Evaporation auxiliary device with vapor cloud guiding function

Abstract

The utility model provides an evaporation auxiliary device with a steam cloud guiding function. The evaporation auxiliary device comprises a heating plate combination, a first connecting block and a second connecting block, wherein the first connecting block and the second connecting block are arranged at the two ends of the heating plate combination respectively; the heating plate combination comprises at least two heating plates which are arrayed in parallel, connecting columns are arranged at the two ends of each heating plate, and the heating plates are movably connected to the first connecting block and the second connecting block through the connecting columns; and the evaporation auxiliary device is suspended right above the evaporation boat and is clamped between the two electrodes. According to the evaporation auxiliary device, the steam cloud guiding function is achieved through flexible adjustment of the angle of the heating plate, the test period is shortened as much as possible while the sheet resistance uniformity is adjusted, the effective breadth of the sheet resistance of a product is improved, the molten metal splashing probability is reduced, and large-scale application and popularization are facilitated.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, and relates to an evaporation auxiliary device, in particular to an evaporation auxiliary device with a vapor cloud guiding function. Background Art

[0002] Composite current collectors are relative to single current collectors. They mainly use polymer materials such as PET / PP as the intermediate layer base film. Through vacuum coating and other processes, a composite material formed by a double-layer copper / aluminum conductive layer is deposited on the upper and lower surfaces of the base film. The specific preparation process and common problems are: the evaporation boat melts the fed metal wire through resistance heating to form a molten pool on the surface of the evaporation boat. Bubbles are generated inside the molten pool due to the decomposition of the evaporation boat material or the vaporization of the metal liquid, accompanied by rupture, which can easily cause irregular and large-scale splashing of metal droplets. These metal droplets splash onto the base film and cool down to form splash points. These splash points are too high and will cause abnormal shutdown of equipment during battery coating production. Therefore, it is necessary to reduce the probability of splashing to ensure the normal progress of production activities.

[0003] In addition, due to the low density of edge vapor cloud, the edge square resistance of the product obtained after conventional evaporation is high and cannot be used. It needs to be cut and scrapped subsequently, which significantly prolongs the processing time, increases manufacturing costs, and reduces economic benefits.

[0004] To this end, technicians in this field generally change the distance between the two evaporation sources or replace evaporation boats of different widths to match the uniformity of the square resistance, or increase the wire feeding amount at the edge to increase the deposited film thickness, thereby increasing the effective width of the square resistance, or use a secondary evaporation mechanism to solve the splashing problem.

[0005] However, the technical means of changing the distance between the two evaporation sources requires a long adjustment cycle, delays production, and the adjustment degree is limited, the effect is difficult to estimate, and it cannot solve the problem of thin film thickness at the evaporation edge, and the effective width of the product square resistance cannot be improved; the technical means of replacing evaporation boats of different widths brings about a limited adjustment degree, and the effect is also difficult to estimate, and it cannot solve the problem of thin film thickness at the evaporation edge, and the effective width of the product square resistance cannot be improved; the technical means of increasing the wire feed amount at the edge brings about a limited effective width of the product square resistance, which increases the thickness of the deposited aluminum layer in the non-film forming area of ​​the equipment, increases the risk of aluminum layer falling off, and only moderately adjusting the uniformity of the square resistance cannot reduce the probability of splashing; the technical means of using a two-stage evaporation mechanism also cannot improve the square resistance, and there is still much room for improvement.

[0006] It can be seen that how to provide an evaporation auxiliary device to shorten the test cycle as much as possible while adjusting the uniformity of the square resistance, increase the effective width of the product square resistance, and reduce the probability of metal liquid splashing has become an urgent problem that technical personnel in this field need to solve. Utility Model Content

[0007] In view of the shortcomings of the prior art, the purpose of the utility model is to provide an evaporation auxiliary device with a vapor cloud guiding function. The evaporation auxiliary device realizes the vapor cloud guiding function through flexible adjustment of the angle of the heating plate, shortens the test cycle as much as possible while adjusting the uniformity of the square resistance, increases the effective width of the product square resistance, reduces the probability of metal liquid splashing, and is conducive to large-scale promotion and application.

