.

[0025] As a preferred technical solution of the utility model, one end of the first boss away from the tool handle is an inclined surface, and the inclined surface is inclined in a direction away from the second boss.

[0026] As a preferred technical solution of the utility model, the inclination angle of the inclined surface is 10-11°, for example, it can be 10°, 10.1°, 10.2°, 10.3°, 10.4°, 10.5°, 10.6°, 10.7°, 10.8°, 10.9°, 11°, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0027] As a preferred technical solution of the present invention, the minimum angle of the triangle is 8-9°, for example, it can be 8°, 8.1°, 8.2°, 8.3°, 8.4°, 8.5°, 8.6°, 8.7°, 8.8°, 8.9°, 9°, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable; and the minimum angle is located at the highest point of the first boss.

[0028] It should be noted that in the present invention, by limiting the inclined surface of the first boss, the inclination angle of the inclined surface and the minimum angle of the triangle, the first boss can perfectly fit the microgroove, thereby improving the processing efficiency of the microgroove on the gas distribution plate and ensuring the technical requirements of the processing.

[0029] It should be noted that the minimum angle at the highest point of the first boss refers to the point on the first boss that is farthest from the tool handle, and when the lathe is operated, cutting is performed at the minimum angle, which can ensure the processing accuracy of the micro groove.

[0030] Exemplarily, the method for using the micro-groove machining tool in the utility model includes:

[0031] The tool holder of the machining tool is clamped on the lathe, and the first boss and the second boss are set toward the sample. The G74 cycle cutting instruction is used for machining. The lathe spindle speed is set to S280 / min and the cutting speed is 10MM / min. After the cutting is completed, the processed micro-groove is rinsed and wiped with alcohol, and the micro-groove is checked to be smooth and free of burrs.

[0032] Compared with the prior art, the beneficial effects of the utility model are:

[0033] In the utility model, through the specific structural design and parameter design of the first boss and the second boss on the processing tool, the processing accuracy of the microgrooves on the gas distribution plate is higher, the microgrooves that meet the use requirements can be stably produced, the defective rate of the product is reduced, the processing efficiency is improved, the structure is simple, and it is suitable for promotion. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 A schematic diagram of the structure of a micro-groove machining tool provided in a specific embodiment of the utility model;

[0035] Figure 2 A schematic cross-sectional view of a first boss in a microgroove machining tool provided in a specific embodiment of the utility model;

[0036] Figure 3 A side view of a micro-groove machining tool provided in a specific embodiment of the utility model;

[0037] Among them, 1-handle; 2-first boss; 3-second boss. DETAILED DESCRIPTION

[0038] It should be understood that, in the description of the present utility model, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0039] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0040] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0041] In a specific embodiment, the utility model provides a micro-groove processing tool, such as Figure 1 , Figure 2 and Figure 3 As shown, the machining tool includes a tool handle 1 and a tool head arranged at one end of the tool handle 1, the tool head includes a first boss 2 and a second boss 3, one side of the first boss 2 is connected to one side of the second boss 3, one end of the first boss 2 and one end of the second boss 3 are both fixedly connected to one end of the tool handle 1; and the height of the first boss 2 is greater than the height of the second boss 3, and the cross-section of the first boss 2 along the axial direction perpendicular to the tool handle 1 is a triangle.

[0042] In the utility model, through the specific structural design and parameter design of the first boss 2 and the second boss 3 on the processing tool, the processing accuracy of the microgrooves on the gas distribution plate is higher, the microgrooves that meet the use requirements can be stably produced, the defective rate of the product is reduced, the processing efficiency is improved, the structure is simple, and it is suitable for promotion.

[0043] Furthermore, the width of the handle 1 is 8 to 10 mm, for example, it can be 8 mm, 8.2 mm, 8.4 mm, 8.6 mm, 8.8 mm, 9 mm, 9.2 mm, 9.4 mm, 9.6 mm, 9.8 mm, 10 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0044] It should be noted that the width of the knife handle 1 in the present invention refers to the width of the knife handle 1 in a direction perpendicular to the knife head, that is, the radial width of the knife handle 1 .

[0045] Furthermore, the width of the blade head is 4 to 5 mm, for example, it can be 4 mm, 4.1 mm, 4.2 mm, 4.3 mm, 4.4 mm, 4.5 mm, 4.6 mm, 4.7 mm, 4.8 mm, 4.9 mm, 5 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0046] It should be noted that the width of the cutter head in the present invention refers to the width of the cutter head in a direction perpendicular to the length of the handle 1, that is, the radial width of the cutter head.

[0047] Furthermore, the height of the first boss 2 is 8 to 9 mm, for example, it can be 8 mm, 8.1 mm, 8.2 mm, 8.3 mm, 8.4 mm, 8.5 mm, 8.6 mm, 8.7 mm, 8.8 mm, 8.9 mm, 9 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0048] Furthermore, the width of the first boss 2 is 0.8-0.9 mm, for example, it can be 0.8 mm, 0.81 mm, 0.82 mm, 0.83 mm, 0.84 mm, 0.85 mm, 0.86 mm, 0.87 mm, 0.88 mm, 0.89 mm, 0.9 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0049] It should be noted that, in the present invention, the height of the first boss 2 refers to the height along a direction parallel to the length of the handle 1 , and the width refers to the width along a direction perpendicular to the length of the handle 1 .

