Polishing treatment device for polycrystalline silicon

Abstract

The utility model relates to the technical field of polycrystalline silicon processing, and discloses a polycrystalline silicon polishing device which comprises a base and a polishing table fixed above the base, and further comprises air cylinders bolted to the left side and the right side of the top of the base, clamping plates are arranged on the left side and the right side of the top of the base, and output shafts of the air cylinders are fixedly connected with the surfaces of the clamping plates; the top plate is fixed above the base, and a hydraulic rod is arranged at the bottom of the base; the polycrystalline silicon polishing device has a multi-position polishing function, can polish the side edge of polycrystalline silicon while polishing the surface of the polycrystalline silicon, further effectively treats burrs on the surface of the polycrystalline silicon, and can adjust the polishing position according to the width of the polished polycrystalline silicon, so that the practicability of the polycrystalline silicon polishing device is improved, and the polycrystalline silicon polishing device is suitable for popularization and application. In addition, the device further has a cleaning function, generated polycrystalline silicon scraps can be cleaned after polycrystalline silicon polishing is completed, and convenience is provided for subsequent polishing work of workers.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon processing, in particular to a polysilicon grinding processing device. Background Art

[0002] Polycrystalline silicon is a form of elemental silicon. When molten elemental silicon solidifies under supercooling conditions, silicon atoms are arranged in the form of diamond lattices to form many crystal nuclei. If these crystal nuclei grow into grains with different crystal plane orientations, these grains will combine and crystallize into polycrystalline silicon. Polycrystalline silicon can be used as raw material for pulling single crystal silicon. The difference between polycrystalline silicon and single crystal silicon is mainly reflected in physical properties. During the production process of polycrystalline silicon, burrs may be generated during the processing, and then the polycrystalline silicon needs to be polished using a grinding device.

[0003] After searching, a grinding and dust removal equipment for polysilicon production, application number: CN202211045227.9, is found. The device sets the grinding disc above the polysilicon, which results in that after the grinding disc contacts the polysilicon, only the surface above the polysilicon can be polished, and the burrs generated by the processing often appear on the side edges of the polysilicon, which results in the device having poor grinding effect on the burrs when grinding the polysilicon. Moreover, the device absorbs the debris generated during grinding by vacuuming, but after the polysilicon is polished, some large pieces of polysilicon debris cannot be effectively absorbed and recovered, and the debris falls on the base and needs to be cleaned up by the staff later, which is inconvenient to use. Utility Model Content

[0004] The purpose of the utility model is to provide a polysilicon grinding processing device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a polysilicon grinding processing device, comprising a base and a grinding table fixed above the base, and also comprising:

[0006] A cylinder bolted to the left and right sides of the top of the base, wherein the left and right sides of the top of the base are provided with clamping plates, and the output shaft of the cylinder is fixedly connected to the surface of the clamping plate;

[0007] A top plate is fixed above the base, and a hydraulic rod is arranged at the bottom of the base, a mobile device for controlling the forward and backward movement of the hydraulic rod is installed on the surface of the top plate, a mounting frame is bolted to the bottom end of the output shaft of the hydraulic rod, a mounting box is fixed to the bottom of the mounting frame, a positioning structure is arranged inside the mounting box, a grinding disc is installed in the middle of the bottom of the mounting box, and grinding wheels are arranged on the left and right sides of the bottom of the mounting box;

[0008] A fixed frame is fixed on the rear side of the grinding table, and a transmission structure is arranged inside the fixed frame. A mounting block is arranged on the rear side of the top of the grinding table, and a cleaning brush is fixed on the bottom of the mounting block. A waste box is placed on the front side of the base.

[0009] Preferably, the positioning structure includes an electric push rod, a lifting block, a movable block, a connecting rod, a through slot and a slider, the electric push rod is fixed above the installation box, and the output shaft of the electric push rod passes through the interior of the installation box, the lifting block is arranged above the interior of the installation box, and the bottom end of the electric push rod output shaft is fixedly connected to the lifting block, the movable block is slidably connected to the left and right sides of the bottom of the inner wall of the installation box, the connecting rod is hinged on the left and right sides of the lifting block, and the other end of the connecting rod is hinged to the surface of the movable block, the connecting rod is inclined as a whole, the through slot is opened on the left and right sides of the bottom of the installation box, the slider is slidably connected to the inside of the through slot, and the top of the slider is fixed to the movable block, and the top of the grinding wheel is fixedly connected to the bottom of the slider.