[0008] To achieve this purpose, the utility model adopts the following technical solutions:

[0009] The utility model provides an evaporation auxiliary device with a vapor cloud guiding function. The evaporation auxiliary device with a vapor cloud guiding function comprises a heating plate assembly and a first connecting block and a second connecting block respectively arranged at two ends of the heating plate assembly.

[0010] The heating plate combination comprises at least two heating plates in a parallel array, and both ends of each heating plate are provided with connecting columns, and the heating plate is movably connected to the first connecting block and the second connecting block through the connecting columns.

[0011] The evaporation auxiliary device is suspended above the evaporation boat and sandwiched between two electrodes.

[0012] In the present invention, the number of the heating plates is at least 2, for example, it can be 2, 3, 4, 5, 6, 7, 8, 9 or 10, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0013] The evaporation auxiliary device provided by the utility model flexibly connects the heating plate between the two connecting blocks, realizes the vapor cloud guiding function through the flexible adjustment of the plate surface angle, can accurately control the flow direction of the vapor cloud, solves the problem of thin film thickness at the edge, and improves the effective width of the product square resistance; heating plates at different angles are installed above the evaporation boat corresponding to the area with uneven square resistance, so that the square resistance uniformity can be adjusted, and at the same time, the heating plate combination is suspended just above the evaporation boat to play a good blocking role, thereby reducing the probability of metal liquid splashing, and this movable connection mode is easy to disassemble, and the heating plate can be flexibly replaced and adjusted according to the coating requirements, which is conducive to large-scale promotion and application.

[0014] Preferably, when the evaporation boat is located at the edge of the coating area, the surface of the heating plate corresponding to the top of the evaporation boat faces the edge of the coating area, and the angle between the surface of the heating plate and the horizontal plane is 0°-90°, for example, it can be 0°, 5°, 10°, 15°, 20°, 25°, 30°, 35°, 40°, 45°, 50°, 55°, 60°, 65°, 70°, 75°, 80°, 85° or 90°, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0015] Preferably, when the evaporation boat is located in the center of the coating area, the angle between the plate surface of the heating plate corresponding to the top of the evaporation boat and the horizontal plane is 0°-180°, for example, it can be 0°, 10°, 20°, 30°, 40°, 50°, 60°, 70°, 80°, 90°, 100°, 110°, 120°, 130°, 140°, 150°, 160°, 170° or 180°, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0016] Preferably, when the angle between the plate surface of the heating plate and the horizontal plane is ≠90°, the upper edge of the heating plate and the lower edge of the adjacent heating plate are located on the same vertical line, thereby further avoiding splashing of molten metal on the product.

[0017] Preferably, the plate surface of the heating plate and the surface of the connecting column are wrapped with graphite sheets, and the surface of the graphite sheets is coated with graphite emulsion.

[0018] Preferably, a graphite sheet is placed on the surface of the first connection block and the second connection block on one side in contact with the electrode.

[0019] In the utility model, the configuration of the graphite sheet and / or graphite emulsion limits the electrical contact mode to soft contact, thereby ensuring a good electrical contact effect and preventing poor contact.

[0020] Preferably, the thickness of the graphite sheet is 0.5-1.5 mm, for example, it can be 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm, 1 mm, 1.1 mm, 1.2 mm, 1.3 mm, 1.4 mm or 1.5 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0021] Preferably, the shape of the heating plate is any one of a rectangular, a trapezoidal or an elliptical shape, and more preferably a rectangular shape.

[0022] Preferably, a groove and / or a through hole is provided on one side surface of the first connecting block and the second connecting block which is in contact with the connecting column.

[0023] Preferably, the evaporation auxiliary device is suspended 10-50 mm above the evaporation boat, for example, it can be 10 mm, 15 mm, 20 mm, 25 mm, 30 mm, 35 mm, 40 mm, 45 mm or 50 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0024] The evaporation auxiliary device provided by the utility model is used for vacuum coating. The specific method includes: suspending the evaporation auxiliary device just above the evaporation boat and clamping it between two electrodes, and adjusting the flow direction of the vapor cloud by changing the angle between the plate surface of the heating plate and the horizontal plane.

