Vacuum breaking device for wafer outlet chamber of vacuum system

Abstract

The utility model relates to the technical field of PVD (Physical Vapor Deposition) coating, in particular to a vacuum breaking device for a film outlet chamber of a vacuum system, which comprises a vacuum chamber, upper inflating components, lower inflating components and an inflating pipeline, a vacuum chamber cover is arranged on the vacuum chamber, the upper inflating components are arranged on the front, back, left and right sides of the vacuum chamber cover, and the lower inflating components are arranged on the upper inflating components. A lower inflation assembly and an inflation pipeline are arranged at the position, opposite to the upper inflation assembly, of the bottom wall of the vacuum cavity, and the inflation pipeline is communicated with the vacuum cavity through the upper inflation assembly and the lower inflation assembly. According to the vacuum breaking device, the paired upper and lower air inflation assemblies are correspondingly arranged, so that the air inflation efficiency is improved, the instantaneous air pressure difference of the vacuum chamber is reduced, and the air inflation smoothness and uniformity are improved; according to the magnetron sputtering coating device, rapid vacuum breaking of a wafer outlet chamber in a magnetron sputtering coating system is achieved, meanwhile, intense impact of airflow on a battery piece on a carrier plate in a vacuum cavity can be eliminated, the phenomena of silicon wafer deviation, fragmentation and the like of the battery piece on the carrier plate are avoided, and continuous production of the magnetron sputtering coating device is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of PVD coating, in particular to a vacuum breaking device used in a film discharge chamber of a vacuum system. Background Art

[0002] The magnetron sputtering coating equipment includes a loading platform, C1 film inlet chamber, C2 film inlet isolation chamber, C3 film inlet buffer chamber, C4 process chamber 1, C5 process chamber 2, C6 film outlet buffer chamber, C7 film outlet isolation chamber, C8 film outlet chamber, and a loading platform; the entire magnetron sputtering coating equipment operates in a vacuum environment, and the cells to be coated are placed on the frozen film carrier and enter from the C1 film inlet chamber and exit from the C8 film outlet chamber. Therefore, when the carrier enters and exits the magnetron sputtering coating equipment, the film inlet chamber and the film outlet chamber of the equipment need to be broken through. The time for C1 to break through the film inlet chamber and C8 to break through the air directly affects the production cycle of the equipment. In order to shorten the production cycle time and increase the output, the diameter of the inflation valve is generally enlarged, and the air flow is directly filled into the vacuum chamber through the inflation valve and then diverted through the metal baffle to achieve the purpose of breaking through the vacuum chamber.

[0003] However, the airflow after diversion in the prior art is still fast and has a strong impact, which can easily blow up dust in the vacuum chamber and blow off or break the battery cells placed on the coated carrier, seriously affecting the equipment output and product quality, and causing waste of raw materials and increased production costs. Utility Model Content

[0004] In view of the shortcomings of the existing background technology, the purpose of the utility model is to provide a simple-structured and easy-to-use air-breaking device for the film discharge chamber of a vacuum system. In the air-breaking device of the utility model, pairs of upper and lower inflation components are arranged correspondingly, which improves the inflation efficiency and reduces the instantaneous air pressure difference in the vacuum chamber, thereby improving the smoothness and uniformity of the inflation; while realizing the rapid air-breaking of the film discharge chamber in the magnetron sputtering coating system, it can eliminate the violent impact of the airflow on the battery cells on the carrier board in the vacuum chamber, avoid the occurrence of silicon wafer offset, fragmentation, etc. on the battery cells on the carrier board, and realize the continuous production of the magnetron sputtering coating equipment.

[0005] To achieve the above, the technical solution of the utility model is: a breaking device for a film discharge chamber of a vacuum system, comprising a vacuum chamber, and also comprising an upper inflatable component, a lower inflatable component and an inflatable pipe, wherein a vacuum chamber cover is provided on the vacuum chamber, and upper inflatable components are arranged on the front, back, left and right sides of the vacuum chamber cover, and a lower inflatable component and an inflatable pipe are arranged on the bottom wall of the vacuum chamber and at a position opposite to the upper inflatable component, and the inflatable pipe is connected to the vacuum chamber through the upper inflatable component and the lower inflatable component respectively.

