Graphite surface anti-oxidation coating coating device for semiconductor industry

Abstract

The utility model relates to the field of semiconductors, and discloses a graphite surface anti-oxidation coating coating device for the semiconductor industry, which comprises a base, a graphite block movably arranged on the top of the base, a coating device arranged on the top of the graphite block, a support table fixedly arranged on one side of the top of the base corresponding to the graphite block, and a coating device arranged on the other side of the base, three sets of fans in the surrounding plate and the coating device synchronously slide towards one side, the coating device conducts coating firstly and then conducts rapid air drying through the three sets of fans, the structure is simple and practical, the natural air drying time of an anti-oxidation coating is shortened, the stability of the anti-oxidation coating is improved, and the production efficiency is improved. And meanwhile, the three groups of fans are used for synchronously blowing, so that the air drying consistency of coating is ensured, and the quality of the coated graphite block is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a graphite surface anti-oxidation coating coating device used in the semiconductor industry. Background Art

[0002] In the semiconductor industry, graphite materials are mainly used to manufacture heaters and thermal insulation components in the wafer growth process and as dielectric materials for wafer processing. Because graphite has excellent conductivity, thermal stability and chemical stability, it can work stably under high temperature conditions and provide a uniform thermal environment for the growth of semiconductor materials such as silicon wafers. In addition, graphite will not pollute semiconductor materials, ensuring the high purity and high performance of semiconductor products. Although graphite materials have good chemical stability, they are easy to react with oxygen at high temperatures, resulting in performance degradation. Therefore, it is very necessary to treat the graphite surface with an anti-oxidation coating. First of all, the anti-oxidation coating can effectively prevent oxygen from diffusing into the graphite matrix. This coating acts as a barrier to reduce the permeability of oxygen, thereby protecting the graphite from erosion by the oxidizing environment. After the graphite is coated, it is necessary to wait for natural drying and then remove the graphite. The waiting process is relatively long, so it will delay a certain amount of work efficiency. For this reason, we propose a graphite surface anti-oxidation coating coating device for the semiconductor industry. Utility Model Content

[0003] 1. Technical issues to be solved

[0004] In view of the deficiencies in the prior art, the utility model provides a graphite surface anti-oxidation coating coating device for the semiconductor industry, which solves the above-mentioned problems.

[0005] (II) Technical solution

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a graphite surface anti-oxidation coating coating device for the semiconductor industry, comprising a base, a graphite block is movably mounted on the top of the base, a coating device is arranged on the top of the graphite block, a coating device is arranged on the top of the base, a support is fixedly mounted on one side of the graphite block corresponding to the top of the base, a cylinder is fixed on the top of the support, two sets of slide grooves are arranged on the base, and also includes:

[0007] A quick blow-drying component is arranged on the top of the coating device and is used for quickly air-drying the anti-oxidation coating applied on the surface of the graphite block. The quick blow-drying component includes a slider, a bracket, a coupling and a surrounding plate. The two groups of slide grooves are slidably connected with sliders, and the top of the slider is fixedly connected with a vertical bracket. The two groups of brackets are fixedly connected with couplings on the corresponding sides and near the top, and a surrounding plate is fixedly connected between the two groups of couplings.

[0008] A stabilizing assembly is disposed on top of the base to prevent the graphite block from shifting when being coated by the coating device.

[0009] Preferably, sliding grooves are provided at positions corresponding to the two side edges of the top of the base.

[0010] Preferably, a side plate is fixedly connected to the side of the surrounding plate facing away from the cylinder, and the bottom of the side plate is fixedly connected to the top of the coating device.

[0011] Preferably, the quick blow-drying component also includes a push plate and a fan, the push plate is fixedly connected to the piston rod on the cylinder, both ends of the push plate are fixedly connected to integrated extension plates and are respectively fixedly connected to one side of the two groups of brackets, and three groups of fans equidistantly distributed are fixedly arranged between the inner walls on both sides of the surrounding plate.

[0012] Preferably, the stabilizing assembly comprises an empty groove, a movable shaft, a blocking block and a push rod. An empty groove is provided on the top of the base corresponding to the side of the graphite block. A movable shaft is fixed between the inner walls on both sides of the empty groove. A blocking block is rotatably sleeved on the movable shaft. A vertical push rod is fixed on the bottom inner wall of the empty groove.

[0013] Preferably, one side of the blocking block is completely in contact with the end of the graphite block.

[0014] (III) Beneficial effects

[0015] Compared with the prior art, the utility model provides a graphite surface anti-oxidation coating coating device for the semiconductor industry, which has the following beneficial effects:

[0016] 1. The semiconductor industry uses a graphite surface anti-oxidation coating coating device, which slides to one side synchronously with the coating device through three sets of fans in the surrounding plate. The coating is first coated by the coating device and then quickly dried by three sets of fans. This structure is simple and practical, which reduces the natural drying time of the anti-oxidation coating and improves the working efficiency to a certain extent. At the same time, the three sets of fans blow air synchronously to ensure the consistency of the drying of the coating and improve the quality of the graphite block after coating.