[0025] On the one hand, an evaporation auxiliary device is suspended above the evaporation boat at the edge of the coating area, and the angle between the heating plate surface and the horizontal plane is adjusted to 0°-90° to guide the vapor cloud to the edge of the coating area and increase the edge film thickness of the product.

[0026] On the other hand, an evaporation auxiliary device is suspended above the evaporation boat in the center of the coating area, and the angle between the heating plate surface and the horizontal plane is adjusted to 0°-180° to guide the vapor cloud to the coating area, thereby improving the uniformity of the product's square resistance.

[0027] The numerical range described in the present invention not only includes the point values ​​listed above, but also includes any point values ​​between the above numerical ranges that are not listed. Due to space limitations and for the sake of simplicity, the present invention no longer exhaustively lists the specific point values ​​included in the range.

[0028] Compared with the prior art, the beneficial effects of the utility model are:

[0029] The evaporation auxiliary device provided by the utility model flexibly connects the heating plate between the two connecting blocks, realizes the vapor cloud guiding function through the flexible adjustment of the plate surface angle, can accurately control the flow direction of the vapor cloud, solves the problem of thin film thickness at the edge, and improves the effective width of the product square resistance; heating plates at different angles are installed above the evaporation boat corresponding to the area with uneven square resistance, so that the square resistance uniformity can be adjusted, and at the same time, the heating plate combination is suspended just above the evaporation boat to play a good blocking role, thereby reducing the probability of metal liquid splashing, and this movable connection mode is easy to disassemble, and the heating plate can be flexibly replaced and adjusted according to the coating requirements, which is conducive to large-scale promotion and application. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a schematic diagram of the structure of the evaporation auxiliary device provided by the utility model;

[0031] Figure 2 This is a cross-sectional view of the arrangement of the heating plates in the evaporation auxiliary device provided by the utility model;

[0032] Figure 3 It is a vapor cloud flow diagram of vacuum coating using the evaporation auxiliary device provided by the utility model;

[0033] Figure 4 This is a diagram of the vapor cloud flow direction in the vacuum coating method provided in Example 1.

[0034] Among them: 1-heating plate; 2-connecting column; 3-first connecting block; 4-second connecting block. DETAILED DESCRIPTION

[0035] It should be understood that, in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0036] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0037] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0038] Example 1

[0039] This embodiment provides an evaporation auxiliary device with a vapor cloud guiding function, such as Figure 1 As shown, the evaporation auxiliary device includes a heating plate combination and a first connecting block 3 and a second connecting block 4 respectively arranged at both ends of the heating plate combination; the heating plate combination includes 8 heating plates 1 in a parallel array, and each heating plate 1 is provided with connecting columns 2 at both ends, and the heating plate 1 is movably connected to the first connecting block 3 and the second connecting block 4 through the connecting columns 2; the evaporation auxiliary device is suspended directly above the evaporation boat and clamped between two electrodes.

[0040] In this embodiment, when the evaporation boat is located at the edge of the coating area, the surface of the heating plate 1 corresponding to the evaporation boat is oriented toward the edge of the coating area, and the angle between the surface of the heating plate 1 and the horizontal plane is 45°±15°; when the evaporation boat is located at the center of the coating area, the angle between the surface of the heating plate 1 corresponding to the evaporation boat and the horizontal plane is 75°±15°. When the angle between the surface of the heating plate 1 and the horizontal plane is ≠90°, the upper edge of the heating plate 1 and the lower edge of the adjacent heating plate 1 are located on the same vertical line (see Figure 2 ), avoiding the splashing of molten metal on the product.

[0041] In this embodiment, the plate surface of the heating plate 1 and the surface of the connecting column 2 are wrapped with a graphite sheet, and the surface of the graphite sheet is coated with graphite emulsion; a graphite sheet is placed on the surface of the first connecting block 3 and the second connecting block 4 on one side in contact with the electrode; the thickness of the graphite sheet is 1 mm.