[0010] Preferably, limiting grooves are provided on both the front and rear sides of the inner wall of the through groove, limiting blocks are fixed on both the front and rear sides of the sliding block, and one side of the limiting block extends into the interior of the limiting groove and is slidably connected to the inner wall of the limiting groove.

[0011] Preferably, the height of the bottom of the grinding wheel is lower than the height of the bottom of the grinding disc.

[0012] Preferably, the transmission structure includes a threaded rod rotatably connected to the inside of a fixed frame, a motor fixed to the back of the fixed frame, a moving block slidably connected to the rear side of the inside of the fixed frame, and a movable frame fixed to the top of the moving block, the output shaft of the motor passes through the inside of the fixed frame and is fixedly connected to the rear end of the threaded rod, the threaded rod passes through the moving block and is threadedly connected to the moving block, and the front side of the movable frame is fixedly connected to the rear side of the mounting block.

[0013] Preferably, guide grooves are provided on both left and right sides of the inner wall of the fixing frame, and guide blocks slidably connected to the inner wall of the guide grooves are fixed on both left and right sides of the moving block.

[0014] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0015] The utility model has a multi-position grinding function. The device can grind the side edges of the polysilicon while grinding the polysilicon surface, thereby effectively processing the burrs on the polysilicon surface. The grinding position can also be adjusted according to the width of the polysilicon being grinded, thereby improving the practicality of the device. The device also has a cleaning function, which can clean the polysilicon debris generated after the polysilicon is polished, providing convenience for the staff's subsequent grinding work. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0017] Figure 2 It is a three-dimensional structural schematic diagram of another viewing angle of the utility model;

[0018] Figure 3 It is a three-dimensional schematic diagram of the base in the utility model;

[0019] Figure 4 It is a cross-sectional view of the installation box in the utility model;

[0020] Figure 5 It is a three-dimensional schematic diagram of the installation block in the utility model.

[0021] In the figure: 1. base; 2. grinding table; 3. cylinder; 4. clamping plate; 5. top plate; 6. hydraulic rod; 7. mounting frame; 8. mounting box; 9. adjustment structure; 91. electric push rod; 92. lifting block; 93. movable block; 94. connecting rod; 95. through groove; 96. slider; 10. grinding disc; 11. grinding wheel; 12. fixed frame; 13. transmission structure; 131. threaded rod; 132. motor; 133. moving block; 134. movable frame; 14. mounting block; 15. cleaning brush; 16. waste box; 17. limit groove; 18. limit block; 19. guide groove; 20. guide block. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-5As shown, the polysilicon grinding processing device comprises a base 1, a grinding table 2 is fixed on the top of the base 1, cylinders 3 are bolted to the left and right sides of the top of the base 1, clamping plates 4 are arranged on the left and right sides of the top of the base 1, and the output shaft of the cylinder 3 is fixedly connected to the surface of the clamping plate 4, a top plate 5 is fixed above the base 1, and a hydraulic rod 6 is arranged at the bottom of the base 1, a mobile device for controlling the forward and backward movement of the hydraulic rod 6 is installed on the surface of the top plate 5, a mounting frame 7 is bolted to the bottom end of the output shaft of the hydraulic rod 6, and the bottom of the mounting frame 7 A mounting box 8 is fixed, a positioning structure 9 is arranged inside the mounting box 8, a grinding disc 10 is installed in the middle of the bottom of the mounting box 8, and grinding wheels 11 are arranged on the left and right sides of the bottom of the mounting box 8, a fixing frame 12 is fixed on the rear side of the grinding table 2, and a transmission structure 13 is arranged inside the fixing frame 12, a mounting block 14 is arranged on the rear side of the top of the grinding table 2, and a cleaning brush 15 is fixed to the bottom of the mounting block 14, and the bottom of the cleaning brush 15 is in contact with the surface of the grinding table 2, and a waste box 16 is placed on the front side of the base 1.