[0050] Furthermore, the height of the second boss 3 is 2 to 3 mm, for example, it can be 2 mm, 2.1 mm, 2.2 mm, 2.3 mm, 2.4 mm, 2.5 mm, 2.6 mm, 2.7 mm, 2.8 mm, 2.9 mm, 3 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0051] Furthermore, the width of the second boss 3 is 3.1-4.2 mm, for example, 3.1 mm, 3.2 mm, 3.3 mm, 3.4 mm, 3.5 mm, 3.6 mm, 3.7 mm, 3.8 mm, 3.9 mm, 4 mm, 4.1 mm, 4.2 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0052] It should be noted that, in the present invention, the height of the second boss 3 refers to the height along a direction parallel to the length of the handle 1 , and the width refers to the width along a direction perpendicular to the length of the handle 1 .

[0053] Furthermore, one end of the first boss 2 away from the tool handle 1 is an inclined surface, and the inclined surface is inclined in a direction away from the second boss 3 .

[0054] Furthermore, the inclination angle of the slope is 10-11°, for example, it can be 10°, 10.1°, 10.2°, 10.3°, 10.4°, 10.5°, 10.6°, 10.7°, 10.8°, 10.9°, 11°, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0055] Furthermore, the minimum angle in the triangle is 8 to 9°, for example, it can be 8°, 8.1°, 8.2°, 8.3°, 8.4°, 8.5°, 8.6°, 8.7°, 8.8°, 8.9°, 9°, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable; and the minimum angle is located at the highest point of the first boss 2.

[0056] It should be noted that in the present invention, by limiting the inclined surface of the first boss 2, the inclination angle of the inclined surface and the minimum angle of the triangle, the first boss 2 can perfectly fit the microgroove, improve the processing efficiency of the microgroove on the gas distribution plate, and ensure the technical requirements of processing.

[0057] It should be noted that the minimum angle at the highest point of the first boss 2 refers to the point at which the first boss 2 is farthest from the tool handle 1, and when the lathe is operated, cutting is performed at the minimum angle to ensure the processing accuracy of the micro groove.

[0058] Exemplarily, the method for using the micro-groove machining tool in the utility model includes:

[0059] The tool holder 1 of the machining tool is clamped on the lathe, and the first boss 2 and the second boss 3 are set toward the sample. The G74 cycle cutting instruction is used for machining. The spindle speed of the lathe is set to S280 / min and the cutting speed is 10MM / min. After the cutting is completed, the processed micro-groove is rinsed and wiped with alcohol, and the micro-groove is checked to be smooth and free of burrs.

[0060] Example 1

[0061] This embodiment provides a micro-groove machining tool, wherein:

[0062] The machining tool includes a tool handle 1 and a tool head arranged at one end of the tool handle 1, the tool head includes a first boss 2 and a second boss 3, one side of the first boss 2 is connected to one side of the second boss 3, one end of the first boss 2 and one end of the second boss 3 are both fixedly connected to one end of the tool handle 1; and the height of the first boss 2 is greater than the height of the second boss 3, and the cross-section of the first boss 2 along the axial direction parallel to the tool handle 1 is a triangle.

[0063] The width of the handle 1 is 8 mm, the width of the tool head is 4 mm, the height of the first boss 2 is 8 mm, the width of the first boss 2 is 0.86 mm, the height of the second boss 3 is 3 mm, the width of the second boss 3 is 3.5 mm, and the end of the first boss 2 away from the handle 1 is a slope, which is inclined in the direction away from the second boss 3, the inclination angle of the slope is 11°, and the minimum angle in the triangle is 8°.

[0064] In summary, the utility model has higher processing accuracy for microgrooves on the gas distribution plate through the specific structural design and parameter design of the first boss 2 and the second boss 3 on the processing tool, can stably produce microgrooves that meet the use requirements, reduce the defective rate of products, improve processing efficiency, has a simple structure, and is suitable for promotion.

[0065] The above description is only a specific implementation method of the present utility model, but the protection scope of the present utility model is not limited thereto. Technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by technicians in the relevant technical field within the technical scope disclosed in the present utility model fall within the protection scope and disclosure scope of the present utility model.

Claims

1. A micro-groove processing tool, characterized in that: The machining tool comprises a tool handle and a tool head arranged at one end of the tool handle, the tool head comprises a first boss and a second boss, one side of the first boss is connected to one side of the second boss, and one end of the first boss and one end of the second boss are both fixedly connected to one end of the tool handle; The height of the first boss is greater than that of the second boss, and the cross section of the first boss along a direction perpendicular to the axial direction of the shank is a triangle.

2. The micro-groove machining tool according to claim 1, characterized in that: The width of the knife handle is 8-10 mm.

3. The micro-groove machining tool according to claim 1, characterized in that: The width of the blade head is 4-5 mm.

4. The micro-groove machining tool according to claim 1, characterized in that: The height of the first boss is 8-9 mm.

5. The micro-groove machining tool according to claim 1, characterized in that: The width of the first boss is 0.8-0.9 mm.

6. The micro-groove machining tool according to claim 1, characterized in that: The height of the second boss is 2-3 mm.

7. The micro-groove machining tool according to claim 1, characterized in that: The width of the second boss is 3.1-4.2 mm.

8. The micro-groove machining tool according to claim 1, characterized in that: One end of the first boss away from the tool handle is an inclined surface, and the inclined surface is inclined in a direction away from the second boss.

9. The micro-groove machining tool according to claim 8, characterized in that: The inclination angle of the inclined surface is 10-11°.

10. The micro-groove machining tool according to claim 1, characterized in that: The minimum angle of the triangle is 8-9 degrees, and the minimum angle is located at the highest point of the first boss.

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