[0042] In this embodiment, the surface of the heating plate 1 is rectangular; through holes are provided on the surfaces of the first connecting block 3 and the second connecting block 4 on one side in contact with the connecting column 2; and the evaporation auxiliary device is suspended 30 mm above the evaporation boat.

[0043] like Figure 3 As shown, the evaporation auxiliary device provided in this embodiment is used for vacuum coating. The specific method includes: suspending the evaporation auxiliary device just above the evaporation boat and clamping it between two electrodes, and adjusting the flow direction of the vapor cloud by changing the angle between the plate surface of the heating plate 1 and the horizontal plane.

[0044] On the one hand, an evaporation auxiliary device is suspended above the evaporation boat at the edge of the coating area, and the angle between the plate surface of the heating plate 1 and the horizontal plane is adjusted to 45°±15° to guide the steam cloud to the edge of the coating area and increase the edge film thickness of the product.

[0045] On the other hand, an evaporation auxiliary device is suspended above the evaporation boat in the center of the coating area, and the angle between the plate surface of the heating plate 1 and the horizontal plane is adjusted to 75°±15° to guide the vapor cloud to the coating area to improve the uniformity of the product's square resistance.

[0046] Example 2

[0047] This embodiment provides an evaporation auxiliary device with a vapor cloud guiding function, such as Figure 1As shown, the evaporation auxiliary device includes a heating plate combination and a first connecting block 3 and a second connecting block 4 respectively arranged at both ends of the heating plate combination; the heating plate combination includes 10 heating plates 1 in a parallel array, and each heating plate 1 is provided with connecting columns 2 at both ends, and the heating plate 1 is movably connected to the first connecting block 3 and the second connecting block 4 through the connecting columns 2; the evaporation auxiliary device is suspended directly above the evaporation boat and clamped between two electrodes.

[0048] In this embodiment, when the evaporation boat is located at the edge of the coating area, the surface of the heating plate 1 corresponding to the top of the evaporation boat faces the edge of the coating area, and the angle between the surface of the heating plate 1 and the horizontal plane is 60°±30°; when the evaporation boat is located at the center of the coating area, the angle between the surface of the heating plate 1 corresponding to the top of the evaporation boat and the horizontal plane is 150°±30°. When the angle between the surface of the heating plate 1 and the horizontal plane is ≠90°, the upper edge of the heating plate 1 and the lower edge of the adjacent heating plate 1 are located on the same vertical line (see Figure 2 ), avoiding the splashing of molten metal on the product.

[0049] In this embodiment, the plate surface of the heating plate 1 and the surface of the connecting column 2 are wrapped with a graphite sheet, and the surface of the graphite sheet is coated with graphite emulsion; a graphite sheet is placed on the surface of the first connecting block 3 and the second connecting block 4 on the side in contact with the electrode; the thickness of the graphite sheet is 0.5 mm.

[0050] In this embodiment, the surface of the heating plate 1 is rectangular; through holes are provided on the surfaces of the first connecting block 3 and the second connecting block 4 on one side in contact with the connecting column 2; and the evaporation auxiliary device is suspended 10 mm above the evaporation boat.

[0051] like Figure 3 As shown, the evaporation auxiliary device provided in this embodiment is used for vacuum coating. The specific method includes: suspending the evaporation auxiliary device just above the evaporation boat and clamping it between two electrodes, and adjusting the flow direction of the vapor cloud by changing the angle between the plate surface of the heating plate 1 and the horizontal plane.

[0052] On the one hand, an evaporation auxiliary device is suspended above the evaporation boat at the edge of the coating area, and the angle between the plate surface of the heating plate 1 and the horizontal plane is adjusted to 60°±30° to guide the steam cloud to the edge of the coating area and increase the edge film thickness of the product.

[0053] On the other hand, an evaporation auxiliary device is suspended above the evaporation boat in the center of the coating area, and the angle between the plate surface of the heating plate 1 and the horizontal plane is adjusted to 150°±30° to guide the vapor cloud to the coating area to improve the uniformity of the product's square resistance.