[0006] Furthermore, a filling component is provided in the vacuum chamber, and the filling component is arranged on the inner walls on the left and right sides of the vacuum chamber and is connected to the vacuum chamber.

[0007] Furthermore, the upper inflation assembly includes an upper air distribution plate, which is arranged on the inner wall of the vacuum chamber cover, and the upper air distribution plate is arranged along the front, back, left and right parts of the inner wall of the vacuum chamber cover.

[0008] Furthermore, the upper inflation assembly also includes an upper guide plate, which is disposed in the vacuum chamber cover and arranged along four sides of the vacuum chamber cover, with a spacing between the upper guide plate and the upper air distribution plate.

[0009] Furthermore, the length of the upper guide plate is smaller than that of the upper air distribution plate, and the air distribution holes are evenly distributed on the upper air distribution plate.

[0010] Furthermore, the lower inflation assembly includes a lower air distribution plate, which is arranged on the inner walls around the vacuum chamber, and the position of the lower air distribution plate corresponds to that of the upper air distribution plate.

[0011] Furthermore, the lower inflation assembly also includes a lower guide plate, which is installed on the bottom plate in the vacuum chamber. The lower guide plates are arranged along the four walls of the vacuum chamber, and a gap is arranged between the lower guide plate and the lower air distribution plate.

[0012] Furthermore, the length of the lower air guide plate is smaller than that of the lower air distribution plate, and the air distribution holes are evenly distributed on the lower air distribution plate.

[0013] Furthermore, the inflation pipe includes an upper inflation pipe, a lower inflation pipe and an inflation valve, the upper inflation pipe is located above the outer side of the vacuum chamber cover, and is connected to the upper inflation assembly through the inflation port on the vacuum chamber cover; the lower inflation pipe is located below the outer side of the vacuum chamber and is arranged opposite to the upper inflation pipe, and the lower inflation pipe is connected to the lower inflation assembly through the inflation port at the bottom of the vacuum chamber.

[0014] Furthermore, the upper inflation pipe and the lower inflation pipe are connected through a vertical pipe arranged outside the vacuum chamber and at a certain distance from the vacuum chamber. The upper inflation pipe and the vertical pipe, as well as the lower inflation pipe and the vertical pipe are connected through an inflation valve, and the inner diameters of the upper inflation pipe and the lower inflation pipe are both larger than the inner diameter of the inflation valve.

[0015] The advantages of adopting the technical solution of the utility model are:

[0016] In the utility model, the upper and lower inflation components are arranged in pairs corresponding to each other, which improves the inflation efficiency and reduces the instantaneous air pressure difference in the vacuum chamber, thereby improving the smoothness and uniformity of the inflation; while realizing the rapid air breaking of the film discharge chamber in the magnetron sputtering coating system, it can eliminate the violent impact of the airflow on the battery cells on the carrier board in the vacuum chamber, avoid the occurrence of silicon wafer offset, fragments and the like on the battery cells on the carrier board, and realize the continuous production of the magnetron sputtering coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 This is a schematic diagram of the overall structure of the air-breaking device of the utility model;

[0019] Figure 2 This is a top view schematic diagram of the air-breaking device of the utility model;

[0020] Figure 3 This is a schematic diagram of the structure of the upper inflatable component of the utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the lower inflation component of the utility model;

[0022] Figure 5 This is a schematic diagram of the filling component structure of the utility model.

[0023] The marks in the above figure are respectively: 1. vacuum chamber; 11. vacuum chamber cover; 2. upper inflation assembly; 21. upper air distribution plate; 22. upper guide plate; 3. lower inflation assembly; 31. lower air distribution plate; 32. lower guide plate; 4. inflation pipe; 41. upper inflation pipe; 42. lower inflation pipe; 43. inflation valve; 44. vertical pipe; 5. filling assembly; 6. air intake filter; 7. air intake valve; 8. main inflation pipe. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0025] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0026] like Figures 1 to 5 As shown, a breaking device for a film discharge chamber of a vacuum system includes a vacuum chamber 1, characterized in that it also includes an upper inflatable component 2, a lower inflatable component 3 and an inflating pipe 4, a vacuum chamber cover 11 is provided on the vacuum chamber 1, and the upper inflatable components 2 are arranged in front, behind, left and right of the vacuum chamber cover 11, and the lower inflatable component 3 and the inflating pipe 4 are arranged on the bottom wall of the vacuum chamber 1 and at a position opposite to the upper inflatable component 2, and the inflating pipe 4 is connected to the vacuum chamber 1 through the upper inflatable component 2 and the lower inflatable component 3 respectively.