[0017] 2. The graphite surface anti-oxidation coating coating device for the semiconductor industry prevents the top of the graphite block from sliding on the base due to the forward force generated by the coating device when the graphite block is coated by the coating device by making the blocking block press against one end of the graphite block, thereby ensuring the stability of the coating device during operation and improving the operating efficiency during coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a side schematic diagram of the utility model;

[0019] Figure 2 This is a schematic diagram of the coating device of the utility model;

[0020] Figure 3 It is a top view schematic diagram of the utility model;

[0021] Figure 4 for Figure 2 A local enlarged schematic diagram of point A in the figure.

[0022] In the figure: 1. base; 2. graphite block; 3. coating device; 4. support platform; 5. cylinder; 6. slider; 7. bracket; 8. connecting shaft; 9. surrounding plate; 10. side plate; 11. slide groove; 12. push plate; 13. fan; 14. empty slot; 15. movable shaft; 16. blocking block; 17. push rod. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-4 A graphite surface anti-oxidation coating coating device for the semiconductor industry comprises a base 1, a graphite block 2 is movably mounted on the top of the base 1, a coating device 3 is arranged on the top of the graphite block 2, a support 4 is fixedly mounted on the top of the base 1 corresponding to one side of the graphite block 2, a cylinder 5 is fixedly arranged on the top of the support 4, two sets of slide grooves 11 are arranged on the base 1, and further comprises:

[0025] A quick drying component is arranged on the top of the coating device 3 and is used for quickly drying the anti-oxidation coating applied on the surface of the graphite block 2. The quick drying component includes a slider 6, a bracket 7, a connecting shaft 8 and a surrounding plate 9. The two groups of slide grooves 11 are slidably connected with the slider 6. The top of the slider 6 is fixedly connected with a vertical bracket 7. The two groups of brackets 7 are fixedly connected with the connecting shaft 8 on the corresponding side and near the top. The surrounding plate 9 is fixedly connected between the two groups of connecting shafts 8. The cylinder 5 on the support 4 is started, and the piston rod on the cylinder 5 is used to push the push plate 12 to one side. The two groups of extension plates on the push plate 12 are connected to the bracket 7 to drive the two groups of sliders 6 to slide to one side in the two groups of slide grooves 11 respectively.

[0026] The stabilizing assembly is arranged on the top of the base 1 to prevent the graphite block 2 from being displaced when being coated by the coating device 3 .

[0027] Slide grooves 11 are provided at the top of the base 1 at the positions corresponding to the two side edges. The two groups of sliders 6 connected by the two groups of brackets 7 slide in the two groups of slide grooves 11 respectively, ensuring the stability of the coating device 3 during coating and preventing the coating device 3 from shifting to the left and right during linear motion.

[0028] A side plate 10 is fixedly connected to the side of the surrounding plate 9 facing away from the cylinder 5, and the bottom of the side plate 10 is fixedly connected to the top of the coating device 3. When the coating device 3 at the bottom of the side plate 10 is moving and coating the top of the graphite block 2, the three sets of fans 13 in the surrounding plate 9 provide wind energy to the top of the graphite block 2 and dry the anti-oxidation coating just coated.

[0029] The quick drying component also includes a push plate 12 and a fan 13. The piston rod on the cylinder 5 is fixedly connected to the push plate 12. Both ends of the push plate 12 are fixedly connected to integrated extension plates and are respectively fixedly connected to one side of the two groups of brackets 7. Three groups of fans 13 are equidistantly distributed between the inner walls of the two sides of the surrounding plate 9. The surrounding plate 9 is connected to the bracket 7 through two groups of connecting shafts 8 and slides to one side at the top of the graphite block 2. The three groups of fans 13 in the surrounding plate 9 slide to one side synchronously with the coating device 3. The coating is first performed by the coating device 3 and then the three groups of fans 13 are quickly dried. This structure is simple and practical, which reduces the natural drying time of the antioxidant coating and improves a certain degree of operating efficiency. At the same time, the three groups of fans 13 blow air synchronously to ensure the consistency of the drying of the coating and improve the quality after coating.

[0030] The stabilizing component includes an empty groove 14, a movable shaft 15, a blocking block 16 and a push rod 17. An empty groove 14 is opened at the top of the base 1 corresponding to the side of the graphite block 2. A movable shaft 15 is fixed between the inner walls on both sides of the empty groove 14. A blocking block 16 is rotatably sleeved on the movable shaft 15. A vertical push rod 17 is fixed to the bottom inner wall of the empty groove 14. When in use, the graphite block 2 is first placed on the top of the base 1, and the blocking block 16 is rotated on the movable shaft 15. When the bottom of the blocking block 16 is rotated to fit with the top of the push rod 17, one side of the blocking block 16 is simultaneously fitted with the end of the graphite block 2 to prevent the graphite block 2 from being displaced by the force generated by the coating device 3 when rolling and coating on the top of the graphite block 2.