[0054] Example 3

[0055] This embodiment provides an evaporation auxiliary device with a vapor cloud guiding function, such as Figure 1 As shown, the evaporation auxiliary device includes a heating plate combination and a first connecting block 3 and a second connecting block 4 respectively arranged at both ends of the heating plate combination; the heating plate combination includes 6 heating plates 1 in a parallel array, and each heating plate 1 is provided with connecting columns 2 at both ends, and the heating plate 1 is movably connected to the first connecting block 3 and the second connecting block 4 through the connecting columns 2; the evaporation auxiliary device is suspended directly above the evaporation boat and clamped between two electrodes.

[0056] In this embodiment, when the evaporation boat is located at the edge of the coating area, the surface of the heating plate 1 corresponding to the top of the evaporation boat faces the edge of the coating area, and the angle between the surface of the heating plate 1 and the horizontal plane is 30±10°; when the evaporation boat is located at the center of the coating area, the angle between the surface of the heating plate 1 corresponding to the top of the evaporation boat and the horizontal plane is 90°±30°. When the angle between the surface of the heating plate 1 and the horizontal plane is ≠90°, the upper edge of the heating plate 1 and the lower edge of the adjacent heating plate 1 are located on the same vertical line (see Figure 2 ), avoiding the splashing of molten metal on the product.

[0057] In this embodiment, the plate surface of the heating plate 1 and the surface of the connecting column 2 are wrapped with graphite sheets, and the surface of the graphite sheet is coated with graphite emulsion; a graphite sheet is placed on the surface of the first connecting block 3 and the second connecting block 4 on the side in contact with the electrode; the thickness of the graphite sheet is 1.5 mm.

[0058] In this embodiment, the surface of the heating plate 1 is rectangular; through holes are provided on the surfaces of the first connecting block 3 and the second connecting block 4 on one side in contact with the connecting column 2; and the evaporation auxiliary device is suspended 50 mm above the evaporation boat.

[0059] like Figure 3 As shown, the evaporation auxiliary device provided in this embodiment is used for vacuum coating. The specific method includes: suspending the evaporation auxiliary device just above the evaporation boat and clamping it between two electrodes, and adjusting the flow direction of the vapor cloud by changing the angle between the plate surface of the heating plate 1 and the horizontal plane.

[0060] On the one hand, an evaporation auxiliary device is suspended above the evaporation boat at the edge of the coating area, and the angle between the plate surface of the heating plate 1 and the horizontal plane is adjusted to 30°±10° to guide the vapor cloud to the edge of the coating area and increase the edge film thickness of the product.

[0061] On the other hand, an evaporation auxiliary device is suspended above the evaporation boat in the center of the coating area, and the angle between the plate surface of the heating plate 1 and the horizontal plane is adjusted to 90°±30° to guide the vapor cloud to the coating area, thereby improving the uniformity of the product's square resistance.

[0062] Example 4

[0063] The present embodiment provides an evaporation auxiliary device with a vapor cloud guiding function. In addition to adjusting the plate surface shape of the heating plate 1 to a trapezoid that is wider at the top and narrower at the bottom, and changing the through holes provided on the surface of the first connecting block 3 and the second connecting block 4 on one side in contact with the connecting column 2 to grooves, the remaining structures and conditions are the same as those in Example 1, so they are not repeated here.

[0064] The method for vacuum coating using the evaporation auxiliary device provided in this embodiment and the effect achieved are the same as those in Embodiment 1, so they will not be described in detail here.

[0065] Example 5

[0066] This embodiment provides an evaporation auxiliary device with a vapor cloud guiding function. Except that the plate surface shape of the heating plate 1 is adjusted to an ellipse, and the major axis of the ellipse coincides with the extension line of the connecting column 2, the remaining structures and conditions are the same as those in Embodiment 1, so they are not described here.

[0067] The method for vacuum coating using the evaporation auxiliary device provided in this embodiment and the effect achieved are the same as those in Embodiment 1, so they will not be described in detail here.