[0027] In the utility model, the upper and lower inflation components are arranged in pairs corresponding to each other, which improves the inflation efficiency and reduces the instantaneous air pressure difference in the vacuum chamber, thereby improving the smoothness and uniformity of the inflation; while realizing the rapid air breaking of the film discharge chamber in the magnetron sputtering coating system, it can eliminate the violent impact of the airflow on the battery cells on the carrier board in the vacuum chamber, avoid the occurrence of silicon wafer offset, fragments and the like on the battery cells on the carrier board, and realize the continuous production of the magnetron sputtering coating equipment.

[0028] A filling assembly 5 is provided in the vacuum chamber 1 . The filling assembly 5 is arranged on the inner walls on the left and right sides of the vacuum chamber 1 and is communicated with the vacuum chamber 1 .

[0029] The upper gas-filling assembly 2 includes an upper gas-distributing plate 21, which is disposed on the inner wall of the vacuum chamber cover 11, and is disposed along the front, back, left, and right portions of the inner wall of the vacuum chamber cover 11. The upper gas-distributing assembly 2 also includes an upper guide plate 22, which is disposed in the vacuum chamber cover 11, and is disposed along the four sides of the vacuum chamber cover 11, with a spacing between the upper guide plate 22 and the upper gas-distributing plate 21. The length of the upper guide plate 22 is less than that of the upper gas-distributing plate 21, and the upper gas-distributing plate 21 has gas-distributing holes evenly distributed thereon.

[0030] The lower gas-filling assembly 3 includes a lower gas distribution plate 31, which is arranged on the inner walls around the vacuum chamber 1, and the position of the lower gas distribution plate 31 corresponds to that of the upper gas distribution plate 21. The lower gas-filling assembly 3 also includes a lower guide plate 32, which is installed on the bottom plate in the vacuum chamber 1, and the lower guide plates 32 are arranged along the four walls of the vacuum chamber 1, and a gap is arranged between the lower guide plates 32 and the lower gas distribution plate 31. The length of the lower guide plate 32 is less than that of the lower gas distribution plate 31, and the gas distribution holes are evenly distributed on the lower gas distribution plate 31.

[0031] The inflation pipe 4 includes an upper inflation pipe 41, a lower inflation pipe 42 and an inflation valve 43. The upper inflation pipe 41 is located above the outer side of the vacuum chamber cover, and is connected to the upper inflation component 2 through the inflation port on the vacuum chamber cover; the lower inflation pipe 42 is located below the outer side of the vacuum chamber and is arranged opposite to the upper inflation pipe, and the upper inflation pipe 41 of the lower inflation pipe 42 is connected to the lower inflation component 3 through the inflation port at the bottom of the vacuum chamber.

[0032] The upper inflation pipe 41 and the lower inflation pipe 42 are connected through a vertical pipe 44 which is arranged outside the vacuum chamber and at a certain distance from the vacuum chamber. The upper inflation pipe 41 and the vertical pipe 44 as well as the lower inflation pipe 42 and the vertical pipe 44 are connected through an inflation valve 43. The inner diameters of the upper inflation pipe 41 and the lower inflation pipe 42 are both larger than the inner diameter of the inflation valve 43.

[0033] The air-breaking device also includes an air intake filter 6, an air intake valve 7 and a main air-inflating pipe 8. The air intake filter 6 and the air intake valve 7 are both installed on the main air-inflating pipe 8. The main air-inflating pipe 8 is connected to the vertical pipe 44. The atmosphere and CDA enter the main air-inflating pipe through the air intake filter and the air intake valve, and then are diverted through the vertical pipe 44 to enter the upper air-inflating pipe and the lower air-inflating pipe respectively.