[0031] One side of the blocking block 16 is completely fitted with the end of the graphite block 2. By making the blocking block 16 abut against one end of the graphite block 2, the top of the graphite block 2 is prevented from sliding on the base 1 due to the forward force generated by the coating device 3 when being coated by the coating device 3, thereby ensuring the stability of the coating device 3 during operation and improving the operating efficiency during coating.

[0032] Working principle: When in use, first place the graphite block 2 on the top of the base 1, so that the blocking block 16 rotates on the movable shaft 15, and when it rotates until the bottom of the blocking block 16 is in contact with the top of the push rod 17, one side of the blocking block 16 is in contact with the end of the graphite block 2 at the same time, preventing the coating device 3 from rolling and coating on the top of the graphite block 2. The force generated by the graphite block 2 is displaced, and then the cylinder 5 on the support 4 is started, and the piston rod on the cylinder 5 is used to push the push plate 12 to one side. The two groups of extension plates on the push plate 12 are connected to the bracket 7 to drive the two groups of sliders 6 to slide to one side in the two groups of slide grooves 11 respectively. The surrounding plate 9 is connected to the bracket 7 through two groups of connecting shafts 8 to slide to one side on the top of the graphite block 2. When the coating device 3 at the bottom of the side plate 10 is moving and coating the top of the graphite block 2, the three groups of fans 13 in the surrounding plate 9 provide wind energy to the top of the graphite block 2 and dry the anti-oxidation coating that has just been coated.

[0033] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A graphite surface anti-oxidation coating coating device for the semiconductor industry, comprising a base (1), a graphite block (2) movably mounted on the top of the base (1), and a coating device (3) disposed on the top of the graphite block (2), characterized in that: The top of the base (1) is provided with a coating device (3), a support platform (4) is fixedly installed on one side of the top of the base (1) corresponding to the graphite block (2), a cylinder (5) is fixedly installed on the top of the support platform (4), two groups of slide grooves (11) are provided on the base (1), and the base (1) further comprises: A quick drying component is arranged on the top of the coating device (3) and is used for quickly drying the anti-oxidation coating applied on the surface of the graphite block (2). The quick drying component comprises a slider (6), a bracket (7), a connecting shaft (8) and a surrounding plate (9). The sliders (6) are slidably connected in the two groups of the slide grooves (11). The top of the slider (6) is fixedly connected with a vertical bracket (7). The two groups of brackets (7) are fixedly connected with a connecting shaft (8) on one side corresponding to each other and close to the top. The surrounding plate (9) is fixedly connected between the two groups of connecting shafts (8); A stabilizing component is arranged on the top of the base (1) to prevent the graphite block (2) from being displaced when being coated by the coating device (3).

2. The graphite surface anti-oxidation coating coating device for the semiconductor industry according to claim 1 is characterized in that: Slide grooves (11) are provided at positions corresponding to the two side edges of the top of the base (1).

3. The graphite surface anti-oxidation coating coating device for the semiconductor industry according to claim 1 is characterized in that: A side plate (10) is fixedly connected to the side of the surrounding plate (9) facing away from the cylinder (5), and the bottom of the side plate (10) is fixedly connected to the top of the coating device (3).

4. The graphite surface anti-oxidation coating coating device for the semiconductor industry according to claim 3 is characterized in that: The quick drying component also includes a push plate (12) and a fan (13); the piston rod on the cylinder (5) is fixedly connected to the push plate (12); both ends of the push plate (12) are fixedly connected to an integrated extension plate and are respectively fixedly connected to one side of the two groups of brackets (7); three groups of fans (13) are fixedly arranged between the inner walls on both sides of the surrounding plate (9) and are evenly distributed.

5. The graphite surface anti-oxidation coating coating device for the semiconductor industry according to claim 1 is characterized in that: The stabilizing component comprises an empty slot (14), a movable shaft (15), a blocking block (16) and a push rod (17); the top of the base (1) is provided with an empty slot (14) corresponding to the side of the graphite block (2); a movable shaft (15) is fixedly arranged between the inner walls on both sides of the empty slot (14); a blocking block (16) is rotatably sleeved on the movable shaft (15); and a vertical push rod (17) is fixedly arranged on the inner wall at the bottom of the empty slot (14).

6. The graphite surface anti-oxidation coating coating device for the semiconductor industry according to claim 5, characterized in that: One side of the blocking block (16) is completely in contact with the end of the graphite block (2).

Images