[0068] Comparative Example 1

[0069] This comparative example provides a vacuum coating method, such as Figure 4 As shown, the method does not suspend an evaporation auxiliary device above the evaporation boat, resulting in a divergent flow direction of the vapor cloud and poor uniformity of square resistance of the resulting product; due to the low density of the edge vapor cloud, the edge square resistance of the product obtained after evaporation is high and cannot be used, and needs to be cut and scrapped later.

[0070] In addition, bubbles are generated and burst inside the molten pool due to the decomposition of the evaporation boat material or the vaporization of the molten metal, which can easily cause irregular and large-scale splashing of molten metal droplets. These molten metal droplets splash onto the base film and form splash points after cooling.

[0071] It can be seen that the evaporation auxiliary device provided by the utility model flexibly connects the heating plate between the two connecting blocks, realizes the vapor cloud guiding function through the flexible adjustment of the plate surface angle, can accurately control the flow direction of the vapor cloud, solves the problem of thin film thickness at the edge, and improves the effective width of the product square resistance; heating plates at different angles are installed above the evaporation boat corresponding to the area with uneven square resistance, so as to adjust the uniformity of square resistance, and at the same time, the heating plate combination is suspended just above the evaporation boat to play a good blocking role, thereby reducing the probability of metal liquid splashing, and this movable connection method is easy to disassemble, and the heating plate can be flexibly replaced and adjusted according to the coating requirements, which is conducive to large-scale promotion and application.

[0072] The applicant declares that the above is only a specific implementation method of the present utility model, but the protection scope of the present utility model is not limited thereto. The technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by the technicians in the relevant technical field within the technical scope disclosed in the present utility model fall within the protection scope and disclosure scope of the present utility model.

Claims

1. An evaporation auxiliary device with a vapor cloud guiding function, characterized in that: The evaporation auxiliary device with a vapor cloud guiding function comprises a heating plate assembly and a first connecting block and a second connecting block respectively arranged at two ends of the heating plate assembly; The heating plate assembly comprises at least two heating plates in a parallel array, and each heating plate is provided with connecting columns at both ends, and the heating plate is movably connected to the first connecting block and the second connecting block through the connecting columns; The evaporation auxiliary device is suspended above the evaporation boat and sandwiched between two electrodes.

2. The evaporation auxiliary device with vapor cloud guiding function according to claim 1, characterized in that: When the evaporation boat is located at the edge of the coating area, the surface of the heating plate corresponding to the top of the evaporation boat faces the edge of the coating area, and the angle between the surface of the heating plate and the horizontal plane is 0°-90°.

3. The evaporation auxiliary device with vapor cloud guiding function according to claim 1, characterized in that: When the evaporation boat is located at the center of the coating area, the angle between the plate surface of the heating plate corresponding to the top of the evaporation boat and the horizontal plane is 0°-180°.

4. The evaporation auxiliary device with vapor cloud guiding function according to claim 1, characterized in that: When the angle between the plate surface of the heating plate and the horizontal plane is ≠90°, the upper edge of the heating plate and the lower edge of the adjacent heating plate are located on the same vertical line.

5. The evaporation auxiliary device with vapor cloud guiding function according to claim 1, characterized in that: The plate surface of the heating plate and the surface of the connecting column are wrapped with graphite sheets, and the surface of the graphite sheets is coated with graphite emulsion.

6. The evaporation auxiliary device with vapor cloud guiding function according to claim 1, characterized in that: A graphite sheet is placed on the surface of the first connection block and the second connection block on one side in contact with the electrode.

7. The evaporation auxiliary device with vapor cloud guiding function according to claim 5 or 6, characterized in that: The thickness of the graphite sheet is 0.5-1.5 mm.

8. The evaporation auxiliary device with vapor cloud guiding function according to claim 1, characterized in that: The plate surface shape of the heating plate includes any one of a rectangular, a trapezoidal or an elliptical shape.

9. The evaporation auxiliary device with vapor cloud guiding function according to claim 1, characterized in that: A groove and / or a through hole is provided on a surface of one side of the first connection block and the second connection block that contacts the connection column.

10. The evaporation auxiliary device with vapor cloud guiding function according to claim 1, characterized in that: The evaporation auxiliary device is suspended 10-50 mm above the evaporation boat.

Images