[0034] Specifically, the utility model is used for the air-breaking device of the film discharge chamber of the vacuum system, which includes a pair of upper air-inflating components arranged on the inner side of the vacuum chamber cover and arranged front, back, left, and right, a pair of lower air-inflating components arranged on the bottom wall of the vacuum chamber and arranged opposite to the upper air-inflating components, and a filling component arranged on the left and right parts of the vacuum chamber and connected to the inner wall of the vacuum chamber; the upper air-inflating component includes an upper air-distributing plate arranged on the inner wall of the vacuum chamber cover and distributed front, back, left, and right, an upper guide plate located on the inner wall of the vacuum chamber cover and at a certain distance from the upper air-distributing plate, and a filling component located above the outer side of the vacuum chamber cover. And an upper inflation pipe connected to the inflation port on the vacuum chamber cover; the lower inflation component includes a lower air distribution plate arranged on the inner wall of the vacuum chamber and opposite to the upper air distribution plate, a lower guide plate located on the inner wall of the vacuum chamber and at a certain distance from the lower air distribution plate, and a lower inflation pipe located at the lower outer side of the vacuum chamber and opposite to the upper inflation pipe; the upper inflation pipe and the lower inflation pipe are connected through a vertical pipe arranged outside the vacuum chamber and at a certain distance from the vacuum chamber, and are connected to an inflation valve whose inner diameter is smaller than that of the upper and lower inflation pipes.

[0035] The implementation principle of the air-breaking device for the film discharge chamber of the vacuum system of the utility model is as follows: the atmosphere and CDA enter the main air-charging pipe through the air intake filter and the air intake valve and then are split and enter the upper air-charging pipe and the lower air-charging pipe respectively; after the airflow enters the upper air-charging component through the upper air-charging pipe, it is guided by the upper guide plate and then evenly enters the vacuum chamber through the air distribution holes evenly distributed around the upper air distribution plate; the airflow enters the lower air-charging component through the lower air-charging pipe, the airflow first passes through the lower air-charging baffle, and then is guided by the lower guide plate and then evenly enters the vacuum chamber through the air distribution holes evenly distributed around the upper air distribution plate; after the airflow enters the vacuum chamber through the upper and lower air-charging components, it is counteracted to the filling components distributed on the left and right positions of the vacuum chamber, so that the flow rate of the airflow is further reduced, and finally the entire vacuum chamber is stably covered, and the vacuum chamber is completed.

[0036] In the utility model, the upper and lower inflation components are arranged in pairs corresponding to each other, which improves the inflation efficiency and reduces the instantaneous air pressure difference in the vacuum chamber, thereby improving the smoothness and uniformity of the inflation, and the inner diameter of the inflation pipe is larger than the diameter of the air inlet valve, so that the flow velocity of the air flow is reduced in the process of entering the inflation pipe, thereby increasing the air-breaking speed and reducing the impact of the air flow on the vacuum chamber.

[0037] The utility model adopts the reasonable structural setting of the air distribution plate. After the airflow enters the upper and lower inflation components, it enters the inner cavity of the vacuum chamber from the reasonably distributed air distribution holes. The airflow velocity is further reduced, and the synchronization of the pressure increase process in various directions and positions in the vacuum chamber is guaranteed to be better. The drilling holes of the air distribution plate are reasonably distributed, so that the gas can enter the vacuum chamber from the drilling holes in various directions at the same time. The synchronization of the pressure increase process in various directions and positions in the vacuum chamber is better, so the instantaneous pressure difference between various areas and directions in the vacuum chamber is smaller, achieving the purpose of smooth air breaking. The reasonable layout of the guide plate can not only make the airflow pass through the air distribution plate evenly, but also can well control the volume of the vacuum chamber, increase the vacuum beat and reduce the inflation time, and improve the production beat of the equipment.

[0038] The utility model provides a device for breaking air in a discharge chamber of a vacuum system, which not only realizes rapid breaking air in a discharge chamber of a magnetron sputtering coating system, but also eliminates the violent impact of airflow on the battery cells on a carrier plate in the vacuum chamber, thereby avoiding the occurrence of silicon wafer offset, fragmentation, etc. on the battery cells on the carrier plate, and realizing continuous production of magnetron sputtering coating equipment.