[0024] The adjustment structure 9 includes an electric push rod 91, a lifting block 92, a movable block 93, a connecting rod 94, a through slot 95 and a slider 96. The electric push rod 91 is fixed on the top of the installation box 8, and the output shaft of the electric push rod 91 passes through the inside of the installation box 8. The lifting block 92 is arranged on the top of the inside of the installation box 8, and the bottom end of the output shaft of the electric push rod 91 is fixedly connected to the lifting block 92. The movable block 93 is slidably connected to the left and right sides of the bottom of the inner wall of the installation box 8. The connecting rod 94 is hinged on the left and right sides of the lifting block 92, and the other end of the connecting rod 94 is hinged to the surface of the movable block 93. The connecting rod 94 is arranged obliquely as a whole. The through slot 95 is opened on the left and right sides of the bottom of the installation box 8. The slider 96 is slidably connected to the inside of the through slot 95, and the top of the slider 96 is fixed to the movable block 93. The grinding wheel The top of 11 is fixedly connected to the bottom of the slider 96, and the front and rear sides of the inner wall of the through groove 95 are provided with limiting grooves 17, and the front and rear sides of the slider 96 are fixed with limiting blocks 18, and one side of the limiting block 18 extends to the inside of the limiting groove 17 and is slidably connected to the inner wall of the limiting groove 17. When grinding the upper surface of the polysilicon, the staff can open the electric push rod 91, and the output shaft of the electric push rod 91 drives the lifting block 92 below to move up and down, so that the connecting rod 94 drives the movable block 93 below to move, and the movable blocks 93 on both sides move in opposite directions, thereby adjusting the spacing between the grinding wheels 11 on both sides, and adjusting the position of the grinding wheel 11 according to the width of the polysilicon to be polished, so that the grinding wheel 11 can grind the edge of the polysilicon.

[0025] The height of the bottom of the grinding wheel 11 is lower than the height of the bottom of the grinding disc 10. When the grinding disc 10 descends to the surface of the polysilicon, the grinding wheels 11 on both sides of the grinding disc 10 will be at the edges of both sides of the polysilicon, thereby grinding the edge positions of the polysilicon.

[0026] The transmission structure 13 includes a threaded rod 131, a motor 132, a moving block 133 and a movable frame 134. The threaded rod 131 is rotatably connected to the inside of the fixed frame 12. The motor 132 is fixed to the back of the fixed frame 12, and the output shaft of the motor 132 passes through the inside of the fixed frame 12 and is fixedly connected to the rear end of the threaded rod 131. The moving block 133 is slidably connected to the rear side of the inside of the fixed frame 12, and the threaded rod 131 passes through the moving block 133 and is threadedly connected between the moving block 133. The movable frame 134 is fixed to the top of the moving block 133. The movable frame 134 is L-shaped as a whole, and the front side of the movable frame 134 is connected to the mounting block 14. The rear side is fixedly connected, the left and right sides of the inner wall of the fixed frame 12 are provided with guide grooves 19, the left and right sides of the movable block 133 are fixed with guide blocks 20, and the guide blocks 20 are located inside the guide grooves 19 and are slidably connected to the inner wall of the guide grooves 19. When the staff completes the processing of the polysilicon, the rear motor 132 can be turned on, and the threaded rod 131 rotates, so that the movable block 133 moves forward on the surface of the threaded rod 131, and the movable frame 134 pushes the mounting block 14 to move forward, and the cleaning brush 15 moves on the surface of the grinding table 2 to push the excess waste on the surface of the grinding table 2 into the waste box 16 on the front side.

[0027] Working principle: When the staff needs to grind the polysilicon, the staff will place the polysilicon to be polished on the top of the grinding table 2, and then the staff can open the cylinders 3 on both sides, and the output shafts of the cylinders 3 push the clamping plates 4 to move towards each other, and the clamping plates 4 on both sides are attached to the two sides of the polysilicon to clamp and fix the polysilicon. After the fixation is completed, the staff can open the upper hydraulic rod 6, and the output shaft of the hydraulic rod 6 pushes the lower mounting frame 7 to descend, so that the grinding disc 10 moves downward. When the grinding disc 10 is attached to the surface above the polysilicon, the staff will open the electric push rod 91 at this time, so that the grinding wheels 11 on both sides will move, and the staff will adjust the grinding wheel 11 according to the grinding wheel 11. The position of the grinding wheel 11 is adjusted according to the width of the polysilicon. When the grinding wheel 11 contacts the edges of both sides of the polysilicon, the staff opens the grinding disc 10 and the grinding wheel 11 to make them rotate. The staff controls the mobile device to make the mounting box 8 reciprocate in the front and rear directions, thereby grinding the surface and edges of the polysilicon. After grinding, the staff can remove the polysilicon, and then turn on the rear motor 132 to move the mounting block 14 to the front side, and use the cleaning brush 15 to push the polysilicon debris on the surface of the grinding table 2 into the waste box 16 on the front side, and then the staff can continue to grind the polysilicon.