[0039] A person skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

[0040] Therefore, any omission, modification, equivalent substitution, improvement, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A vacuum breaking device for a film discharge chamber of a vacuum system, comprising a vacuum chamber (1), characterized in that: The vacuum chamber (1) further comprises an upper inflation component (2), a lower inflation component (3) and an inflation pipe (4); a vacuum chamber cover (11) is provided on the vacuum chamber (1); the upper inflation component (2) is arranged on the front, back, left and right sides of the vacuum chamber cover (11); the lower inflation component (3) and the inflation pipe (4) are arranged on the bottom wall of the vacuum chamber (1) and at a position opposite to the upper inflation component (2); the inflation pipe (4) is connected to the vacuum chamber (1) through the upper inflation component (2) and the lower inflation component (3), respectively.

2. A vacuum breaking device for a film discharge chamber of a vacuum system as claimed in claim 1, characterized in that: A filling assembly (5) is provided in the vacuum chamber (1); the filling assembly (5) is arranged on the inner walls on the left and right sides of the vacuum chamber (1) and is in communication with the vacuum chamber (1).

3. A vacuum breaking device for a film discharge chamber of a vacuum system as claimed in claim 2, characterized in that: The upper inflation component (2) comprises an upper air distribution plate (21), which is arranged on the inner wall of the vacuum chamber cover (11), and the upper air distribution plate (21) is arranged along the front, back, left and right parts of the inner wall of the vacuum chamber cover (11).

4. A vacuum breaking device for a film discharge chamber of a vacuum system as claimed in claim 3, characterized in that: The upper inflation assembly (2) further comprises an upper guide plate (22), which is arranged in the vacuum chamber cover (11) and is arranged along the four sides of the vacuum chamber cover (11), with a spacing being provided between the upper guide plate (22) and the upper air distribution plate (21).

5. A vacuum breaking device for a film discharge chamber of a vacuum system as claimed in claim 4, characterized in that: The length of the upper guide plate (22) is smaller than the length of the upper air distribution plate (21), and the air distribution holes are evenly distributed on the upper air distribution plate (21).

6. A vacuum breaking device for a film discharge chamber of a vacuum system according to any one of claims 3 to 5, characterized in that: The lower inflation assembly (3) comprises a lower air distribution plate (31), which is arranged on the inner wall of the vacuum chamber (1), and the position of the lower air distribution plate (31) corresponds to that of the upper air distribution plate (21).

7. A vacuum breaking device for a film discharge chamber of a vacuum system as claimed in claim 6, characterized in that: The lower inflation assembly (3) further comprises a lower guide plate (32), the lower guide plate (32) being mounted on a bottom plate in the vacuum chamber (1), and a gap being provided between the lower guide plate (32) and the lower air distribution plate (31).

8. The air-breaking device for a film discharge chamber of a vacuum system according to claim 7, characterized in that: The length of the lower guide plate (32) is smaller than the length of the lower air distribution plate (31), and the air distribution holes are evenly distributed on the lower air distribution plate (31).

9. A vacuum breaking device for a film discharge chamber of a vacuum system as claimed in claim 8, characterized in that: The inflation pipe (4) comprises an upper inflation pipe (41), a lower inflation pipe (42) and an inflation valve (43); the upper inflation pipe (41) is located above the outer side of the vacuum chamber cover, and is connected to the upper inflation component (2) via an inflation port on the vacuum chamber cover; the lower inflation pipe (42) is located below the outer side of the vacuum chamber and is arranged opposite to the upper inflation pipe; the lower inflation pipe (42) and the upper inflation pipe (41) are connected to the lower inflation component (3) via an inflation port at the bottom of the vacuum chamber.

10. A vacuum breaking device for a film discharge chamber of a vacuum system as claimed in claim 9, characterized in that: The upper inflation pipe (41) and the lower inflation pipe (42) are connected via a vertical pipe (44) disposed outside the vacuum chamber and at a certain distance from the vacuum chamber; the upper inflation pipe (41) and the vertical pipe (44), and the lower inflation pipe (42) and the vertical pipe (44) are both connected via an inflation valve (43); and the inner diameters of the upper inflation pipe (41) and the lower inflation pipe (42) are both larger than the inner diameter of the inflation valve (43).

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