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A polysilicon grinding and processing device, comprising a base (1) and a grinding table (2) fixed above the base (1), characterized in that: Also includes: A cylinder (3) is bolted to the left and right sides of the top of the base (1), and a clamping plate (4) is provided on both the left and right sides of the top of the base (1), and the output shaft of the cylinder (3) is fixedly connected to the surface of the clamping plate (4); A top plate (5) is fixed above the base (1), and a hydraulic rod (6) is arranged at the bottom of the base (1); a mobile device for controlling the forward and backward movement of the hydraulic rod (6) is installed on the surface of the top plate (5); a mounting frame (7) is bolted to the bottom end of the output shaft of the hydraulic rod (6); a mounting box (8) is fixed to the bottom of the mounting frame (7); a positioning structure (9) is arranged inside the mounting box (8); a grinding disc (10) is installed in the middle of the bottom of the mounting box (8), and grinding wheels (11) are arranged on both left and right sides of the bottom of the mounting box (8); A fixing frame (12) is fixed on the rear side of the grinding table (2), and a transmission structure (13) is arranged inside the fixing frame (12); a mounting block (14) is arranged on the rear side of the top of the grinding table (2), and a cleaning brush (15) is fixed on the bottom of the mounting block (14); and a waste box (16) is placed on the front side of the base (1).

2. The polysilicon polishing device according to claim 1, characterized in that: The positioning structure (9) comprises an electric push rod (91), a lifting block (92), a movable block (93), a connecting rod (94), a through slot (95) and a sliding block (96); the electric push rod (91) is fixed above the installation box (8), and the output shaft of the electric push rod (91) penetrates into the interior of the installation box (8); the lifting block (92) is arranged above the interior of the installation box (8), and the bottom end of the output shaft of the electric push rod (91) is fixedly connected to the lifting block (92); the movable block (93) is slidably connected to the installation box (8) The left and right sides of the bottom of the inner wall, the connecting rod (94) is hinged on the left and right sides of the lifting block (92), and the other end of the connecting rod (94) is hinged to the surface of the movable block (93), the connecting rod (94) is arranged obliquely as a whole, the through groove (95) is opened on the left and right sides of the bottom of the installation box (8), the sliding block (96) is slidably connected inside the through groove (95), and the top of the sliding block (96) is fixed to the movable block (93), and the top of the grinding wheel (11) is fixedly connected to the bottom of the sliding block (96).

3. The polysilicon polishing device according to claim 2, characterized in that: Limiting grooves (17) are provided on both the front and rear sides of the inner wall of the through groove (95), and limiting blocks (18) are fixed on both the front and rear sides of the sliding block (96), and one side of the limiting block (18) extends into the interior of the limiting groove (17) and is slidably connected to the inner wall of the limiting groove (17).

4. The polysilicon polishing device according to claim 1, characterized in that: The height of the bottom of the grinding wheel (11) is lower than the height of the bottom of the grinding disc (10).

5. The polysilicon polishing device according to claim 1, characterized in that: The transmission structure (13) comprises a threaded rod (131) rotatably connected to the interior of a fixed frame (12), a motor (132) fixed to the back of the fixed frame (12), a moving block (133) slidably connected to the rear side of the interior of the fixed frame (12), and a movable frame (134) fixed to the top of the moving block (133); the output shaft of the motor (132) penetrates into the interior of the fixed frame (12) and is fixedly connected to the rear end of the threaded rod (131); the threaded rod (131) penetrates the moving block (133) and is threadedly connected to the moving block (133); and the front side of the movable frame (134) is fixedly connected to the rear side of the mounting block (14).

6. The polysilicon polishing device according to claim 5, characterized in that: The inner wall of the fixed frame (12) is provided with guide grooves (19) on both sides, and the movable block (133) is fixed with guide blocks (20) slidably connected to the inner wall of the guide groove (19) on both sides.

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